CN110286492A - A kind of interferometer large-aperture optical beam expander - Google Patents
A kind of interferometer large-aperture optical beam expander Download PDFInfo
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- CN110286492A CN110286492A CN201910616570.6A CN201910616570A CN110286492A CN 110286492 A CN110286492 A CN 110286492A CN 201910616570 A CN201910616570 A CN 201910616570A CN 110286492 A CN110286492 A CN 110286492A
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- interferometer
- light
- lens
- camera lens
- connecting cylinder
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Abstract
The invention discloses a kind of interferometer large-aperture optical beam expanders, it is characterized in that: using the output light of interferometer as light source, the structure type that beam expander is arranged is: F3 camera lens is arranged in the optical output port of interferometer, the output light of interferometer is first point light source through F3 lens focus, point light source is diverging light by the light hole outgoing in diaphragm, diverging light is heavy caliber collimated light beam through object lens output, and interferometer, F3 camera lens, the optical axis of diaphragm and object lens are coaxial；Object lens are plano-convex non-spherical lens.The present invention is easy to that adjustment, cost of implementation is low, it is good to expand effect, job stability is high, and the 9mm directional light exported for realizing 4D interferometer 6100 expands as 100mm directional light.
Description
Technical field
The invention belongs to optical, mechanical and electronic integration apparatus fields, expand more particularly to a kind of interferometer large-aperture optical
Beam device.
Background technique
Interferometer large-aperture optical beam expander is to be expanded using the output light of interferometer as light source as larger clear aperture
Directional light, effect be expanded light beam diameter, compression light beam space divergence angle, improve beam collimation, be widely used in illumination,
Imaging and some optical detections on, generally required in some occasions using bore for 100mm directional light as detect light source；It is existing
9mm directional light in technology for the existing output of 4D interferometer 6100 in the market is expanded by following several forms:
1, reflective optic beam-expanding system is set, bore expanding greater than 200mm is usually used in, without color difference, but it is tied
Structure is complicated；The eyepiece of reflective beam expander is known as secondary mirror, and object lens are known as primary mirror.It is parabolic that its mirror surface type, which generally selects primary mirror,
Face, secondary mirror are also paraboloid；Due to its primary mirror and secondary mirror be it is aspherical, processing and resetting difficulty it is larger.
2, be arranged refractive optical beam-expanding system, processing and resetting difficulty it is relatively small, no system is blocked, technology at
Ripe, debugging is convenient, is usually used in bore expanding less than 200mm, but has biggish aberration when its refraction, leads to that image quality is imaged
Difference.
Summary of the invention
The present invention is to provide one kind to avoid above-mentioned deficiency of the prior art and be easy to that adjustment, cost of implementation are low, expand
The interferometer large-aperture optical beam expander that Shu Xiaoguo is good, job stability is high, the 9mm exported for realizing 4D interferometer 6100 are flat
Row light expands as 100mm directional light.
The present invention adopts the following technical scheme that in order to solve the technical problem
Interferometer large-aperture optical beam expander of the present invention is structurally characterized in that: using the output light of interferometer as light source, if
The structure type for setting beam expander is: F3 camera lens is arranged in the optical output port of the interferometer, the output light of interferometer is first
It is point light source through F3 lens focus, the point light source is diverging light by the light hole outgoing in diaphragm, and the diverging light is through object
Mirror output is heavy caliber collimated light beam, and the interferometer, F3 camera lens, the optical axis of diaphragm and object lens are coaxial；The object lens are plano-convex
Non-spherical lens.
The design feature of interferometer large-aperture optical beam expander of the present invention is lain also in: the interferometer is 4DPhaseCam
6100 interferometers export 9mm directional light, optical maser wavelength 633nm；The clear aperture of the F3 camera lens is 9mm, and focal length is
27mm；The heavy caliber collimated light beam is the collimated light beam of 100mm.
The design feature of interferometer large-aperture optical beam expander of the present invention is lain also in: the tube structure of beam expander is arranged are as follows:
The F3 camera lens is arranged in the chamber cylinder of connecting cylinder, and can move axially in the chamber cylinder of connecting cylinder, and diaphragm is mounted on the company
On the front end face of connect cylinder；The connecting cylinder is fixedly connected with body tube by transition rings, and the connecting cylinder coexists with body tube same
On shaft position, the object lens are fitted in the outlet end of body tube using pressing ring and cover board.
The design feature of interferometer large-aperture optical beam expander of the present invention is lain also in: extending one in the tail portion of the connecting cylinder
Section adjusts sleeve, adjusts the built-in adjusting inner cylinder being slidably matched, the adjusting inner cylinder in sleeve and is fixedly connected with F3 camera lens；Institute
The external setting adjusting handle for adjusting sleeve is stated, the inner sidewall of the adjusting handle is set as spiral slide；In the adjusting
The pillar radially protruded out is fixedly installed on the barrel of cylinder, the pillar runs through the axial direction for being arranged in and adjusting on sleeve corresponding position
Long hole top extends in the spiral slide of adjusting handle, is slidably matched with the spiral slide；It rotates adjusting handle and passes through pillar band
Dynamic adjusting inner cylinder and F3 camera lens move axially in connecting cylinder, realize the adjustment of distance between F3 camera lens and diaphragm.
The design feature of interferometer large-aperture optical beam expander of the present invention is lain also in: the transition rings are in front end and body tube
Rear end internal screw thread be connected, transition rings are fixedly connected using screw with connecting cylinder in rear end；In the side wall of the transition rings
Screw hole symmetrically is offered, utilizes center of the jackscrew fine tuning F3 camera lens being screwed onto the screw hole in connecting cylinder.
The design feature of interferometer large-aperture optical beam expander of the present invention is lain also in: the F3 camera lens is from left to right followed successively by
First spherical lens, the second spherical lens and third spherical lens.
Compared with the prior art, the invention has the advantages that:
1, structure of the invention is reasonable, is easy to adjustment, and cost of implementation is low；
2, the present invention can correct system aberration, improve systemic resolution, it is good to expand effect；
3, job stability of the present invention is high, practical, is able to carry out batch production.
Detailed description of the invention
Fig. 1 is present system structural schematic diagram；
Fig. 2 is adjustment structure partial enlarged view in the present invention；
Fig. 3 is light path schematic diagram in the present invention；
Fig. 4 is the encirclement circle energy curve figure of optical beam-expanding system in the present invention；
Fig. 5 is the point range figure of optical beam-expanding system in the present invention；
Fig. 6 is the wave aberration figure of optical beam-expanding system in the present invention；
Figure label: 1 interferometer, connect cylinder after 2,3 connecting cylinders, 3a adjust sleeve, 4 transition rings, 5 body tubes, 6 pressing rings, 7 lids
Plate, 8 object lens, 9 retaining rings, 10 pillars, 11 adjust inner cylinders, 12 adjusting handles, 13 screws, 14 jackscrews, 15 be F3 camera lens, 16 first
Spherical lens, 17 second spherical lenses, 18 third spherical lenses, 19 diaphragms, 20 support rods, 21 pedestals, supporting leg knob 22, branch
Support leg cover board 23, studdle 24, supporting leg seat 25.
Specific embodiment
Referring to Fig. 1, in the present embodiment interferometer large-aperture optical beam expander be using the output light of interferometer 1 as light source,
The structure type that beam expander is arranged is: F3 camera lens 15 is arranged in the optical output port of interferometer 1, the output light of interferometer 1 is first
It first is focused to point light source through F3 camera lens 15, point light source is diverging light by the light hole outgoing in diaphragm 19, and diverging light is through object lens 8
Output is heavy caliber collimated light beam, wherein interferometer 1, F3 camera lens 15, the optical axis of diaphragm 19 and object lens 8 are coaxial；Object lens 8 are flat
Convex aspheric surface lens refer to that its one side is plane, and another side is ellipsoid, i.e. plano-convex ellipsoid object lens, is convenient for aberration correction.
In the present embodiment, interferometer 1 is 6100 interferometer of 4DPhaseCam, exports 9mm directional light, and optical maser wavelength is
633nm；The clear aperture of F3 camera lens 15 is 9mm, focal length 27mm；Heavy caliber collimated light beam is the collimated light beam of 100mm.
In specific implementation, the tube structure of beam expander is set are as follows: F3 camera lens 15 is arranged in the chamber cylinder of connecting cylinder 3, and energy
It is moved axially in the chamber cylinder of connecting cylinder 3, diaphragm 19 is mounted on the front end face of connecting cylinder 3, and the light hole in diaphragm 19 is cone
Shape mouth, cone mouth are in light incidence side；Connecting cylinder 3 is fixedly connected with body tube 5, connecting cylinder 3 and body tube by transition rings 4
On coaxial position, body tube 5 is provided with step in object lens 8 at one end for 5 coexistences, and object lens 8 is made to match with its step internal diameter,
Object lens 8 are fitted in the outlet end of body tube 5 using pressing ring 6 and cover board 7.
As shown in Figure 1, extending one section of adjusting sleeve 3a in the tail portion of connecting cylinder 3, built-in in sleeve 3a be slidably matched is adjusted
Adjusting inner cylinder 11, adjust inner cylinder 11 be fixedly connected with F3 camera lens 15；Adjusting handle 12 is set adjusting the external of sleeve 3a, is adjusted
The inner sidewall of section handwheel 12 is set as spiral slide；On the barrel for adjusting inner cylinder 11 radially by screw connection fixed setting
The pillar 10 protruded out, the axial long hole top that pillar 10 runs through on the corresponding position for being arranged in and adjusting sleeve 3a extend to adjusting handle 12
Spiral slide in, be slidably matched with spiral slide；Adjusting handle 12 obtains axial limiting, pillar in the outside for adjusting sleeve 3a
10 are limited in a circumferential direction in the axial long hole for adjusting sleeve, and pillar can be passed through by rotating adjusting handle 12 as a result,
10 drive adjusting inner cylinder 11 and F3 camera lens 15 to move axially in connecting cylinder 3, realize the tune of distance between F3 camera lens 15 and diaphragm 19
It is whole.It is to be meshed with pillar 10 with adjusting handle 12 in the present embodiment, the fine tuning in the axial direction of composition F3 camera lens 15
Structure.
In the present embodiment, transition rings 4 are connected in front end with the rear end internal screw thread of body tube 5, and transition rings 4 are utilized in rear end
Screw 13 is fixedly connected with connecting cylinder 3；Screw hole is symmetrically offered in the side wall of transition rings 4, utilizes the top being screwed onto screw hole
Silk 14 finely tunes center of the F3 camera lens 15 in connecting cylinder 3, to eliminate processing and installation error；In specific implementation, also wrap
The connect cylinder 2 after the setting of the tail portion of connecting cylinder 3 is included, compression ring 9 is screwed onto the tail portion outer ring of connecting cylinder 3, and the side of compression ring 9 is close
Contact adjusting handle 12, connect cylinder 2 after the other side is in close contact.
Referring to fig. 2, F3 camera lens 15 is from left to right followed successively by the first spherical lens 16, the second spherical lens 17 in the present embodiment
With third spherical lens 18；Wherein, the first spherical lens 16 is spherical convex lens, is in laser light incident side；Second spherical surface is saturating
Mirror 17 is spherical meniscus；Third spherical lens 18 is spherical plano-concave lens, 19 side of diaphragm is in, using three pieces
Preferably convergence acts on lens forming.
As practical system is suitable for, the support construction being accordingly arranged includes support rod 20 and pedestal 21, on body tube 5
Screw hole is set, is fixedly connected on the top of support rod 20 with body tube 5 using screw, the bottom end of support rod 20 is mounted on pedestal 21
On, convenient for placing；Pedestal 21 is three leg support constructions, and wherein the top surface of supporting leg seat 25 is circular groove, studdle 24
Bottom bulb is placed in the circular groove of supporting leg seat 25, on the bottom bulb of 23 gland studdle 24 of supporting leg cover board,
And be fixedly connected with supporting leg cover board 23 with supporting leg seat 25 using screw, guarantee that vertical direction does not shake；In studdle 24
Rod segment be set with supporting leg knob 22, open up side screw hole in 22 side of supporting leg knob, screw passes through side screw hole and is butted on branch
Screw rod 24 is supportted, guarantees that horizontal direction is stablized；The upper section of studdle 24 is thread segment, for being spirally connected fixation with pedestal 21.
It is realized for the present invention using Zemax optical design software, obtains the packet of optical beam-expanding system shown in Fig. 4
Enclose round energy curve figure, the wave picture of the point range figure of optical beam-expanding system shown in fig. 5 and optical beam-expanding system shown in fig. 6
Difference figure, input are the collimated light beam of Φ 9mm, and wavelength 633mm exports as Φ 100mm directional light.Visible its of Fig. 4 has connect
The nearly ceiling capacity limit, the visible point range figure of Fig. 5 is in the ring of Ruili, and Rms radius is 0.511 μm, and imaging facula radius is less than Ruili
Ring radius, system reach diffraction limit；Optical system distortion PV shown in fig. 6 is 0.0773waves；Wavefront distortion RMS=
0.021waves is better than λ/40, and imaging results correct aberration well, and system results are fine.
Claims (6)
1. a kind of interferometer large-aperture optical beam expander, it is characterized in that: setting is expanded using the output light of interferometer (1) as light source
The structure type of beam device is: F3 camera lens (15) is arranged in the optical output port of the interferometer (1), the output of interferometer (1)
Light is focused to point light source through F3 camera lens (15) first, and the point light source is diverging light by the light hole outgoing in diaphragm (19),
The diverging light is heavy caliber collimated light beam, the interferometer (1), F3 camera lens (15), diaphragm (19) and object through object lens (8) output
The optical axis of mirror (8) is coaxial；The object lens (8) are plano-convex non-spherical lens.
2. interferometer large-aperture optical beam expander according to claim 1, it is characterized in that: the interferometer (1) is
6100 interferometer of 4DPhaseCam exports 9mm directional light, optical maser wavelength 633nm；The light admission port of the F3 camera lens (15)
Diameter is 9mm, focal length 27mm；The heavy caliber collimated light beam is the collimated light beam of 100mm.
3. interferometer large-aperture optical beam expander according to claim 1, it is characterized in that: the tube structure of setting beam expander
Are as follows: the F3 camera lens (15) is arranged in the chamber cylinder of connecting cylinder (3), and can move axially in the chamber cylinder of connecting cylinder (3), diaphragm
(19) it is mounted on the front end face of the connecting cylinder (3)；The connecting cylinder (3) is fixedly connected with body tube by transition rings (4)
(5), the connecting cylinder (3) and body tube (5) coexist on coaxial position, and the object lens (8) utilize pressing ring (6) and cover board (7)
It is fitted in the outlet end of body tube (5).
4. interferometer large-aperture optical beam expander according to claim 3, it is characterized in that: the tail in the connecting cylinder (3)
Portion extends one section of adjusting sleeve, adjusts the built-in adjusting inner cylinder (11) being slidably matched, the adjusting inner cylinder (11) and F3 in sleeve
Camera lens (15) is fixedly connected；In external setting adjusting handle (12) for adjusting sleeve, the inner sidewall of the adjusting handle is set
It is set to spiral slide；The pillar (10) radially protruded out, the pillar is fixedly installed on the barrel for adjusting inner cylinder (11)
(10) it is extended in the spiral slide of adjusting handle (12) through the axial long hole top being arranged on adjusting sleeve corresponding position, with institute
Spiral slide is stated to be slidably matched；Rotation adjusting handle (12) drives adjusting inner cylinder (11) and F3 camera lens (15) to exist by pillar (10)
Axial movement in connecting cylinder (3), realizes the adjustment of distance between F3 camera lens (15) and diaphragm (19).
5. interferometer large-aperture optical beam expander according to claim 1, it is characterized in that: the transition rings (4) are in front end
It is connected with the rear end internal screw thread of body tube (5), transition rings (4) are fixedly connected using screw (13) with connecting cylinder (3) in rear end；
Screw hole is symmetrically offered in the side wall of the transition rings (4), finely tunes F3 mirror using the jackscrew (14) being screwed onto the screw hole
Center of the head (15) in connecting cylinder (3).
6. interferometer large-aperture optical beam expander according to claim 1, it is characterized in that: the F3 camera lens (15) from a left side to
The right side is followed successively by the first spherical lens (16), the second spherical lens (17) and third spherical lens (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910616570.6A CN110286492A (en) | 2019-07-09 | 2019-07-09 | A kind of interferometer large-aperture optical beam expander |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910616570.6A CN110286492A (en) | 2019-07-09 | 2019-07-09 | A kind of interferometer large-aperture optical beam expander |
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| CN110286492A true CN110286492A (en) | 2019-09-27 |
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| CN201910616570.6A Pending CN110286492A (en) | 2019-07-09 | 2019-07-09 | A kind of interferometer large-aperture optical beam expander |
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| CN109633915A (en) * | 2018-12-25 | 2019-04-16 | 南京航空航天大学 | A kind of automatic zoom laser beam expanding lens of hollow Driven by Ultrasonic Motors |
| CN210427914U (en) * | 2019-08-27 | 2020-04-28 | 南京英田光学工程股份有限公司 | Supporting device for optical lens |
| CN111781721A (en) * | 2020-08-11 | 2020-10-16 | 中国科学院长春光学精密机械与物理研究所 | Movable assembling and adjusting system for meter-grade caliber optical lens supporting device |
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| EP2275222A1 (en) * | 2006-07-14 | 2011-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatuses and methods using a beam expander with two lenses, the position of the latter with respect to the laser oscillator governed by an equation |
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Application publication date: 20190927 |
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