CN106153196A - Based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer - Google Patents

Based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer Download PDF

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Publication number
CN106153196A
CN106153196A CN201610438616.6A CN201610438616A CN106153196A CN 106153196 A CN106153196 A CN 106153196A CN 201610438616 A CN201610438616 A CN 201610438616A CN 106153196 A CN106153196 A CN 106153196A
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CN
China
Prior art keywords
beam splitter
fourier transform
interferometer
light
double
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Pending
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CN201610438616.6A
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Chinese (zh)
Inventor
周俊
涂珊
饶鑫
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Priority to CN201610438616.6A priority Critical patent/CN106153196A/en
Publication of CN106153196A publication Critical patent/CN106153196A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry

Abstract

The invention discloses a kind of based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer, belong to spectral technique field.The feature of this spectrogrph is: uses the Michelson's interferometer after improving as core light line structure, eliminates horizontal glass, one side reflecting mirror change index glass into double mirror.Light is after light source sends, and collimated light path arrives beam splitter, and light beam is divided into two bundles, a branch of after beam splitter reflection, then is irradiated to the one side of double-sided reflecting moving after multiple reflections, then reflects back into beam splitter along former road;Another is restrainted after beam splitter transmission, then is irradiated to the another side of double-sided reflecting moving after multiple reflections, and then Ye Yanyuan road reflects back into beam splitter;This two-beam is formed after arriving beam splitter interferes, and interferes light to be received by detector after converging.Double-sided reflecting moving often moves a segment distance, produced optical path difference is four times of this distance, it it is the twice of conventional Fourier transform spectrogrph, in the case of keeping simple in construction and same precision, reduce the volume of Fourier transform spectrometer, shorten the time of index glass scanning, improve conventional efficient.

Description

Based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer
Technical field
The present invention relates to spectral technique field, particularly relate to a kind of based on the Fourier's change without horizontal glass Michelson's interferometer Change spectrogrph.
Background technology
Fourier Transform Spectroscopy is to utilize Fourier transform spectrometer, to gather interferogram, then interferogram is carried out Fu In leaf transformation and reducing obtain the technology of former spectrum, it is an important branch of spectroscopy, is just being widely used in material, life The every field such as thing is chemical, medical.Fourier transform spectrometer, (Fourier Transform Spectrometer, FTS) is pressed Can be divided into time-modulation type and spatial modulation type according to structure and modulation system, time-modulation type FTS is by increasing moving component Make the distance of two light path processes different or time difference used forms interference to produce optical path difference, spatial modulation type FTS It is to irradiate the point of diverse location in space by light to produce optical path difference formation interference.Compared with time-modulation type FTS, space Modulation type FTS is more stable, volume is the least, because not having sports apparatus inside it;But time-modulation type FTS typically has Higher detection signal to noise ratio and broader detective bandwidth, thus application is the most extensive.
The core of traditional time-modulation type FTS generally uses Michelson (Michelson) interferometer.Typically Fourier transform spectrometer, schematic diagram based on Michelson's interferometer is as shown in Figure 1.In existing system, horizontal glass is fixing, Index glass moves a segment distance every time, and the optical path difference of generation is 2 times of this distance, in order to obtain the measurement of high-resolution, wide-band Spectrum, the distance of index glass scanning needs the longest, and this volume resulting in this type of spectrogrph is bigger than normal, and the measurement time also compares Long.
Summary of the invention
In order to solve defect present in above-mentioned prior art, the present invention proposes a kind of based on dry without horizontal glass Michelson The Fourier transform spectrometer, of interferometer.Its core is the Michelson's interferometer without horizontal glass that present invention firstly provides, and is protecting In the case of holding same precision, index glass moves a segment distance every time, and the optical path difference of generation rises to 4 times from the 2 of this distance times, for this The miniaturized structure of class Fourier transform spectrometer, provides new way.
To achieve these goals, the present invention program is as follows:
The invention discloses a kind of based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer, belong to spectrum skill Art field.The feature of this spectrogrph is: using the Michelson's interferometer after improving as core light line structure, it is fixed to eliminate Mirror, is changed index glass into double mirror by one side reflecting mirror.Light is after light source sends, and collimated light path arrives beam splitter, light beam It is divided into two bundles, a branch of after beam splitter reflection, then after multiple reflections, it is irradiated to the one side of double-sided reflecting moving, then along former Road reflects back into beam splitter;Another is restrainted after beam splitter transmission, then is irradiated to double-sided reflecting moving another after multiple reflections Face, then Ye Yanyuan road reflects back into beam splitter;This two-beam is formed after arriving beam splitter interferes, by detecting after interfering light to converge Device receives.
Present invention have the advantage that
1, invention removes horizontal glass, use double-sided reflecting moving, the light that light source sends obtains two-beam through beam splitter, this Two-beam return after leaving beam splitter beam splitter the difference of distance of process be optical path difference, in the present invention, double-sided reflecting moves Mirror often moves a segment distance, and produced optical path difference is four times of this distance.
2, the present invention is in the case of keeping simple in construction and same precision, makes the Distance Shortened that index glass scans half, Reduce the volume of Fourier transform spectrometer,.
3, in the present invention, double-sided reflecting moving is moved to move a step and is equivalent to index glass in conventional Fourier transform spectrogrph and moves two Step, shortens the time of index glass scanning, improves conventional efficient.
4, using multiple reflecting mirror to constitute optical delay light path in the present invention, the search making zero optical path difference position is convenient fast Prompt.
5, present configuration is simple, easily operates.
Accompanying drawing explanation
Fig. 1 is traditional Fourier transform spectrometer, structural representation based on Michelson's interferometer.
Fig. 2 be the present invention based on the Fourier transform spectrometer, specific embodiments one without horizontal glass Michelson's interferometer Structural representation.
Fig. 3 be the present invention based on the Fourier transform spectrometer, specific embodiments two without horizontal glass Michelson's interferometer Structural representation.
Wherein, Fig. 1~3 includes: light source (1);Collimating lens (2);Beam splitter (3);Plane double-sided reflecting moving (4);Plus lens (5);Detector (6);Horizontal glass (7);One side reflection index glass (8), plane mirror (9)~(15);Ridge-roof type Double-sided reflecting moving (16).
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is further illustrated with, it is noted that described embodiment is only just In the understanding of the present invention, and it is not played any restriction effect.
Such as Fig. 2, in the present invention, light sends from light source (1), and collimated lens (2) arrive beam splitter (3), and light beam is by beam splitter (3) two bundles it are divided into, the most a branch of after beam splitter (3) reflects, then be irradiated to after plane mirror (9)~(11) multiple reflections The one side of plane double-sided reflecting moving (4), then reflects back into beam splitter (3) along former road;Another bundle is from beam splitter (3) transmission After, then after plane mirror (12)~(15) multiple reflections, it is irradiated to the another side of plane double-sided reflecting moving (4), then Ye Yanyuan road reflects back into beam splitter (3);This two-beam arrives beam splitter (3) and forms interference afterwards, interferes light through plus lens (5) Arrive detector (6).Wherein beam splitter (3) is a kind of semi-transparent semi-reflecting optical element, and the most not absorbing light, amplitude transmittance is about Being 50%, amplitude reflectance is also about 50%;Plane double-sided reflecting moving (4) is the light that tow sides are plane mirror Learn element, by motor control can on displacement platform way moving;The two-beam obtained by beam splitter (3) decile leaves beam splitter (3) return after beam splitter (3) the difference of distance of process be optical path difference, in the present invention, double-sided reflecting moving often moves one Segment distance, produced optical path difference is four times of this distance;The effect of plane mirror (9)~(15) is to constitute optical delay light Road, makes the length length equal to OE+EG+GH+HI+IM of OA+AB+BC+CN, and the search making zero optical path difference position is convenient and swift.
Plane double-sided reflecting moving (4) in Fig. 2 can replace to the ridge-roof type double-sided reflecting moving (16) in Fig. 3; Ridge-roof type double mirror (16) is the optical element that tow sides are ridge mirror, motor controlling can be on displacement platform Way moving.
The foregoing is only the preferred embodiments of the present invention, not in order to limit the design, all spirit in the present invention Any amendment, equivalent and improvement with being made within principle, should be included within the scope of the present invention.

Claims (4)

1., based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer, its feature is:
Use the Michelson's interferometer after improving as core light line structure, eliminate horizontal glass, by index glass by one side reflecting mirror Change double mirror into.Light sends from light source (1), and collimated lens (2) arrive beam splitter (3), and light beam is divided into by beam splitter (3) Two bundle, the most a branch of from beam splitter (3) reflect after, then be irradiated to after plane mirror (9)~(11) multiple reflections two-sided instead Penetrate the one side of index glass (4), then reflect back into beam splitter (3) along former road;Another is restrainted after beam splitter (3) transmission, then through plane Being irradiated to the another side of flat double-sided reflecting moving (4) after reflecting mirror (12)~(15) multiple reflections, then Ye Yanyuan road is reflected back To beam splitter (3);This two-beam arrives beam splitter (3) and forms interference afterwards, interferes light to arrive detector (6) through plus lens (5). Double-sided reflecting moving often moves a segment distance, and produced optical path difference is four times of this distance, is conventional Fourier transform spectrum The twice of instrument.
The most according to claim 1 based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer, its feature exists In: described core light line structure is without horizontal glass Michelson steller interferometer.
The most according to claim 1 based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer, its feature exists In: described beam splitter (3) is a kind of semi-transparent semi-reflecting optical element, the most not absorbing light, and amplitude transmittance is about 50%, amplitude Reflectance is also about 50%.
The most according to claim 1 based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer, its feature exists In: described double-sided reflecting moving (4) is the optical element that tow sides are reflecting mirror, by motor control can on displacement platform double To movement, reflecting mirror is plane mirror or ridge mirror.
CN201610438616.6A 2016-06-16 2016-06-16 Based on the Fourier transform spectrometer, without horizontal glass Michelson's interferometer Pending CN106153196A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109297600A (en) * 2018-10-22 2019-02-01 中国科学院西安光学精密机械研究所 A kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror
CN113654658A (en) * 2021-08-30 2021-11-16 中国科学院空天信息创新研究院 Parallel reflector group rotary Fourier transform infrared spectrum device
CN113853512A (en) * 2021-08-26 2021-12-28 徐州旭海光电科技有限公司 Segmented scanning Fourier transform spectrometer
CN114371128A (en) * 2022-01-13 2022-04-19 挚感(苏州)光子科技有限公司 Fourier transform spectrometer based on multilayer slab waveguide structure
CN114397017A (en) * 2021-12-17 2022-04-26 光子集成(温州)创新研究院 Moving mirror scanning device, Michelson interferometer and Fourier infrared spectrometer
CN114739512A (en) * 2022-06-13 2022-07-12 武汉大学 W-type common-path time modulation interference spectrum imaging device and method

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CN103712692A (en) * 2013-12-31 2014-04-09 聚光科技(杭州)股份有限公司 Spectrograph and working method
CN103822718A (en) * 2014-03-10 2014-05-28 李剑平 Scanning interferometer device for measuring imaging Fourier transform spectrum
CN203929229U (en) * 2014-07-01 2014-11-05 史伟立 Index glass Fourier imaging spectrometer

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JP2006300661A (en) * 2005-04-19 2006-11-02 Kobe Steel Ltd Interferometer and fourier spectral device
CN101320126A (en) * 2008-06-02 2008-12-10 杨庆华 Two-sided reflection movable mirror interferometer
CN101303254A (en) * 2008-06-30 2008-11-12 杨庆华 Novel double-cat eye movable lens interferometer
CN101329200A (en) * 2008-08-04 2008-12-24 杨庆华 Two-way output double-corner reflection body interferometer
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109297600A (en) * 2018-10-22 2019-02-01 中国科学院西安光学精密机械研究所 A kind of Fourier transformation Hyperspectral imaging devices based on high speed bireflectance tilting mirror
CN109297600B (en) * 2018-10-22 2024-04-05 中国科学院西安光学精密机械研究所 Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror
CN113853512A (en) * 2021-08-26 2021-12-28 徐州旭海光电科技有限公司 Segmented scanning Fourier transform spectrometer
CN113654658A (en) * 2021-08-30 2021-11-16 中国科学院空天信息创新研究院 Parallel reflector group rotary Fourier transform infrared spectrum device
CN113654658B (en) * 2021-08-30 2023-08-01 中国科学院空天信息创新研究院 Rotary Fourier transform infrared spectrum device of parallel reflecting mirror group
CN114397017A (en) * 2021-12-17 2022-04-26 光子集成(温州)创新研究院 Moving mirror scanning device, Michelson interferometer and Fourier infrared spectrometer
CN114397017B (en) * 2021-12-17 2024-05-03 光子集成(温州)创新研究院 Moving mirror scanning device, michelson interferometer and Fourier infrared spectrometer
CN114371128A (en) * 2022-01-13 2022-04-19 挚感(苏州)光子科技有限公司 Fourier transform spectrometer based on multilayer slab waveguide structure
CN114739512A (en) * 2022-06-13 2022-07-12 武汉大学 W-type common-path time modulation interference spectrum imaging device and method

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