CN105938013B - Spectrometer and correction method thereof - Google Patents
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- CN105938013B CN105938013B CN201610248470.9A CN201610248470A CN105938013B CN 105938013 B CN105938013 B CN 105938013B CN 201610248470 A CN201610248470 A CN 201610248470A CN 105938013 B CN105938013 B CN 105938013B
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- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000003595 spectral effect Effects 0.000 claims abstract description 59
- 239000006185 dispersion Substances 0.000 claims abstract description 33
- 238000005259 measurement Methods 0.000 claims abstract description 20
- 238000006243 chemical reaction Methods 0.000 claims abstract description 11
- 230000035945 sensitivity Effects 0.000 claims description 21
- 238000003384 imaging method Methods 0.000 claims description 19
- 238000001228 spectrum Methods 0.000 claims description 14
- 238000005316 response function Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- 230000005855 radiation Effects 0.000 description 6
- 239000000523 sample Substances 0.000 description 6
- 230000010354 integration Effects 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 230000004310 photopic vision Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001795 light effect Effects 0.000 description 2
- 238000005375 photometry Methods 0.000 description 2
- 230000004296 scotopic vision Effects 0.000 description 2
- 230000004382 visual function Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J2003/2866—Markers; Calibrating of scan
- G01J2003/2876—Correcting linearity of signal
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Abstract
The invention discloses a spectrometer and a correction method thereof, wherein the spectrometer comprises an incident optical unit, an incident slit, a dispersion unit for dispersing incident light, and an array detector for receiving dispersed light; the broadband light source device further comprises a broadband detector which receives the zero-order light beam formed by diffraction of the dispersion unit. In addition, a color filter matched with a V (lambda) curve is arranged in front of a photoelectric conversion element of the broadband detector, and the linearity of the array detector is corrected by utilizing the luminosity information measured by the broadband detector to obtain the absolute radiant quantity to be measured, so that the linearity and the measurement accuracy of the spectrometer are further improved; besides, the relative spectral power distribution measured by the array detector can be used for performing spectral mismatch correction on the luminosity information of the broadband detector, so that the luminosity measurement precision is improved.
Description
[ technical field ] A method for producing a semiconductor device
The invention belongs to the field of optical radiation measurement, and particularly relates to a spectrometer.
[ background of the invention ]
The existing fast spectrometer (also called array spectrometer) generally comprises an incident optical unit, an incident slit, a dispersion unit, an imaging unit and an array detector, the structure of the existing fast spectrometer is shown in fig. 1, light beams enter the inside of the spectrometer from the incident slit through the incident optical unit, and dispersed light with different wavelengths is projected onto a photosensitive surface of the array detector through the dispersion unit, so that measurement of spectral power distribution is realized.
According to the multi-slit diffraction effect, zero-order diffraction light of the grating is not dispersed, namely, is called zero-order light beam, and a detector of the spectrometer actually measures an nonzero-order diffraction spectrum of the grating, which is dispersed, and generally is first-order diffraction light. In the prior art, the zero-order light beam is often regarded as one of the important sources of stray light of the spectrometer, and is always in a negative position of being "extinguished", and is never effectively utilized. It is common practice to coat the cavity of a conventional optical cavity with a black or low-reflectivity coating, or to provide an extinction trap at the convergence of the zero order beam to absorb this portion of the beam. Meanwhile, the fast spectrometer adopts an array type detector such as a CCD (charge coupled device), and although the sensitivity is high, the large dynamic linear range is generally not as good as that of a silicon photocell.
[ summary of the invention ]
Aiming at the technical problems, the invention overcomes the technical bias of grating diffraction zero-order light beams in the prior art, changes waste into valuable, corrects the array detector linearity of the spectrometer by utilizing the optical information contained in the zero-order light beams, and further improves the measurement accuracy of the spectrometer; or as a complement to the array detector measurement band.
the invention can be realized by the following technical scheme: the spectrometer is characterized by further comprising a broadband detector for receiving the zero-order sub-beam formed by light splitting of the dispersion unit.
The working principle of the invention is as follows: the measured light beam enters the spectrometer from the entrance slit through the entrance optical unit, the measured light is split by the dispersion unit, and different-order spectrums are formed, wherein the nonzero-order spectrum formed by the split light is projected onto a photoelectric conversion element of the array detector to realize the measurement of the spectral power distribution, and the zero-order light beam formed by the split light is received by the wide-band detector.
The invention can be further perfected by the following technical scheme:
Preferably, the photoelectric conversion element of the broadband detector is a photocell or a photodiode, and specifically, the photoelectric conversion element may be a silicon photocell, a silicon photodiode, or a germanium cell, or a photoelectric conversion element made of other materials. Among them, a photometric probe made of a photoelectric conversion element such as a silicon photocell or a silicon photodiode has excellent linearity in a wide dynamic range, and thus is widely used for photometric measurement.
Furthermore, a color filter is arranged on a light path in front of the photoelectric conversion element of the broadband detector, so that a relative spectral response curve of incident light (detected light) of the photoelectric conversion element of the broadband detector, which is incident to the incident optical unit, is matched with a specific spectral efficiency function.
Preferably, the color filter matches the relative spectral sensitivity curve of the broadband detector for the measured light passing through the entrance optical unit to the human eye luminous efficiency function V (λ) curve or flat straight line, or other specific spectral sensitivity response curve. When the photoelectric conversion element of the broadband detector is a silicon photocell, a color filter matched with a human eye photopic efficiency function V (lambda) curve is arranged in front of the silicon photocell to form a photometric probe relative to the detected light. The above further technical expression may also be that a color filter is disposed in front of the broadband detector, so that after the detected light passing through the incident optical unit passes through the incident slit, the dispersion unit, and the color filter, a relative spectral sensitivity response curve of the broadband detector to the detected incident light matches or coincides with a specific spectral power function, where the spectral power function may be a V (λ) curve or a flat straight line, or other curves. In a special application, the color filter may also be a band-pass filter, or even a band-pass filter with a narrow band-pass, and in this case, the actual measurement effect of the broadband detector may be only for a narrow-band spectral range around a certain wavelength, that is, the color filter makes the relative spectral sensitivity curve of the broadband detector for the measured incident light a band-pass response curve around a certain specific wavelength.
As a technical solution, the dispersion unit may be an integrated structure, that is, the dispersion unit has both light splitting and imaging capabilities. The dispersive unit may be a concave grating or a concave flat field grating. The concave surface flat field grating is a reflection type diffraction grating formed by carving a series of line grooves on a high-reflection metal concave surface, and has better light splitting and condensing capacity.
As another solution, the dispersion unit may be a combined structure, i.e. the light splitting and the imaging are respectively realized by different optical elements. The specific dispersion unit can comprise a dispersion element and an imaging element, wherein the dispersion element can be a planar grating and realizes the light splitting function; the imaging element can be a concave mirror, and the imaging function is realized.
The invention also provides a correction method of the spectrometer, and the measurement waveband [ lambda ] of the array detector1，λ2]Response band [ lambda ] with wide band detectors1，λs2]Matching, i.e. the response band [ lambda ] of a broadband detectors1，λs2]Ranging over the measurement band [ lambda ] of the array probe1，λ2]Within the range. For example: the measuring wave band range of the array detector is 380nm and 780nm]The response band of the broadband detector can be in the range of 380nm,780nm]Or at [450nm, 600nm ]]In addition, the array detector spectrometer is arranged at 380nm and 780nm by using the correction method provided by the invention]The internal linearity can be corrected more accurately by the signal measured by the broadband detector.
Specifically, the method comprises the following steps: the relative spectral power distribution information and the optical radiance information of the detected light are respectively measured by the array detector and the broadband detector, and the linearity of the array detector in the same waveband range is corrected by using the response value of the broadband detector in the response range. The correction coefficient K is:
Wherein, ISThe response value of the broadband detector is obtained by measuring zero-order light beams, P (lambda) is the relative spectral power distribution of the measured light measured by the array detector, S (lambda) is the absolute spectral sensitivity of the broadband detector, and lambdas1、λs2The integral starting wavelength and the integral ending wavelength of the broadband detector are respectively, and the unit is nm.
The absolute spectral power distribution of the measured light is K.P (lambda) by using the correction coefficient, and the photometric value of the measured light can be obtained by the formulaCalculating, wherein V (lambda) is a CIE standard human eye luminous efficiency function; kmFor maximum spectral luminous efficacy, for photopic vision, Km683 lm/W; lambda [ alpha ]1、λ2The integral starting wavelength and the integral ending wavelength of the array detector are respectively, and the unit is nm.
Since the relative spectral sensitivity of a broadband detector is more readily known than its absolute spectral sensitivity, the relative spectral sensitivity S (λ) of a broadband detector is knownrelIn the method, the spectrum mismatch of the broadband detector can be corrected by using the relative spectral power distribution P (lambda) of the detected light measured by the array detector, and the correction coefficient K1 is as follows:
Directly measuring the correction coefficient K1 and the zero-order light beam signal value I directly measured by the broadband detectorTMultiplying to obtain correctedSignal value IT，C。
Wherein, P (lambda)SRelative spectral power distribution of a standard source for scaling a broadband detector; q (lambda) is an ideal spectral response function of the broadband detector, namely Q (lambda) can be a CIE standard human eye photopic efficiency function V (lambda), can also be a flat straight line, or a band-pass response curve near a certain wavelength, or other specific spectral sensitivity curves; lambda [ alpha ]s1、λs2The wavelength is the integral starting wavelength and the integral ending wavelength of the broadband detector respectively, and the unit is nm.
Taking the example that the probe of the broadband detector is a photometric probe, the array detector and the broadband detector respectively measure the relative spectral power distribution and photometric information of the measured light, and effectively correct the V (lambda) mismatch error of the photometric probe according to the formula (3), thereby greatly improving the measurement accuracy of the photometric value. The specific correction formula is as follows:
Wherein, IT,CFor corrected photometric values, ITThe photometric quantity of the zero-order light beam directly measured by the broadband detector, P (lambda) is the relative spectral power distribution of the measured light measured by the array detector, S (lambda)relrelative spectral sensitivity of broadband detector, P (lambda)SV (λ) is the CIE standard human eye photopic efficiency function for the relative spectral power distribution of the standard source for scaling the broadband detector. Lambda [ alpha ]s1、λs2respectively, the integration start wavelength and the integration end wavelength, the unit is nm, and the general lambda iss1And λs2380nm and 780nm respectively.
Through the correction, the photometric measurement accuracy of the broadband detector is greatly improved. At the same time, the corrected measured value I is obtained by using a broadband detectorT,CThe absolute spectral radiance parameter I of the array detector can be obtained according to the following formulae(λ) represented by the following formula:
Wherein, KmFor maximum spectral luminous efficacy, for photopic vision, Km683 lm/W; for scotopic vision, KmIs 1725 lm/W.
According to the absolute spectral radiation parameter I of the array detectore(lambda), an accurate radiation value can be calculated.
In addition to the above-described scheme of using the overlapping portion of the broadband detector and the array detector to perform calibration to improve the linearity of the spectrometer, the present invention also provides a measurement scheme in which the response band [ lambda ] of the broadband detectors1,λs2]In the measurement band [ lambda ] of the array detector1,λ2]Outer, i.e. λs1>λ2Or λs2<λ1(ii) a Or the response band [ lambda ] of a broadband detectors1,λs2]Measuring wave band lambda with array detector1,λ2]partially overlapping, i.e. λs1<λ1<λs2<λ2Or λ1<λs1<λ2<λs2. By the scheme, photometric information outside the measurement wave band range of the array detector can be obtained. For example: the measuring wave band of the array detector is in the visible light range [380nm,780nm ]]And the broadband detector has a response band in, for example, the infrared region [1100,1200nm ] after the bandpass cut-off filter is provided]Therefore, the luminosity information in the range of the band-pass cut color filter can be obtained while the spectral power distribution in the range of the visible light wave band is obtained.
In summary, the invention can achieve the purpose of correcting the linearity of the spectrometer array detector by utilizing the scattered zero-order light beam, and simultaneously reduce the level of stray light in the spectrometer to a certain extent.
[ description of the drawings ]
FIG. 1 is a basic structure of a conventional spectrometer.
FIG. 2 is a schematic structural view of embodiment 1;
FIG. 3 is a schematic structural view of embodiment 2;
FIG. 4 is a graph showing the results of example 3;
1-a dispersive unit; 2-an array detector; 3-a broadband detector; 1-1 dispersive element; 1-2 imaging elements;
[ detailed description ] embodiments
Example 1
As shown in fig. 2, this embodiment discloses a spectrometer structure, which includes an incident slit, a dispersion unit 1, an array detector 2, and a broadband detector 3, wherein the dispersion unit 1 is a concave flat field grating, the array detector 2 is a CCD array detector, the broadband detector 3 is a silicon photocell, and a color filter is disposed in front of a photosensitive surface of the silicon photocell, so that the silicon photocell generates a color filter whose relative spectral sensitivity curve for a zero-order light beam formed by light splitting matches with the CIE standard human eye luminous efficiency function V (λ). The incident optical unit is an optical fiber or an optical fiber bundle.
The working principle of the spectrometer is as follows: the measured light is received by the optical fiber or optical fiber bundle incidence optical unit, enters the spectrometer through the incidence slit, and is incident on the surface of the dispersion unit 1, and then the dispersion unit 1 performs light splitting on the incident measured light, and because the concave surface flat field grating integrates the light splitting and imaging functions, different levels of spectra are formed on the image surface; wherein the spectrum of non-zero order formed by light splitting is received and measured by the array detector 2, and the light beam of zero order formed by light splitting is received and measured by the broadband array detector 3.
If the absolute spectral sensitivity S (λ) of the broadband detector 3 is known, the relative spectral power distribution P (λ) of the measured light measured by the array detector 2 and the photometric signal I measured by the broadband detector 3 can be usedsObtaining the absolute spectral response of the array detector 2, and further correcting the measurement linearity of the array detector 2 by the correction coefficient ofand K.P (. lamda.) is the absolute spectral response.
In addition, the relative spectral power distribution P (λ) of the detected light measured by the array detector 2 can be used for the broadband detector 3Measured photometric signal ITand correcting to reduce the V (lambda) mismatch error of the broadband detector 3 and obtain accurate optical measurement. The specific correction formula is as follows:
Wherein, IT，CFor corrected photometric values, ITThe photometric quantity of the zero-order light beam directly measured by the broadband detector 3, P (lambda) is the relative spectral power distribution of the measured light measured by the array detector 2, S (lambda)relRelative spectral sensitivity of the broadband detector 3, P (lambda)SV (λ) is the CIE standard human eye photopic efficiency function for the relative spectral power distribution of the standard source that scales the broadband detector 3. Lambda [ alpha ]1、λ2Respectively an integration start wavelength and an integration end wavelength, and the units are nm and lambda1and λ2380nm and 780nm respectively.
After the photometric quantity measured by the broadband detector 3 is corrected, the measurement accuracy is greatly improved. Meanwhile, the measured value I corrected by the wide-band detector 3 can be utilizedT，CObtaining the absolute spectral radiation parameters corresponding to the array detector 2 according to the following formula:
Wherein, KmFor maximum spectral luminous efficacy, for photopic vision, Km683 lm/W; for scotopic vision, KmIs 1725 lm/W.
Further, the radiation parameter I is determined according to the absolute spectrum of the array detector 2e(lambda), an accurate radiation value can be calculated.
The structure of the spectrometer overcomes the technical bias of technicians in the field on zero-order diffraction spectrum, changes waste into valuable, corrects the linearity of the spectrometer array detector by utilizing the optical information in the zero-order light beam and the superior large dynamic range linearity of a silicon photocell (or a silicon photodiode), and further improves the measurement accuracy of the spectrometer.
Example 2
As shown in fig. 3, the present embodiment discloses a spectrometer structure, which includes an entrance slit, a collimating mirror, a dispersion unit 1, an array detector 2 and a broadband detector 3, wherein the dispersion unit 1 includes a dispersion element 1-1 and an imaging element 1-2, the dispersion element 1-1 is a plane grating, and the imaging element 1-2 is a concave mirror; the array detector 2 is a CCD array detector, the broadband detector 3 is a silicon photodiode, and a color filter which enables the silicon photodiode to generate a relative spectral sensitivity curve to zero-order light beams formed by light splitting and is matched with a CIE light effect visual function V (lambda) is arranged in front of a light sensing surface of the silicon photodiode.
The working principle of the spectrometer is as follows: the measured light enters the spectrometer through the spectrometer entrance slit and forms parallel light beams after passing through the collimating mirror to be projected to the dispersion element 1-1, the dispersion element 1-1 splits the incident measured light, and projects the non-zero-order spectrum and the zero-order light beam formed by splitting to the imaging element 1-2, and further forms different-order spectra on the focal plane of the imaging element 1-2; wherein the non-zero order spectrum of the measured light is received and measured by the array detector 2, and the zero order beam of the measured light is received and measured by the broadband array detector 3.
The following mutual correction procedure and calculation method are similar to those of embodiment 1.
Example 3
As shown in fig. 4, the present embodiment discloses a spectrometer structure, which includes an entrance slit, a collimating mirror, a dispersion unit 1, an array detector 2 and a broadband detector 3, wherein the dispersion unit 1 includes a dispersion element 1-1 and an imaging element 1-2, the dispersion element 1-1 is a plane grating, and the imaging element 1-2 is a concave mirror; the array detector 2 is a CCD array detector, the broadband detector 3 is a silicon photodiode, and a color filter which enables the silicon photodiode to generate a relative spectral sensitivity curve to zero-order light beams formed by light splitting and is matched with a CIE light effect visual function V (lambda) is arranged in front of a light sensing surface of the silicon photodiode.
The working principle of the spectrometer is as follows: the measured light enters the spectrometer through the spectrometer entrance slit and forms a parallel light beam after passing through the collimating reflector and is projected at the dispersion element 1-1, the dispersion element 1-1 splits the incident measured light and projects the non-zero order spectrum formed by splitting at the imaging element 1-2, and then the spectrums sequentially arranged according to the wavelength sequence appear on the focal plane of the imaging element 1-2 and are received and measured by the array detector 2; wherein the zero-order sub-beam split by the dispersion element 1-1 is not projected on the imaging element 1-2 but is directly received and measured by the broadband array detector 3.
The following mutual correction procedure and calculation method are similar to those of embodiment 1.
Claims (6)
1. The spectrometer comprises an incidence slit, a dispersion unit (1) and an array detector (2) for receiving dispersed light, and is characterized by further comprising a broadband detector (3), wherein the broadband detector (3) receives a zero-order sub-beam formed by light splitting of the dispersion unit (1), a photoelectric conversion element of the broadband detector is a photocell or a photodiode, and a color filter for enabling a relative spectral sensitivity curve of the broadband detector (3) to the incident light to be matched with an ideal spectral efficiency function is arranged in front of the photoelectric conversion element of the broadband detector (3).
2. The spectrometer as claimed in claim 1, wherein the color filter matches the relative spectral sensitivity curve of the broadband detector (3) to the eye luminous efficiency function V (λ) curve or a flat straight line; or the color filter makes the relative spectral sensitivity curve of the broadband detector (3) a band-pass response curve.
3. The spectrometer according to claim 1, wherein the dispersive unit (1) is a concave flat field grating.
4. The spectrometer according to claim 1, wherein the dispersive unit (1) comprises a dispersive element (1-1) and an imaging element (1-2); the dispersion element (1-1) is a plane grating, and the imaging element (1-2) is a concave reflector.
5. A calibration method for a spectrometer as claimed in claim 1, characterized in that the measurement band [ λ ] of the array detector (2)1,λ2]Response wave band [ lambda ] with wide wave band detector (3)s1,λs2]The response wave band [ lambda ] of the matched wide-band detector (3)s1,λs2]The range is in the measuring wave band [ lambda ] of the array detector (2)1,λ2]Within the range; the array detector (2) and the broadband detector (3) respectively measure the relative spectral power distribution information of the non-zero-order spectrum of the measured light and the luminosity information of the zero-order light beam of the measured light, and utilize the correction coefficientMultiplying the absolute spectral power distribution of the measured light by P (lambda);
wherein P (lambda) is the relative spectral power distribution of the measured light measured by the array detector (2), IsThe response value of the measured light zero-order secondary light beam measured by the broadband detector (3); s (lambda) is the absolute spectral response sensitivity of the broadband detector (3), lambdas1、λs2The integral starting wavelength and the integral ending wavelength of the broadband detector (3) are respectively, and the unit is nm.
6. A spectrometer calibration method as claimed in claim 5, characterised in that the measurement of the broadband detector (3) is corrected for spectral mismatch using the measured light relative spectral power distribution P (λ) measured by the array detector (2) by a correction factor ofThe correction coefficient K1 is directly measured by the broadband detector (3)TMultiplying to obtain corrected signal value IT,C；
Wherein, S (lambda)relis the relative spectral sensitivity, P (lambda), of the broadband detector (3)SFor determining the broadband detector (3)The relative spectral power distribution of the target standard source, Q (lambda) is the ideal spectral response function of the broadband detector (3), lambdas1、λs2The wavelength is respectively the integral starting wavelength and the integral ending wavelength of the broadband detector (3), and the unit is nm.
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| CN108318137B (en) * | 2017-01-16 | 2021-09-17 | 台湾超微光学股份有限公司 | Spectrum measuring system, spectrum measuring device, optical measuring method and optical correction method |
| EP3385703A1 (en) * | 2017-04-07 | 2018-10-10 | Greentropism | Improved spectroscopic device and method for sample characterization |
| CN108489609B (en) * | 2018-01-30 | 2019-09-27 | 中国科学院上海技术物理研究所 | A kind of wide range bearing calibration of FTIR measurement photodetector response |
| CN108956487A (en) * | 2018-08-02 | 2018-12-07 | 佛山市方垣机仪设备有限公司 | A kind of high-precision cremate light source atomic emission spectrum surveys oily device and detection method |
| CN111103246A (en) * | 2018-10-26 | 2020-05-05 | 中国科学院长春光学精密机械与物理研究所 | Light splitting photometer |
| CN111044458B (en) * | 2019-12-19 | 2022-06-07 | 北京云端光科技术有限公司 | Spectrometer |
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