CN203053569U - Spectrograph - Google Patents
Spectrograph Download PDFInfo
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- CN203053569U CN203053569U CN 201320059643 CN201320059643U CN203053569U CN 203053569 U CN203053569 U CN 203053569U CN 201320059643 CN201320059643 CN 201320059643 CN 201320059643 U CN201320059643 U CN 201320059643U CN 203053569 U CN203053569 U CN 203053569U
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- array spectrometer
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Abstract
The utility model discloses a spectrograph, comprising a beam splitter, and a plurality of array spectrographs. The beam splitter splits a tested light ray into a plurality of light beams. Through each of the array spectrographs whose measuring ranges are connected end to end and cover whole to-be-tested wave bands, each wave band is accurately measured. Spectral power distribution of the whole to-be-tested wave bands can be obtained just by measuring once. The spectrograph is characterized by rapid measuring speed, high measuring accuracy, high wavelength fine division, high energy utilization rate, convenient operation, etc.
Description
Technical field
The utility model belongs to the optical radiation measurement field, is specifically related to a kind of spectrometer.
Background technology
Spectrometer is used for the equipment of the spectral composition that the Measurement and analysis spectral radiant power distributes, and is widely used in fields such as radiation of light source measurement, color measuring, element evaluation, chemical analysis.Spectrometer commonly used comprises monochromator and polychromator (multi-channel spectrometer based, array rapid spectrometer etc.), and the array spectrometer of employing hyperchannel detector has the measuring speed of Millisecond, and development in recent years is rapid, uses also more and more widely.
The parasitic light index is the important indicator of array spectrometer, and at array spectrometer, parasitic light refers to be radiated at certain specific wavelength and puts other spectral components on the corresponding picture dot, and its size is determining the accuracy of measurement of array spectrometer.Existing array is generally measured by whole segmented mode, and namely one-shot measurement can obtain the spectral power distribution of whole wave band to be measured, though this measuring method test speed is fast, cost is also lower, and parasitic light is bigger, and accuracy is relatively low.In addition, the bandwidth of spectrometer, capacity usage ratio, sensitivity, wavelength resolution are also bigger for the influence of test result.
In order to reduce parasitic light, publication number be CN101324468B patent disclosure a kind of technical scheme of utilizing the logical colour wheel of band to measure piecemeal, by the color filter incision light path of the logical colour wheel of rotating band with different conducting wave bands, measure thereby different wave bands imported in the light path.This metering system can accurately be measured every section spectrum, the accuracy of measurement height, but because each measurement all needs to switch color filter, consuming time longer, test speed is slow; And all once all are introduced in spectrometer inside by photometry, though the conducting color filter that adopts before grating beam splitting still has more unexpected reflection and brings parasitic light, influence accuracy of measurement.What is more important, for same spectrometer, the measurement wave band on the detector array determines that namely the segmentation degree of wavelength is also determined.This technical scheme is utilized the light of same spectrometer measurement different-waveband, during each the measurement, detector array only can be utilized wherein than small part, can not be fully utilized, for example, the wavelength coverage of whole wave band to be measured is 380nm ~ 780nm, measurement wavelength on the detector array on each pixel determined, when measuring 380nm ~ 480nm wave band, only the pixel than small part participates in the light response, other pixel does not participate in response, and pixel can not be fully utilized.
Notification number discloses a kind of spectrometer of being made up of a plurality of monochromators for " CN 201476880U ", and each monochromator is exported the monochromatic light of different-waveband respectively, and the monochromatic light wave band of output head and the tail are overlapping.During each monochromator real work, all export the monochromatic light of different wave length by rotating shutter, not only length consuming time; And as mentioned above, a large amount of parasitic lights are introduced in the disposable monochromator inside that is incorporated into of all tested light, and accuracy of measurement is lower.
In addition, because the zero order spectrum energy of grating is maximum but chromatic dispersion can not take place, the spectrometer actual measurement be the primary spectrum of grating generation chromatic dispersion, but because its energy is lower, be limited to detector sensitivity, often need the incident light than macro-energy, could guarantee that primary spectrum is detected device and detects, capacity usage ratio is lower; But the incident light energy increases, and the energy of the spectrum that its zero order spectrum and other grade are inferior is also bigger, and the parasitic light of spectrometer inside is also more, the accuracy that influence is measured.
The utility model content
At above-mentioned the deficiencies in the prior art, the utility model aims to provide a kind of high precision array spectrometer, this spectrometer only needs one-shot measurement, can realize the measurement of whole band spectrum to be measured by the mode of measuring piecemeal accurately, significantly reduce the interference of stray light level, had characteristics such as speed is fast, accuracy of measurement is high, wavelength accuracy is high, capacity usage ratio is high, easy to operate.
A kind of spectrometer described in the utility model is achieved through the following technical solutions.A kind of spectrometer, it is characterized in that, comprise beam splitter and two or more array spectrometers, described beam splitter comprises a light input end mouth, two or more optical output port, the number of optical output port and array spectrometer equates and is corresponding one by one, and the measurement wave band of each array spectrometer is end to end and cover whole wave band to be measured; Each optical output port imports to light to be measured in the corresponding array spectrometer, and each array spectrometer receives and measure the light of different-waveband.
The utility model discloses and comprise a plurality of optical output ports one to one and array spectrometer, measuring beam is from the input of optic fibre input end mouth, and beam splitter is divided into multi beam with light beam, and every bundle light incides respectively in the different array spectrometers to be measured.Because the measurement wave band of each array spectrometer is end to end and cover whole wave band to be measured, namely wave band to be measured is divided into a plurality of wave bands, and each wave band is measured piecemeal, and the result that each wave band records merges the spectral power distribution that can obtain whole wave band to be measured.The technical program is accurately measured each wave band by measuring the different array spectrometer of wave band, only needs the one-shot measurement can be by measuring the spectral power distribution that can obtain whole wave band to be measured piecemeal, and measuring speed is fast, accuracy is high and easy to operate; Array spectrometer than same measurement range, this array spectrometer has different measurement ranges, and its inner detector array is the light of measure portion wave band only, and the wavelength coverage that distributes on the same pixel of detector array is littler, be wavelength segmentation Du Genggao, accuracy of measurement is also higher.
The utility model can also further limit by the following technical programs and be perfect.
As a kind of technical scheme, described array spectrometer comprises entrance slit, grating and detector array, and the grating one-level blaze wavelength in each array spectrometer all is in the measurement wave band of this array spectrometer.The light beam that sends from optical output port incides the entrance slit, after grating dispersion, is surveyed by detector array.In addition, described array spectrometer also comprises collimating mirror and convergent mirror, after collimating mirror and convergent mirror are arranged on the light path of entrance slit, in order to reflection and convergent beam.
The spectrum of optical grating diffraction is divided into zero order spectrum, primary spectrum, second order spectrum ..., spectral order is inferior more high, and dispersion power is more good, and light intensity is more little; Spectral order is inferior more low, and dispersion power is more weak, and light intensity is more big, thereby zero order spectrum energy maximum, but chromatic dispersion does not take place.In order to obtain the relatively large dispersed light of light intensity, the spectrometer actual detection be to have relative higher light intensities, simultaneously the primary spectrum of chromatic dispersion takes place also, but because the most luminous energy of grating all concentrate on the zero order spectrum of grating, the parasitic light of spectrometer inside is more, and is bigger to the measurement result influence.
In order to reduce parasitic light, by on the glass substrate of the sheet metal that polishes or metal film, depict a series of equidistant serrate groove faces and form blazed gratings.This grating makes the zero level principal maximum of single groove face diffraction and the zero level principal maximum that each groove face is interfered separate, thereby makes luminous energy shift and focus on a certain auroral spectrum from interfering the zero level principal maximum.According to grating equation, can obtain blaze wavelength at different levels, if single groove diffraction zero-level principal maximum of grating just in time drops on the one-level spectral line of a certain wavelength, then this wavelength is called the one-level blaze wavelength, primary spectrum obtains maximum light intensity, has had the advantage of chromatic dispersion and light intensity concurrently.Grating one-level blaze wavelength in each array spectrometer all is in the measurement wave band of this array spectrometer, the single groove diffraction zero-level principal maximum that incides the light on each detector array just in time drops on the one-level spectral line of blaze wavelength, the light intensity that is the one-level spectral line is the strongest, the light intensity of other grade spectral line is all very weak, thereby the parasitic light that has guaranteed each array spectrometer inside is all less, signal to noise ratio (S/N ratio) significantly increases, and the wavelength energy utilization factor significantly promotes.
As preferably, the grating one-level blaze wavelength in each array spectrometer all is positioned near the centre wavelength of this array spectrometer.Grating one-level blaze wavelength in the different array spectrometers all is positioned near the centre wavelength of array spectrometer, with energization utilization factor farthest.
As preferably, comprise two or more band-pass filter, band-pass filter equates with the number of array spectrometer and is corresponding one by one that the conducting wave band of each band-pass filter is slightly larger than or equals the measurement wave band of its corresponding array spectrometer; The light that each optical output port sends is filtered by the band-pass filter of correspondence, and each array spectrometer receives and measure the light after band-pass filter filters.During measurement, a plurality of band-pass filters and array spectrometer are corresponding one by one, and measuring beam is from the input of optic fibre input end mouth, and beam splitter is divided into multi beam with light beam, every bundle light incides respectively in the different array spectrometers and measures behind different band-pass filter.Because the measurement wave band of the array spectrometer of the correspondence of each band-pass filter is identical, each band-pass filter only allows the light in the array spectrometer measurement range see through and the outer light of its measurement range can not see through, therefore, the light that enters into array spectrometer inside only is the light of its measurement range, avoided sneaking in the wave band to be measured the senior spectrum of other wave band, can significantly reduce stray light level, improve accuracy of measurement; Perhaps each band-pass filter light of only allowing array spectrometer be slightly larger than its measurement range sees through and other light all can not see through, the situation that light in other non-measurement range all enters array spectrometer, the unexpected light that this technical scheme enters into array spectrometer inside significantly reduces, also can significantly reduce parasitic light, improve accuracy of measurement.
In the utility model, described band-pass filter can be arranged on the array spectrometer light path before; Perhaps described band-pass filter is arranged on array spectrometer inside, is the part of array spectrometer.The position of band-pass filter can arrange flexibly, as long as its light beam that measured light can be sent is divided into different measurement wave bands.In addition, described two or more the conducting wave band of band-pass filter covers ultraviolet to infrared wave band.The measurement wave band of array spectrometer covers ultraviolet-visible light-infrared band, thereby the conducting wave band of band-pass filter should correspondingly cover the wave band to be measured of array spectrometer.
As a kind of technical scheme, comprise light-mixing machine, described light-mixing machine is arranged on the optical output port light path before, and described light-mixing machine is integrating sphere or diffuse reflector or diffuse transmission plate.Light-mixing machine will fully mix from the light signal that measured target sends, and outputs to the optic fibre input end mouth, in order to measure the averaged spectrum information of measured light.
As a kind of technical scheme, described beam splitter is quartzy bifurcation fiber or the light splitting semi-transparent semi-reflecting lens that can obtain the multichannel light beam or light splitting semi-transparent semi-reflecting lens group.Silica fibre can transmit the light of ultraviolet, each wave band such as visible, infrared, and is applied widely.
As preferably, comprise the control center of each array spectrometer synchro measure of control or integration, described control center all is electrically connected with each array spectrometer.Control center controls each array spectrometer and carries out the electronics synchro measure, and one-shot measurement can be realized the measurement of whole wave band to be measured; After simultaneously each array spectrometer is measured and is finished, can also be with the result transmission that records separately to control center, the relative spectral power that is integrated into whole wave band to be measured distributes.
As a kind of technical scheme, can independently arrange the integral time of described each array spectrometer or regulate automatically according to the strong and weak of incident light.All can independently arrange the integral time of each array spectrometer, to be applicable to different incident raies; Simultaneously can be according to the power of incident light, each array spectrometer can also be regulated integral time separately automatically, to obtain rational A/D value.
As preferably, described band-pass filter and array spectrometer are set up in parallel.In addition, band-pass filter and array spectrometer are not limited to this arrangement mode, also comprise other set-up mode, are arranged on the sphere as band-pass filter and array spectrometer.
As preferably, comprise cabinet, described beam splitter, array spectrometer, band-pass filter all are arranged in the cabinet.Each device all is arranged in the cabinet integrated degree height, design integration, easy to operate.
In addition, in light path, devices such as convergence apparatus, imaging device, adjustable diaphragm can also be set.For example, comprise imaging device, described imaging device is arranged on the beam splitter light path before, and beam splitter is positioned on the image planes position of imaging device; Perhaps described imaging device be arranged on after the beam splitter, on the light path before the array spectrometer.The imaging device here is lens or other devices, if imaging device is arranged on before the beam splitter, the light of measured target is imaged onto through imaging device on the input port of beam splitter, in order to image spectrum and the brightness of image spectrum spoke of measuring measured target; If imaging device is arranged on after the beam splitter, before the array spectrometer, imaging device will be measured to the light inlet of different array spectrometers through the convergence of rays of optical output port output.Perhaps comprise adjustable diaphragm, described adjustable diaphragm is arranged on the beam splitter light path before; Perhaps described adjustable diaphragm be arranged on after the beam splitter, on the light path before the array spectrometer.Adjustable diaphragm is arranged on before the beam splitter, incides the light of the measured target in the beam splitter input port in order to restriction; Adjustable diaphragm is arranged on after the beam splitter, array spectrometer incides light in the array spectrometer in order to restriction.
In sum, the utility model adopts beam splitter that tested light is divided into a plurality of light beams, end to end and cover each array spectrometer of whole wave band to be measured by measurement range, each wave band is accurately measured, only need the one-shot measurement can be by measuring the spectral power distribution to obtain whole wave band to be measured piecemeal, have that measuring speed is fast, wavelength segmentation degree height, accuracy of measurement height and characteristics such as easy to operate; In addition, conducting wave band each band-pass filter identical with its measurement wave band is set respectively before each array spectrometer, also can significantly reduces interference of stray light, further improve accuracy of measurement.
Description of drawings
Accompanying drawing 1 is the synoptic diagram of embodiment 1;
Accompanying drawing 2 is synoptic diagram of embodiment 2;
Accompanying drawing 3 is synoptic diagram of embodiment 3.
The 1-beam splitter; 1-1-light input end mouth; The 1-2-optical output port; The 2-array spectrometer; The 3-band-pass filter; 4-control center; The 5-cabinet; The 6-light-mixing machine.
Embodiment
Embodiment 1
As shown in Figure 1, present embodiment discloses a kind of spectrometer, comprises beam splitter 1,5 band- pass filters 3,5 array spectrometers 2, control center 4 and cabinets 5; Beam splitter 1, band-pass filter 3 and array spectrometer 2 all are arranged in the cabinet 5.
Beam splitter 1 is " one drags five " bifurcation fiber, comprises a light input end mouth 1-1,5 optical output port 1-2; The wave band of light to be measured is 380nm-780nm, the measurement wave band of each array spectrometer 2 is respectively 380nm-460nm, 460nm-540nm, 540nm-620nm, 620nm-700nm and 700nm-780nm, and the conducting wave band of above-mentioned each array spectrometer 2 is the first overlapping and cover whole wave band to be measured; The conducting wave band of each band-pass filter 3 is slightly larger than the measurement wave band of its corresponding array spectrometer 2, and its conducting wave band also is followed successively by 360nm-480nm, 440nm-560nm, 520nm-620nm, 620nm-700nm and 700nm-780nm.During test, array spectrometer 2 receives the light beam that the optical output port 1-2 after each band-pass filter 3 filters sends, and 5 array spectrometers 2 are measured the spectral power distribution of 380nm-460nm, 460nm-540nm, 540nm-620nm, 620nm-700nm and 700nm-780nm wave band respectively.
Present embodiment also comprises control and integrates the control center 4 of each array spectrometer 2 measurement results that control center 4 all is electrically connected with each array spectrometer 2.After each array spectrometer 2 was measured and finished, to control center 4, the relative spectral power that is integrated into whole wave band to be measured distributed with the result transmission that records separately.
This embodiment can obtain the measurement of whole wave band to be measured by one-shot measurement, can significantly reduce parasitic light, and wavelength segmentation degree height has that measuring speed is fast, accuracy is high and easy to operate.
As shown in Figure 2, as different from Example 1, the beam splitter 1 of present embodiment is light splitting semi-transparent semi-reflecting lens group, and light beam is imported from optical output port 1-1, light splitting semi-transparent semi-reflecting lens group comprises three Amici prisms, and an optical output port 1-2 is arranged respectively on each prism; Each optical output port 1-2 arranges an array spectrometer 2 respectively, and before each array spectrometer 2 band-pass filter 3 is set all.
In the present embodiment, each band-pass filter 3 is corresponding one by one with each array spectrometer 2, and the conducting wave band of each band-pass filter 3 equals the measurement wave band of its corresponding array spectrometer 2.Wave band to be measured is 380nm-780nm, the measurement wave band of three array spectrometers 2 is respectively 380nm-500nm, 500nm-620nm and 620nm-780nm, and the conducting wave band of each band-pass filter 3 also is followed successively by 380nm-500nm, 500nm-620nm and 620nm-780nm.
In addition, array spectrometer 2 in the present embodiment comprises entrance slit, blazed grating and detector array, the one-level blaze wavelength of grating is in the measurement wave band of corresponding array spectrometer 2, measured light is after band-pass filter filters, single groove diffraction zero-level principal maximum of the light that sees through just in time drops on the one-level spectral line of blaze wavelength, the light intensity that is the one-level spectral line is the strongest, the light intensity of other grade spectral line is all very weak, thereby the parasitic light that has guaranteed array spectrometer 2 inside is less, signal to noise ratio (S/N ratio) significantly increases, and the wavelength energy utilization factor significantly promotes.
As shown in Figure 3, as different from Example 1, comprise light-mixing machine 6, this light-mixing machine 6 is integrating sphere, be arranged on the optical output port 1-2 light path before, tested light enters analysis to measure in the corresponding array spectrometer 2 then through abundant mixed light in light-mixing machine 6 after each band-pass filter 3 filters.
Claims (10)
1. spectrometer, it is characterized in that, comprise beam splitter (1) and two or more array spectrometers (2), described beam splitter (1) comprises a light input end mouth (1-1), two or more optical output port (1-2), the number of optical output port (1-2) and array spectrometer (2) equates and is corresponding one by one, and the measurement wave band of each array spectrometer (2) is end to end and cover whole wave band to be measured; Each optical output port (1-2) imports to light to be measured in the corresponding array spectrometer (2), and each array spectrometer (2) receives and measure the light of different-waveband.
2. a kind of spectrometer as claimed in claim 1, it is characterized in that, described array spectrometer (2) comprises entrance slit, grating and detector array, and the grating one-level blaze wavelength in each array spectrometer (2) all is in the measurement wave band of this array spectrometer (2).
3. a kind of spectrometer as claimed in claim 2 is characterized in that, the grating one-level blaze wavelength in each array spectrometer (2) all is positioned near the centre wavelength of this array spectrometer (2).
4. a kind of spectrometer as claimed in claim 1, it is characterized in that, the band-pass filter (3) that comprises two or more, band-pass filter (3) equates with the number of array spectrometer (2) and is corresponding one by one that the conducting wave band of each band-pass filter (3) is slightly larger than or equals the measurement wave band of its corresponding array spectrometer (2); The light that each optical output port (1-2) sends is filtered by the band-pass filter of correspondence (3), and each array spectrometer (2) receives and measure the light after band-pass filter (3) filters.
5. a kind of spectrometer as claimed in claim 4 is characterized in that, described band-pass filter (3) is arranged on array spectrometer (2) light path before; Perhaps described band-pass filter (3) is arranged on array spectrometer (2) inside, is the part of array spectrometer (2).
6. a kind of spectrometer as claimed in claim 1 is characterized in that, comprises the control center (4) of control each array spectrometer (3) synchro measure or integration, and described control center (4) all is electrically connected with each array spectrometer (2).
7. a kind of spectrometer as claimed in claim 1 is characterized in that, can independently arrange the integral time of described each array spectrometer (3) or regulate automatically according to the strong and weak of incident light.
8. a kind of spectrometer as claimed in claim 1 is characterized in that, described beam splitter (1) is bifurcation fiber or light splitting semi-transparent semi-reflecting lens or the light splitting semi-transparent semi-reflecting lens group that can obtain the multichannel light beam.
9. a kind of spectrometer as claimed in claim 1, it is characterized in that, comprise light-mixing machine (6), described light-mixing machine (6) is arranged on optical output port (1-2) light path before of beam splitter (1), and described light-mixing machine (6) is integrating sphere or diffuse reflector or diffuse transmission plate.
10. a kind of spectrometer as claimed in claim 4 is characterized in that, comprises cabinet (5), and described beam splitter (1), array spectrometer (2), band-pass filter (3) all are arranged in the cabinet (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320059643 CN203053569U (en) | 2013-02-04 | 2013-02-04 | Spectrograph |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320059643 CN203053569U (en) | 2013-02-04 | 2013-02-04 | Spectrograph |
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| Publication Number | Publication Date |
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| CN203053569U true CN203053569U (en) | 2013-07-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320059643 Expired - Lifetime CN203053569U (en) | 2013-02-04 | 2013-02-04 | Spectrograph |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103134588A (en) * | 2013-02-04 | 2013-06-05 | 杭州远方光电信息股份有限公司 | Spectrograph |
| CN105938013A (en) * | 2016-04-20 | 2016-09-14 | 杭州远方光电信息股份有限公司 | Spectrometer and correction method thereof |
| CN106595861A (en) * | 2016-12-09 | 2017-04-26 | 中国科学技术大学 | Spatial resolution spectrum acquisition system |
| CN107421448A (en) * | 2017-04-01 | 2017-12-01 | 中国科学院光电研究院 | A kind of micro-displacement measuring device and measuring method |
-
2013
- 2013-02-04 CN CN 201320059643 patent/CN203053569U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103134588A (en) * | 2013-02-04 | 2013-06-05 | 杭州远方光电信息股份有限公司 | Spectrograph |
| WO2014117546A1 (en) * | 2013-02-04 | 2014-08-07 | 杭州远方光电信息有限公司 | Spectrometer |
| CN105938013A (en) * | 2016-04-20 | 2016-09-14 | 杭州远方光电信息股份有限公司 | Spectrometer and correction method thereof |
| CN105938013B (en) * | 2016-04-20 | 2019-12-17 | 杭州远方光电信息股份有限公司 | Spectrometer and correction method thereof |
| CN106595861A (en) * | 2016-12-09 | 2017-04-26 | 中国科学技术大学 | Spatial resolution spectrum acquisition system |
| CN107421448A (en) * | 2017-04-01 | 2017-12-01 | 中国科学院光电研究院 | A kind of micro-displacement measuring device and measuring method |
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