CN115014519A - Super-spectral resolution spectrometer based on Fabry-Perot interferometer - Google Patents
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
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- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
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Abstract
The invention provides a super-spectral resolution spectrometer based on a Fabry-Perot interferometer, which comprises an optical lead-in system, a first-stage light splitting system of the Fabry-Perot interferometer, a second-stage spectral order selection system and a two-dimensional area array detection system, wherein the first-stage light splitting system is connected with the optical lead-in system; the optical lead-in system is used for receiving the light beam to be detected, entering the spectrometer system and projecting the light beam into the primary light splitting system through the collimating lens; the Fabry-Perot interferometer primary light splitting system is used for receiving parallel light beams from different angles of the collimating lens and performing primary light splitting through the angle dependence of an interference spectrum; the second-level spectrum order selection system is used for secondarily selecting the aliasing spectrum separated by the first-level light splitting system in one spatial dimension; the two-dimensional area array detection system is used for receiving the coarse resolution spectrum signals and the high resolution spectrum signals. The invention has the advantages that: the device has high spectral resolution, wide spectral range, relatively low cost and relatively small volume.
Description
Technical Field
The invention relates to the technical field of spectra, in particular to a super-spectral resolution spectrometer based on a Fabry-Perot interferometer.
Background
Spectroscopic instruments are widely used in the fields of physical analysis, biological sample, semiconductor material detection, optical detection, material detection, environmental monitoring, and the like.
The existing spectrum instruments mainly comprise a grating spectrometer, a prism spectrometer and a Fourier spectrometer. The grating spectrometer mainly relies on low-order interference light splitting of the diffraction grating, and the spectral resolution is limited by the number of diffraction lines of the diffraction grating, the focal length of a focusing lens and the size of a detector; high-resolution grating spectrometers often require dense grating lines to cooperate with large-size gratings and long focusing lenses, and thus have large sizes and high costs, while the spectral range is limited by the size of the detector, which makes it difficult to achieve high spectral resolution in a wide-band range. The prism spectrometer divides light by means of refraction, spectral aliasing cannot occur, and the resolution ratio is poor. The Fourier spectrometer performs Fourier transformation on interference intensity by means of interference light splitting, can realize high spectral resolution, but the instrument needs high-precision mechanical control, and is generally large in size and high in cost.
Therefore, there is an urgent need to develop a spectrometer with high spectral resolution, wide spectral range, relatively low cost and relatively small volume.
Disclosure of Invention
The invention aims to solve the technical problem of providing a super-spectral resolution spectrometer based on a Fabry-Perot interferometer, which is combined with a primary light splitting system and a secondary spectrum order selection system of the Fabry-Perot interferometer and utilizes a two-dimensional detector to receive a two-dimensional high-resolution spectrogram so as to realize the super-spectral resolution spectrometer, and effectively solves the problems that the existing spectrometer is difficult to realize high spectral resolution and wide spectral range, relatively high in cost and relatively large in size.
The invention adopts the following technical scheme to solve the technical problems:
a super-spectral resolution spectrometer based on a Fabry-Perot interferometer comprises an optical lead-in system, a first-stage light splitting system of the Fabry-Perot interferometer, a second-stage spectral order selection system and a two-dimensional area array detection system;
the optical leading-in system comprises an entrance slit and a collimating lens; the incidence slit is used for receiving a light beam to be detected, entering a spectrometer system and projecting the light beam into a primary light splitting system of the Fabry-Perot interferometer through a collimating lens;
the first-order light splitting system of the Fabry-Perot interferometer comprises a Fabry-Perot interferometer; the Fabry-Perot interferometer is used for receiving parallel beams from different angles of the collimating lens and performing first-order light splitting through the angle dependence of interference spectrum;
the second-level spectral order selection system comprises a grating or an optical filter device and is used for secondarily selecting the aliasing spectrum separated by the first-level light splitting system of the Fabry-Perot interferometer in one spatial dimension;
the two-dimensional area array detection system is used for receiving the coarse resolution spectrum signals from the secondary spectrum order selection system and the high resolution spectrum signals filtered by the primary light splitting system of the Fabry-Perot interferometer.
In a preferred embodiment of the present invention, the entrance slit of the optical introduction system is located at a focal plane of the collimator lens; the light beams entering from different spatial positions of the entrance slit form parallel light beams with different angles through the collimating lens.
As one of the preferred modes of the present invention, the beam angle is determined by formula I:
α ═ arctan (d/f) formula I;
in the formula, d is the height of a space point on the incident slit, f is the focal length of the collimating lens, and alpha is the beam angle.
As one preferable mode of the present invention, the first-order beam splitting system of the fabry-perot interferometer is located behind the optical introduction system, and performs spectrum selection according to formula II:
in the formula, alpha is an angle of a light beam entering the Fabry-Perot interferometer, R is the mirror reflectivity of the Fabry-Perot interferometer, d is the mirror interval of the Fabry-Perot interferometer, and T is the spectral transmittance;
after passing through the Fabry-Perot interferometer, the spectrums transmitted at different angles are received at different spatial positions, and then ultrahigh resolution spectrum information is extracted.
As one preferable mode of the present invention, the second-order spectral order selection system is located behind the first-order splitting system of the fabry-perot interferometer, and the grating or the optical filter device is used to separate the aliased high-resolution spectrum from the first-order splitting system of the fabry-perot interferometer.
As one preferable mode of the present invention, the two-dimensional area array detection system has two spatial dimensions, one of the two spatial dimensions is used for receiving the coarsely resolved spectrum selection signal from the grating or the optical filter device in the secondary spectrum order selection system, and the other spatial dimension is used for receiving the high resolution spectrum signal filtered by the spectral angle dependency of the fabry perot interferometer in the primary spectroscopic system of the fabry perot interferometer.
As one of the preferable modes of the present invention, the broadband high-resolution spectrum is obtained by splicing the high-resolution spectrum and the coarse-resolution spectrum received by the two-dimensional area array detection system.
As one preferable mode of the present invention, an optical coupling system is further disposed between the first-order splitting system and the second-order spectral order selecting system of the fabry-perot interferometer.
In a preferred embodiment of the present invention, the optical coupling system includes a coupling lens, a secondary slit, and a secondary collimator lens; the coupling lens converges the space light from different angles of the primary light splitting system of the Fabry-Perot interferometer to a secondary slit; the secondary slit is positioned at the focus of the secondary collimating lens and limits the received space light with different angles to enter the secondary spectrum order selection system in a parallel light form after being collimated by the secondary collimating lens.
The working principle is as follows:
the method comprises the steps of performing primary spectrum selection by utilizing Fabry-Perot interference high-order interference, focusing high-order aliasing spectrums with different wavelengths on different space points by utilizing the angle dependence of a transmission spectrum of the Fabry-Perot interferometer, performing secondary spectrum selection by utilizing a grating/optical filter device, performing low-order spectrum filtering on a space dimension in one direction, finally receiving a two-dimensional spectrogram containing ultrahigh-resolution spectrum information on a two-dimensional detector, and splicing a high-resolution spectrum in a single free spectrum range of the Fabry-Perot interferometer with a broadband spectrum of the grating/optical filter device to obtain broadband and high-spectral-resolution spectrum information.
Compared with the prior art, the invention has the advantages that:
(1) the grating/optical filter device is only used as a spectrum order selection device, and fine spectrum resolution is provided by Fabry-Perot interferometer (F-P) high-order interference, so that the realization cost is lower compared with a spectrometer for increasing the spectrum resolution by increasing the number of grating lines;
(2) the traditional high-resolution spectrometer can only provide a high-resolution spectrum in a narrow waveband range (by increasing the focal length of a focusing lens), the invention utilizes a grating/optical filter device to perform coarse-resolution spectrum selection, and utilizes a Fabry-Perot interferometer (F-P) to subdivide the spectrum in a single grating spectrum channel again, so that the acquisition of the high-resolution spectrum in the wide waveband range can be realized, and the volume is small (no long-focus focusing lens is needed).
Drawings
FIG. 1 is a schematic perspective view of a Fabry-Perot interferometer-based hyperspectral spectrometer in embodiment 1;
FIG. 2 is a schematic front view of a Fabry-Perot interferometer-based hyperspectral spectrometer in embodiment 1;
fig. 3 is a schematic view of an orthographic view of a super-spectral resolution spectrometer based on a fabry-perot interferometer in embodiment 2;
fig. 4 is a schematic top view of a fabry-perot interferometer-based hyperspectral resolution spectrometer of embodiment 2;
fig. 5 is a schematic front view of a super-spectral resolution spectrometer based on a fabry-perot interferometer in embodiment 3;
FIG. 6 shows the spectral transmittances of the Fabry-Perot interferometers of examples 1, 2 and 3;
FIG. 7 is a graph of the spectral transmittance of the Fabry-Perot interferometer of embodiments 1, 2 and 3 as a function of angle;
fig. 8 is a spectrogram of the grating light-splitting received by the two-dimensional detector image plane and the super-spectral resolution spectrometer based on the fabry-perot interferometer in embodiments 1 and 2.
In the figure: the optical waveguide system comprises an optical lead-in system 1, an incident slit 11, a collimating lens 12, a first-order beam splitting system 2, a Fabry-Perot interferometer 21, a Fabry-Perot interferometer 3, a second-order spectral order selection system 31, a diffraction grating 32, a focusing lens 33, a focusing lens 34, a linear gradient filter 34, a two-dimensional area array detection system 4, a two-dimensional detector 41, an optical coupling system 5, a coupling lens 51, a secondary slit 52 and a secondary collimating lens 53.
Detailed Description
The following examples are given for the detailed implementation and the specific operation procedures, but the scope of the present invention is not limited to the following examples.
Example 1
As shown in fig. 1-2, the super-spectral resolution spectrometer based on the fabry-perot interferometer of the present embodiment sequentially includes an optical introducing system 1, a first-order splitting system 2 of the fabry-perot interferometer, a second-order spectral order selecting system 3, and a two-dimensional area array detecting system 4 along a light path direction. Wherein, the optical leading-in system 1 comprises an entrance slit 11 and a collimating lens 12; the first-order beam splitting system 2 of the Fabry-Perot interferometer comprises a Fabry-Perot interferometer 21; the second-order spectral order selection system 3 comprises a diffraction grating 31 and a focusing lens 32; the two-dimensional area array detection system 4 includes a two-dimensional detector 41.
Further, in the present embodiment, the entrance slit 11 is located at the focal plane of the collimating lens 12, and is used for receiving the light beam to be measured to enter the spectrometer system. The entrance slit 11 restricts the light beam to a linear shape, and the light beam is collimated by the collimator lens 12 into parallel light in a direction perpendicular to the entrance slit 11, and the angle of the light beam in a direction parallel to the entrance slit 11 varies with the spatial position of the entrance slit 11.
The light beams entering from different spatial positions of the entrance slit 11 form parallel light beams of different angles via the collimator lens 12. The beam angle is determined by formula I:
α ═ arctan (d/f) formula I;
where d is the height of a spatial point on the entrance slit 11, f is the focal length of the collimating lens 12, and α is the beam angle.
Further, in the present embodiment, the fabry-perot interferometer 21 is located behind the collimating lens 12, and is configured to receive parallel beams from the collimating lens 12 at different angles and perform first-order light splitting through the angle dependence of the interference spectrum.
Specifically, the fabry-perot interferometer 21 disperses light entering at different angles to different wavelengths according to formula II (fabry-perot interferometer transmittance formula):
in the formula, α is an angle of a light beam entering the fp interferometer 21, R is a mirror reflectivity of the fp interferometer 21, d is a mirror pitch of the fp interferometer 21, and T is a spectral transmittance.
The transmittance of the fp interferometer 21 in this embodiment is shown in fig. 6 to 7, and an alias spectrum with high spectral resolution is generated by first-order light splitting of the fp interferometer 21.
Further, in this embodiment, the diffraction grating 31 performs second-order spectrum order selection on the high-spectral-resolution alias spectrum from the fabry-perot interferometer 21, and selects the focusing lens 32 with a suitable angle according to formula III (grating line dispersion formula) to disperse the light with different wavelengths to different spatial positions, and only the wavelength band range of the diffracted light of the diffraction grating 31 and the corresponding transmission peak spectrum at the spectrum transmission peak position of the fabry-perot interferometer 21 can be transmitted.
Wherein f is the focal length of the focusing lens, m is the grating interference order, theta is the grating diffraction angle, lambda is the wavelength, and l is the distance between adjacent spectral lines.
Further, in this embodiment, the two-dimensional detector 41 has two spatial dimensions, one of which receives the coarsely resolved spectrum selection channel from the secondary spectrum order selection system 3, and the other of which receives the high-resolution spectrum signal filtered by the spectral angle dependency of the fp interferometer 21 in the primary spectroscopic system 2.
Fig. 8 shows the spectrograms of the grating light received at the image plane of the two-dimensional detector 41 and the super-spectral resolution spectrometer based on the fabry-perot interferometer 21 in this embodiment.
The broadband high-resolution spectrum is obtained by splicing the high-resolution spectrum and the coarse-resolution spectrum received by the two-dimensional detector 41.
Example 2
As shown in fig. 3 to 4, the super-spectral resolution spectrometer based on the fabry-perot interferometer of the present embodiment sequentially includes an optical introduction system 1, a first-order light splitting system 2 of the fabry-perot interferometer, an optical coupling system 5, a second-order spectrum order selection system 3, and a two-dimensional area array detection system 4 along a light path direction. Wherein, the optical leading-in system 1 comprises an entrance slit 11 and a collimating lens 12; the first-order beam splitting system 2 of the Fabry-Perot interferometer comprises a Fabry-Perot interferometer 21; the second-order spectral order selection system 3 comprises a diffraction grating 31 and a focusing lens 32; the two-dimensional area array detection system 4 includes a two-dimensional detector 41; the optical coupling system 5 includes a coupling lens 51, a secondary slit 52, and a secondary collimator lens 53.
Further, in this embodiment, the entrance slit 11 is located at the focal plane of the collimating lens 12, and is used for receiving the light beam to be measured to enter the spectrometer system. The entrance slit 11 restricts the light beam to a linear shape, and the light beam is collimated by the collimator lens 12 into parallel light in a direction perpendicular to the entrance slit 11, and the angle of the light beam in a direction parallel to the entrance slit 11 varies with the spatial position of the entrance slit 11.
The light beams entering from different spatial positions of the entrance slit 11 form parallel light beams of different angles via the collimator lens 12. The beam angle is determined by formula I:
α ═ arctan (d/f) formula I;
where d is the height of a spatial point on the entrance slit 11, f is the focal length of the collimating lens 12, and α is the beam angle.
Further, in the present embodiment, the fabry-perot interferometer 21 is located behind the collimating lens 12, and is configured to receive parallel beams from the collimating lens 12 at different angles and perform first-order light splitting through the angle dependence of the interference spectrum.
Specifically, the fp interferometer 21 disperses light entering at different angles to different wavelengths according to formula II (fp-transmittance formula):
in the formula, α is an angle of a light beam entering the fp interferometer 21, R is a mirror reflectivity of the fp interferometer 21, d is a mirror pitch of the fp interferometer 21, and T is a spectral transmittance.
The transmittance of the fabry-perot interferometer 21 of the present embodiment is shown in fig. 6 to 7, and an alias spectrum with high spectral resolution is generated by first-order light splitting of the fabry-perot interferometer 21.
Further, in the present embodiment, the coupling lens 51 converges the spatial light from the fabry-perot interferometer 21 at different angles to the secondary slit 52; the secondary slit 52 is located at the focus of the secondary collimating lens 53, and limits the received spatial light with different angles to enter the secondary spectral order selection system 3 behind the secondary collimating lens 53 in the form of parallel light after being collimated by the secondary collimating lens 53.
Further, in this embodiment, the diffraction grating 31 performs secondary spectrum order selection on the alias spectrum with high spectral resolution from the optical coupling system 5, and selects the focusing lens 32 with a suitable angle according to formula III (grating line dispersion formula) to disperse the light with different wavelengths to different spatial positions, and only the wavelength band range of the diffracted light of the diffraction grating 31 and the corresponding transmission peak spectrum at the position of the spectrum transmission peak of the fabry-perot interferometer 21 can be transmitted.
Wherein f is the focal length of the focusing lens, m is the grating interference order, theta is the grating diffraction angle, lambda is the wavelength, and l is the distance between adjacent spectral lines.
Further, in this embodiment, the two-dimensional detector 41 has two spatial dimensions, one of which receives the coarsely resolved spectrum selection channel from the secondary spectrum order selection system 3, and the other of which receives the high-resolution spectrum signal filtered by the spectral angle dependency of the fp interferometer 21 in the primary spectroscopic system 2.
Fig. 8 shows the spectrograms of the grating light received at the image plane of the two-dimensional detector 41 and the super-spectral resolution spectrometer based on the fabry-perot interferometer 21 in this embodiment.
The broadband high-resolution spectrum is obtained by splicing the high-resolution spectrum and the coarse-resolution spectrum received by the two-dimensional detector 41.
Example 3
As shown in fig. 5, the super-spectral resolution spectrometer based on the fabry-perot interferometer of the present embodiment sequentially includes an optical introduction system 1, a first-order splitting system 2 of the fabry-perot interferometer, a second-order spectral order selection system 3, and a two-dimensional area array detection system 4 along a light path direction. Wherein, the optical leading-in system 1 comprises an entrance slit 11 and a collimating lens 12; the first-order beam splitting system 2 of the Fabry-Perot interferometer comprises a Fabry-Perot interferometer 21; the secondary spectral order selection system 3 comprises a focusing lens 33 and a linear gradient filter 34; the two-dimensional area array detection system 4 includes a two-dimensional detector 41.
Further, in this embodiment, the entrance slit 11 is located at the focal plane of the collimating lens 12, and is used for receiving the light beam to be measured to enter the spectrometer system. The entrance slit 11 restricts the light beam to a linear shape, and the light beam is collimated by the collimator lens 12 into parallel light in a direction perpendicular to the entrance slit 11, and the angle of the light beam in a direction parallel to the entrance slit 11 varies with the spatial position of the entrance slit 11.
The light beams entering from different spatial positions of the entrance slit 11 form parallel light beams of different angles via the collimator lens 12. The beam angle is determined by formula I:
α ═ arctan (d/f) formula I;
where d is the height of a spatial point on the entrance slit 11, f is the focal length of the collimating lens 12, and α is the beam angle.
Further, in the present embodiment, the fabry-perot interferometer 21 is located behind the collimating lens 12, and is configured to receive parallel beams from the collimating lens 12 at different angles and perform first-order light splitting through the angle dependence of the interference spectrum.
Specifically, the fabry-perot interferometer 21 disperses light entering at different angles to different wavelengths according to formula II (fabry-perot interferometer transmittance formula):
in the formula, α is an angle of a light beam entering the fp interferometer 21, R is a mirror reflectivity of the fp interferometer 21, d is a mirror pitch of the fp interferometer 21, and T is a spectral transmittance.
The transmittance of the fabry-perot interferometer 21 of the present embodiment is shown in fig. 6 to 7, and an alias spectrum with high spectral resolution is generated by first-order light splitting of the fabry-perot interferometer 21.
Further, in the present embodiment, the focusing lens 33 converges the spatial light from the first-order beam splitting system 2 of the fabry-perot interferometer at different angles onto the target surface of the two-dimensional detector 41; the linear gradient filter 34 is located in front of the two-dimensional detector 41, pixels of the two-dimensional detector 41 are linearly separated in one spatial dimension according to wavelength, pixel points in different spatial positions receive light intensities in different wave bands, and a transmission spectrum with high spectral resolution separated by an angle of the fabry-perot interferometer 21 is used for carrying out secondary subdivision on a spectral channel roughly resolved by the linear gradient filter 34 in the other spatial dimension.
Further, in this embodiment, the two-dimensional detector 41 has two spatial dimensions, one of which receives the coarsely resolved spectrally selective channel from the linear graded filter 34 in the secondary spectral order selection system 3, and the other of which receives the high-resolution spectral signal filtered by the spectral angle dependency of the fp interferometer 21 in the primary spectroscopic system 2.
The broadband high-resolution spectrum is obtained by splicing the high-resolution spectrum and the coarse-resolution spectrum received by the two-dimensional detector 41.
The invention is not the best known technology.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (9)
1. A hyper-spectral resolution spectrometer based on a Fabry-Perot interferometer is characterized by comprising an optical lead-in system, a first-stage light splitting system of the Fabry-Perot interferometer, a second-stage spectrum order selection system and a two-dimensional area array detection system;
the optical leading-in system comprises an entrance slit and a collimating lens; the incidence slit is used for receiving a light beam to be detected, entering a spectrometer system and projecting the light beam into a primary light splitting system of the Fabry-Perot interferometer through a collimating lens;
the first-stage light splitting system of the Fabry-Perot interferometer comprises a Fabry-Perot interferometer; the Fabry-Perot interferometer is used for receiving parallel beams from different angles of the collimating lens and performing first-order light splitting through the angle dependence of interference spectrum;
the second-level spectral order selection system comprises a grating or an optical filter device and is used for secondarily selecting the aliasing spectrum separated by the first-level light splitting system of the Fabry-Perot interferometer in one spatial dimension;
the two-dimensional area array detection system is used for receiving the coarse resolution spectrum signals from the secondary spectrum order selection system and the high resolution spectrum signals filtered by the primary light splitting system of the Fabry-Perot interferometer.
2. The fabry-perot interferometer based hyperspectral resolved spectrometer of claim 1, wherein the entrance slit of the optical introduction system is located at a collimating lens focal plane; the light beams entering from different spatial positions of the entrance slit form parallel light beams with different angles through the collimating lens.
3. The fabry-perot interferometer based hyperspectral resolved spectrometer of claim 2, wherein the beam angle is determined by formula I:
α ═ arctan (d/f) formula I;
in the formula, d is the height of a space point on the incident slit, f is the focal length of the collimating lens, and alpha is the beam angle.
4. The fabry-perot interferometer based hyperspectral resolved spectrometer of claim 1, wherein the first stage beam splitting system of the fabry-perot interferometer is located behind the optical import system, and the spectrum selection is performed according to formula II:
in the formula, alpha is an angle of a light beam entering the Fabry-Perot interferometer, R is a mirror reflectivity of the Fabry-Perot interferometer, d is a mirror interval of the Fabry-Perot interferometer, and T is a spectrum transmittance.
5. The fp interferometer-based hyperspectral resolved spectrometer according to claim 1, wherein the secondary spectral order selection system is located behind the fp interferometer primary beam splitting system, and wherein the grating or filter device is used to separate aliased high resolution spectra from the fp interferometer primary beam splitting system.
6. The fabry-perot interferometer based super-spectrally resolved spectrometer according to claim 1, wherein the two-dimensional area array detection system has two spatial dimensions, one of which is used to receive the coarsely resolved spectral selection signal from the grating or filter device in the secondary spectral order selection system, and the other is used to receive the high-resolution spectral signal filtered by the angular dependence of the fabry-perot interferometer spectrum in the primary spectroscopic system.
7. The fabry-perot interferometer based hyperspectral resolved spectrometer of claim 1, wherein a broadband high-resolution spectrum is obtained by splicing the high-resolution spectrum and the coarse-resolution spectrum received by the two-dimensional area array detection system.
8. The Fabry-Perot interferometer-based hyperspectral spectrometer according to any of claims 1 to 6, wherein an optical coupling system is further arranged between the primary light splitting system and the secondary spectral order selection system of the Fabry-Perot interferometer.
9. The fabry-perot interferometer based hyperspectral resolved spectrometer of claim 8, wherein the optical coupling system comprises a coupling lens, a secondary slit, and a secondary collimating lens; the coupling lens converges the space light from the first-order light splitting system of the Fabry-Perot interferometer at different angles to the secondary slit; the secondary slit is positioned at the focus of the secondary collimating lens and limits the received space light with different angles to enter the secondary spectrum order selection system in a parallel light form after being collimated by the secondary collimating lens.
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