CN105372042A - Optical filter high precision transmittance testing device - Google Patents
Optical filter high precision transmittance testing device Download PDFInfo
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- CN105372042A CN105372042A CN201510941385.6A CN201510941385A CN105372042A CN 105372042 A CN105372042 A CN 105372042A CN 201510941385 A CN201510941385 A CN 201510941385A CN 105372042 A CN105372042 A CN 105372042A
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- optical filter
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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Abstract
The invention discloses an optical filter high precision transmittance testing device, consisting of a laser pumped broadband light source, a light modulator, a double cascade monochromator system, a light collimation system, a test camera obscura, an UV visible photomultiplier, a high voltage power supply module, a photoelectric signal processing module, a phase-lock amplifier and an industrial control computer. The testing device adopts work modes of the light modulator and the phase-lock amplifier; the incident light is regulated to a set frequency by the light modulator and is transmitted to the phase-locked amplifier for phase sensitive detection after photoelectric conversion, which can effectively filter the voltage signal generated by the stray background light; besides, the double cascade monochromator system adopts the chromatic-dispersion subtracted mode; the light inlet and the light outlet of the monochromator are provided with high pass optical filter optical sheets with specific wavelength. As a result, the optical filter high precision transmittance testing device can effectively reduce the stray light of the monochromator, which is in favor of weak signal detection.
Description
Technical field
The invention belongs to low light technology field, particularly a kind of proving installation of optical filter high precision transmitance.
Background technology
Spectral transmittance is the important parameter of optical filter light-filtering characteristic.How accurately to measure the spectral transmittance of optical filter, effectively can instruct the preparation technology of optical filter, also improve the practicality of solar blind ultraviolet detector part to a certain extent.According to the needs of high measuring accuracy, and the light signal after optical filter decay is extremely faint, so this cover proving installation is higher to suppressing the requirement of parasitic light.
At present, the report that the domestic transmission measurement device being greater than 10 to optical filter OD value is not correlated with, does not more mention the proving installation of its spectral transmittance.
Summary of the invention
The object of the present invention is to provide a kind of optical filter high precision transmission measurement device, for measuring optical filter spectral transmitance, its detectable go out optical filter OD value be the transmitance of 12.
The technical solution realizing the object of the invention is: a kind of proving installation of optical filter high precision transmitance, comprise laser pump (ing) wideband light source, photomodulator, twin-stage receipts or other documents in duplicate look instrument system, optical alignment system, test camera bellows, UV, visible light photoelectricity multiplier tube, high-voltage power module, Photoelectric Signal Processing module, lock-in amplifier and industrial computer, described UV, visible light photoelectricity multiplier tube and tested optical filter are all arranged in test camera bellows, and tested optical filter is between optical alignment system and UV, visible light photoelectricity multiplier tube;
Laser pump (ing) wideband light source produces white light becomes to have fixed frequency light signal through light modulator modulates, grating through twin-stage receipts or other documents in duplicate look instrument system produces pure monochromatic light, monochromatic light is incident to the monochromatic light that optical alignment system transition is quasi-parallel, little beam diameter, re-shoots to tested optical filter; Monochromatic light after tested optical filter decay is incident to UV, visible light photoelectricity multiplier tube, becomes the photo-signal of amplification under the effect of high-voltage power module through opto-electronic conversion; Send into lock-in amplifier after the photo-signal exported photomultiplier in signal processing module again processes with carrying out filter and amplification to carry out phase-sensitive detection and obtain stable voltage signal; Industrial computer according to the voltage signal values that lock-in amplifier obtains determine through optical power value, be the transmitance of tested optical filter with the ratio of original luminous power.
Compared with prior art, its remarkable advantage is in the present invention:
(1) the present invention adopts the light source of high stability, high brightness, makes up the deficiency of single beam measuring technique;
(2) high-pass filter of specific cutoff wavelength is equipped with in the present invention respectively at monochromator light inlet and light-emitting window, can significantly reduce the parasitic light of monochromator, thus meet the test request of high precision spectral transmittance;
(3) the present invention proposes the proving installation of optical filter high precision transmitance first, and its limit detection OD value, up to 12, has filled up the blank of domestic optical filter high precision spectral transmittance proving installation.
Accompanying drawing explanation
Fig. 1 is the structural representation of optical filter high precision transmission measurement device of the present invention.
Fig. 2 is filter plate transmission measurement curve map in embodiment of the present invention.
Embodiment
Spectral transmittance is the important parameter of optical filter light-filtering characteristic.How accurately to measure the spectral transmittance of optical filter, effectively can instruct the preparation technology of optical filter, also improve the practicality of solar blind ultraviolet detector part to a certain extent.In order to accurately detect the spectral transmittance of optical filter in UV, visible light optical range, the present invention proposes a kind of for the optical filter high precision transmission measurement device in 200 ~ 600nm spectral range.
Composition graphs 1, proving installation comprises laser pump (ing) wideband light source 1, photomodulator 2, twin-stage receipts or other documents in duplicate look instrument system 3, optical alignment system 4, test camera bellows 5, UV, visible light photoelectricity multiplier tube 6, high-voltage power module 7, Photoelectric Signal Processing module 8, lock-in amplifier 9 and industrial computer 10; Tested optical filter is arranged in test camera bellows 5, and is positioned in the transmitting light path of optical alignment system 4;
Laser pump (ing) wideband light source 1 produces white light and is modulated into the light signal with characteristic frequency through photomodulator 2, grating through twin-stage receipts or other documents in duplicate look instrument system 3 produces pure monochromatic light, the optical alignment system 4 that is incident to monochromatic light changes the monochromatic light of quasi-parallel, little beam diameter into, re-shoots to tested optical filter; Monochromatic light after tested optical filter decay is incident to UV, visible light photoelectricity multiplier tube 6, becomes the photo-signal of amplification under the effect of high-voltage power module 7 through opto-electronic conversion; Send into lock-in amplifier 9 after the photo-signal exported photomultiplier in signal processing module 8 again processes with carrying out filter and amplification to carry out phase-sensitive detection and obtain stable voltage signal; Industrial computer according to the voltage signal values that lock-in amplifier obtains obtain through optical power value, be the transmitance of tested optical filter with the ratio of original luminous power.
What laser pump (ing) wideband light source 1 adopted is the model that Rnergetig company of the U.S. produces is LDLSEQ-99 white light source; This wideband white light source adopts the mode maintain plasma Discharge illuminating of laser pump (ing), avoids the defect using electrode to bring; First the xenon in bulb is lighted by effluve, make xenon temperature raise ionization and become plasma, continuous laser light beam enters bulb through lens focus, utilize the energy of laser to maintain the plasma in bulb, now high pressure can be closed, adopt the good laser of focusing to carry out maintain plasma, ultraviolet excitation can be made to stablize and be easy to focus on; High brightness required when therefore can produce system testing, the white light of high stability.
What photomodulator 2 adopted is the SR540 type photomodulator 2 produced by Stamford Study system company of the U.S.; The optical radiation signal that its effect in this device is mainly used for light source to send is modulated into alternating signal by motor, thus avoid the detection signal time long and drift about, can modulate by light-metering, export the reference voltage square wave synchronous with modulating frequency, as the reference signal of lock-in amplifier simultaneously.
What twin-stage receipts or other documents in duplicate look instrument system 3 adopted is the Omni-λ-D series twin-stage connection monochromator that Beijing Zolix Instrument Co., Ltd. produces; It, by two identical dispersion beam-splitting structures of focal length, combines, effectively can improve separate unit monochromator optical property after special adjustment; Double monochromator has dispersion addition and dispersion to subtract each other two kinds of patterns: the twin-stage connection monochromator adopting dispersion combined mode, can double lifting spectral resolution, and applicable high resolving power measures demand; Adopt dispersion phase size reduction mode, significantly reduce the parasitic light of monochromator, thus the detection of more feeble signal can be carried out.At the wavelength place that transmitance is minimum, through light signal extremely faint, higher to the requirement of parasitic light, and the second-order diffraction of the source of parasitic light mainly grating, so added the optical filter wheel of the high-pass filter that 200nm and 350nm wavelength is housed respectively at the light inlet of twin-stage receipts or other documents in duplicate look instrument system 3 and light-emitting window, control it and rotated to reach the object eliminating parasitic light.
What UV, visible light photoelectricity multiplier tube 6 adopted is the 9924QB type UV, visible light photoelectricity multiplier tube 6 produced by ETL company of Britain; What it adopted is SbCs Bialkali photocathode, and respective wavelength scope is 160 ~ 680nm, is applicable to ultraviolet detection.
What high-voltage power module 7 adopted is the PS310 type high-voltage power supply of being produced by Stamford Study system company of the U.S., is responsible for adding high pressure to photomultiplier.
What lock-in amplifier 9 adopted is the SR830 type lock-in amplifier produced by Stamford Study system company of the U.S., be used for detecting atomic weak AC signal, even if this AC signal is buried in the noise signal of more much larger than it times, lock-in amplifier 9 also can detect accurately.Lock-in amplifier 9 utilizes the technology of phase-sensitive detection, according to the reference signal with particular reference frequency and phase place, only allows by the object signal identical or close with reference frequency, and the not identical noise signal of those frequencies and reference frequency will be isolated.
The testing procedure of above-mentioned optical filter high precision transmission measurement device is:
The first step, opens laser pump (ing) wideband light source 1, photomodulator 2, twin-stage receipts or other documents in duplicate look instrument system 3, high-voltage power module 7, signal processing module 8 and lock-in amplifier 9 successively before test;
Second step, by the frequency furnishing fixed frequency 172Hz of photomodulator 2;
3rd step, puts into the test camera bellows 5 that UV, visible light photoelectricity multiplier tube 6 is housed by optical filter to be measured, make in the middle of its optical alignment system 4 being clipped in monochromator light-emitting window place and UV, visible light photoelectricity multiplier tube 6;
The value of electrical signals V that industrial computer obtains according to lock-in amplifier
1, with the luminous power P demarcated in file under identical high pressure phase co-wavelength
0corresponding voltage signal values V
0convert through luminous power P
1:
Calculating optical optical filter is transmitance T (λ) under certain specific wavelength λ:
Wherein, P
0(λ) luminous power of non-filtered sheet decay under certain specific wavelength is represented, P
1(λ) luminous power after optical filter decay under certain specific wavelength is represented.
Choose the sample of an optical filter, test according to above-mentioned steps, verifying that this cover test macro can detect optical filter OD value is the transmitance of 12, and result as shown in Figure 2.
Proving installation of the present invention adopts the mode of operation of photomodulator and lock-in amplifier, first by photomodulator, the incident beam modulated is become specific frequency, after opto-electronic conversion, send into lock-in amplifier carry out phase-sensitive detection, like this can the voltage signal that produces of the spuious bias light of filtering effectively; In addition, twin-stage receipts or other documents in duplicate look instrument system adopts dispersion phase size reduction mode, and the high-pass filter of specific cutoff wavelength is housed respectively at monochromator light inlet and light-emitting window, effectively can reduce the parasitic light of monochromator, thus more be conducive to the detection of feeble signal.
Claims (9)
1. the proving installation of an optical filter high precision transmitance, it is characterized in that, comprise laser pump (ing) wideband light source (1), photomodulator (2), twin-stage receipts or other documents in duplicate look instrument system (3), optical alignment system (4), test camera bellows (5), UV, visible light photoelectricity multiplier tube (6), high-voltage power module (7), Photoelectric Signal Processing module (8), lock-in amplifier (9) and industrial computer (10), described UV, visible light photoelectricity multiplier tube (6) and tested optical filter are all arranged in test camera bellows (5), and tested optical filter is positioned between optical alignment system (4) and UV, visible light photoelectricity multiplier tube (6),
Laser pump (ing) wideband light source (1) produces white light and is modulated into the light signal with fixed frequency through photomodulator (2), grating through twin-stage receipts or other documents in duplicate look instrument system (3) produces pure monochromatic light, monochromatic light is incident to the monochromatic light that optical alignment system (4) changes quasi-parallel, little beam diameter into, re-shoots to tested optical filter; Monochromatic light after tested optical filter decay is incident to UV, visible light photoelectricity multiplier tube (6), becomes the photo-signal of amplification under the effect of high-voltage power module (7) through opto-electronic conversion; Signal processing module (8) is sent into lock-in amplifier (9) and is carried out phase-sensitive detection and obtain stable voltage signal after processing with carrying out filter and amplification the photo-signal that photomultiplier exports; Industrial computer according to the voltage signal values that lock-in amplifier obtains determine through optical power value, be the transmitance of tested optical filter with the ratio of original luminous power.
2. the proving installation of optical filter high precision transmitance according to claim 1, is characterized in that, laser pump (ing) wideband light source (1) is the LDLSEQ-99 white light source of Rnergetig company of the U.S..
3. the proving installation of optical filter high precision transmitance according to claim 1, is characterized in that, photomodulator (2) is the SR540 type photomodulator of Stamford Study system company of the U.S..
4. the proving installation of the optical filter high precision transmitance according to claim 1 or 3, is characterized in that, the fixed frequency of photomodulator is 172Hz.
5. the proving installation of optical filter high precision transmitance according to claim 1, is characterized in that, the Omni-λ-D series twin-stage receipts or other documents in duplicate look instrument system that twin-stage receipts or other documents in duplicate look instrument system (3) is Beijing Zolix Instrument Co., Ltd..
6. the proving installation of optical filter high precision transmitance according to claim 1, is characterized in that, the 9924QB type UV, visible light photoelectricity multiplier tube that UV, visible light photoelectricity multiplier tube (6) is ETL company of Britain.
7. the proving installation of optical filter high precision transmitance according to claim 1, is characterized in that, high-voltage power module (7) is the PS310 type high-voltage power supply of Stamford Study system company of the U.S..
8. the proving installation of the optical filter high precision transmitance according to claim 1 or 7, is characterized in that, high-voltage power module (7) is 0 ~ 1000V to the high pressure range that photomultiplier applies.
9. the proving installation of optical filter high precision transmitance according to claim 1, is characterized in that, lock-in amplifier (9) is the SR830 type lock-in amplifier of Stamford Study system company of the U.S..
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| CN201510941385.6A CN105372042A (en) | 2015-12-16 | 2015-12-16 | Optical filter high precision transmittance testing device |
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| CN201510941385.6A CN105372042A (en) | 2015-12-16 | 2015-12-16 | Optical filter high precision transmittance testing device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092974A (en) * | 2016-05-31 | 2016-11-09 | 南京理工大学 | Extraordinary edge filter transmittance graph high precision testing device and method |
| CN107063647A (en) * | 2017-05-05 | 2017-08-18 | 四川九州光电子技术有限公司 | The isolation of filter plate and the detection means and method of input light loss objective |
| CN112033648A (en) * | 2020-09-10 | 2020-12-04 | 重庆理工大学 | Cut-off depth detection method of optical filter |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN107063647A (en) * | 2017-05-05 | 2017-08-18 | 四川九州光电子技术有限公司 | The isolation of filter plate and the detection means and method of input light loss objective |
| CN112033648A (en) * | 2020-09-10 | 2020-12-04 | 重庆理工大学 | Cut-off depth detection method of optical filter |
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