CN202403797U - Spectroanalysis instrument - Google Patents
Spectroanalysis instrument Download PDFInfo
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- CN202403797U CN202403797U CN2011205775022U CN201120577502U CN202403797U CN 202403797 U CN202403797 U CN 202403797U CN 2011205775022 U CN2011205775022 U CN 2011205775022U CN 201120577502 U CN201120577502 U CN 201120577502U CN 202403797 U CN202403797 U CN 202403797U
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Abstract
The utility model relates to a spectroanalysis instrument, which comprises a light source, a light collecting unit, a light splitting unit, an imaging unit, a detecting unit and a processing unit, wherein the light source emits measurement light, the light collecting is used for coupling the measurement light to the light splitting unit, the light splitting unit comprises a first light splitting module and a second light splitting module, the measurement light is split by the second light splitting module along an X direction after split by the first light splitting module along the same direction, the measurement light is imaged by the imaging unit and received by the detecting unit after split through the second light splitting module, and the processing unit processes a signal received by the detecting unit, and obtains a spectrogram corresponding to a narrow wave spectrum. The spectroanalysis instrument has the advantage of high spectral resolution of the narrow wave spectrum.
Description
Technical field
The utility model relates to a kind of spectroanalysis instrument, relates in particular to a kind of spectroanalysis instrument that can effectively improve narrow-band spectrum resolution.
Background technology
In the spectrographic detection field, generally require the spectra collection time short as far as possible, the spectral range of once gathering is wide as far as possible; Whole detection system is wanted firm compactness, is easy to carry and outdoor use; These characteristics can not sacrificial light spectral resolution and precision, also will reduce calibration and various drift-compensated workload as far as possible.
At present, the structure of common spectrometer has Czerny-Turner structure, Paschen-Runge structure, flat filed concave grating beam splitting system, echelle grating bidimensional spectroscopy system etc.
Volume is little, the resolution advantages of higher because it has in echelle grating bidimensional spectroscopy system, obtains more application in the high-resolution occasion of needs.
Echelle grating bidimensional spectroscopy system, as shown in Figure 1, generally comprise light source 1, entrance slit 3, collimating mirror 4, grating 6 and prism 5, imaging mirror 7 and detector 8.After measuring light is introduced entrance slit through certain focus lamp 2; The collimated light beam that obtains through collimating mirror 4 backs incides on mutually perpendicular grating 6 of dispersion direction and the prism 5; Realize the two-dimension chromatic dispersion of incident light; Inciding on the imaging mirror 7 through the light behind the two-dimension chromatic dispersion, is to obtain a two dimension corresponding spectrogram of whole broadband, i.e. wide range spectrogram from the long wave to the shortwave on the image planes on the test surface of detector 8 through imaging mirror 7.
Ladder bidimensional spectroscopy system has following characteristics in above-mentioned: in the wide range spectrogram, spectral line presents Two dimensional Distribution on image planes, and promptly (160～850nm) spectral profile show that the shortwave spectral profile is dredged, the closeer characteristics of long wave spectral profile from the shortwave to the long wave.
Based on These characteristics, echelle grating bidimensional spectroscopy system has following deficiency:
1, spectral profile is inhomogeneous
Wavelength is long more, and corresponding prismatic refraction rate is more little, then just occupies most of spectrogram at minute spectral line of light time shortwave part, and the spectral line of long wave part is very intensive and only occupy few part of spectrogram, and spectral profile is inhomogeneous;
2, especially long wave direction spectral resolution is low for narrow wave band
The optical resolution of this type of beam splitting system; Be subject to the characteristic of echelle grating, wavelength is long more, and optical resolution is big more; Resolving effect is poor more; Can become several times of short wavelength regions optical resolution like the Long wavelength region optical resolution, as the corresponding optical resolution of the above wave band of 300nm, can become more than 2 times of shortwave 200nm, have a strong impact on the spectrally resolved ability of system;
3, measuring error is big
The numerous spectral lines of REE and subgroup element all concentrate on 300～500nm wave band; Spectral line is intensive especially; More serious in these occasion overlap of spectral lines interference ratio, the spectral resolution of conventional echelle grating bidimensional spectroscopy system is not enough to tell the interference spectral line, makes beam splitting system can't eliminate the spectral line interference problem effectively; Cause measuring error, be unfavorable for detecting.
The utility model content
In order to solve above-mentioned deficiency of the prior art, the utility model provides that a kind of cost is lower, reliability is high, can improve the spectroanalysis instrument that traditional echelle grating bidimensional spectroscopy system narrow-band spectrum is differentiated the problem of rate variance.
For realizing above-mentioned purpose, the utility model adopts following technical scheme:
A kind of spectroanalysis instrument comprises:
Light source, said light source sends measuring light;
The light collection unit, said light collection unit is coupled to spectrophotometric unit with measuring light;
Spectrophotometric unit, said spectrophotometric unit comprise first spectral module and second spectral module, and measuring light is carried out the beam split of equidirectional by said second spectral module after the said first spectral module directions X beam split;
Image-generating unit and probe unit, said measuring light is through received by probe unit by image-generating unit imaging back after the said second spectral module beam split again;
Processing unit, the signal that said processing unit processes probe unit receives obtains the corresponding spectrogram of narrow wave band.
Further, said first spectral module also carries out the beam split of Y direction to measuring light, and directions X and Y direction are not parallel.
As preferably, said directions X is vertical each other with the Y direction.
Further, said first spectral module comprises first prism and first grating, and the said first grating pair measuring light is carried out the beam split of directions X.
As preferably, said first grating is an echelle grating.
As preferably, said second spectral module is echelle grating or the plane grating or the concave grating of reflection or transmission.
As preferably, said image-generating unit comprises first image-forming module and second image-forming module, and said probe unit comprises first detector and second detector;
Measuring light is after the said first spectral module beam split, and by the reception of first detector, a part is further by the second spectral module beam split, received by second detector after second image-forming module forms images again through first image-forming module imaging back for a part; The signal that said processing unit processes first detector and second detector receive obtains the corresponding spectrogram of broadband and narrow wave band respectively.
As preferably, said second spectral module is arranged on second image-forming module.
As preferably, said first detector and second detector are same detector.
Compared with prior art, the utlity model has following beneficial effect:
1, the beam split ability that provides through second spectral module has significantly promoted the especially corresponding optical resolution of long wave direction of narrow wave band.
2, can obtain conventional wide range spectrogram corresponding from the long-wave band to the short-wave band and high-resolution narrow wave band such as the corresponding spectrogram of long-wave band, have traditional echelle grating spectrogram and cover the high advantage of the corresponding spectral resolution of the wide and narrow wave band of wavelength coverage.
3, by imaging detection, optical lens that it adopted and planar array detector cost are lower after twice beam split for measuring light, can in the limited cost scope, reach better effect.
Description of drawings
Fig. 1 is the echelle grating bidimensional spectroscopy system schematic of background technology;
The structural representation of the spectroanalysis instrument when Fig. 2 is reflective gratings for second spectrophotometric unit among the embodiment 1.
The structural representation of the spectroanalysis instrument when Fig. 3 is transmission-type grating for second spectrophotometric unit among the embodiment 1.
Fig. 4 is the spectrogram that conventional echelle grating bidimensional spectroscopy optical system obtains.
Fig. 5 is the spectrogram that second light path obtains, and has shown from 300 to 500nm spectral profile.
The structural representation of spectroanalysis instrument when Fig. 6 is arranged between first spectral module and first image-forming module for second spectral module among the embodiment 2;
The structural representation of spectroanalysis instrument when Fig. 7 is arranged between first image-forming module and first detector for second spectral module among the embodiment 2;
Fig. 8 is the structural representation of spectroanalysis instrument among the embodiment 3.
Embodiment
See also Fig. 2, Fig. 3, a kind of spectroanalysis instrument comprises light source, light collection unit, spectrophotometric unit, image-generating unit, probe unit and processing unit;
In the utility model, said light source 11 is a kind of in inductively coupled plasma (ICP), laser instrument, element lamp, xenon lamp, the flame etc., and present embodiment is the ICP light source.Inductive coupling high-frequency plasma light source is the most frequently used atomic emission spectrometry light source, and usually, it is made up of four parts such as radio-frequency generator, inductive coil, plasma quarter bend and air supply systems;
Said light collection unit comprises focus lamp 12, goes into seam 13 and focus lamp 14, and the measuring light that said light collection unit sends light source 11 is coupled to first spectral module.Said light source and light collection unit are the state of the art, repeat no more at this.
Said spectrophotometric unit comprises first spectral module and second spectral module, and measuring light is carried out the diffraction beam split of equidirectional by said second spectral module after the said first spectral module directions X diffraction beam split;
Said first spectral module and second spectral module can be the diffraction beam split to the beam split of measuring light, also can be the refraction beam split;
At present embodiment, first spectral module comprises first grating 16 and first prism 15, and 16 pairs of measuring light of said first grating are carried out the diffraction beam split of directions X, and 15 pairs of measuring light of said first prism are carried out the refraction beam split of Y direction; Said directions X and Y direction are not parallel.
Preferably, said first grating 16 is an echelle grating.
Preferably, directions X is vertical each other with the Y direction.
Measuring light by the 16 diffraction beam split of first grating after; Can produce overlapping between at different levels; Divide light direction and first grating, 16 orthogonal first prisms 15 through chromatic dispersion again, on image planes, form the two-dimension spectrum image, can access whole measuring amount wave band is the corresponding spectrogram of broadband; But because echelle grating is along with wavelength is elongated; The order of diffraction is inferior can to diminish, thereby causes resolution to descend, so long-wave band spectrogram resolution can be than short-wave band difference; Spectral line just disturbs relatively seriously when analyzing the profuse material of long wave spectral line, as analyzing the REE in the ferrous metal iron.
In order to improve spectral resolution, second spectral module 172 is set; The branch light direction of said second spectral module 172 divides light direction identical with the chromatic dispersion of first grating 16, and is promptly identical with directions X; Measuring light after the first spectral module beam split further by 172 beam split of said second spectral module; Said second spectral module 172 is echelle grating, plane grating or the concave grating of reflection or transmission.
Received by probe unit by image-generating unit imaging back again after 172 beam split of said second spectral module of said measuring light process; The signal that said processing unit processes probe unit receives obtains the corresponding spectrogram of narrow wave band such as long-wave band.
Said image-generating unit comprises second image-forming module 19 and first image-forming module 171, and said probe unit comprises first detector 18 and second detector 20; Said processing unit (not marking among the figure) links to each other with second detector 20 with first detector 18 respectively.
Measuring light is after the said first spectral module beam split, and a part is received by first detector 18 through first image-forming module 171 imaging back, a part further by 172 beam split of second spectrophotometric unit, again after second image-forming module 19 forms images by 20 receptions of second detector;
The signal that said processing unit processes first detector 18 and second detector 20 receive obtains corresponding spectrogram of broadband and narrow wave band such as the corresponding higher spectrogram of resolution of long-wave band respectively, please respectively referring to Fig. 4, Fig. 5; Wherein, Fig. 5 has shown the spectral profile from 300～500nm for the spectrogram to obtaining after the further beam split of Fig. 4 long-wave band.
According to demand image-generating unit and probe unit are set: if only need obtain the corresponding spectrogram of high-resolution narrow wave band, then, image-generating unit can only comprise second image-forming module, and probe unit only comprises second detector; If need to obtain wide spectrum (wide spectrum is a wave band corresponding from the long wave to the shortwave) and the corresponding spectrogram of narrow wave band, then, image-generating unit comprises first image-forming module and second image-forming module, and probe unit comprises first detector and second detector.
Present embodiment needs to obtain broadband and the corresponding respectively spectrogram of narrow wave band, and then image-generating unit need comprise first image-forming module and second image-forming module, and probe unit need comprise first detector and second detector.
Preferably, in the present embodiment, said second spectral module 172 is arranged on first image-forming module 171; Owing to all there is on the whole image planes of first image-forming module 171 broadband to comprise the spectral profile of long-wave band and short-wave band, so second spectral module 172 that is used for further narrow wave band is carried out beam split can be arranged on arbitrary position that can receive measuring light on first image-forming module 171.
Preferably, in the present embodiment, first image-forming module 171 is the imaging concave mirror, and second spectral module 172 is a plane of reflection grating; Said second spectral module 172 is arranged on the center of first image-forming module 171.
Measuring light through the first spectral module beam split is incident on first image-forming module 171, and a part is received by first detector 18 after 171 imagings of first image-forming module; A part of the measurement direction of light changes by diffraction after 172 reflections of second spectral module or the transmission, after 19 imagings of second image-forming module, is received by second detector 20; The introducing of second spectral module 172 has increased the dispersive power of system to narrow wave band, has improved spectrally resolved power.
Said second image-forming module 19 is the simple glass focus lamp, and said second detector 20 is common planar array detector.Said first image-forming module 171 and first detector 18 are the state of the art, repeat no more at this.
Present embodiment also provides a kind of spectroscopic analysis methods, may further comprise the steps:
The spectroanalysis instrument of A, the described raising spectral resolution of employing present embodiment;
B, measuring light further by 172 beam split of said second spectrophotometric unit, are received by probe unit after the image-generating unit imaging after the said first spectral module beam split, and the signal that the said probe unit of processing unit processes receives obtains the corresponding spectrogram of long-wave band.
Through the beam split ability that second spectral module provides, significantly promoted the especially corresponding optical resolution of long-wave band of narrow wave band.
When obtaining conventional broadband spectrogram, obtained high-resolution narrow wave band such as long-wave band spectrogram, had traditional echelle grating spectrogram and cover the wide and high advantage of narrow-band spectrum resolution of wavelength coverage.
It is lower to carry out optical lens and planar array detector cost that the secondary beam split adopted, can in the limited cost scope, reach better effect.
A kind of spectroanalysis instrument, different with the spectroanalysis instrument described in the embodiment 1 is:
First image-forming module 27 and second spectral module 272 are separate device; Said second spectral module 272 is arranged between first spectral module and first image-forming module 27; As shown in Figure 6, or be arranged between first image-forming module 27 and first detector 18, as shown in Figure 7.Second spectral module is the concave grating of reflection or transmission, present embodiment, and said second spectral module 272 is the transmission concave grating.
Measuring light through after the first spectral module beam split through 272 beam split of second spectral module; Second spectral module is told 1 grade of light from 0 grade of light; 0 grade of light is not introduced extra beam split ability, and it is constant that the spectrogram that therefore on first detector 18, obtains is kept the broadband spectrogram, especially the corresponding spectrogram of short-wave band; 1 grade of light can be introduced the secondary dispersion that second spectral module is introduced, and therefore on second detector 20, just can obtain to have the more corresponding spectrogram of narrow wave band of high resolution capacity.Present embodiment, narrow wave band are short-wave band 200～300nm.
Present embodiment also provides a kind of spectroscopic analysis methods, and different with the spectroscopic analysis methods among the embodiment 1 is:
1, in steps A, adopts the spectroanalysis instrument of present embodiment;
2, measuring light through after the first spectral module beam split through after 272 beam split of second spectral module; Second spectral module 272 is told 1 grade of light from 0 grade of light; 0 grade of light is not introduced extra beam split ability; Therefore it is constant that the spectrogram that on first detector 18, obtains is kept the broadband spectrogram, and 1 grade of light direction has the secondary dispersion that second spectral module is introduced, and therefore on second detector 20, just can obtain to have the narrower wave band such as the corresponding spectrogram of short-wave band of high resolution capacity.
See also Fig. 8, a kind of spectroanalysis instrument, different with the spectroanalysis instrument described in the embodiment 2 is:
Image-generating unit only comprises second image-forming module 19, and probe unit only comprises second detector 20;
Present embodiment, narrow wave band are long-wave band 500nm～650nm.
Present embodiment also provides a kind of spectroscopic analysis methods, and different with the spectroscopic analysis methods among the embodiment 2 is:
1, in steps A, adopts the spectroanalysis instrument of present embodiment;
2, measuring light through after the first spectral module beam split through 272 beam split of second spectral module; Second spectral module 272 is told 1 grade of light; Handle 1 grade of light that second detector 20 receives, can obtain to have the narrower wave band such as the corresponding spectrogram of long-wave band of high resolution capacity.
Above-mentioned embodiment should not be construed as the restriction to the utility model protection domain.The key of the utility model is: measuring light is carried out the beam split of equidirectional by said second spectral module after the said first spectral module directions X beam split, has improved the corresponding spectral resolution of narrow wave band.Under the situation that does not break away from the utility model spirit, any type of change that the utility model is made all should fall within the protection domain of the utility model.
Claims (9)
1. spectroanalysis instrument comprises:
Light source, said light source sends measuring light;
The light collection unit, said light collection unit is coupled to spectrophotometric unit with measuring light;
Spectrophotometric unit, said spectrophotometric unit comprise first spectral module and second spectral module, and measuring light is carried out the beam split of equidirectional by said second spectral module after the said first spectral module directions X beam split;
Image-generating unit and probe unit, said measuring light is through received by probe unit by image-generating unit imaging back after the said second spectral module beam split again;
Processing unit, the signal that said processing unit processes probe unit receives obtains the corresponding spectrogram of narrow wave band.
2. spectroanalysis instrument according to claim 1 is characterized in that: said first spectral module also carries out the beam split of Y direction to measuring light, and directions X and Y direction are not parallel.
3. spectroanalysis instrument according to claim 2 is characterized in that: said directions X is vertical each other with the Y direction.
4. spectroanalysis instrument according to claim 2 is characterized in that: said first spectral module comprises first prism and first grating, and the said first grating pair measuring light is carried out the beam split of directions X.
5. spectroanalysis instrument according to claim 4 is characterized in that: said first grating is an echelle grating.
6. spectroanalysis instrument according to claim 1 is characterized in that: said second spectral module is echelle grating or the plane grating or the concave grating of reflection or transmission.
7. spectroanalysis instrument according to claim 1 is characterized in that:
Said image-generating unit comprises first image-forming module and second image-forming module, and said probe unit comprises first detector and second detector;
Measuring light is after the said first spectral module beam split, and by the reception of first detector, a part is further by the second spectral module beam split, received by second detector after second image-forming module forms images again through first image-forming module imaging back for a part; The signal that said processing unit processes first detector and second detector receive obtains the corresponding spectrogram of broadband and narrow wave band respectively.
8. spectroanalysis instrument according to claim 7 is characterized in that: said second spectral module is arranged on second image-forming module.
9. spectroanalysis instrument according to claim 7 is characterized in that: said first detector and second detector are same detector.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205775022U CN202403797U (en) | 2011-12-29 | 2011-12-29 | Spectroanalysis instrument |
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| CN2011205775022U CN202403797U (en) | 2011-12-29 | 2011-12-29 | Spectroanalysis instrument |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564591A (en) * | 2011-12-29 | 2012-07-11 | 聚光科技(杭州)股份有限公司 | Spectrum analyzer and spectrum analyzing method |
| CN103575398A (en) * | 2013-11-26 | 2014-02-12 | 武进田 | Echelette-grating light splitting device of UV/VIS/NIR spectrophotometer |
-
2011
- 2011-12-29 CN CN2011205775022U patent/CN202403797U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564591A (en) * | 2011-12-29 | 2012-07-11 | 聚光科技(杭州)股份有限公司 | Spectrum analyzer and spectrum analyzing method |
| CN102564591B (en) * | 2011-12-29 | 2014-04-16 | 聚光科技(杭州)股份有限公司 | Spectrum analyzer and spectrum analyzing method |
| CN103575398A (en) * | 2013-11-26 | 2014-02-12 | 武进田 | Echelette-grating light splitting device of UV/VIS/NIR spectrophotometer |
| CN103575398B (en) * | 2013-11-26 | 2016-04-27 | 武进田 | UV, visible light near infrared spectrometer echelette grating light-dividing device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120829 Termination date: 20151229 |
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| EXPY | Termination of patent right or utility model |