CN108593108A - Spectrometer - Google Patents
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- CN108593108A CN108593108A CN201810474131.1A CN201810474131A CN108593108A CN 108593108 A CN108593108 A CN 108593108A CN 201810474131 A CN201810474131 A CN 201810474131A CN 108593108 A CN108593108 A CN 108593108A
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- 239000006185 dispersion Substances 0.000 claims abstract description 86
- 230000003287 optical effect Effects 0.000 claims description 25
- 238000005070 sampling Methods 0.000 claims description 17
- 230000007704 transition Effects 0.000 claims description 6
- 201000009310 astigmatism Diseases 0.000 claims description 2
- 238000010304 firing Methods 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 4
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- 238000012014 optical coherence tomography Methods 0.000 description 21
- 238000001228 spectrum Methods 0.000 description 14
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 6
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 235000013350 formula milk Nutrition 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 244000144985 peep Species 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920002338 polyhydroxyethylmethacrylate Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
Abstract
The present invention relates to a kind of spectrometers.The spectrometer includes：Collimating element, for broad band light beam to be changed into directional light；Dispersive device, for directional light to be pressed wavelength dispersion into multi beam dispersed light；Concentrating element, for focusing the dispersed light with phase co-wavelength, and concentrating element focuses on the dispersed light with different wave length at the different location on its focal plane, and the focal beam spot of each dispersed light is ranked sequentially along a straight line；And detecting devices, there are multiple detecting locations, detecting devices to be used to detect the dispersed light of multiple and different preset wavelengths on focal plane；One timing of incidence angle of dispersive device is injected in directional light, dispersive device and concentrating element match so that the focal position of the dispersed light of multiple and different preset wavelengths is matched with multiple detecting locations one-to-one correspondence；In the dispersed light of different preset wavelengths, the wave-number difference of the arbitrary adjacent dispersed light of two beams is equal.Operation greatly reduces in the imaging process of above-mentioned spectrometer, saves imaging time, improves image taking speed.
Description
Technical field
The present invention relates to spectrometric instrument technical field, more particularly to a kind of spectrometer.
Background technology
Means of optical coherence tomography (Optical CoherenceTomography, abbreviation OCT) is using similar ultrasound
Wave inspection principle, using wide spectrum infrared beam to the penetration capacity of test sample, by sample different depth position backwards
Optical superposition is scattered, and accesses Michelson's interferometer jointly with reference light and carries out coherent detection, it is different deep to obtain sample interior
The optical diffusion characteristic of degree is imaged sample tissue internal cross section to realize.OCT technology has test sample non-
Radiation, non-contact, axial direction high resolution is lossless, is easy to interior and peeps integrated and moderate characteristic.Therefore, OCT technology is
A kind of optical imaging tools of great future.Currently, OCT technology has been widely used for medical diagnosis and industrial flaw detection neck
Domain.
Spectral coverage OCT (spectral domain OCT, be abbreviated as SD-OCT) is one of OCT systems of a variety of different principles.
Since SD-OCT carries out axial (referring to axially the propagation that sample interior detects light beam herein without using mechanical scanning component to sample
Direction) depth scan, the information by different level of sample axial direction can be directly obtained by the Fourier transform of spectrum, it is thus possible to significantly
The image taking speed of raising system.Have benefited from the development of semiconductor broadband light source and high speed alignment photodetection camera, SD-OCT
Performance indicator achieve development at full speed, realize higher axial resolution, system sensitivity, investigation depth, phase
Measurement result is more stablized, signal-to-noise ratio higher.Meanwhile the hydrones of characteristic wavelength that use of SD-OCT absorb it is minimum, thus
Ophthalmic medical and diagnostic field achieve great success.Usually, traditional SD-OCT includes spectrometer, and spectrometer is used for
The spectral line for analyzing the interference spectrum of Michelson's interferometer outgoing, to obtain the optical diffusion characteristic of sample interior different depth,
Sample tissue internal cross section is imaged to realize.
However, the spectrometer used in traditional SD-OCT systems includes that photodetector and dispersion beam splitter are (logical
It is often diffraction grating).Dispersion beam splitter opens incident wide range optical signal according to different wavelength dispersions, forms dispersed light.
Photodetector includes several pixels, these pixels are along arranged in a straight line.Each pixel of photodetector, which corresponds to, receives difference
The dispersed light of wavelength, and the wavelength difference of light beam that arbitrary two adjacent picture elements sample is consistent.Thus, such spectrometer
For wavelength domain equal interval sampling spectrometer.According to the imaging algorithm of traditional SD-OCT systems, what photodetector detected
Wavelength domain spectrum, it is necessary first to carry out wavelength domain (wavelength is denoted as λ) to the conversion of wave-number domain (wave number is denoted as k), transformation for mula
For：λ=2 π/k.And the spectrum of wavelength domain equal interval sampling, after being converted into wave-number domain, no longer there is equal interval sampling property.It will
Sampling spectrum is converted to wave-number domain, more dense in the smaller low-frequency band sampling of wave number, the high frequency band sampling of wave number bigger
It is more sparse.And it is wave-number domain equal interval sampling that the Fourier transformation in imaging algorithm, which requires spectrum sample,.Therefore, traditional
In SD-OCT systems, before carrying out Fourier transformation to the optical signal of wave-number domain, need to carry out one to the spectrum sample of wave-number domain
After fixed Interpolating transform (generally use cubic spline interpolation), Fast Fourier Transform (FFT) can be carried out.Therefore, traditional SD-OCT
Operand during system imaging is larger, causes SD-OCT system imaging speed slower, imaging time is longer.
Invention content
Based on this, it is necessary to be directed to traditional slow problem of SD-OCT system imagings, provide a kind of spectrometer.
A kind of spectrometer, for carrying out wave-number domain equal interval sampling to broad band light beam, the broad band light beam includes different waves
Long optical signal；The spectrometer includes：
Collimating element, for the broad band light beam to be changed into directional light；
Dispersive device, for the directional light to be pressed wavelength dispersion into multi beam dispersed light；
Concentrating element, for focusing the dispersed light with phase co-wavelength, and the concentrating element will have difference
The dispersed light of wavelength focuses at the different location on its focal plane, and the focal beam spot of each dispersed light is along a straight line
It is ranked sequentially；And
Detecting devices has multiple detecting locations, the detecting devices multiple and different for detecting on the focal plane
The dispersed light of preset wavelength；
Wherein, the timing of incidence angle one of the dispersive device is injected in the directional light, the dispersive device and described poly-
Burnt element matches so that the focal position and the multiple detecting location of the dispersed light of multiple and different preset wavelengths are one by one
Corresponding matching；In the dispersed light of the difference preset wavelength, the wave-number difference of the adjacent dispersed light of arbitrary two beam is equal.
Above-mentioned spectrometer, dispersive device and concentrating element match, and entering for the dispersive device is injected in the directional light
One timing of firing angle, the dispersive device and the concentrating element determine the focusing position of the dispersed light of multiple and different preset wavelengths
It sets.In multiple dispersed lights of different preset wavelengths, the wave-number difference of arbitrary two adjacent dispersed lights is equal, i.e., wave-number difference is also pre-
If value.The dispersive device and the concentrating element match so that the focusing of the dispersed light of multiple and different preset wavelengths
Position is matched with the multiple detecting location one-to-one correspondence.In this way so that the multi beam dispersed light that detecting devices detects is wave number
Domain equal interval sampling, so as to avoid the interpolation arithmetic during from wavelength domain equal interval sampling to wave-number domain equal interval sampling.
Therefore, operation greatly reduces in the imaging process of above-mentioned spectrometer, saves imaging time, improves image taking speed.
The dispersive device includes at least two dispersion elements, described two dispersion elements in one of the embodiments,
Respectively the first dispersion element and the second dispersion element；The directional light is multi beam by wavelength dispersion by first dispersion element
Transition light beam；Each transition light beam is changed into the multi beam dispersed light by wavelength dispersion by second dispersion element, and will be each
The dispersed light is projected to the concentrating element；One timing of incidence angle of the dispersive device is injected in the directional light, it is described
The focal length of the optical parameter of first dispersion element and second dispersion element, relative position and the concentrating element determines respectively
The focal position of the dispersed light.
First dispersion element and second dispersion element are diffraction grating, institute in one of the embodiments,
The extending direction of the extending direction and second dispersion element of stating the first dispersion element has preset angle.
First dispersion element and second dispersion element are balzed grating,s in one of the embodiments,.
First dispersion element is transmission-type or reflective diffraction grating in one of the embodiments,；Described
Two dispersion elements are transmission-type or reflective diffraction grating.
First dispersion element uses positive first-order diffraction or negative one order diffraction in one of the embodiments,；Described
Two dispersion elements use positive first-order diffraction or negative one order diffraction.
The detecting devices includes photodetector in one of the embodiments, and the photodetector includes multiple
Pixel, point-blank, a pixel receives the dispersed light of respective wavelength to multiple pixel rows.
The photodetector is used to detect the dispersion of the centre wavelength of the wide range light beam in one of the embodiments,
Light, the photodetector are additionally operable to detect the dispersed light of the part wavelength of the centre wavelength both sides；The photodetector
The dispersed light detected, the equidistantly distributed on the focal plane.
Spectrometer further includes entrance slit in one of the embodiments, and the broad band light beam passes through the incidence successively
Slit and the collimating element；The entrance slit is for shielding interference of the external stray light to the broad band light beam.
The collimating element is collimation lens in one of the embodiments, and the concentrating element is convergent lens, described
Collimation lens and the convergent lens are achromatic lens.
Description of the drawings
Fig. 1 is the optical system schematic diagram of the spectrometer of an embodiment；
Fig. 2 be embodiment shown in FIG. 1 spectrometer in parallel light propagation light path schematic diagram；
Fig. 3 is the relation schematic diagram of the wave number and offset distance for the light beam that the spectrometer of an embodiment samples.
Specific implementation mode
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings to the present invention
Specific implementation mode be described in detail.
Such as background technology, spectrometer can be applied in spectral coverage OCT imaging system, to obtain sample interior different depth
Optical signal scattering properties is imaged sample tissue internal cross section to realize.
A kind of spectrometer, for carrying out wave-number domain equal interval sampling to broad band light beam.Include the light of different wave length with light beam
Signal.For example, the spectral wavelength ranges of broad band light beam are 800-900nm.
Fig. 1 is the optical system schematic diagram of the spectrometer of an embodiment.Spectrometer include collimating element 2, dispersive device 8,
Concentrating element 5 and detecting devices 6.
Collimating element 2 is used to broad band light beam being changed into directional light.Usually, collimating element 2 can be collimation lens.Tool
Body, collimation lens is convex lens.The broad band light beam of diverging is changed into directional light by collimation lens.Collimating element 2 be directed into
The spectrum for penetrating optical signal carries out the lens after achromatism optimization (such as double glued or three balsaming lens).I.e. collimation lens is achromatism
Lens can be collimated into parallel light emergence hence for the different wave length component of broad-spectrum beam.
Dispersive device 8 is used for directional light by wavelength dispersion into multi beam dispersed light.The dispersed light of different wave length is according to wavelength
Size order arrangement.
Concentrating element 5 is used to focus the dispersed light of each wavelength.Concentrating element 5 can focus on the dispersed light of phase co-wavelength
Together.Concentrating element 5 focuses on the dispersed light of different wave length at the different location on its focal plane, and the focusing of each dispersed light
Hot spot is ranked sequentially along a straight line.Concentrating element 5 is convergent lens.Specifically, concentrating element 5 is also convex lens.Convergent lens
It is achromatic lens.
Detecting devices 6 has multiple detecting locations on focal plane, and detecting devices 6 is for detecting multiple and different preset wavelengths
The dispersed light.I.e. detecting devices 6 can detect the focal beam spot at different location on focal plane, to detect different waves
Long light beam.
Wherein, one timing of incidence angle of dispersive device 8 is injected in directional light, dispersive device 8 and concentrating element 5 match,
So that the focal position of the dispersed light of multiple and different preset wavelengths is matched with multiple detecting locations one-to-one correspondence；Different preset wavelengths
Dispersed light in, the wave-number difference of the arbitrary adjacent dispersed light of two beams is equal.Therefore, the arbitrary two beams phase that detecting devices 6 detects
The wave-number difference of adjacent dispersed light is equal.Specifically, for the dispersed light of any preset wavelength, above-mentioned incidence angle, dispersive device 8
The focal length of optical parameter and concentrating element 5 determines focal position of the dispersed light of the preset wavelength on focal plane.Therefore, may be used
The dispersed light of the preset wavelength is adjusted to adjust the focal length of incidence angle, the optical parameter of dispersive device 8 or concentrating element 5
Focal position, so that detecting devices 6 can detect the dispersed light.In the present embodiment, incidence angle, dispersive device 8 optics
Parameter constant.The focal length of concentrating element 5 can be adjusted.In this way, the optical system of spectrometer can be easier on adjusting.
Above-mentioned spectrometer, dispersive device 8 and concentrating element 5 match.The incidence angle one of dispersive device 8 is injected in directional light
Periodically, dispersive device 8 and concentrating element 5 determine the focal position of the dispersed light of multiple and different preset wavelengths.It is default in difference
In multiple dispersed lights of wavelength, the wave-number difference of arbitrary two adjacent dispersed lights is equal, i.e., wave-number difference is also preset value.Dispersive device
8 and concentrating element 5 match so that the focal position of the dispersed light of multiple and different preset wavelengths and multiple detecting locations one are a pair of
It should match.Specifically, if wave-number difference has been set, the wavelength of the light beam in the broad band light beam to be detected of detecting devices 6 it is known that
The wavelength for other light beams that detecting devices 6 to be detected can then be released.For example, detecting devices 6 will detect the center of broad band light beam
The light beam of wavelength, wave-number difference is it is known that then known to the wavelength of each dispersed light to be detected of detecting devices 6.As long as dispersive device 8 and poly-
Burnt element 5 matches, you can so that the multi beam dispersed light that detecting devices 6 detects is wave-number domain equal interval sampling, to avoid
Interpolation arithmetic during from wavelength domain equal interval sampling to wave-number domain equal interval sampling.Therefore, the imaging of above-mentioned spectrometer
Operation greatly reduces in the process, saves imaging time, improves image taking speed.Simultaneously as in the imaging process of spectrometer
Operation greatly reduces, and also saves the hardware resource of imaging system, cost-effective.
As shown in Figure 1, spectrometer further includes entrance slit 1, the setting of entrance slit 1 broad band light beam and collimating element 2 it
Between, entrance slit 1 is located at the focal position of collimation lens.Entrance slit 1 is used to broad band light beam being changed into diverging light.It is i.e. incident
Slit 1 is used to form the picture point of broad band light beam.Specifically, entrance slit 1 refers to a kind of optical aperture, is used for broadband optical signal
While accessing to spectrometer system, shielding external stray light interference, to reduce the noise of system.Optionally, which can be with
It is the circular aperture for optical fiber output interface.
Dispersive device 8 includes at least two dispersion elements.As shown in Figure 1, two dispersion elements are respectively the first dispersion member
Part 3 and the second dispersion element 4.Directional light is multi beam transition light beam by wavelength dispersion by the one the first dispersion elements 3.Second dispersion
Each transition light beam is changed into the multi beam dispersed light by wavelength dispersion by element 4, and each dispersed light is projected to concentrating element 5.I.e.
Dispersive device 8 in the present embodiment uses 3 and second dispersion element 4 of cascade first dispersion element.Color is injected in directional light
It is casually arranged with standby 8 one timing of incidence angle, optical parameter, relative position and the focusing member of the first dispersion element 3 and the second dispersion element 4
The focal length of part 5 determines the focal position of each dispersed light.Therefore, set the first dispersion element 3 appropriate and with the second dispersion member
The focal length of the optical parameter of part 4, relative position and concentrating element 5 is the focal position for the dispersed light that may make any preset wavelength
Match with the detecting location of detecting devices 6.
In the present embodiment, the first dispersion element 3 and the second dispersion element 4 are diffraction grating.I.e. the first dispersion element 3 is
First diffraction grating.Second dispersion element 4 is the second diffraction grating.The extending direction of first dispersion element 3 and the second dispersion member
The extending direction of part 4 has preset angle.Diffraction grating is a kind of dispersion beam splitter.The surface of diffraction grating passes through groove
Generate a kind of periodic structure.In broad band light beam, have according to optical grating diffraction Bragg equation for the light beam of different wave length
The different angle of emergence, to reach the function of separation different wave length light component.Grating Bragg equation is：
d(sinθi+sinθd)=m λ (1)
Wherein, θdFor the angle of emergence, θiBe wavelength for incidence angle, λ, d is screen periods constant, m be diffraction time (m=0, ±
1, ± 2 ...).
First dispersion element 3 and the second dispersion element 4 are balzed grating,s.Balzed grating, surface has periodic slot
The zero-order diffraction light not being divided (energy is maximum) can be transferred on certain level-one (being typically m=+1 grades) difraction spectrum by face,
To obtain the maximum diffraction energy of the level.I.e. balzed grating, realizes the position never dispersion of diffraction central maximum
Zero order spectrum, which is transferred to other, to be had on the order of spectrum of dispersion.First dispersion element 3 is transmission-type or reflective diffraction grating.The
Two dispersion elements 4 are transmission-type or reflective diffraction grating.In the present embodiment, the first dispersion element 3 and the second dispersion element 4
It is transmission grating.First dispersion element 3 uses positive first-order diffraction or negative one order diffraction.Second dispersion element 4 uses positive level-one
Diffraction or negative one order diffraction.First dispersion element 3 uses positive first-order diffraction or negative one order diffraction, so that the first dispersion element 3
Diffraction efficiency highest.Second dispersion element 4 uses positive first-order diffraction or negative one order diffraction, so that the first dispersion element 3
Diffraction efficiency highest.In the present embodiment, the first dispersion element 3 and the second dispersion element 4 are all made of positive first-order diffraction.Therefore, right
For formula (1), m 1.
Fig. 2 be embodiment shown in FIG. 1 spectrometer in parallel light propagation light path schematic diagram.Assuming that directional light injects the
The incidence angle of one diffraction grating is θB。θBAlso it is the flare angle of the first diffraction grating.Wide range light beam is by the first diffraction grating diffraction
Afterwards, different wavelength components has different diffraction angles1, and be incident on the second diffraction grating.By optical grating diffraction equation (1)
It is found that the output angle θ of first order diffraction grating1For：
θ1=arcsin [λ/d1-sin(θB)] (2)
Wherein, d1It is the phase constant of first order diffraction grating.Angle between two diffraction grating is α, then according to fig. 2
In geometrical relationship, the incidence angle for obtaining being incident on the second diffraction grating is：
θ2=α-θ1=α-arcsin [λ/d1-sin(θB)] (3)
After the diffraction grating diffraction of the second level, it is θ to form the angle of emergence0Diffracted beam, again can by diffraction equation (1)
Know：
The emergent light of second level diffraction grating is incident on convergent lens, is converged lens and is converged on its focal plane.It is special
Not, it is assumed that the angle of emergence of the light beam 7 of the centre wavelength of wide range light beam after the diffraction grating of the second level is θf.Assuming that assembling saturating
The focal length of mirror is f, then geometrical relationship as shown in Figure 2 can obtain focal position of the light beam 7 of centre wavelength on focal plane.
Geometrical relationship again as shown in Figure 2 it is found that focal beam spot of the light beam 9 on focal plane of any non-central wavelength relative to center
The expression formula of the offset distance x of the focal beam spot of the light beam 7 of wavelength is：
X=ftan (θf-θ0) (5)
By formula (1) to formula (5) it is found that by focusing, the optical parameter of the first diffraction grating, the second diffraction grating
The incidence angle of optical parameter, the angle of the first diffraction grating and the second diffraction grating or the first diffraction grating is i.e. changeable above-mentioned inclined
Move distance.In the present embodiment, since the focal length of convergent lens is easier to adjust, can adjusting convergent lens focal length
The above-mentioned offset distance that the dispersed light of any wavelength can be changed, so that the focusing position of the dispersed light of multiple and different preset wavelengths
It sets and is matched with multiple detecting locations one-to-one correspondence, so that detecting devices 6 can detect wave-number domain color arranged at equal interval
Astigmatism.
Fig. 3 is the relation schematic diagram of the wave number and offset distance for the light beam that the spectrometer of an embodiment samples.This reality
It applies in example, detecting devices 6 includes photodetector.Photodetector includes multiple pixels 61.Multiple pixels 61 come one directly
On line.One pixel 61 receives the dispersed light of respective wavelength.I.e. photodetector is alignment photodetector.Photodetector can
To be that (Complementary Metal-Oxide-Semiconductor, are abbreviated as based on complementary metal oxide semiconductor
CMOS) the high speed detecting devices 6 of sensor.The light-sensitive material of pixel 61 can be according to the spectrum model of the incident light of desired detection
It encloses, selects GaAs, Si or InGaAs etc..
Photodetector is used to detect the dispersed light of the centre wavelength of wide range light beam, and photodetector is additionally operable to detection center
The dispersed light of the part wavelength of wavelength both sides.The dispersed light that photodetector detects, the equidistantly distributed on focal plane.
In the present embodiment, it is assumed that incident light spectrum wavelength is 800-900nm, and the screen periods constant of the first diffraction grating is
The screen periods constant of 1200pl/mm, the second diffraction grating are 200pl/mm.The folder of first diffraction grating and the second diffraction grating
Angle is 30 °.The focal length of convergent lens is 50mm.Centre wavelength is about 849nm, and the wave number k of the light beam of centre wavelength is 7.4,
Offset distance is 0.I.e. focal position of the light beam of centre wavelength on focal plane is reference position.What detecting devices 6 detected
The offset distance of light beam is using the focal position of the light beam of centre wavelength as reference point.As shown in figure 3, horizontal axis is wave number, the longitudinal axis
For the offset distance x of the light beam of different wave numbers.Using above-mentioned optical system, wave-number domain that the detecting devices 6 of spectrometer samples
The offset distance of light beam arranged at equal interval and the substantially linear relationship of wave number.What i.e. detecting devices 6 sampled is arbitrary two adjacent
Light beam wave-number difference it is equal when, focal position of the arbitrary two adjacent light beams on focal plane also be equidistantly distributed.In this way
Just the function of the wave-number domain equal interval sampling of spectrometer is realized.
Each technical characteristic of embodiment described above can be combined arbitrarily, to keep description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Several embodiments of the invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of spectrometer, which is characterized in that for carrying out wave-number domain equal interval sampling, the broad band light beam packet to broad band light beam
Include the optical signal of different wave length；The spectrometer includes：
Collimating element, for the broad band light beam to be changed into directional light；
Dispersive device, for the directional light to be pressed wavelength dispersion into multi beam dispersed light；
Concentrating element, for focusing the dispersed light with phase co-wavelength, and the concentrating element will have different wave length
The dispersed light focus at the different location on its focal plane, and the focal beam spot of each dispersed light along a straight line sequence
Arrangement；And
Detecting devices has multiple detecting locations, the detecting devices multiple and different default for detecting on the focal plane
The dispersed light of wavelength；
Wherein, one timing of incidence angle of the dispersive device, the dispersive device and focusing member are injected in the directional light
Part matches so that the focal position of the dispersed light of multiple and different preset wavelengths is corresponded with the multiple detecting location
Matching；In the dispersed light of the difference preset wavelength, the wave-number difference of the adjacent dispersed light of arbitrary two beam is equal.
2. spectrometer according to claim 1, which is characterized in that the dispersive device includes at least two dispersion elements,
Described two dispersion elements are respectively the first dispersion element and the second dispersion element；First dispersion element is by the directional light
It is multi beam transition light beam by wavelength dispersion；Each transition light beam is changed by the more of wavelength dispersion by second dispersion element
Beam dispersed light, and each dispersed light is projected to the concentrating element；Entering for the dispersive device is injected in the directional light
Optical parameter, relative position and the focusing member of one timing of firing angle, first dispersion element and second dispersion element
The focal length of part determines the focal position of each dispersed light.
3. spectrometer according to claim 2, which is characterized in that first dispersion element and second dispersion element
It is diffraction grating, the extending direction of the extending direction of first dispersion element and second dispersion element is with preset
Angle.
4. spectrometer according to claim 3, which is characterized in that first dispersion element and second dispersion element
It is balzed grating,.
5. spectrometer according to claim 3, which is characterized in that first dispersion element is transmission-type or reflective
Diffraction grating；Second dispersion element is transmission-type or reflective diffraction grating.
6. spectrometer according to claim 3, which is characterized in that first dispersion element is using positive first-order diffraction or bears
First-order diffraction；Second dispersion element uses positive first-order diffraction or negative one order diffraction.
7. spectrometer according to claim 1, which is characterized in that the detecting devices includes photodetector, the light
Electric explorer includes multiple pixels, and point-blank, a pixel receives the color of respective wavelength to multiple pixel rows
Astigmatism.
8. spectrometer according to claim 1, which is characterized in that the photodetector is for detecting the wide range light beam
Centre wavelength dispersed light, the photodetector is additionally operable to detect the dispersion of the part wavelength of the centre wavelength both sides
Light；The dispersed light that the photodetector detects, the equidistantly distributed on the focal plane.
9. spectrometer according to claim 1, which is characterized in that further include entrance slit, the broad band light beam passes through successively
Cross the entrance slit and the collimating element；The entrance slit does the broad band light beam for shielding external stray light
It disturbs.
10. spectrometer according to claim 1, which is characterized in that the collimating element is collimation lens, the focusing member
Part is convergent lens, and the collimation lens and the convergent lens are achromatic lens.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810474131.1A CN108593108A (en) | 2018-05-17 | 2018-05-17 | Spectrometer |
| PCT/CN2019/082030 WO2019218807A1 (en) | 2018-05-17 | 2019-04-10 | Spectrometer |
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| CN109211415A (en) * | 2018-11-20 | 2019-01-15 | 电子科技大学 | A kind of Wavelength calibration method based on light source light spectrum characteristic wavelength |
| CN109682474A (en) * | 2018-12-27 | 2019-04-26 | 佛山科学技术学院 | Spectrometer dispersive elements and spectrometer |
| CN109923555A (en) * | 2019-01-29 | 2019-06-21 | 深圳市汇顶科技股份有限公司 | Fingerprint detection method, finger print detection device and electronic equipment |
| WO2019218807A1 (en) * | 2018-05-17 | 2019-11-21 | 深圳市太赫兹科技创新研究院 | Spectrometer |
| CN110631702A (en) * | 2019-09-17 | 2019-12-31 | 华中科技大学 | Spectral resolution enhancing device |
| CN111061015A (en) * | 2019-12-27 | 2020-04-24 | 武汉邮电科学研究院有限公司 | Wavelength selective switch with double gratings and design method thereof |
| CN114994938A (en) * | 2022-07-19 | 2022-09-02 | 中国科学院长春光学精密机械与物理研究所 | Dispersion enhanced optical element and spectrum beam combining, locking and measuring structure |
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