CN201173901Y - Optical glass uniformity testing device - Google Patents
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- CN201173901Y CN201173901Y CNU2008200563764U CN200820056376U CN201173901Y CN 201173901 Y CN201173901 Y CN 201173901Y CN U2008200563764 U CNU2008200563764 U CN U2008200563764U CN 200820056376 U CN200820056376 U CN 200820056376U CN 201173901 Y CN201173901 Y CN 201173901Y
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- 239000005304 optical glass Substances 0.000 title claims abstract description 72
- 238000012360 testing method Methods 0.000 title claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 62
- 239000012530 fluid Substances 0.000 claims abstract description 38
- 239000010438 granite Substances 0.000 claims abstract description 21
- 238000009434 installation Methods 0.000 claims description 18
- 238000012545 processing Methods 0.000 claims description 18
- 238000003384 imaging method Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000002156 mixing Methods 0.000 claims description 6
- 238000010079 rubber tapping Methods 0.000 claims description 4
- 241000931526 Acer campestre Species 0.000 claims description 3
- 239000003350 kerosene Substances 0.000 claims description 3
- 238000002310 reflectometry Methods 0.000 claims description 3
- JHJLBTNAGRQEKS-UHFFFAOYSA-M sodium bromide Chemical compound [Na+].[Br-] JHJLBTNAGRQEKS-UHFFFAOYSA-M 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 10
- 238000007781 pre-processing Methods 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 230000001427 coherent effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000012956 testing procedure Methods 0.000 description 3
- PXFBZOLANLWPMH-UHFFFAOYSA-N 16-Epiaffinine Natural products C1C(C2=CC=CC=C2N2)=C2C(=O)CC2C(=CC)CN(C)C1C2CO PXFBZOLANLWPMH-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 101100327165 Arabidopsis thaliana CCD8 gene Proteins 0.000 description 1
- 238000011000 absolute method Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000013100 final test Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000016507 interphase Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model provides an optical glass homogeneity testing arrangement, the device includes interferometer data acquisition system and treats optical glass allotment system, interferometer and data acquisition system, by the laser instrument, the beam splitter, expand beam objective, formation of image objective, CCD camera and image acquisition processor constitute, the optical glass allotment system that awaits measuring, including a cistern, place the layer board in proper order in this cistern, the granite is dull and stereotyped, lifting net and the optical glass that awaits measuring, this cistern is equipped with flowing back valve and annotates the liquid valve, it has refractive index matching liquid to be equipped with in it, this cistern passes through the pipeline, annotates the liquid valve and communicates with each other with the fluid reservoir that contains refractive index matching liquid, the cistern arrange in on the slope guiding mechanism, this slope guiding mechanism arranges in on the anti-vibration platform. The utility model discloses the homogeneity of optical glass that can the direct measurement surface not carry out preprocessing is the absolute measurement of optical glass refracting index homogeneity, and this testing arrangement can reach 4 x 10－7And (4) precision.
Description
Technical field
The utility model relates to optical glass, and particularly a kind of optical glass homogeneity proving installation is particularly useful for the uniformity test of large scale high-precision optical glass material.
Background technology
The macro-energy, the device of high power laser development that are used for laser constraint fusion in recent years are swift and violent, and as the NIF of the U.S. and " the refreshing light " of China, these laser aids need a large amount of large scale (diagonal line 0.5～1m) plane class transmission laser optical elements.Laser system to the requirement of the transmitted wave surface error of this class optical element generally in 0.25～0.1 λ (P-V value).Process so high optical element of precision, it is very high on the one hand the optical homogeneity of material to be claimed, because thickness is the glass material of 40mm, and local indexes of refraction 10
-6The variation of magnitude, the distortion that its single transmitted light wave causes just reach 0.1 λ (n gets 1.53, and λ gets 0.633 μ m); On the other hand under the situation that the homogeneity of glass is determined, obtain the optical element that whole transmission corrugated meets the demands if can measure the way that inhomogeneity distribution situation just can take to process compensation in optics processing, this is particularly important in the processing of large scale laser plane optical element.
Guo Peiji, people such as Yu Jingchi have developed the high-precision optical glass optics uniformity measurement instrument (" laser magazine " 2004 the 25th the 3rd phases of volume) that adopts laser interferometer.The homogeneity test device synoptic diagram of this optical glass is seen Fig. 1.It is to obtain the inhomogeneity absolute measured value of sample by four pacing metering methods, sees Fig. 2.
In known as depicted in figs. 1 and 2 optical glass homogeneity proving installation and method of testing: by laser instrument 1 emitted laser bundle through eliminating coherence and link such as illumination shaping etc., through beam splitter 2, expand through beam-expanding system 3 again and restraint to the required beam size of workpiece, parallel beam is through standard flat mirror 4 afterwards, road light beam through the reflection of standard flat mirror 4 rear surfaces returns, another road light beam continues to arrive back mirror 6 by measured workpiece 5 and returns afterwards, and the two-way light beam successively produces interference fringe again by beam splitter 2 on the image planes of image-forming objective lens 7 at CCD8.Interference fringe is carried out analytical calculation by image acquisition in computing machine 9 systems.The interferogram that proving installation that Fig. 1 describes is gathered has not only comprised the inhomogeneity information of measured workpiece, and has comprised the error of front and rear surfaces of error, the front and back index plane sum of errors workpiece itself of system.Step 1 among Fig. 2, the back index plane reflection reference wave of standard flat mirror 4-1 and the front surface 5-1 reflection wave coherent imaging data acquisition of measured workpiece are M
1(x, y); Step 2, the back index plane 4-1 reflection reference wave of standard flat mirror and the rear surface 5-2 reflection wave coherent imaging data acquisition of measured workpiece are M
2(x, y); Step 3, the reflection wave coherent imaging data acquisition of passing through measured workpiece after the back index plane 4-1 reflection reference wave of standard flat mirror and the back reflection minute surface 6-1 reflection again is M
3(x, y); Step 4, it is M that the back index plane 4-1 reflection reference wave of standard flat mirror directly reflects by the coherent imaging data acquisition with back reflection minute surface 6-1
4(x, y); Can solve the inhomogeneity absolute data of refractive index of measured workpiece by four step mensurations shown in Figure 2:
Δn(x，y)＝{(n
0-1)〔M
1(x，y)-M
2(x，y)〕+n0〔M
3(x，y)-M
4(x，y)〕}/2t
(the absolute measurement technology of optical glass optical homogeneity, " laser magazine " 2003 the 24th the 3rd phases of volume).
Though said method is a kind of absolute measuring method, need error by the introducing of above-mentioned four step removal systems, each measurement all needs to obtain the interference fringe of certain precision, and not so introducing the margin of error can be very big.And described four pacing amounts are to finish in the different time periods, because the error that the air turbulence of mistiming introducing and air-flow cause can not weed out.Measured workpiece still needs to be worked into certain surface figure accuracy.
Summary of the invention
In order more accurately and easily to measure the homogeneity of optical glass, the purpose of this utility model is to provide a kind of optical glass homogeneity proving installation, and this device directly surface measurements does not carry out the homogeneity of the optical glass of preprocessing.
Technical solution of the present utility model is:
A kind of proving installation of optical glass homogeneity is characterized in comprising: interferometer and data acquisition system (DAS) and test macro
Interferometer and data acquisition system (DAS), form by laser instrument, beam splitter, expansion bundle object lens, image-forming objective lens, CCD camera and image acquisition and processing device, its position relation is: the laser that laser instrument sends sees through the optical glass to be measured that beam splitter irradiation after expanding bundle object lens beam-expanding collimation places liquid bath, this expansion bundle object lens are collected folded light beam by described liquid bath direction again behind beam splitter reflection, by the image-forming objective lens imaging by described CCD camera shooting and send the image acquisition and processing device to;
Optical glass mixing system to be measured, comprise a liquid bath, in this liquid bath, put supporting plate, granite surface plate, lifting net and optical glass to be measured successively, this liquid bath is provided with tapping valve and liquid-filling valve, index-matching fluid is housed in it, this liquid bath communicates by pipeline, liquid-filling valve and the flow container that fills index-matching fluid, and described liquid bath places on the tilt adjusting mechanism, and this tilt adjusting mechanism places on the vibrationproof platform.
Described interferometer and data acquisition system adopted fixing vertical are installed on relatively independent space, and described image acquisition and processing device is independent of a test room.
The distance of the high liquid level (HLL) of the index-matching fluid in the front surface of described expansion bundle object lens and the described liquid bath is 30～80cm.
The P-V value of the face shape of described granite surface plate upper surface is λ/10, and is coated with and increases reverse, and this reflectivity that increases anti-film is 40%～70%, and λ is the optical maser wavelength of laser instrument.
Described supporting plate is the plate that has many concentric grooves.
Described index-matching fluid is with α bromo sodium and kerosene configuration, and is identical with the refractive index of optical glass to be measured.
Utilize the proving installation machine of above-mentioned optical glass homogeneity to carry out the inhomogeneity method of testing of glass, comprise the following steps:
1. open liquid-filling valve with the index-matching fluid that configures in flow container injection liquid bath slowly, the amount of liquid that injects is wanted can submergence optical glass to be measured, liquid level is with held stationary and level under the gravity of the earth, the face shape of this liquid level is labeled as A (x, y), the face shape of the standard reflection face of granite surface plate is labeled as B (x, y), start, the CCD camera of laser interferometer and image acquisition and processing device are gathered by the wavefront of liquid level reflection with by liquid level and by the coherent imaging of the wavefront of the standard reflection face reflection of granite surface plate, and at this moment detected phase of wave difference is labeled as H
1(x, y):
H
1(x，y)＝2A(x，y)+2n
0B(x，y) (1)，
In the formula: n
0Be the refractive index of optical glass to be measured, x and y are the position coordinateses of optical glass to be measured;
2. utilize the lifting net with optical glass to be measured putting into liquid bath and optical glass to be measured is immersed by the index-matching fluid of liquid bath fully slowly, the CCD camera of laser interferometer and image acquisition and processing device are gathered by the wavefront of liquid level reflection and the wave-front coherence imaging that sees through behind liquid level and the optical glass to be measured again by the standard reflection face reflection of granite surface plate, and at this moment the phase of wave difference of Jian Ceing is labeled as H
2(x, y):
H
2(x，y)＝2A(x，y)+2tΔn(x，y)+2n
0B(x，y) (2)；
3. the image acquisition and processing device carries out data processing, deducts (1) formula by (2) formula, obtains the homogeneity image of optical glass to be measured
Δn(x，y)＝{H
2(x，y)-H
1(x，y)}/2t。
From as can be seen above-mentioned, the homogeneity image of optical glass to be measured does not only comprise the face shape error of optical glass to be measured, the face shape error that does not also comprise the standard reflection face of granite surface plate in system and the device, so the utility model also is the inhomogeneity absolute method of measurement of a kind of glass optics on principle.
Index-matching fluid in the described liquid bath satisfies h
1+ h
2=h,
Wherein: h when not putting into optical glass to be measured, the distance of index-matching fluid liquid level and granite surface plate upper surface; After putting into optical glass to be measured, h
1Be distance between the standard reflection face of the bottom surface of optical glass to be measured and granite surface plate, h
2Be distance between optical glass end face to be measured and the index-matching fluid liquid level.
Because it is affine that index-matching fluid can be good at optical glass surface to be measured, so also can not detect even do not carry out precise polished " hair side " glass.By tilting to modulate mechanism can adjust the interference fringe on the image planes when detecting density, to obtain optimum precision.
The utility model optical glass homogeneity proving installation comprises interferometer and data acquisition system (DAS) and optical glass mixing system to be measured.The utility model mainly improves: interferometer and data acquisition system adopted Feisuo type commercial lasers flat interferometer or its bundled software of shearing interferometer level also expand bundle.Optical glass mixing system to be measured: adopt grouan material processing criterion catoptron (thermal expansivity is low, corrosion-resistant), adopt index-matching fluid with optical glass to be measured.Granite surface plate is placed in the liquid bath of band tilt adjusting mechanism, can circulate fluid injection and control liquid level of liquid bath.Adopt net to realize the lifting of measured workpiece.Therefore technique effect of the present utility model is:
1, just can realize inhomogeneity absolute measurement by two testing procedures;
2, do not need that glass to be measured is carried out preprocessing and just can directly detect homogeneity;
3, reduced quality requirements to the standard reflection face;
4, the liquid level that uses index-matching fluid saves the preceding dressing plate of interferometer test as the reference reflecting surface, saves manufacturing cost;
5, reduce the influence of air-distribution inequality and disturbance.
Description of drawings
The utility model is described in further detail below in conjunction with drawings and Examples, but should not limit protection domain of the present utility model with this.
Fig. 1 is the uniformity test instrument principle schematic of existing optical glass.
Fig. 2 is the testing procedure synoptic diagram of Fig. 1 optical glass homogeneity tester.
Fig. 3 is the utility model optical glass homogeneity proving installation synoptic diagram.
Fig. 4 is the testing procedure synoptic diagram of the utility model optical glass homogeneity proving installation.
Fig. 5 is that supporting plate launches synoptic diagram among Fig. 3.
Fig. 6 is the expansion synoptic diagram of lifting net among Fig. 3.
Embodiment
See also Fig. 3 earlier, Fig. 3 is the utility model optical glass homogeneity proving installation synoptic diagram.As seen from the figure, the proving installation of the utility model optical glass homogeneity comprises:
Interferometer and data acquisition system (DAS) 31, by laser instrument 31-1, beam splitter 31-2, expand bundle object lens 31-3, image-forming objective lens 31-4, CCD camera 31-5 and image acquisition and processing device 31-6 form, its position relation is: the laser that laser instrument 31-1 sends sees through the optical glass to be measured 33 that beam splitter 31-2 irradiation after expanding bundle object lens 31-3 beam-expanding collimation places liquid bath 32-1, this expansion bundle object lens 31-3 collects folded light beam by described liquid bath 32-1 direction again after beam splitter 31-2 reflection, by image-forming objective lens 31-4 imaging by described CCD camera 31-5 shooting and send image acquisition and processing device 31-6 to;
Optical glass mixing system 32 to be measured, comprise a liquid bath 32-1, in this liquid bath 32-1, put supporting plate 32-9, granite surface plate 32-2, lifting net 32-6 and optical glass to be measured 33 successively, this liquid bath 32-1 is provided with tapping valve 32-8 and liquid-filling valve 32-7, index-matching fluid 32-5 is housed in it, this liquid bath 32-1 communicates by pipeline, liquid-filling valve 32-7 and the flow container 32-4 that fills index-matching fluid, described liquid bath 32-1 places on the tilt adjusting mechanism 32-3, and this tilt adjusting mechanism 32-3 places on the vibrationproof platform 34.
Described interferometer and data acquisition system (DAS) 31 adopt fixing vertical to be installed on relatively independent space, to improve system stability.Described image acquisition and processing device 31-6 is independent of a test room, thermal source and the air-flow of avoiding human body to introduce in test process.Described optical glass mixing system to be measured 32 leans on vibrationproof platform 34 and add the vibrationproof ground in the test room and keeps stable.
The distance of the high liquid level (HLL) of the index-matching fluid 32-5 in the front surface of described expansion bundle object lens 31-3 and the described liquid bath 32-1 is 30～80cm, and the oversize test process of distance is subjected to the influence of air-flow just serious more.
The P-V value of the face shape of described granite surface plate 32-2 upper surface is λ/10, and is coated with and increases reverse, and this reflectivity that increases anti-film is 40%～70%, and λ is the optical maser wavelength of laser instrument 31-1.
Granite surface plate 32-2 is placed on the deformation quantity that can reduce granite surface plate on the supporting plate 32-9.Described supporting plate 32-9 is the plate (see figure 5) that has many concentric grooves.
Carry out fluid injection and discharge opeing and control the index-matching fluid liquid level by flow container 32-5 and liquid-filling valve 32-7, tapping valve 32-8, in the fluid injection process, will slowly inject and avoid occurring bubble.
Described index-matching fluid 32-5 is with α bromo sodium and kerosene preparation, and is identical with the refractive index of optical glass to be measured.When measuring the workpiece of unified refractive index, index-matching fluid can recycle in certain sense cycle.
Be a concrete test implementation example below, referring to Fig. 4:
Step 2 is put into optical glass 33 to be measured, and the index-matching fluid of annotating again rises liquid level and complete submergence optical glass 33 to be measured, and the spacing h between optical glass to be measured 33 bottom surfaces and the granite surface plate 32-2 upper surface
1, the spacing h between optical glass 33 end faces to be measured and the index-matching fluid liquid level
2, satisfy h
1+ h
2=h (make liquid postcondition identical) to reduce measuring error.Treat index-matching fluid fully and surface of the work begin to test for the second time after affine and stable.Light beam arrives the index-matching fluid liquid level still by matching fluid index-matching fluid 32-5 liquid level antireflection part light (light beam 1 among Fig. 4 '), remaining light will arrive the dull and stereotyped 32-2 upper surface of granite and be reflected (light beam 2 among Fig. 4 ') with optical glass 33 to be measured (because refractive index is identical, light beam does not produce reflection and refraction on the interphase of optical glass 33 to be measured and index-matching fluid liquid) through index-matching fluid.Light beam 1 ' and light beam 2 ' generations coherent imaging on CCD, gather also recorded and stored by image acquisition and processor 31-6, write down phase of wave difference information H at this moment
2(x, y).
Δn(x，y)＝{H
2(x，y)-H
1(x，y)}/2t。
Precision and error analysis: though light beam 1 and light beam 1 in the actual measurement ' same characterize is A (x before the reflection wave of matching fluid 32-5 liquid level, y), under steady stationary state is the radius-of-curvature of the earth, is equivalent to the face shape error of 0.03 λ approximately, (λ=0.6328 μ m).Though this error is not included in the test error yet,, actual air-flow is different with ambient condition during twice measurement, this influence is superimposed upon in the final test error, this can introduce uncertain error when measuring, therefore, the measurement of two steps should keep the unanimity of environmental baseline in test.The main cause that influences precision also comprises and the stochastic error of interferometer system is generally less than λ/30 with the interferometer stochastic error, therefore for thick be sample about 40mm thickness, accuracy of detection can reach 4 * 10
-7
Claims (6)
1, a kind of proving installation of optical glass homogeneity is characterized in that comprising:
Interferometer and data acquisition system (DAS) (31), by laser instrument (31-1), beam splitter (31-2), expand bundle object lens (31-3), image-forming objective lens (31-4), CCD camera (31-5) and image acquisition and processing device (31-6) are formed, its position relation is: the laser that laser instrument (31-1) sends sees through the optical glass to be measured (33) that beam splitter (31-2) irradiation after expanding bundle object lens (31-3) beam-expanding collimation places liquid bath (32-1), this expansion bundle object lens (31-3) are collected folded light beam by described liquid bath (32-1) direction again after beam splitter (31-2) reflection, are made a video recording by described CCD camera (31-5) and are sent to image acquisition and processing device (31-6) by image-forming objective lens (31-4) imaging;
Optical glass mixing system to be measured (32), comprise a liquid bath (32-1), in this liquid bath (32-1), put supporting plate (32-9) successively, granite surface plate (32-2), lifting net (32-6) and optical glass to be measured (33), this liquid bath (32-1) is provided with tapping valve (32-8) and liquid-filling valve (32-7), index-matching fluid (32-5) is housed in it, this liquid bath (32-1) passes through pipeline, liquid-filling valve (32-7) communicates with the flow container that fills index-matching fluid (32-5) (32-4), described liquid bath (32-1) places on the tilt adjusting mechanism (32-3), and this tilt adjusting mechanism (32-3) places on the vibrationproof worktable (34).
2, the proving installation of optical glass homogeneity according to claim 1, it is characterized in that described interferometer and data acquisition system (DAS) (31) adopt fixing vertical to be installed on relatively independent space, described image acquisition and processing device (31-6) is independent of a test room.
3, the proving installation of optical glass homogeneity according to claim 1 is characterized in that the distance of the high liquid level (HLL) of index-matching fluid (32-5) in the front surface of described expansion bundle object lens (31-3) and the described liquid bath (32-1) is 30～80cm.
4, the proving installation of optical glass homogeneity according to claim 1, the P-V value that it is characterized in that the face shape of described granite surface plate (32-2) upper surface is λ/10, and be coated with and increase reverse, this reflectivity that increases anti-film is 40%～70%, λ is the optical maser wavelength of laser instrument (31-1).
5, the proving installation of optical glass homogeneity according to claim 1 is characterized in that described supporting plate (32-9) is the plate that has many concentric grooves.
6, according to the proving installation of each described optical glass homogeneity of claim 1 to 5, it is characterized in that described index-matching fluid with α bromo sodium and kerosene configuration, identical with the refractive index of optical glass to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200563764U CN201173901Y (en) | 2008-03-19 | 2008-03-19 | Optical glass uniformity testing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200563764U CN201173901Y (en) | 2008-03-19 | 2008-03-19 | Optical glass uniformity testing device |
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ID=40201029
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101251497B (en) * | 2008-03-19 | 2011-04-06 | 中国科学院上海光学精密机械研究所 | Optical glass uniformity testing device and testing method thereof |
| CN105092530A (en) * | 2015-05-21 | 2015-11-25 | 南京理工大学 | Parallel flat crystal optical inhomogeneity absolute measurement method |
| CN109406106A (en) * | 2018-10-19 | 2019-03-01 | 中国兵器工业标准化研究所 | The evaluation method of optical material index of refraction homogeneity |
| CN111044263A (en) * | 2019-12-31 | 2020-04-21 | 北京灵犀微光科技有限公司 | Optical element testing device |
-
2008
- 2008-03-19 CN CNU2008200563764U patent/CN201173901Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101251497B (en) * | 2008-03-19 | 2011-04-06 | 中国科学院上海光学精密机械研究所 | Optical glass uniformity testing device and testing method thereof |
| CN105092530A (en) * | 2015-05-21 | 2015-11-25 | 南京理工大学 | Parallel flat crystal optical inhomogeneity absolute measurement method |
| CN105092530B (en) * | 2015-05-21 | 2018-01-05 | 南京理工大学 | The absolute method of measurement of optical parallel optical heterogeneity |
| CN109406106A (en) * | 2018-10-19 | 2019-03-01 | 中国兵器工业标准化研究所 | The evaluation method of optical material index of refraction homogeneity |
| CN109406106B (en) * | 2018-10-19 | 2020-06-30 | 中国兵器工业标准化研究所 | Method for evaluating uniformity of refractive index of optical material |
| CN111044263A (en) * | 2019-12-31 | 2020-04-21 | 北京灵犀微光科技有限公司 | Optical element testing device |
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