CN201637492U - Laser wavelength measuring device based on synthetic wavelength - Google Patents

Laser wavelength measuring device based on synthetic wavelength Download PDF

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Publication number
CN201637492U
CN201637492U CN2010201511393U CN201020151139U CN201637492U CN 201637492 U CN201637492 U CN 201637492U CN 2010201511393 U CN2010201511393 U CN 2010201511393U CN 201020151139 U CN201020151139 U CN 201020151139U CN 201637492 U CN201637492 U CN 201637492U
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China
Prior art keywords
wavelength
laser
light
synthetic
measured
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Expired - Lifetime
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CN2010201511393U
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Chinese (zh)
Inventor
陈本永
严利平
杨涛
李超荣
唐为华
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Zhejiang Sci Tech University ZSTU
Zhejiang University of Science and Technology ZUST
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Zhejiang Sci Tech University ZSTU
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Abstract

The utility model discloses a laser wavelength measuring device based on synthetic wavelength. A laser device with higher wavelength stability is adopted as a reference laser device, and after the light beam of the reference laser device and the light beam of a laser device to be measured are modulated into orthogonal polarized light, the polarized light enters the same Michelson interferometer to respectively form respective interference signals. When a measurement arm in the Michelson interferometer moves, the phase relation of reference light and light to be measured can be changed; when the phase difference of the two interference signals is changed by 2phi, the displacement which is half the synthetic wavelength formed by the reference light and the light to be measured is generated relative to the measurement arm. A synthetic wavelength value can be measured through detecting the zero crossing positions of the two interference signals simultaneously two times, and the wavelength value of the laser to be measured can be obtained according to the relation between the wavelength of the laser to be measured as well as the wavelength of the reference laser and the synthetic wavelength. The laser wavelength measuring device has stronger environmental anti-interference capability and low cost and is easy to realize practicability, and the wavelength measurement precision can reach more than 10-8.

Description

A kind of laser wavelength measurement device based on synthetic wavelength
Technical field
The utility model relates to laser wavelength measurement method and device, especially relates to a kind of laser wavelength measurement device based on synthetic wavelength.
Background technology
In laser technology research and application, the exact value of optical maser wavelength is a very important parameter.In the dimensional measurement technical field, adopt laser instrument as geometric senses such as coherent source Displacement Measurement, speed, angle, flatness and linearitys in large quantities, therefore accurately the wavelength of detection laser is the key that guarantees these geometric measurement accuracys and magnitude tracing.In field of spectroscopy, be tuned to the wavelength that needs to tunable laser, also essential a kind of precision, laser wavelength measurement device fast.In the opctical frequency standard research field, also be essential to the wavelength of opctical frequency standard itself or the measurement of frequency values in addition, the exact value of opctical frequency standard wavelength or frequency is to guarantee other meterings key of accuracy as a result.
At present, the method that adopts interference technique to carry out laser wavelength measurement both at home and abroad mainly contains Fabry-Perot interference type, Fizeau interference type and Michelson interfere type.Fabry-Perot wavemeter is that the phenomenon of utilizing light beam to produce multiple-beam interference during with the certain glass plate of high reflectance, spacing by two platings is carried out the measurement of testing laser wavelength, and measuring accuracy can reach 10 -7, but it is narrower to measure wavelength coverage.Striking rope wavemeter is a kind of film two-beam interference, its former and later two reflectings surface returned two-beam after incident light entered etalon, and generation interference fringe, finally can record the incident light wavelength by receiving plane light distribution and order of interference, measuring accuracy is subjected to optical device performance, mechanical vibration and influence of temperature change bigger.The Michelson wavemeter is recently to try to achieve light wavelength to be measured, i.e. N by what calculate reference light and Light Interference Streaks number to be measured R/ N UU/ λ R(wherein, N RBe the number of interference fringes of reference laser, N UBe the number of interference fringes of testing laser, λ UBe the wavelength of testing laser, λ RWavelength for reference laser), this method can reach 10 -7~10 -8Measuring accuracy, but in order to improve measuring accuracy, the method that must increase the count value of interference fringe or adopt stripe subdividing is to measure the fraction part of striped, this can make the measuring system complex structure, and the cost height.
Summary of the invention
Need high-precision wavelength at technical fields such as precision measurement, laser spectrum and opctical frequency standard researchs, a kind of laser wavelength measurement device based on synthetic wavelength of providing is provided the purpose of this utility model, is to realize measurement to optical maser wavelength to be measured by detecting composite wave long value that reference laser wavelength and testing laser wavelength form.
The technical scheme that its technical matters that solves the utility model adopts is:
One, a kind of laser wavelength measurement method based on synthetic wavelength:
The light beam of reference laser diode and testing laser device becomes orhtogonal linear polarizaiton light behind analyzer separately, incide Michelson interferometer, and the interference signal that forms is separately received by two detectors respectively; When the gage beam in the Michelson interferometer moves, the phase relation of reference light and interference of light signal to be measured will change; When this two-way interference signal phase differential changes 2 π, the displacement of moving half synthetic wavelength corresponding to gage beam; Therefore, by detecting the position of zero crossing simultaneously, just can record the composite wave long value, according to the testing laser wavelength X twice of this two-way interference signal UWith the reference laser wavelength X RWith synthetic wavelength λ SBetween relation, the wavelength that can obtain testing laser is:
λ U = λ S λ R λ S ± λ R .
Two, a kind of laser wavelength measurement device based on synthetic wavelength:
The light beam of reference laser diode output becomes the linearly polarized light λ that is parallel to paper be parallel to first analyzer of paper through the direction of shaking thoroughly after R, directive first polarization spectroscope; The light beam of testing laser device output becomes the linearly polarized light λ perpendicular to paper after through second analyzer of direction perpendicular to paper that shake thoroughly U, directive first polarization spectroscope after mirror reflects; Linearly polarized light λ RSee through behind first polarization spectroscope and linearly polarized light λ UAfter the first polarization spectro mirror reflection, synthetic a branch of orhtogonal linear polarizaiton light, incide the Michelson interferometer of forming by spectroscope, first prism of corner cube and second prism of corner cube, form interference signal separately, after the second polarization spectroscope beam split, receive by first detector and second detector respectively; Just the composite wave long value can be recorded by detecting twice while of two-way interference signal zero crossing position,, the wavelength value of testing laser can be obtained according to the relation between testing laser wavelength and reference laser wavelength and the synthetic wavelength.
The beneficial effect that the utlity model has is:
(1) measurement of testing laser wavelength is converted to the measurement of the gage beam moving displacement (being synthetic wavelength) that is easy to detect, rather than witness mark laser λ RNumber of interference fringes and testing laser λ UThe ratio of number of interference fringes, this method are easy to realize.
(2) light beam to be measured and reference beam are followed common light path principle, can suppress the influence of environmental factor to measurement result, have stronger environment interference, and therefore, the measuring accuracy height can reach 10 -8More than.
(3) simple in structure, low-cost and be easy to practicability.
Description of drawings
Fig. 1 is based on the laser wavelength measurement schematic diagram of synthetic wavelength.
Fig. 2 is λ RWith λ UThe interference signal phase differential and the second prism of corner cube moving displacement concern synoptic diagram.
Among the figure: 1. reference laser diode, 2. first analyzer, 3. testing laser device, 4. second analyzer, 5. catoptron, 6. first polarization spectroscope, 7. first prism of corner cube, 8. spectroscope, 9. second prism of corner cube, 10. second polarization spectroscope, 11. first detectors, 12. second detectors, V (λ R) expression reference laser diode the interference signal waveform, V (λ U) the interference signal waveform of expression testing laser device.
Embodiment
Based on the laser wavelength measurement method and the device of synthetic wavelength, as shown in Figure 1, the light beam of reference laser diode 1 output becomes the linearly polarized light λ that is parallel to paper be parallel to first analyzer 2 of paper through the direction of shaking thoroughly after R, directive first polarization spectroscope 6; The light beam of testing laser device 3 output becomes the linearly polarized light λ perpendicular to paper after through second analyzer 4 of direction perpendicular to paper that shake thoroughly U, directive first polarization spectroscope 6 after catoptron 5 reflections; Linearly polarized light λ RSee through first polarization spectroscope, 6 back and linearly polarized light λ UAfter 6 reflections of first polarization spectroscope, synthetic a branch of orhtogonal linear polarizaiton light, incide the Michelson interferometer of forming by spectroscope 8, first prism of corner cube 7 and second prism of corner cube 9, form interference signal separately, after 10 beam split of second polarization spectroscope, receive by first detector 11 and second detector 12 respectively; Just the composite wave long value can be recorded by detecting twice while of two-way interference signal zero crossing position,, the wavelength value of testing laser can be obtained according to the relation between testing laser wavelength and reference laser wavelength and the synthetic wavelength.
Note L 0Be the path difference of reference path in the Michelson interferometer and measurement light path, the phase differential of the interference signal of two detector receptions is respectively
Can get by above two formulas:
λ in the formula SBe reference light λ RWith treat photometry λ UThe synthetic wavelength that forms:
λ S = λ R λ U | λ R - λ U | - - - ( 4 )
When second prism of corner cube 9 is the gage beam moving displacement L=λ of Michelson interferometer S/ 2 o'clock, formula (3) became:
That is:
Formula (3) and (5) show: two-way interference signal phase differential changes 2 π corresponding to second prism of corner cube, 9 moving displacement L=λ S/ 2, can try to achieve the value of synthetic wavelength in view of the above:
λ S=2·L (6)
The concrete enforcement of following formula is: reference light λ RWith treat photometry λ UThe interference signal phase differential and the variation relation between the moving displacement of second prism of corner cube 9 as shown in Figure 2, suppose that second prism of corner cube 9 begins to move initial phase difference from the A point Be λ RAnd λ UInterference signal is zero passage simultaneously, two-way interference signal while zero passage once more when second prism of corner cube 9 arrives B points, phase differential Be 0 once more, this moment, the variation of two-way interference signal phase differential was 2 π just, and the displacement that second prism of corner cube 9 moves between A point and B point is λ S/ 2.Therefore, by detecting the position of twice while of two-way interference signal zero crossing, can draw synthetic wavelength λ SValue, i.e. formula (6).
The wavelength that can get the testing laser device according to formula (4) is:
λ U = λ S λ R λ S ± λ R - - - ( 7 )
The λ that formula (6) is obtained SWavelength X with known reference laser diode RSubstitution formula (7) just can be obtained the wavelength of testing laser device.
So far finish the utility model.

Claims (1)

1. laser wavelength measurement device based on synthetic wavelength is characterized in that: the light beam of reference laser diode (1) output becomes the linearly polarized light λ that is parallel to paper be parallel to first analyzer (2) of paper through the direction of shaking thoroughly after R, directive first polarization spectroscope (6); The light beam of testing laser device (3) output becomes the linearly polarized light λ perpendicular to paper after through second analyzer (4) of direction perpendicular to paper that shake thoroughly U, directive first polarization spectroscope (6) after catoptron (5) reflection; Linearly polarized light λ RSee through first polarization spectroscope (6) back and linearly polarized light λ UAfter first polarization spectroscope (6) reflection, synthetic a branch of orhtogonal linear polarizaiton light, incide the Michelson interferometer of forming by spectroscope (8), first prism of corner cube (7) and second prism of corner cube (9), form interference signal separately, after second polarization spectroscope (10) beam split, receive by first detector (11) and second detector (12) respectively; Just the composite wave long value can be recorded by detecting twice while of two-way interference signal zero crossing position,, the wavelength value of testing laser can be obtained according to the relation between testing laser wavelength and reference laser wavelength and the synthetic wavelength.
CN2010201511393U 2010-04-02 2010-04-02 Laser wavelength measuring device based on synthetic wavelength Expired - Lifetime CN201637492U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101832821A (en) * 2010-04-02 2010-09-15 浙江理工大学 Method and device for measuring laser wavelength based on bound wavelength
CN103076304A (en) * 2013-01-05 2013-05-01 浙江理工大学 Modulation type laser interference method and device for measuring air refractive index
CN104483022A (en) * 2014-11-25 2015-04-01 北京工业大学 Fourier conversion spectrum instrument based on Michelson interferometer of equivalent intersecting mirror

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101832821A (en) * 2010-04-02 2010-09-15 浙江理工大学 Method and device for measuring laser wavelength based on bound wavelength
CN101832821B (en) * 2010-04-02 2011-07-20 浙江理工大学 Method and device for measuring laser wavelength based on bound wavelength
CN103076304A (en) * 2013-01-05 2013-05-01 浙江理工大学 Modulation type laser interference method and device for measuring air refractive index
CN103076304B (en) * 2013-01-05 2015-01-14 浙江理工大学 Modulation type laser interference method and device for measuring air refractive index
CN104483022A (en) * 2014-11-25 2015-04-01 北京工业大学 Fourier conversion spectrum instrument based on Michelson interferometer of equivalent intersecting mirror

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Granted publication date: 20101117

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