CN103575398B - UV, visible light near infrared spectrometer echelette grating light-dividing device - Google Patents
UV, visible light near infrared spectrometer echelette grating light-dividing device Download PDFInfo
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- CN103575398B CN103575398B CN201310611624.2A CN201310611624A CN103575398B CN 103575398 B CN103575398 B CN 103575398B CN 201310611624 A CN201310611624 A CN 201310611624A CN 103575398 B CN103575398 B CN 103575398B
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Abstract
A kind of UV, visible light near infrared spectrometer echelette grating light-dividing device, comprise the light source, condenser, the first beam splitting system and the second beam splitting system that connect in turn according to light path, described light source is used for sending required spectrum, the light that described condenser is used for being sent by light source converges at the entrance slit of the first beam splitting system, one of described two beam splitting systems are grating splitting system, and another is prism splitter system.The present invention only adopts one block of grating just to achieve the light splitting of wide wavelength coverage, and whole ultraviolet spectrum district also obtains the parasitic light index of high energy efficiency and good whole wave band.
Description
Technical field
The present invention is about a kind of UV, visible light near infrared spectrometer echelette grating light-dividing device.
Background technology
In wavelength coverage light splitting (as the light splitting from 190nm to 3000nm) wider from ultraviolet near infrared, existing grating splitting system technology is (as three kinds with multiple grating, ultraviolet light and visible ray one, visible ray and near infrared light one, near infrared long wave is a kind of) combine and carry out, different wave bands uses different gratings, and make often kind of grating all be operated in the higher wave band of diffraction efficiency, several grating combination gets up to cover whole wave band.Because of diffraction efficiency of grating, especially the diffraction efficiency of its ultraviolet band of ultraviolet grating is that wave band is higher among a small circle near blaze wavelength, and thus this technology has 2 significantly deficiencies:
(1) although the grating that glitters of the special a kind of ultraviolet of ultraviolet band, but still be difficult to ensure that whole ultraviolet band has satisfied diffraction efficiency;
(2) this technology is because of spectrophotometric unit use multiple (individual) grating, and thus Grating Mechanism is numerous and diverse, and cost is high.
Summary of the invention
The invention provides a kind of UV, visible light near infrared spectrometer echelette grating light-dividing device, to solve the multiple grating combination of grating splitting system in prior art, the complicated and technical matters that ultraviolet band diffraction efficiency is uneven of mechanism.
For this reason, the present invention invents a kind of UV, visible light near infrared spectrometer echelette grating light-dividing device, wherein, comprise the light source, condenser, the first beam splitting system and the second beam splitting system that connect in turn according to light path, described light source is used for sending required spectrum, the light that described condenser is used for being sent by light source converges at the entrance slit of the first beam splitting system, and one of described two beam splitting systems are grating splitting system, and another is prism splitter system.
Described UV, visible light near infrared spectrometer echelette grating light-dividing device, wherein, described prism splitter system comprises the prism splitter system entrance slit, the first collimating mirror, prism, the second collimating mirror and the prism splitter system exit slit that connect in turn according to light path, described first collimating mirror is used for the diverging light entering prism splitter system entrance slit to become the directional light being irradiated to prism, described prism utilizes dispersion mechanism to carry out light splitting, and described second collimating mirror is used for the directional light after prismatic decomposition to become the light converging at prism splitter system exit slit.
Described UV, visible light near infrared spectrometer echelette grating light-dividing device, wherein, described grating splitting system comprises the grating splitting system entrance slit connected in turn according to light path, 3rd collimating mirror, grating, 4th collimating mirror and grating splitting system exit slit, described 3rd collimating mirror is used for the diverging light entering grating splitting system entrance slit to become the directional light irradiated in grating, described grating utilizes diffraction interference principle to carry out light splitting, the collimated monochromatic ligth that described grating decomposes is become the converging light converging at grating splitting system exit slit by described 4th collimating mirror.
Described UV, visible light near infrared spectrometer echelette grating light-dividing device, wherein, described grating beam splitting device meets m λ ≈ λ to UV, visible light optical band
p, wherein m is the spectral order of described optical-mechanical system, a round numbers; λ is output wavelength; λ
pfor the blaze wavelength of described grating.λ
pmeet grating equation λ
p=d (sin α
p± sin β
p), wherein d is grating constant, the distance namely between the adjacent cutting of grating, α
pfor light λ
pincident angle on grating, β
pfor light λ
pangle of diffraction on grating, sign " ± " is relevant with grating rotating direction with light channel structure, gets "+" or gets "-", only get one in the system determined.To actual monochromator system, the α in above formula
pand β
psum is constant, and therefore actual only have a variable, and rotating shutter corner during work, as incident angle α on grating=α
ptime, the output light-seeking of grating splitting system is in λ
p.
Described UV, visible light near infrared spectrometer echelette grating light-dividing device, wherein, the blaze wavelength λ of described grating
pbe located at medium-long wave band.
Described UV, visible light near infrared spectrometer echelette grating light-dividing device, wherein, described prism splitter system, during work its centre wavelength and grating splitting system output wavelength λ harmonious, and spectral bandwidth meet below less value in the two.
δ λ < ∣ λ
2-λ ∣ and δ λ < ∣ λ
1-λ ∣
Wherein δ λ is the spectral bandwidth of prism splitter system, λ
2spectrum more secondary than wavelength X high one-level in grating splitting system, λ
1spectrum more secondary than the low one-level of wavelength X in grating splitting system, the λ in above formula
2, λ
1, λ must meet (m+1) λ
2=m λ and (m-1) λ
1=m λ, m are the levels time of the wavelength X for exporting.
The Advantageous Effects that the present invention reaches is, only adopt one block of grating just to achieve the light splitting of wide wavelength coverage, whole ultraviolet spectrum district also obtains the parasitic light index of high energy efficiency and good whole wave band.
Accompanying drawing explanation
Fig. 1 is the light path schematic diagram of first embodiment of the invention;
Fig. 2 is the light path schematic diagram of second embodiment of the invention.
Description of reference numerals
Light source-1; Condenser-2; Prism splitter system entrance slit-3; First collimating mirror-4; Prism-5; Second collimating mirror-6; Grating splitting system entrance slit-7; 3rd collimating mirror-8; Grating-9; 4th collimating mirror-10; Grating splitting system exit slit-11; Prism splitter system exit slit-12.
Embodiment
In order to enable shape of the present invention, structure and feature be understood better, below will enumerate preferred embodiment and being described in detail by reference to the accompanying drawings.
The present invention is in series by prism splitter system and grating splitting system two beam splitting systems.Grating splitting system beam splitter one piece of echelette grating, grating cutting density every millimeter hundreds of, blaze wavelength is near infrared, and operating wavelength range long wave can to 3,000 ran.Echelette grating blaze wavelength λ
p, for shortwave wavelength X, use its senior sub-spectrum, make
M λ ≈ λ
p, (m=± 1, ± 2, ± 3 ..., for the system determined, the symbol before integer is determined, is just or is negative, only gets a kind of symbol) and (1)
The wavelength longer for other is desirable
(m-1)λ≈λ
p，(m-2)λ≈λ
p，……(2)
Wherein λ: for the wavelength exported;
λ
p: blaze of grating wavelength, at λ
phigher diffraction efficiency is had near wavelength;
M: grating spectral order, a round numbers.
λ
pmeet grating equation λ
p=d (sin α
p± sin β
p), wherein d is grating constant, the distance namely between the adjacent cutting of grating, α
pfor light λ
pincident angle on grating, β
pfor light λ
pangle of diffraction on grating, sign " ± " is relevant with grating rotating direction with light channel structure, gets "+" or gets "-", only get one in the system determined.To actual monochromator system, the α in above formula
pand β
psum is constant, and therefore actual only have a variable.
Rotating shutter corner during work, as light incident angle α=α on grating
ptime, the output light-seeking of grating splitting system is in λ
p.
If m arranges proper, whole skip band can obtain high diffraction efficiency, because its blaze wavelength is in near-infrared region, so near infrared wave band also has higher diffraction efficiency.But use the grating splitting system of senior sub-spectrum to have the spectra overlapping of not at the same level time, the light exported is not the light of single spectral bandwidth, as beam splitting system output wavelength be 1000nm time, have 500nm simultaneously, if there are these light in 250nm(light source) light output of equiwavelength, this is that beam splitting system is unallowable, so the present invention's spectrum of the prism splitter system of connecting with it by not at the same level time is separated, obtain the light (prism splitter system can not produce senior sub-spectrum) of single spectral bandwidth.Again because there is the light of prism splitter system to grating splitting system further to filter purification, so the spuious auroral poles of this beam splitting system is low, there is good parasitic light index.
In such the present invention, grating splitting system only just achieves the light splitting of wide wavelength coverage with one block of grating, and whole ultraviolet spectrum district also obtains the parasitic light index of high energy efficiency and good whole wave band.
Wave band presses the secondary division of level.Whole wave band is divided into m section by the required superlative degree time m.The level of most shortwave is time the highest, time is reduced to one-level successively from shortwave to long wave level.Blaze of grating wavelength is located at the medium-long wave band wavelength X of whole wave band
p, for the shortwave wavelength X for exporting, using its senior sub-spectrum, making
mλ≈λ
p
Along with the change (increase) of beam splitting system wavelength X during work, m λ is gradually away from λ
p, diffraction efficiency declines, and at this moment just uses (m-1) λ that low one-level is secondary instead, makes
(m-1)λ≈λ
p
The rest may be inferred has (m-2) λ ≈ λ
p, (m-3) λ ≈ λ
petc., when diffraction efficiency drops to a certain degree, just fall one-level time, reach again high diffraction efficiency after falling one-level time, make whole shortwave have higher diffraction efficiency like this.
The wherein slit feature of grating splitting system.
(1) geometric widths of the slit of same spectral bandwidth is different with level time difference.The geometric widths of the slit (light input/output port) of grating splitting system converts according to required spectral bandwidth δ λ, same spectral bandwidth δ λ, the geometric widths δ X of secondary its slit of light not at the same level is also different, the width of senior secondary its slit of light is wide, and the geometric widths of rudimentary secondary its slit of light is little.If the slit geometric widths of primary spectrum is δ X, then the geometric widths of m level spectrum is m δ X.
(2) number of slit geometric widths is more.If the spectral bandwidth number of beam splitting system system is N, the highest number of times of spectrum is m, the variable gap number that then grating splitting system needs is Nm, spectral bandwidth δ λ and the m/2(secondary because of m level or m/3, m/4 etc., when integer exists a, round numbers) spectral bandwidth 2 δ λ (or the 3 δ λ of level time, 4 δ λ etc.) be very close can sharing, the variable gap number of therefore actual grating splitting system can reduce.
The feature of the spectral bandwidth δ λ of prism splitter system.
In the present invention, the Main Function of prism splitter system is the senior sub-spectrum of filtering grating splitting system, and its spectral bandwidth is greater than the spectral bandwidth of grating splitting system, but grating splitting system other grade of secondary light beyond m level time can not be allowed too greatly to pass through.During work, its centre wavelength and grating splitting system output wavelength λ harmonious, and spectral bandwidth meet below less value in the two.
δ λ < ∣ λ
2-λ ∣ and δ λ < ∣ λ
1-λ ∣
Wherein δ λ is the spectral bandwidth of prism splitter system, λ
2grating splitting system specific output wavelength X high one-level level time spectrum, λ
1the low one-level level of grating splitting system specific output wavelength X time spectrum, the λ in above formula
2, λ
1, λ must meet (m+1) λ
2=m λ and (m-1) λ
1=m λ, m are the levels time for output wavelength λ.
Such as, m=5, requires grating splitting system output wavelength 240nm.Because of m=5, grating corner is positioned 240*5=1200nm position (if establish λ
p=1200nm), for 6 grades of spectrum that high one-level is secondary, there is 1200nm/6=200nm, 4 grades of spectrum of low one-level time have 1200nm/4=300nm, namely grating positioning is in 1200nm place, the output wavelength of requirement be 240nm(because glittering at 1200nm, so 5 of 240nm(grades of spectrums) have high diffraction efficiency), but 200nm and 300nm(is had certainly to also have 400nm, 600nm) light of wavelength also exports simultaneously.This just needs to filter out these unwanted spectrum with prism splitter system.At this moment prism centers wavelength is positioned 240nm, its spectral bandwidth answers Man Zu ∣ 200nm-240nm ∣ with less value 40nm in ∣ 300nm-240nm ∣, has just more easily been filtered when its spectral bandwidth to meet when this requires other spectrum further from the level time of 5.
Meet a UV, visible light near infrared spectrometer echelette grating light-dividing device for above-mentioned condition, comprise the light source 1, condenser 2, first beam splitting system and the second beam splitting system that connect in turn according to light path.Described light source 1 is for sending required spectrum.Condenser 2 converges at the entrance slit (optical input of the first beam splitting system) of the first beam splitting system for the light sent by light source 1.
One of above-mentioned two beam splitting systems are grating splitting system, and another is prism splitter system.These two beam splitting systems are series relationship, and the light namely exported from a beam splitting system enters another beam splitting system, after the further light splitting of another beam splitting system, export required light.The beam splitter of grating splitting system is echelette grating, and the beam splitter of prism splitter system is prism.
Wherein prism splitter system comprises prism splitter system entrance slit 3, first collimating mirror 4, prism 5, second collimating mirror 6 and the prism splitter system exit slit 12 that connect in turn according to light path.Described prism splitter system entrance slit 3 is the strip light hole of one fixed width, as the passage of the incident light of beam splitting system, the width of entrance slit, together with beam splitter and light channel structure, determines the spectral bandwidth (spectral bandwidth is exactly generally monochromatic purity) of beam splitting system.Described first collimating mirror 4 is for becoming the directional light being irradiated to prism by the diverging light entering prism splitter system entrance slit 3.Described prism 5 is beam splitter, utilizes its dispersion mechanism to carry out light splitting.Directional light after prism 5 light splitting is become the light converging at prism splitter system exit slit 12 by described second collimating mirror 6.
Wherein grating splitting system comprises the grating splitting system entrance slit 7, the 3rd collimating mirror 8, grating 9, the 4th collimating mirror 10 and the grating splitting system exit slit 11 that connect in turn according to light path.Described grating splitting system entrance slit 7 is similarly the strip light hole of one fixed width, as the passage of the incident light of grating splitting system.Described 3rd collimating mirror 8 is for becoming the directional light irradiated in grating 9 by the diverging light entering grating splitting system entrance slit 7.Grating 9 is beam splitter, utilizes its diffraction interference principle to carry out light splitting.The collimated monochromatic ligth that grating 9 decomposes is become the converging light converging at grating splitting system exit slit 11 by described 4th collimating mirror 10.
In the first embodiment of the present invention, be the first beam splitting system with prism splitter system, grating splitting system is the second beam splitting system, for simplicity, prism splitter system exit slit 12 and grating splitting system entrance slit 7 is overlapped.Its course of work is:
Light source 1 sends required spectrum.The light that light source 1 sends converges on prism splitter system entrance slit 3 by condenser 2, only dispersing after the prism splitter system entrance slit 3, becoming directional light through the first collimating mirror 4 is again radiated on prism 5, the optical dispersion of different wave length is the directional light of different angles by prism 5, rotating prism 5 can make required illumination on the second collimating mirror 6, through the second collimating mirror 6, required monochromatic light is converged at grating splitting system entrance slit 7(is also prism splitter system exit slit 12 simultaneously) on, enter grating splitting system.
The light entering grating splitting system is divergent beams, is transformed to directional light through the 3rd collimating mirror 8, irradiates on grating 9, the monochromatic light having certain spectral bandwidth that grating 9 will come through prism splitter system, is decomposed into the directional light of different angles further.Rotating shutter 9, makes required monochromatic light exposure on the 4th collimating mirror 10, converges at grating splitting system exit slit 11 through the 4th collimating mirror 10, and the light exported from grating splitting system is exactly required monochromatic light.
Execute in example of the present invention second, the first beam splitting system is grating splitting system, and the second beam splitting system is prism splitter system.Prism splitter system entrance slit 3 and grating splitting system exit slit 11 are overlapped.In second embodiment and the first embodiment, these two kinds of light path forms are equivalent, therefore do not repeat them here.
The above description of this invention is illustrative, and nonrestrictive, and those skilled in the art is understood, and can carry out many amendments, change or equivalence, but they all will fall within the scope of protection of the present invention within the spirit and scope of claim restriction to it.
Claims (1)
1. a UV, visible light near infrared spectrometer echelette grating light-dividing device, it is characterized in that, comprise the light source, condenser, the first beam splitting system and the second beam splitting system that connect in turn according to light path, described light source is used for sending required spectrum, the light that described condenser is used for being sent by light source converges at the entrance slit of the first beam splitting system, one of described two beam splitting systems are grating splitting system, and another is prism splitter system;
Described prism splitter system comprises the prism splitter system entrance slit, the first collimating mirror, prism, the second collimating mirror and the prism splitter system exit slit that connect in turn according to light path, described first collimating mirror is used for the diverging light entering prism splitter system entrance slit to become to be irradiated to prism directional light, described prism utilizes dispersion mechanism to carry out light splitting, and described second collimating mirror is used for the directional light after prismatic decomposition to become the light converging at prism splitter system exit slit;
Described grating splitting system comprises the grating splitting system entrance slit, the 3rd collimating mirror, grating, the 4th collimating mirror and the grating splitting system exit slit that connect in turn according to light path, described 3rd collimating mirror is used for the diverging light entering grating splitting system entrance slit to become the directional light irradiated in grating, described grating utilizes diffraction interference principle to carry out light splitting, and the collimated monochromatic ligth that described grating decomposes is become the converging light converging at grating splitting system exit slit by described 4th collimating mirror;
Described light-dividing device UV, visible light wave band meets m λ ≈ λ
p, wherein m is the spectral order of described optical-mechanical system, a round numbers; λ is output wavelength; λ
pfor the blaze wavelength of described grating;
The blaze wavelength λ of described grating
pbe located at medium-long wave band;
During work the centre wavelength of described prism splitter system and the output wavelength λ of grating splitting system harmonious, and spectral bandwidth meet below less value in the two:
δ λ < ∣ λ
2-λ ∣ and δ λ < ∣ λ
1-λ ∣
Wherein δ λ is the spectral bandwidth of prism splitter system, λ
2the wavelength of grating splitting system spectrum more secondary to wavelength X high one-level level, λ
1the wavelength of grating splitting system one-level level time spectrum lower than wavelength X, the λ in above formula
2, λ
1, λ must meet (m+1) λ
2=m λ and (m-1) λ
1=m λ, m are the levels time of the wavelength X for exporting.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101561559A (en) * | 2009-05-25 | 2009-10-21 | 北京奥博泰科技有限公司 | Online film thickness monitoring system and light splitting device for high-resolution narrow-band spectrum |
| CN202403797U (en) * | 2011-12-29 | 2012-08-29 | 聚光科技(杭州)股份有限公司 | Spectroanalysis instrument |
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| US8174694B2 (en) * | 2001-12-21 | 2012-05-08 | Bodkin Design And Engineering Llc | Hyperspectral imaging systems |
| US6885447B2 (en) * | 2002-10-18 | 2005-04-26 | Yokogawa Electric Corporation | Spectrometer and optical spectrum analyzer |
| CN202306007U (en) * | 2011-10-18 | 2012-07-04 | 中国科学院上海技术物理研究所 | Refractive-reflective grating prism combined dispersion component |
| CN102879091B (en) * | 2012-08-28 | 2014-08-20 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method |
| CN203688069U (en) * | 2013-11-26 | 2014-07-02 | 武进田 | Ultraviolet, visible, near-infrared spectrophotometer echelette grating light-splitting device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101561559A (en) * | 2009-05-25 | 2009-10-21 | 北京奥博泰科技有限公司 | Online film thickness monitoring system and light splitting device for high-resolution narrow-band spectrum |
| CN202403797U (en) * | 2011-12-29 | 2012-08-29 | 聚光科技(杭州)股份有限公司 | Spectroanalysis instrument |
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