CN101320126A - Two-sided reflection movable mirror interferometer - Google Patents
Two-sided reflection movable mirror interferometer Download PDFInfo
- Publication number
- CN101320126A CN101320126A CNA2008100183524A CN200810018352A CN101320126A CN 101320126 A CN101320126 A CN 101320126A CN A2008100183524 A CNA2008100183524 A CN A2008100183524A CN 200810018352 A CN200810018352 A CN 200810018352A CN 101320126 A CN101320126 A CN 101320126A
- Authority
- CN
- China
- Prior art keywords
- beam splitter
- double
- level crossing
- reflective surface
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Spectrometry And Color Measurement (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A double-sided movable reflecting mirror interferometer comprises a beam splitter, two fixed plane mirrors and a double-sided movable reflecting mirror which is a plane parallel glass sheet, and both sides of the glass sheet are plated with reflecting film; the double-sided movable reflecting mirror is parallel to the half-reflection surface of the beam splitter; a first plane mirror and a second plane mirror are symmetrical to the half-reflection surface of the beam splitter; the double-sided movable reflecting mirror makes straight reciprocating motion along the normal direction of the half-reflection surface of the beam splitter; the optical path difference is four times longer than the displacement (relative to the position of zero optical path difference) of the double-sided movable reflecting mirror. The interferometer has compact structure, small volume and low cost, and is suitable for high resolution Fourier transform spectrometers of various spectral regions.
Description
Technical field
The present invention relates to a kind of interferometer, be specifically related to a kind of double-sided reflecting moving mirror interferometer that is applied to the high resolving power Fourier transform spectrometer.
Background technology
Fourier transform spectrometer, has advantages such as high spectral resolution, high flux, hyperchannel, and influencing the greatest problem that Michelson (Michelson) interferometer uses in Fourier spectrometer is the tilt problem of plane index glass in scanning process.
Use opal mirror (cat ' s-eye retroreflector) or corner reflector (cube-corner mirrors) to replace the plane index glass can solve tilt problem well, unique shortcoming is that single cat-eye moving mirror makes or single scan angle reflecting body exist the lateral excursion problem.Another way is to use the dynamic calibration servo-drive system, but resolution is high more, and the probability of malfunction of this corrective system is just high more, and this system is very responsive to the disturbance that mechanical vibration cause.
Rotary mirror type or pendulum mirror interferometer have been eliminated the error that the plane index glass tilts to bring, and improved the stability and the reliability of instrument, but the optical path difference of its generation and corner are nonlinear relationship, only are applicable to the low-resolution spectra instrument.
Summary of the invention
The object of the present invention is to provide a kind of double-sided reflecting moving mirror interferometer, it has solved the inclination of background technology midplane index glass, single scanning opal mirror and the traversing technical matters of single scan angle reflecting body, optical path difference is 4 times of double-sided reflecting moving displacement (with respect to its zero optical path difference position), has improved precision widely with respect to Michelson interferometer in the application of Fourier transform spectrometer; Under the foozle condition identical, can obtain higher instrumental resolution with kinematic error.
Technical solution of the present invention is:
A kind of double-sided reflecting moving mirror interferometer comprises a beam splitter that is arranged on the incident beam light path; Also comprise first level crossing that is arranged on the above-mentioned beam splitter semi-reflective surface folded light beam light path and second level crossing that is arranged on the above-mentioned beam splitter semi-reflective surface transmitted light beam light path; Also comprise be arranged on the above-mentioned first flat mirror reflects beam path and the second flat mirror reflects beam path on a double-sided reflecting moving; Also comprise detector and will converge to collection mirror on the detector through the two-beam of double-sided reflecting moving reflection;
It is characterized in that:
Described double-sided reflecting moving is the plane parallel glass plate that reflectance coating is all plated on one two surface; Described double-sided reflecting moving and beam splitter semi-reflective surface are parallel to each other; Described double-sided reflecting moving is done straight reciprocating motion along the normal direction of beam splitter semi-reflective surface; Described first level crossing and second level crossing are about beam splitter semi-reflective surface symmetry; Being centered close in the same plane of described beam splitter, first level crossing, second level crossing.
Above-mentioned double-sided reflecting moving mirror interferometer can be: described beam splitter miter angle is arranged on the incident beam light path, and this beam splitter is the plane parallel glass plate of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of described first level crossing and second level crossing and beam splitter semi-reflective surface is 22.5 degree.
Above-mentioned double-sided reflecting moving mirror interferometer can be: described beam splitter is the right-angle prism of two gummeds, and the inclined-plane of right-angle prism is a cemented surface, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of described first level crossing and second level crossing and beam splitter semi-reflective surface is 22.5 degree.
Above-mentioned double-sided reflecting moving mirror interferometer can be: described beam splitter 30 degree angles are arranged on the incident beam light path, and this beam splitter is the plane parallel glass plate of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of described first level crossing and second level crossing and beam splitter semi-reflective surface is 30 degree.
Above-mentioned double-sided reflecting moving mirror interferometer can be: described beam splitter is the equilateral triangle prism of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of described first level crossing and second level crossing and beam splitter semi-reflective surface is 30 degree.
Above-mentioned collection mirror is convergent lens or convergent lens group.
The invention has the advantages that:
1. this interferometer tilts insensitively to index glass, i.e. the slight inclination of double-sided reflecting moving is very little to the degree of modulation and the phase effect of gained interferogram.
2. optical path difference is 4 times of double-sided reflecting moving displacement (with respect to its zero optical path difference position), is applicable to the high-resolution spectroscopy instrument of various SPECTRAL REGION.
This interferometer structure compactness, volume is little, cost is low.
4. beam splitter is plane parallel glass plate or the right-angle prism of two gummeds or the equilateral triangle prism of two gummeds of two gummeds, thereby has improved the mechanical stability and the thermal stability of this interferometer.
Description of drawings
Fig. 1 is a structural principle synoptic diagram of the present invention (one-piece construction of isosceles right triangle).
Fig. 2 is the plane parallel glass plate light-dividing device (miter angle is arranged on the incident beam light path) of two gummeds.
Fig. 3 is the right-angle prism light-dividing device of two gummeds.
Fig. 4 is a structural principle synoptic diagram of the present invention (one-piece construction of equilateral triangle).
Fig. 5 is the plane parallel glass plate light-dividing device (30 degree angles are arranged on the incident beam light path) of two gummeds.
Fig. 6 is the equilateral triangle Prism spectroscope of two gummeds.
Embodiment
Double-sided reflecting moving mirror interferometer comprises a beam splitter, two fixing plane mirrors (i.e. first level crossing and second level crossing) and a double-sided reflecting moving; Double-sided reflecting moving is the plane parallel glass plate that reflectance coating is all plated on one two surface; Double-sided reflecting moving and beam splitter semi-reflective surface are parallel to each other; First level crossing and second level crossing are about beam splitter semi-reflective surface symmetry; Being centered close in the same plane of beam splitter, first level crossing, second level crossing.
Embodiment 1: the beam splitter miter angle is arranged on the incident beam light path, and this beam splitter is the plane parallel glass plate of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of first level crossing and second level crossing and beam splitter semi-reflective surface is 22.5 degree.
Embodiment 2: beam splitter is the right-angle prism of two gummeds, and the inclined-plane of right-angle prism is a cemented surface, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of first level crossing and second level crossing and beam splitter semi-reflective surface is 22.5 degree.
Embodiment 3: beam splitter 30 degree angles are arranged on the incident beam light path, and this beam splitter is the plane parallel glass plate of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of first level crossing and second level crossing and beam splitter semi-reflective surface is 30 degree.
Embodiment 4: beam splitter is the equilateral triangle prism of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of first level crossing and second level crossing and beam splitter semi-reflective surface is 30 degree.
For above-mentioned any embodiment, the parallel beam of incident reflects and transmission on the semi-reflective surface of beam splitter, and being divided into two-beam I and the II that intensity equates, light beam I is successively by directive beam splitter after first level crossing, double-sided reflecting moving, first flat mirror reflects and through beam splitter; Light beam II is successively by directive beam splitter after second level crossing, double-sided reflecting moving, second flat mirror reflects and through beam splitter; This two-beam interferes when intersecting, and converges on the detector through collecting mirror.
Optical path difference between light beam I and the II is to be produced by the straight reciprocating motion of double-sided reflecting moving, and double-sided reflecting moving is done straight reciprocating motion along the normal direction of beam splitter semi-reflective surface.
When double-sided reflecting moving displacement a, two kinds of situations are arranged: a kind of situation is that the light path of light beam I has increased 2a and the light path of light beam II has reduced 2a, so the variable quantity of optical path difference is 4a between light beam I and the light beam II; Another situation is that the light path of light beam I has reduced 2a and the light path of light beam II has increased 2a, and then the variable quantity of optical path difference still is 4a between light beam I and the light beam II.Therefore, the change amount of light path difference is 4 times of double-sided reflecting moving displacement.Pass between optical path difference x and double-sided reflecting moving displacement (with respect to its zero optical path difference position) l is
x＝4l (1)
Under ideal situation (being double-sided reflecting moving does not have inclination in motion process situation), interference strength is
I(x)＝B(σ)[1+cos(2πσx)] (2)
σ is a wave number in the formula, and B (σ) is a spectral intensity, and x is an optical path difference.
Therefore the interference strength of double-sided reflecting moving mirror interferometer and the pass between the double-sided reflecting moving displacement (with respect to its zero optical path difference position) are
I(x)＝B(σ)[1+cos(8πσl)] (3)
When double-sided reflecting moving during, during with not run-off the straight of double-sided reflecting moving and the optical path difference x at optical axes crosspoint place at motion process medium dip θ angle
0Be benchmark, for square light beam aperture, the interference strength that obtains on the detector is
D is the incident beam aperture in the formula, L
1Be the optical path length from the double-sided reflecting moving to the detector on light beam I light path, L
2Be the optical path length from the double-sided reflecting moving to the detector on light beam II light path.
Claims (6)
1. a double-sided reflecting moving mirror interferometer comprises a beam splitter that is arranged on the incident beam light path; Also comprise first level crossing that is arranged on the above-mentioned beam splitter semi-reflective surface folded light beam light path and second level crossing that is arranged on the above-mentioned beam splitter semi-reflective surface transmitted light beam light path; Also comprise be arranged on the above-mentioned first flat mirror reflects beam path and the second flat mirror reflects beam path on a double-sided reflecting moving; Also comprise detector and will converge to collection mirror on the detector through the two-beam of double-sided reflecting moving reflection;
It is characterized in that:
Described double-sided reflecting moving is the plane parallel glass plate that reflectance coating is all plated on one two surface; Described double-sided reflecting moving and beam splitter semi-reflective surface are parallel to each other; Described double-sided reflecting moving is done straight reciprocating motion along the normal direction of beam splitter semi-reflective surface; Described first level crossing and second level crossing are about beam splitter semi-reflective surface symmetry; Being centered close in the same plane of described beam splitter, first level crossing, second level crossing.
2. double-sided reflecting moving mirror interferometer according to claim 1, it is characterized in that: described beam splitter miter angle is arranged on the incident beam light path, this beam splitter is the plane parallel glass plate of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of described first level crossing and second level crossing and beam splitter semi-reflective surface is 22.5 degree.
3. double-sided reflecting moving mirror interferometer according to claim 1 is characterized in that: described beam splitter is the right-angle prism of two gummeds, and the inclined-plane of right-angle prism is a cemented surface, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of described first level crossing and second level crossing and beam splitter semi-reflective surface is 22.5 degree.
4. double-sided reflecting moving mirror interferometer according to claim 1, it is characterized in that: described beam splitter 30 degree angles are arranged on the incident beam light path, this beam splitter is the plane parallel glass plate of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of described first level crossing and second level crossing and beam splitter semi-reflective surface is 30 degree.
5. double-sided reflecting moving mirror interferometer according to claim 1 is characterized in that: described beam splitter is the equilateral triangle prism of two gummeds, and a face of cemented surface is the beam splitter semi-reflective surface; The angle of described first level crossing and second level crossing and beam splitter semi-reflective surface is 30 degree.
6. according to the arbitrary described double-sided reflecting moving mirror interferometer of claim 2～5, it is characterized in that: described collection mirror is convergent lens or convergent lens group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100183524A CN101320126B (en) | 2008-06-02 | 2008-06-02 | Two-sided reflection movable mirror interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100183524A CN101320126B (en) | 2008-06-02 | 2008-06-02 | Two-sided reflection movable mirror interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101320126A true CN101320126A (en) | 2008-12-10 |
| CN101320126B CN101320126B (en) | 2010-08-04 |
Family
ID=40180274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100183524A Expired - Fee Related CN101320126B (en) | 2008-06-02 | 2008-06-02 | Two-sided reflection movable mirror interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101320126B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101806624A (en) * | 2010-03-31 | 2010-08-18 | 中国科学院西安光学精密机械研究所 | Corner reflector moving mirror interferometer |
| CN102519609A (en) * | 2011-12-13 | 2012-06-27 | 中国科学院光电研究院 | Dual-channel lateral shearing interferometer |
| CN103278809A (en) * | 2013-05-23 | 2013-09-04 | 中国科学院上海光学精密机械研究所 | Orthoptic synthesis aperture laser imaging radar single-prism rotary transmitting device |
| CN103712692A (en) * | 2013-12-31 | 2014-04-09 | 聚光科技(杭州)股份有限公司 | Spectrograph and working method |
| CN103822718A (en) * | 2014-03-10 | 2014-05-28 | 李剑平 | Scanning interferometer device for measuring imaging Fourier transform spectrum |
| CN104713649A (en) * | 2013-12-13 | 2015-06-17 | 天津同阳科技发展有限公司 | Interferometer used for spectrograph |
| CN105387935A (en) * | 2015-12-15 | 2016-03-09 | 北京雪迪龙科技股份有限公司 | Interference device and spectrometer comprising same |
| CN105571717A (en) * | 2014-10-30 | 2016-05-11 | 英飞凌科技股份有限公司 | Spectrometer, method for manufacturing a spectrometer,, and method for operating a spectrometer |
| CN106153196A (en) * | 2016-06-16 | 2016-11-23 | 电子科技大学 | Based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer |
| CN113155286A (en) * | 2021-04-12 | 2021-07-23 | 华中科技大学 | Interferometer integrated mirror and system based on MEMS micro-mirror |
| CN113349707A (en) * | 2013-12-31 | 2021-09-07 | 纪念斯隆-凯特琳癌症中心 | System, method and apparatus for real-time multi-channel imaging of fluorescence sources |
-
2008
- 2008-06-02 CN CN2008100183524A patent/CN101320126B/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101806624A (en) * | 2010-03-31 | 2010-08-18 | 中国科学院西安光学精密机械研究所 | Corner reflector moving mirror interferometer |
| CN102519609A (en) * | 2011-12-13 | 2012-06-27 | 中国科学院光电研究院 | Dual-channel lateral shearing interferometer |
| CN103278809A (en) * | 2013-05-23 | 2013-09-04 | 中国科学院上海光学精密机械研究所 | Orthoptic synthesis aperture laser imaging radar single-prism rotary transmitting device |
| CN104713649A (en) * | 2013-12-13 | 2015-06-17 | 天津同阳科技发展有限公司 | Interferometer used for spectrograph |
| CN103712692A (en) * | 2013-12-31 | 2014-04-09 | 聚光科技(杭州)股份有限公司 | Spectrograph and working method |
| CN103712692B (en) * | 2013-12-31 | 2016-04-27 | 聚光科技(杭州)股份有限公司 | Spectrometer and method of work |
| CN113349707A (en) * | 2013-12-31 | 2021-09-07 | 纪念斯隆-凯特琳癌症中心 | System, method and apparatus for real-time multi-channel imaging of fluorescence sources |
| CN103822718A (en) * | 2014-03-10 | 2014-05-28 | 李剑平 | Scanning interferometer device for measuring imaging Fourier transform spectrum |
| CN105571717B (en) * | 2014-10-30 | 2019-06-14 | 英飞凌科技股份有限公司 | The operating method of spectrometer, the manufacturing method of spectrometer and spectrometer |
| CN105571717A (en) * | 2014-10-30 | 2016-05-11 | 英飞凌科技股份有限公司 | Spectrometer, method for manufacturing a spectrometer,, and method for operating a spectrometer |
| US10247604B2 (en) | 2014-10-30 | 2019-04-02 | Infineon Technologies Ag | Spectrometer, method for manufacturing a spectrometer, and method for operating a spectrometer |
| CN105387935A (en) * | 2015-12-15 | 2016-03-09 | 北京雪迪龙科技股份有限公司 | Interference device and spectrometer comprising same |
| CN106153196A (en) * | 2016-06-16 | 2016-11-23 | 电子科技大学 | Based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer |
| CN113155286A (en) * | 2021-04-12 | 2021-07-23 | 华中科技大学 | Interferometer integrated mirror and system based on MEMS micro-mirror |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101320126B (en) | 2010-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101320126B (en) | Two-sided reflection movable mirror interferometer | |
| CN101413783B (en) | Double-frequency laser interferometry apparatus | |
| CN103267629B (en) | Point-diffraction interference wave aberration measuring instrument and measuring method thereof | |
| CN102486408B (en) | Light splitting method of multi-optical-path interferometer and multi-optical-path interferometer applying same | |
| CN101532880B (en) | Double-moving-mirror interferometer | |
| CN102759402A (en) | Rotary Fourier transform interference imaging spectrometer | |
| CN104713649B (en) | A kind of Fourier transform spectrometer, interferometer | |
| US9557221B1 (en) | Interferometer for Fourier transform infrared spectrometry | |
| CN101614523B (en) | Multi-beam long-rail interferometer for detecting grazing tubular off-axis aspheric mirror | |
| CN101566459B (en) | Dual-frequency laser interferometer | |
| CN112484647B (en) | Interferometer displacement measurement system and method | |
| CN104949630A (en) | Point diffraction interference device with adjustable large-numerical-aperture fringe contrast | |
| CN101329200A (en) | Two-way output double-corner reflection body interferometer | |
| CN101251420A (en) | Novel double-movable-mirror interferometer | |
| CN104236713A (en) | Fabry-Perot interference spectrum imaging instrument | |
| CN101369015B (en) | Light splitting apparatus of wind detection laser radar based on dual-edge detection | |
| CN117849388A (en) | LCVR-based polarization Michelson air-drying interferometer and measurement method thereof | |
| CN101793553A (en) | Double-sided reflecting movable mirror interferometer | |
| CN101806624A (en) | Corner reflector moving mirror interferometer | |
| CN201897569U (en) | Multi-optical path interferometer | |
| CN101303254A (en) | Novel double-cat eye movable lens interferometer | |
| CN115031630B (en) | Plane pose measuring device and measuring method for optical frequency comb dispersion interference | |
| CN101261159A (en) | Double cat eyes moving mirror interferometer | |
| CN114858278A (en) | Common-path large-aperture time modulation interference spectrum imaging device and method | |
| CN101290390A (en) | Double-comer reflector interferometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100804 Termination date: 20110602 |