CN108896537A - A kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer - Google Patents
A kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer Download PDFInfo
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- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
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Abstract
The invention belongs to spectrometer beam splitting system fields, are related to a kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer, which includes by the propagation trajectories sequence of light beam：Entrance slit, the collimating mirror for collimated incident light, prism, the echelle grating for realizing high-order dispersion, the imaging mirror for focusing each wavelength collimated light beam and the planar array detector for receiving spectrum picture signal；Prism is as follows for realizing the crossed dispersion of light beam：Light beam realizes double dispersions from the same side incidence and outgoing of prism.The crossed dispersion of the multiple diffraction times of echelle grating of the present invention realizes that, compared with the dispersion of prism single or prismatic reflection, optical path is compressed on the width under identical clear aperture by the double dispersions of same prism；Meanwhile when reaching identical chromatic dispersion effects, the thickness and the angle of wedge of prism are greatly reduced, and can be reduced absorption of the material to light, be improved the measurement sensitivity of system；The shortwave lower limit of test is up to 165nm.
Description
Technical field
The invention belongs to spectrometer beam splitting system fields, are related to a kind of echelle grating spectrum applied to ICP spectrometer
Instrument light splitting optical path structure.
Background technique
Inductively-coupled plasma spectrometer (ICP spectrometer) is carried out using information provided by atomic emissions characteristic spectral line
Elemental analysis has the advantages that multielement simultaneously, quickly, directly measures, in metallurgy, petrochemical industry, machine-building, geology mining and metallurgy
Etc. play great function in industrial productions, be one of the elemental analysis method being most widely used in Material Field.With ICP
Spectrometer be widely used in metallurgy, the traditional industries such as mine, environmental protection and gradually expand to fast inspection, on-line monitoring field, using needing
That asks is increasingly diversified, and test sample amount demand is huge, tested element species are various, component content is different, and a large amount of suitable points
The sensitive line of analysis is present in ultraviolet band, it is desirable that the research and development of test equipment constantly pursue take into account it is ultraviolet to visible broader spectrum model
It encloses, higher spectral resolution, more preferably sensitivity and detection limit；Meanwhile analysis instrument must be intended to miniaturization, module
Change, is easy of integration.Using echelle grating as the ICP spectrometer of core light-splitting device, have that wavelength band is wide, high resolution, sensitive
Degree is high, advantages such as low of composing instantaneous measurement, detection limit entirely are, it can be achieved that multielement quickly measures simultaneously, more traditional scanning monochromator
And multichannel spectrometer has that spectral coverage is wider, volume is smaller, advantages such as more stable of analyzing fast more rapidity, performance, it has also become atom hair
Penetrate the mainstream development trend of spectrometer.
As the core component of spectral instrument, light splitting optical path structure not only determines the analysis performance of instrument, also very big
Limit equipment instrument in degree.Echelle grating is usually operated in Littrow structure, is struck a bargain with prism or plane grating group
Dispersion light splitting optical path is pitched, obtains the complete spectrum of high dispersion, wide spectrum, all-wave glittering in conjunction with planar array detector.This structure is wanted
Ask grating diffration angle equal with incidence angle, and close to the blaze angle of grating, meanwhile, consider the space that practical optical path is placed, to enter
It penetrates light and emergent ray and needs to be arranged deviation angle appropriate on the direction of vertical normal face.Carry out crossed dispersion element be
Transmission or reflection mode can be used in prism or grating, and degree of dispersion is low compared with echelle grating, for by the more of echelle grating
A diffraction time is separated from each other in the direction of its vertical dispersion.Therefore, it is necessary to by rationally designing optical path, the suitable key of selection
Component realizes the optimal spectroscopic behaviour and volume miniaturization of instrument.
It is usually applied within the scope of the ultraviolet wider continuous spectrum to visible waveband in view of ICP spectrometer, grating beam splitting is deposited
In inevitable spectra overlapping, ICP spectrometer uses echelle grating crossed dispersion beam splitting system to be all made of prism as low color
Dissipate element.Fig. 1, Fig. 2 and Fig. 3 be ICP spectrometer respectively frequently with several beam-splitting structures, echelle grating and prism be not by
Same combination realizes the light splitting to entire spectral coverage, is aided with entrance slit, collimation, concentrating element, on planar array detector
To the non-overlapping spectrum picture of full spectral coverage.Intuitively comparing is it is found that under identical focal length and clear aperature, compared to transmission mode, rib
Mirror will increase the light path of system using reflective operation mode (as shown in Figure 1), once turns back, greatly increases simultaneously because increasing
The width of optical path.And even if prism transmission uses, it is quasi- no matter using pre- dispersion (as shown in Figure 2) or rear dispersion (as shown in Figure 3)
Collimated optical beam and dispersed light beam all have one fixed width and are separated from each other, and occupy larger space, volume is caused not compress further.
Summary of the invention
In view of the above technical problems, the object of the present invention is to provide one kind arrives visible waveband, identical focal length suitable for ultraviolet
The echelle spectrometer light splitting optical path structure applied to ICP spectrometer more compressed with bore lower volume guarantees ultraviolet
While to visible waveband spectroscopic behaviour, further reduce equipment instrument.
To achieve the goals above, the present invention provides following technical solutions：
The present invention provides a kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer, the light splitting light
Line structure by light beam propagation trajectories sequence include：Entrance slit 1, prism 3, is used the collimating mirror 2 for collimated incident light
In the echelle grating 4 of realization high-order dispersion, the imaging mirror 5 for focusing each wavelength collimated light beam and for receiving spectrum
The planar array detector 6 of picture signal；Wherein, the prism 3 is as follows for realizing the crossed dispersion of light beam：Light beam is from prism 3
Double dispersions are realized in the same side incidence and outgoing.
The separation of multiple diffraction times of echelle grating 4 is complete on the direction of vertical raster diffraction by same prism
Secondary dispersion in pairs.
Each component passes through positioning base respectively and is mounted in same closed cavity, to keep relative tertiary location constant such as
Under：The entrance slit 1 and collimating mirror 2 are arranged on systematic optical axis direction, between entrance slit 1 and collimating mirror 2
Gauge is from the focal length for being equal to collimating mirror 2；The prism 3 and echelle grating 4 are successively set on the off-axis of collimating mirror 2
On reflection direction, keep the incidence angle of echelle grating 4 consistent with blaze angle；Point of prism 3 is arranged in the imaging mirror 5
On light direction, the planar array detector 6 is arranged on the off axis reflector direction of imaging mirror 5.
Light beam comprising sample characteristic spectral line passes sequentially through the refraction of prism 3, echelle grating 4 reflects, again by prism 3
Light splitting forms two-dimentional crossed dispersion light beam, wherein the dispersion direction that the light beam passes twice through prism 3 is consistent, and and scala media
The dispersion direction of terraced grating 4 is vertical, cooperates the collimation and focussing force of collimating mirror 2 and imaging mirror 5, finally in face battle array
Two-dimension spectrum image is obtained on detector 6.
The entrance slit 1 uses 50 ± 5 μm of pin holes of Φ.
The material of the prism 3 is calcirm-fluoride.
The shortwave lower limit of the light splitting optical path structured testing is 165nm.
The cutting direction of the echelle grating 4 is parallel with 3 main cross section of prism.
Compared with prior art, the beneficial effects of the present invention are：
The separation of the multiple diffraction times of echelle grating of the present invention is by same prism on the direction of vertical raster diffraction
Double secondary dispersions are completed, compared under identical clear aperture the dispersion of prism single or prismatic reflection, optical path compressed on the width；
For the ultraviolet to the requirement of visible waveband wide spectrum of ICP spectrometer application, using calcirm-fluoride as dispersing prism material, remaining is
Using reflecting element, the shortwave lower limit of test uses light splitting system of the vitreous silica as prism material better than conventional up to 165nm
System；Simultaneously as double light splitting of prism, dispersion increase, it, can compared with prism single dispersion mode when reaching identical chromatic dispersion effects
To greatly reduce the thickness and the angle of wedge of prism, absorption of the material to light is reduced, the measurement sensitivity of system is improved.
Detailed description of the invention
Fig. 1 is that prismatic reflection formula echelle grating intersects beam splitting system schematic diagram in the prior art；
Fig. 2 is that the pre- dispersion transmission-type echelle grating of prism intersects beam splitting system schematic diagram in the prior art；
Fig. 3 intersects beam splitting system schematic diagram for dispersion transmission-type echelle grating after prism in the prior art；
Fig. 4 be the present invention be applied to ICP spectrometer echelle spectrometer light splitting optical path structure --- prism is double-colored
It dissipates transmission-type echelle grating and intersects beam splitting system schematic diagram.
Appended drawing reference therein is：
1 entrance slit
2 collimating mirrors
3 dispersing prisms
4 echelle grating
5 imaging mirrors
6 planar array detectors
Specific embodiment
Invention is further explained with reference to the accompanying drawings and examples.
As shown in figure 4, a kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer, including incidence
Slit 1, collimating mirror 2, prism 3, echelle grating 4, imaging mirror 5 and planar array detector 6.
Each component is mounted in same housing by positioning base, to keep relative tertiary location constant：In systematic optical axis
It is anti-that the spacing distance of placement entrance slit 1 and collimating mirror 2 on direction, entrance slit 1 and collimating mirror 2 is approximately equal to collimation
The focal length for penetrating mirror 2 is sequentially placed prism 3 and echelle grating 4 on the off axis reflector direction of collimating mirror 2, keeps scala media
The incidence angle of terraced grating 4 is consistent with blaze angle, and imaging mirror 5 is located at the off axis reflector direction of echelle grating 4, and is being imaged
Planar array detector 6 is installed on the off axis reflector direction of reflecting mirror 5.Wherein, the collimating mirror 2 is used for collimated incident light；Institute
Prism 3 is stated for realizing crossed dispersion；The echelle grating 4 is for realizing high-order dispersion；The imaging mirror 5 is for gathering
Burnt each wavelength collimated light beam；The planar array detector 6 is for receiving spectrum picture signal.
Light comprising sample characteristic spectral line passes sequentially through the refraction of prism 3 and two orientational dispersions are realized in the reflection of echelle grating 4,
Again by 3 dispersion of prism, two-dimentional crossed dispersion light beam is formed, wherein the light passes twice through the dispersion direction one of prism 3
It causes, and vertical with the dispersion direction of echelle grating 4, the standard of cooperation entrance slit 1, collimating mirror 2 and imaging mirror 5
Directly, focussing force finally obtains two-dimension spectrum image on planar array detector 6.
Sample to be tested is introduced into ICP light source with aerosol form, and the light for inspiring characteristic wavelength enters through entrance slit 1 to be divided
Closed cavity where light optical path, (since echelle grating crossed dispersion system is divided in orthogonal both direction
Light, entrance slit 1 uses 50 μm of pin holes of Φ in this example), collimated light beam is shaped as by collimating mirror 2, each wave after prism 3
It is long to be separated along prism main cross section；Primary dispersed light beam is incident on echelle grating 4 and diffraction occurs, when grating cutting direction and prism
When 3 main cross sections are parallel, high-order dispersion is realized on direction in vertical cutting direction, that is, grating dispersion；So far, light beam have passed through prism 3
It include multiple diffraction times with the two-dimension chromatic dispersion of echelle grating 4 in vertical direction；The light splitting of prism 3 is again passed by later, is added
Strong prism dispersion, increases the separation angle between each level, is finally focused on planar array detector 6 (in this example by imaging mirror 5
For area array CCD), obtain the full spectrum light spectrogram picture of two-dimension chromatic dispersion.
Compared under identical clear aperture the dispersion of prism single or prismatic reflection, multiple diffraction times pass through same in the present invention
The double dispersions on the direction of vertical raster diffraction of one prism, when degree of dispersion is identical as legacy system, optical path is on the width
It is compressed；For the ultraviolet to the requirement of visible waveband wide spectrum of ICP spectrometer application, using calcirm-fluoride as dispersing prism 3
Material, remaining is all made of reflecting element, and the shortwave lower limit of test is up to 165nm, and conventional system uses fused silica material
As dispersing prism material, shortwave lower limit is only capable of reaching 180nm；Due to double light splitting of prism, dispersion increases, mutually homochromy reaching
When dissipating effect, compared with the thickness and the angle of wedge that prism single dispersion mode can greatly reduce prism, absorption of the material to light is reduced,
The measurement sensitivity of raising system.
Claims (8)
1. a kind of echelle spectrometer light splitting optical path structure applied to ICP spectrometer, which presses light beam
Propagation trajectories sequence include：Entrance slit (1), the collimating mirror (2) for collimated incident light, prism (3), for realizing
The echelle grating (4) of high-order dispersion, the imaging mirror (5) for focusing each wavelength collimated light beam and for receiving spectrogram
As the planar array detector (6) of signal；It is characterized in that：
The prism (3) is as follows for realizing the crossed dispersion of light beam：Light beam is realized from the same side incidence and outgoing of prism (3)
Double secondary dispersions.
2. the echelle spectrometer light splitting optical path structure according to claim 1 applied to ICP spectrometer, feature
It is：The separation of multiple diffraction times of echelle grating (4) is complete on the direction of vertical raster diffraction by same prism
Secondary dispersion in pairs.
3. the echelle spectrometer light splitting optical path structure according to claim 1 applied to ICP spectrometer, feature
It is：Each component passes through positioning base respectively and is mounted in same closed cavity, to keep relative tertiary location constant as follows：Institute
It states entrance slit (1) and collimating mirror (2) is arranged on systematic optical axis direction, entrance slit (1) and collimating mirror (2)
Spacing distance is equal to the focal length of collimating mirror (2)；The prism (3) and echelle grating (4) are successively set on collimated reflected
On the off axis reflector direction of mirror (2), keep the incidence angle of echelle grating (4) consistent with blaze angle；The imaging mirror (5)
It is arranged on the light splitting direction of prism (3), the planar array detector (6) is arranged in the off axis reflector direction of imaging mirror (5)
On.
4. the echelle spectrometer light splitting optical path structure according to claim 1 applied to ICP spectrometer, feature
It is：Light beam comprising sample characteristic spectral line passes sequentially through prism (3) refraction, echelle grating (4) reflection, again by prism
(3) it being divided, forms two-dimentional crossed dispersion light beam, wherein the dispersion direction that the light beam passes twice through prism (3) is consistent, and
It is vertical with the dispersion direction of echelle grating (4), cooperate the collimation of collimating mirror (2) and imaging mirror (5) and focus and makees
With finally obtaining two-dimension spectrum image on planar array detector (6).
5. the echelle spectrometer light splitting optical path structure according to claim 1 applied to ICP spectrometer, feature
It is：The entrance slit (1) uses 50 ± 5 μm of pin holes of Φ.
6. the echelle spectrometer light splitting optical path structure according to claim 1 applied to ICP spectrometer, feature
It is：The material of the prism (3) is calcirm-fluoride.
7. the echelle spectrometer light splitting optical path structure according to claim 1 applied to ICP spectrometer, feature
It is：The shortwave lower limit of the light splitting optical path structured testing is 165nm.
8. the echelle spectrometer light splitting optical path structure according to claim 1 applied to ICP spectrometer, feature
It is：The cutting direction of the echelle grating (4) is parallel with the prism (3) main cross section.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632766A (en) * | 2019-01-10 | 2019-04-16 | 中国原子能科学研究院 | A kind of spark light source is the same as the spectroscopic analysis system that ladder optical path combines in two dimension |
| CN110793954A (en) * | 2019-11-05 | 2020-02-14 | 中国科学院苏州生物医学工程技术研究所 | Portable Raman blood identification system based on echelle grating |
| CN111093311A (en) * | 2019-12-09 | 2020-05-01 | 中国科学院西安光学精密机械研究所 | Deep ultraviolet waveband composite sensitivity spectrometer |
| CN114034386A (en) * | 2021-11-07 | 2022-02-11 | 天津大学 | Full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting |
| CN114295209A (en) * | 2021-12-30 | 2022-04-08 | 中国科学院长春光学精密机械与物理研究所 | Tunable spatial heterodyne spectrometer with single light splitting, single rotating shaft and symmetrical light path |
| CN117647311A (en) * | 2024-01-30 | 2024-03-05 | 中国海洋大学 | Optical system of femto-scale ultra-high spectral resolution spectrometer and application thereof |
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| CN107941336A (en) * | 2017-11-02 | 2018-04-20 | 钢研纳克检测技术股份有限公司 | A kind of two-dimentional high resolution spectrometer optical system of double aperture slit switching |
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| CN2697644Y (en) * | 2003-08-09 | 2005-05-04 | 吉林大学 | Inductive coupling plasma spectrometer |
| CN202928949U (en) * | 2011-12-31 | 2013-05-08 | 聚光科技(杭州)股份有限公司 | Splitting device for improving spectrum detection range and spectrum analyzing system |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632766A (en) * | 2019-01-10 | 2019-04-16 | 中国原子能科学研究院 | A kind of spark light source is the same as the spectroscopic analysis system that ladder optical path combines in two dimension |
| CN110793954A (en) * | 2019-11-05 | 2020-02-14 | 中国科学院苏州生物医学工程技术研究所 | Portable Raman blood identification system based on echelle grating |
| CN111093311A (en) * | 2019-12-09 | 2020-05-01 | 中国科学院西安光学精密机械研究所 | Deep ultraviolet waveband composite sensitivity spectrometer |
| CN114034386A (en) * | 2021-11-07 | 2022-02-11 | 天津大学 | Full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting |
| CN114295209A (en) * | 2021-12-30 | 2022-04-08 | 中国科学院长春光学精密机械与物理研究所 | Tunable spatial heterodyne spectrometer with single light splitting, single rotating shaft and symmetrical light path |
| CN117647311A (en) * | 2024-01-30 | 2024-03-05 | 中国海洋大学 | Optical system of femto-scale ultra-high spectral resolution spectrometer and application thereof |
| CN117647311B (en) * | 2024-01-30 | 2024-04-19 | 中国海洋大学 | Optical system of femto-scale ultra-high spectral resolution spectrometer and application thereof |
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