CN201936073U - Dual-beam expanding homogenized parallel illumination light source - Google Patents
Dual-beam expanding homogenized parallel illumination light source Download PDFInfo
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- CN201936073U CN201936073U CN 201020675133 CN201020675133U CN201936073U CN 201936073 U CN201936073 U CN 201936073U CN 201020675133 CN201020675133 CN 201020675133 CN 201020675133 U CN201020675133 U CN 201020675133U CN 201936073 U CN201936073 U CN 201936073U
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Abstract
The utility model discloses a dual-beam expanding homogenized parallel illumination light source for detecting, measuring and imaging, which comprises a laser. The dual-beam expanding homogenized parallel illumination light source is characterized in that a concave lens, a first convex lens, a light gating diaphragm, a second convex lens, a filtering diaphragm and a third convex lens which are coaxial are sequentially arranged in the light beam output direction of the laser; the caliber of the light gating diaphragm is 1/10-1/5 of the diameter of the first convex lens; the filtering diaphragm is positioned on a confocal plane of the second convex lens and the third convex lens; and a diaphragm center of the filtering diaphragm is positioned on a common focus of the second convex lens and the third convex lens. The light source can provide light sources of parallel light for a detecting system, a measuring system, an imaging system, and the like, wherein the illumination uniformity of the light sources is greater than 95 percent and the divergence angles of the light sources are smaller than 0.01mrad. The light sources provided for the detecting system, the measuring system, the imaging system, and the like can eliminate the influence of an error of the light beam quality of the light sources on the measurement result, so that the reality and the reliability of the measurement result can be effectively ensured.
Description
Technical field
The utility model relates to two bundle homogenising directional light irradiation sources of expanding, and specifically relates to a kind of uniform directional light LASER Light Source of illumination such as detection, measurement and imaging that are applicable to.
Background technology
The uniform parallel light source of illumination all is widely used in fields such as optical detection, optical measurement, bio-medical analysis and optical imageries.Along with developing rapidly of laser technology, adopt LASER Light Source more and more to get more and more people's extensive concerning as the testing light source of optical detection, optical measurement, bio-medical analysis and optical imaging system.In recent years, both at home and abroad for how effectively utilizing laser characteristics, reasonably solving the LASER Light Source self character is becoming one of hot research problem of optical field for the research of systematic influences such as optical detection, optical measurement, bio-medical analysis and optical imagery.
Adopt laser to have characteristics such as monochromaticity, one-way and high-energy as light source, but because the characteristic of laser itself makes laser also have its intrinsic shortcoming as testing light source, it is relatively low mainly to show as the Gaussian distribution of laser output intensity and the depth of parallelism that light beam is exported.System background illumination became the non-uniform illumination of Gaussian distribution when the Gaussian distribution of output intensity made it as testing light source.In addition high accuracy analysis, detect with measure in need desirable parallel beam mostly, thereby can by analyze measured object to the influence of light beam obtain need test result, so the quality of light beam parallelism also is another key factor that influences test result.Therefore when adopting laser, how to improve light beam parallelism and make illumination patterns evenly become one of main difficult point of research laser testing light source as light source.All further investigate for the depth of parallelism that how to improve laser output beam both at home and abroad, mostly be to adopt the way of beam expander to obtain high-quality parallel beam, the distribution of light beam light intensity still had the characteristics of Gaussian distribution when but light beam parallelism improved, and also was not very good during as testing light source.And for obtaining the rarely relevant research of the uniform testing light source of the high depth of parallelism and illumination simultaneously.
The utility model content
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, and a kind of two bundle homogenising directional light irradiation sources of expanding that are used for optical detection, optical measurement, bio-medical analysis and optical imaging system are provided.This pair expanded the angle of divergence of parallel beam of bundle homogenising directional light irradiation source output less than 0.01mrad, but also filtering the high frequency parasitic light.
For achieving the above object, the utility model adopts following technical scheme:
A kind of two bundle homogenising directional light irradiation source of expanding, comprise a laser instrument, its characteristics are that its formation is the light beam outbound course at this laser instrument, be successively with optical axis concavees lens group, first convex lens, select light diaphragm, second convex lens, filtering diaphragm and the 3rd convex lens, described filtering diaphragm is positioned on the confocal plane of described second convex lens and the 3rd convex lens, and the diaphragm of described filtering diaphragm is centered close on the confocal point of described second convex lens and the 3rd convex lens.
The diameter of described first convex lens is more than ten times of diameter of the output beam of described laser instrument.
It is described that to select the diaphragm bore of light diaphragm be 1/10～1/5 of the described second convex lens diameter.
Technique effect of the present utility model is as follows:
The two expansion bundle of the utility model homogenising directional light irradiation sources are by expansion bundle, the second time are expanded bundle for the first time, diaphragm selects light, diaphragm filtering four parts to form.Laser Output Beam is earlier through expanding bundle for the first time, improve for the first time the depth of parallelism of output beam, expanding bundle for the first time is made up of two lens, laser beam forms the diverging light light beam by a concavees lens group earlier, divergent beams are through passing through first convex lens behind the certain distance, what the diameter of this convex lens group will surpass the direct output beam diameter of laser instrument expands light beam behind the bundle so that receive through first concavees lens more than ten times, behind first convex lens, form the parallel beam that diameter amplifies ten times, according to the optical analysis theory as can be known, the depth of parallelism of the direct output beam of the relative laser instrument of the depth of parallelism of the parallel beam that forms once more behind the process expansion first time bundle has improved ten times.Improved through the light beam parallelism that expands for the first time behind the bundle, but light distribution still becomes Gaussian distribution, for the unevenness of the light distribution that changes light beam, the utility model adopts and selects the light diaphragm to select the way of light.Specifically be to be provided with one on through the beam direction after once expanding the bundle part to select the light diaphragm, this selects the light diaphragm only to make the core of whole light beam by the diaphragm window, owing to select the light action that blocks of light diaphragm, the highest and light beam that the illumination uniformity coefficient reaches 85% or more of light intensity is exported by selecting behind the light diaphragm.After once expanding bundle and selecting the light diaphragm, output illumination uniformity coefficient reaches more than 85% and light beam parallelism improves ten times.
Select the little and illumination uniformity coefficient of beam diameter behind the light can't satisfy the requirement of high precision measurement or imaging source through expanding for the first time bundle, diaphragm.Therefore, system adopts and to expand that Shu Zaici improves light beam parallelism and illumination uniformity improves the anti-veiling glare interference capability of system in conjunction with the diaphragm filter action simultaneously for the second time.Specifically: process is selected the output beam behind the light diaphragm to enter to expand for the second time and is restrainted, the further light beam parallelism that improves when the expanded light beam diameter improves the illumination uniformity coefficient.Expanding the bundle part for the second time is made up of second convex lens and the 3rd convex lens, light beam focuses on earlier through second convex lens that expand for the second time in the bundle part, light beam forms divergent beams once more after overfocus, divergent beams form parallel beam through the distance back with second convex lens coupling once more by the 3rd convex lens, expanding bundle part back light beam through secondary amplifies more than 50 times once more, light beam parallelism is owing to improved 50 times again, and illumination uniformity further is enhanced simultaneously, can reach more than 95%.The general direct output beam angle of divergence of laser instrument is 1～5mrad, has improved more than 500 times through light beam parallelism behind two beam-expanding systems, and beam divergence angle reaches below the 0.01mrad.Simultaneously for reducing the influence of parasitic light to beam quality, system adopts filtering diaphragm filtering filtering parasitic light, specifically is aperture to be set form low pass filter filters out high frequency parasitic light on the focal position on the common focal plane of secondary expansion bundle described second convex lens of part and the 3rd convex lens.
In sum, the utility model is 1～5mrad with the direct output beam angle of divergence of laser instrument light beam parallelism improves more than 500 times that beam divergence angle reaches below the 0.01mrad, but also filtering the high frequency parasitic light.
Description of drawings
Fig. 1 is the two index paths that expand bundle homogenising directional light irradiation source of the utility model
Fig. 2 is that the two bundle homogenising directional light irradiation sources of expanding of the utility model are used for the imaging system index path that perfect light source is tested
Embodiment
Below in conjunction with drawings and Examples the utility model is elaborated, but should not limit protection domain of the present utility model with this.
See also Fig. 1 earlier, Fig. 1 is two index paths of restrainting homogenising directional light irradiation source that expand, and as seen from the figure, restraint by once expanding in the utility model pair expansion bundle homogenising directional light irradiation source, the secondary expansion is restrainted, diaphragm selects light, diaphragm filtering four parts to form.Fig. 1 also is the two structural representations that expand bundle homogenising directional light irradiation source embodiment of the utility model.
The two bundle homogenising directional light irradiation source embodiment that expand of the utility model, comprise a laser instrument 7, characteristics are that its formation is the light beam outbound course at this laser instrument 7, be successively with optical axis concavees lens 6, first convex lens 5, select light diaphragm 4, second convex lens 3, filtering diaphragm 2 and the 3rd convex lens 1, described filtering diaphragm 2 is positioned on the confocal plane of described second convex lens 3 and the 3rd convex lens 1, and the diaphragm of described filtering diaphragm is centered close on the confocal point of described second convex lens and the 3rd convex lens.The diameter of described first convex lens 5 is more than ten times of diameter of the output beam of described laser instrument 7.1/3 of the diameter that the described diaphragm bore that selects light diaphragm 4 is described first convex lens 5.
Among Fig. 1, the laser instrument 7 output angles of divergence are radiated at after 1～5mrad light intensity becomes the laser beam process of Gaussian distribution to expand the output of bundle part expansion bundle for the first time and select on the light diaphragm 4, once expanding the bundle part is made up of the concavees lens 6 and first convex lens 5, laser instrument 7 output beams expand through concavees lens 6 earlier restraints into divergent beams, is radiated at and selects on the light diaphragm 4 through pooling parallel beam through the first convex lens group 5 again behind the certain distance.Be radiated at the beam expander that selects on the light diaphragm 4 10 times through once expanding bundle, the depth of parallelism has improved 10 times, and light distribution becomes Gaussian distribution.Light beam is through after selecting light diaphragm 4, and light beam has been selected the core that expands bundle back light beam, and outgoing beam light distribution homogeneity improves, and illumination uniformity reaches more than 85%.
The depth of parallelism has improved 10 times and illumination uniformity and has reached parallel beam more than 85% through after selecting light diaphragm 4, enters secondary and expands the bundle part.Secondary expands the bundle part and is made up of second convex lens 3 and the 3rd convex lens 1.Process is dispersed output after selecting the light beam of light diaphragm 4 to focus on through second convex lens 3 earlier again, makes the light beam secondary expand bundle and exports.Divergent beams pool parallel beam output through the distance back with second convex lens, 3 couplings once more by the 3rd convex lens 1, the light beam parallelism that expands after restrainting through secondary improves more than 50 times once more, in conjunction with the effect of once expanding the bundle part, the depth of parallelism through the relative laser instrument 7 direct output beams of the parallel beam depth of parallelism of the 3rd convex lens 1 output has improved more than 500 times, when the laser instrument 7 direct output beam angles of divergence are 1～5mrad, be about 0.002～0.01mrad through the output beam angle of divergence of the 3rd convex lens 1.The light beam light distribution of expanding after restrainting through secondary simultaneously is further improved, and the illumination uniformity coefficient reaches more than 95%.Expand in the bundle part at secondary, for the anti-veiling glare interference performance of raising system, on the focus that second convex lens, 3 back light beams compile filtering diaphragm 2 is set, filtering diaphragm 2 plays the effect of low pass spatial filter, and effectively filtering spatial high-frequency parasitic light is to the interference of system.
Optical detection, optical measurement, bio-medical analysis and optical imaging system all need to obtain test result by analyzing testee for the influence of standard sources, also need when therefore obtaining desirable standard sources the result who adopts perfect light source to test is carried out the imaging check.
As the standard sources of systems such as detection, measurement and imaging, the acquisition of final testing result all needs by analyzing acquisition after the imaging system imaging.This imaging system partly realizes imaging to measured result by light path spectroscopic imaging altogether.This imaging system structure as shown in Figure 2, expand between second convex lens 3 of bundle part and the 3rd convex lens 1 at secondary spectroscope 10 is set, the folded light beam that will have testee reflexes to imaging optical path, behind spectroscope 10 reflection beam splittings, through imaging lens 9 test result is imaged on the imaging surface of photodetector 8 again as light beam.The common light path spectroscopic imaging system that employing is made up of testee 11, spectroscope 10, imaging lens 9 and photodetector 8 realizes the imaging of test result.Specific implementation is: be radiated on the testee 11 through the standard parallel beam of two beam-expanding systems from 1 output of the 3rd convex lens, after light beam reflects through testee 11, the reflected light that has testee 11 information is total to returning through entering imaging lens 9 and photodetector 8 after described spectroscope 10 reflections of light path through the 3rd convex lens 1 and illuminating bundle, and wherein spectroscope 10 is coated with the semi-transparent semi-reflecting rete to the optical maser wavelength correspondence.Through being imaged on the described photodetector 8 through imaging lens 9 of described spectroscope 10 reflections by photometry.The true reflection of the testee information after the imaging results on the photodetector 8 is almost to have eliminated all beam quality errors.
Claims (3)
1. homogenising directional light irradiations source is restrainted in two expansions, comprise a laser instrument (7), be characterised in that its formation is the light beam outbound course at this laser instrument (7), be successively with optical axis concavees lens (6), first convex lens (5), select light diaphragm (4), second convex lens (3), filtering diaphragm (2) and the 3rd convex lens (1), described filtering diaphragm (2) is positioned on the confocal plane of described second convex lens (3) and the 3rd convex lens (1), and the diaphragm of described filtering diaphragm is centered close on the confocal point of described second convex lens and the 3rd convex lens.
2. two bundle homogenising directional light irradiation source of expanding according to claim 1, the diameter that it is characterized in that described first convex lens (5) is more than ten times of output beam diameter of described laser instrument (7).
3. two bundle homogenising directional light irradiations source of expanding according to claim 1 is characterized in that described to select the diaphragm bore of light diaphragm (4) be 1/10～1/5 of described first convex lens (3) diameter.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201020675133 CN201936073U (en) | 2010-12-23 | 2010-12-23 | Dual-beam expanding homogenized parallel illumination light source |
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| CN 201020675133 CN201936073U (en) | 2010-12-23 | 2010-12-23 | Dual-beam expanding homogenized parallel illumination light source |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102121664A (en) * | 2010-12-23 | 2011-07-13 | 成都太科光电技术有限责任公司 | Double beam expanding uniform parallel illumination light source |
| CN102380712A (en) * | 2011-10-31 | 2012-03-21 | 东莞宏威数码机械有限公司 | Multistage homenergic light splitting system |
| CN109521580A (en) * | 2018-11-27 | 2019-03-26 | 中国科学院上海光学精密机械研究所 | Multilayer imaging device and imaging method based on vortex photon screen telescopic system |
| CN110286492A (en) * | 2019-07-09 | 2019-09-27 | 合肥工业大学 | A kind of interferometer large-aperture optical beam expander |
-
2010
- 2010-12-23 CN CN 201020675133 patent/CN201936073U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102121664A (en) * | 2010-12-23 | 2011-07-13 | 成都太科光电技术有限责任公司 | Double beam expanding uniform parallel illumination light source |
| CN102121664B (en) * | 2010-12-23 | 2012-12-26 | 成都太科光电技术有限责任公司 | Double beam expanding uniform parallel illumination light source |
| CN102380712A (en) * | 2011-10-31 | 2012-03-21 | 东莞宏威数码机械有限公司 | Multistage homenergic light splitting system |
| CN109521580A (en) * | 2018-11-27 | 2019-03-26 | 中国科学院上海光学精密机械研究所 | Multilayer imaging device and imaging method based on vortex photon screen telescopic system |
| CN110286492A (en) * | 2019-07-09 | 2019-09-27 | 合肥工业大学 | A kind of interferometer large-aperture optical beam expander |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110817 Termination date: 20111223 |