CN105092530A - Parallel flat crystal optical inhomogeneity absolute measurement method - Google Patents
Parallel flat crystal optical inhomogeneity absolute measurement method Download PDFInfo
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Abstract
The invention discloses a parallel flat crystal optical inhomogeneity absolute measurement method. The method comprises the following steps: carrying out primary interference measurement on the working face of a first transmission reference flat crystal and a front surface of a to-be-measured parallel flat crystal; placing a reflective reference flat crystal behind the to-be-measured parallel flat crystal, and carrying out primary interference measurement on the working face of the first transmission reference flat crystal and the working face of the reflective reference flat crystal; carrying out primary interference measurement on the working face of the first transmission reference flat crystal and the rear surface of the to-be-measured parallel flat crystal; carrying out primary cavity interference measurement on the working face of the first transmission reference flat crystal and the working surface of the reflective reference flat crystal; replacing the first transmission reference flat crystal with a second transmission reference flat crystal, and carrying out primary interference measurement on the working face of the second transmission reference flat crystal and the working face of the first transmission reference flat crystal; carrying out primary interference measurement on the working face of the second transmission reference flat crystal and the working face of the reflective reference flat crystal; and synthesizing measurement results, to obtain the optical inhomogeneity of the to-be-measured parallel flat crystal. The method is simple, feasible, accurate and efficient, and the measured object is not restricted by the parallel degree of the front surface and the rear surface.
Description
Technical field
The invention belongs to interference of light metering field, particularly a kind of absolute method of measurement of optical parallel optical heterogeneity.
Background technology
Optical transmission material is the important component part of optical material, optical heterogeneity as the important indicator evaluating optical transmission material property, reflection be the inconsistency of same optical material inner refractive index.The refractive index of optical material inside is inconsistent, will directly cause the change of transmission wavefront, and then changes the wave aberration of optical system.Under normal circumstances, 10
-6the optical heterogeneity of magnitude, can introduce the wave aberration of wavelength magnitude, therefore has great importance to the heteropical high precision test of optical element optical.
Domestic and international expert has carried out large quantifier elimination to the detection method of optical heterogeneity.Mainly contain and post plate mensuration, four step interferometries, short coherent light interferometry and wavelength tuning Fourier analysis mensuration.Post the detection that plate mensuration carries out optical heterogeneity, need glass optical flat that increase by two pieces of refractive indexes are identical with measured piece as posting plate, optical flat surface surface figure accuracy requires to be better than λ/10, and the heterogeneity of index liquid used also can affect measuring accuracy simultaneously; Four step interferometries carry out the detection of optical heterogeneity, require that the angle of wedge of glass plate to be measured controls between 2 ~ 66 jiaos points, can not test by the optical parallel very high to the front and rear surfaces depth of parallelism; Short Coherence Interferometry solves the heteropical problem of the good planar optics of the high-acruracy survey front and rear surfaces depth of parallelism, but measuring accuracy is subject to the impact of light source spectrum width; Wavelength tuning Fourier analysis mensuration can pass through twice measurement, obtain optical parallel front and rear surfaces face shape and material homogeneity information, but instrument must adopt can the semiconductor laser of fine adjustment wavelength as light source, and need special process software, cannot be used widely.
Summary of the invention
The object of the present invention is to provide the absolute method of measurement of the optical parallel optical heterogeneity of high, the easy realization of a kind of precision, make measurement result not be subject to the impact of transmission reference optical flat face shape and non-reflective reference optical flat surface figure accuracy, measuring object is by the restriction of the front and rear surfaces depth of parallelism.
The technical solution realizing the object of the invention is: a kind of absolute method of measurement of optical parallel optical heterogeneity, comprises the following steps:
Step 1, sets up coordinate system, and with the optical axis transmit direction of striking rope type laser interferometer for z-axis, vertical ground direction is y-axis, and x-axis, y-axis, z-axis form the right-handed coordinate system of thumb along optical axis direction; Adopt striking rope type laser interferometer to the first transmission reference optical flat T
1workplace A and optical parallel S front surface B to be measured carries out an interferometry and obtains result M
1;
Step 2, along optical axis direction, places non-reflective reference optical flat R after optical parallel S to be measured, carries out an interferometry, obtain the transmissive measurement M of optical parallel S to be measured to the first transmission reference optical flat T1 workplace A and non-reflective reference optical flat R workplace D
2;
Step 3, revolves turnback by optical parallel S to be measured around y-axis, to the first transmission reference optical flat T
1workplace A and optical parallel S rear surface C to be measured carries out an interferometry and obtains result M
3, by measurement result M
3carry out mirror image reversal along y-axis to obtain
Step 4, takes optical parallel S to be measured away, to the first transmission reference optical flat T
1workplace A and non-reflective reference optical flat R workplace D carries out a cavity interferometry and obtains result M
4;
Step 5, with the second transmission reference optical flat T
2replace the first transmission reference optical flat T
1, the second transmission reference optical flat T
2as interferometer reference mirror, by the first transmission reference optical flat T
1turnback is revolved, to the second transmission reference optical flat T around y-axis
2workplace E and the first transmission reference optical flat T
1workplace A carries out an interferometry and obtains result M
5;
Step 6, to the second transmission reference optical flat T
2workplace E and non-reflective reference optical flat R workplace D carries out an interferometry and obtains result M
6;
Step 7, the measurement result of combining step 1 ~ 6, obtains the optical heterogeneity Δ n of optical parallel S to be measured.
Compared with prior art, its remarkable advantage is in the present invention: (1) measurement result is not subject to the impact of transmission reference optical flat face shape and non-reflective reference optical flat surface figure accuracy, and measuring accuracy is high; (2) measuring object is not by the restriction of the front and rear surfaces depth of parallelism, easily realizes; (3) measuring process is easy, measures structure simple.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of reference frame of the present invention.
Fig. 2 is the first transmission reference optical flat T
1workplace A and optical parallel S front surface B interferometry schematic diagram to be measured.
Fig. 3 is the transmission measurement schematic diagram of optical parallel S to be measured.
Fig. 4 is the first transmission reference optical flat T
1workplace A and C interferometry schematic diagram in optical parallel S rear surface to be measured.
Fig. 5 is the schematic diagram of cavity interferometry.
Fig. 6 is the second transmission reference optical flat T
2workplace E and the first transmission reference optical flat T
1workplace A interferometry schematic diagram.
Fig. 7 is the second transmission reference optical flat T
2workplace E and non-reflective reference optical flat R workplace D interferometry schematic diagram.
Embodiment
Composition graphs 1, measuring processes all in the present invention is all carried out under the reference frame shown in Fig. 1.Set up coordinate system, with the optical axis transmit direction of striking rope type laser interferometer for z-axis, vertical ground direction is y-axis, and x-axis, y-axis, z-axis form the right-handed coordinate system of thumb along optical axis direction.
Composition graphs 2 ~ Fig. 7, the method for optical parallel optical heterogeneity of the present invention absolute measurement, comprises following steps:
Step 1, as shown in Figure 2, adopts striking rope type laser interferometer to the first transmission reference optical flat T
1workplace A and optical parallel S front surface B to be measured carries out an interferometry and obtains result M
1, formula is as follows:
M
1＝2B(x,y)-2A(x,y)(1)
In formula, A (x, y) represents the first transmission reference optical flat T
1the face shape error of workplace A, B (x, y) represents optical parallel S front surface B face shape error to be measured.
Step 2, as shown in Figure 3, along optical axis direction, after optical parallel S to be measured, place non-reflective reference optical flat R, an interferometry is carried out to the first transmission reference optical flat T1 workplace A and non-reflective reference optical flat R workplace D, obtains the transmissive measurement M of optical parallel S to be measured
2, formula is as follows:
M
2＝2B(x,y)-2A(x,y)+2n
0[C(x,y)-B(x,y)]+2D(x,y)-2C(x,y)+2δ(2)
In formula, n
0represent the refractive index nominal value of optical parallel S to be measured, δ represents the wave aberration that optical parallel S optical heterogeneity to be measured is introduced, and C (x, y) represents the face shape error of optical parallel S rear surface C to be measured, D (x, y) represents the face shape error of non-reflective reference optical flat R workplace D.
Step 3, as shown in Figure 4, revolves turnback by optical parallel S to be measured around y-axis, to the first transmission reference optical flat T
1workplace A and optical parallel S rear surface C to be measured carries out an interferometry and obtains result M
3, formula is as follows:
M
3＝-2C(-x,y)-2A(x,y)(3)
In formula, and C (-x, the face shape error that y) expression treats lining optical parallel S rear surface C along y-axis carries out mirror image reversal;
By measurement result M
3carry out mirror image reversal along y-axis to obtain
Wherein, (-x y) represents along y-axis the first transmission reference optical flat T A
1the face shape error of workplace A carries out mirror image reversal.
Step 4, as shown in Figure 5, takes optical parallel S to be measured away, to the first transmission reference optical flat T
1workplace A and non-reflective reference optical flat R workplace D carries out a cavity interferometry and obtains result M
4, formula is as follows:
M
4＝2D(x,y)-2A(x,y)(5)
Step 5, as shown in Figure 6, with the second transmission reference optical flat T
2replace the first transmission reference optical flat T
1, the second transmission reference optical flat T
2as interferometer reference mirror, by the first transmission reference optical flat T
1turnback is revolved, to the second transmission reference optical flat T around y-axis
2workplace E and the first transmission reference optical flat T
1workplace A carries out an interferometry and obtains result M
5, formula is as follows:
M
5＝-2A(-x,y)-2E(x,y)(6)
Wherein, E (x, y) represents the second transmission reference optical flat T
2the face shape error of workplace E.
Step 6, as shown in Figure 7, to the second transmission reference optical flat T
2workplace E and non-reflective reference optical flat R workplace D carries out an interferometry and obtains result M
6, formula is as follows:
M
6＝2D(x,y)-2E(x,y)(7)
Step 7, the measurement result of combining step 1 ~ 6, simultaneous formula (1), (2), (4), (5), (6), (7), obtain the optical heterogeneity Δ n of optical parallel S to be measured:
In formula, d is the thickness of optical parallel S to be measured.
In sum, measurement result of the present invention is by the impact of transmission reference optical flat face shape and non-reflective reference optical flat surface figure accuracy, and measuring object is by the restriction of the front and rear surfaces depth of parallelism, and measuring accuracy is high, easily realize.
Claims (8)
1. an absolute method of measurement for optical parallel optical heterogeneity, is characterized in that, comprises the following steps:
Step 1, sets up coordinate system, and with the optical axis transmit direction of striking rope type laser interferometer for z-axis, vertical ground direction is y-axis, and x-axis, y-axis, z-axis form the right-handed coordinate system of thumb along optical axis direction; Adopt striking rope type laser interferometer to the first transmission reference optical flat T
1workplace A and optical parallel S front surface B to be measured carries out an interferometry and obtains result M
1;
Step 2, along optical axis direction, places non-reflective reference optical flat R after optical parallel S to be measured, carries out an interferometry, obtain the transmissive measurement M of optical parallel S to be measured to the first transmission reference optical flat T1 workplace A and non-reflective reference optical flat R workplace D
2;
Step 3, revolves turnback by optical parallel S to be measured around y-axis, to the first transmission reference optical flat T
1workplace A and optical parallel S rear surface C to be measured carries out an interferometry and obtains result M
3, by measurement result M
3carry out mirror image reversal along y-axis to obtain
Step 4, takes optical parallel S to be measured away, to the first transmission reference optical flat T
1workplace A and non-reflective reference optical flat R workplace D carries out a cavity interferometry and obtains result M
4;
Step 5, with the second transmission reference optical flat T
2replace the first transmission reference optical flat T
1, the second transmission reference optical flat T
2as interferometer reference mirror, by the first transmission reference optical flat T
1turnback is revolved, to the second transmission reference optical flat T around y-axis
2workplace E and the first transmission reference optical flat T
1workplace A carries out an interferometry and obtains result M
5;
Step 6, to the second transmission reference optical flat T
2workplace E and non-reflective reference optical flat R workplace D carries out an interferometry and obtains result M
6;
Step 7, the measurement result of combining step 1 ~ 6, obtains the optical heterogeneity Δ n of optical parallel S to be measured.
2. the absolute method of measurement of optical parallel optical heterogeneity according to claim 1, is characterized in that, adopts striking rope type laser interferometer to the first transmission reference optical flat T described in step 1
1workplace A and optical parallel S front surface B to be measured carries out an interferometry and obtains result M
1, formula is as follows:
M
1＝2B(x,y)-2A(x,y)(1)
In formula, A (x, y) represents the first transmission reference optical flat T
1the face shape error of workplace A, B (x, y) represents optical parallel S front surface B face shape error to be measured.
3. the absolute method of measurement of optical parallel optical heterogeneity according to claim 1, it is characterized in that, described in step 2, an interferometry is carried out to the first transmission reference optical flat T1 workplace A and non-reflective reference optical flat R workplace D, obtain the transmissive measurement M of optical parallel S to be measured
2, formula is as follows:
M
2＝2B(x,y)-2A(x,y)+2n
0[C(x,y)-B(x,y)]+2D(x,y)-2C(x,y)+2δ(2)
In formula, n
0represent the refractive index nominal value of optical parallel S to be measured, δ represents the wave aberration that optical parallel S optical heterogeneity to be measured is introduced, and C (x, y) represents the face shape error of optical parallel S rear surface C to be measured, D (x, y) represents the face shape error of non-reflective reference optical flat R workplace D.
4. the absolute method of measurement of optical parallel optical heterogeneity according to claim 1, is characterized in that, to the first transmission reference optical flat T described in step 3
1workplace A and optical parallel S rear surface C to be measured carries out an interferometry and obtains result M
3, formula is as follows:
M
3＝-2C(-x,y)-2A(x,y)(3)
In formula, and C (-x, the face shape error that y) expression treats lining optical parallel S rear surface C along y-axis carries out mirror image reversal;
By measurement result M
3carry out mirror image reversal along y-axis to obtain
Wherein, (-x y) represents along y-axis the first transmission reference optical flat T A
1the face shape error of workplace A carries out mirror image reversal.
5. the absolute method of measurement of optical parallel optical heterogeneity according to claim 1, is characterized in that, to the first transmission reference optical flat T described in step 4
1workplace A and non-reflective reference optical flat R workplace D carries out a cavity interferometry and obtains result M
4, formula is as follows:
M
4＝2D(x,y)-2A(x,y)(5)
。
6. the absolute method of measurement of optical parallel optical heterogeneity according to claim 1, is characterized in that, to the second transmission reference optical flat T described in step 5
2workplace E and the first transmission reference optical flat T
1workplace A carries out an interferometry and obtains result M
5, formula is as follows:
M
5＝-2A(-x,y)-2E(x,y)(6)
Wherein, E (x, y) represents the second transmission reference optical flat T
2the face shape error of workplace E.
7. the absolute method of measurement of optical parallel optical heterogeneity according to claim 1, is characterized in that, to the second transmission reference optical flat T described in step 6
2workplace E and non-reflective reference optical flat R workplace D carries out an interferometry and obtains result M
6, formula is as follows:
M
6＝2D(x,y)-2E(x,y)(7)
。
8. the absolute method of measurement of optical parallel optical heterogeneity according to claim 1, is characterized in that, the measurement result of combining step 1 ~ 6 described in step 7, obtains the optical heterogeneity Δ n of optical parallel S to be measured:
In formula, d is the thickness of optical parallel S to be measured.
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| CN107305119A (en) * | 2016-04-25 | 2017-10-31 | 南京英特飞光电技术有限公司 | The scaling method and test platform of a kind of inclining test for the long optical flat of standard |
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| CN110186873A (en) * | 2019-06-25 | 2019-08-30 | 东北大学秦皇岛分校 | A kind of denoising device of magnetic driven optical coherent chromatographic imaging |
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| CN107305119B (en) * | 2016-04-25 | 2019-06-21 | 南京英特飞光电技术有限公司 | A kind of test platform and its scaling method of the inclining test for the long optical flat of standard |
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| CN109406107A (en) * | 2018-10-19 | 2019-03-01 | 中国兵器工业标准化研究所 | The control method of the sample face shape error of infrared optical material uniformity test |
| CN110186873A (en) * | 2019-06-25 | 2019-08-30 | 东北大学秦皇岛分校 | A kind of denoising device of magnetic driven optical coherent chromatographic imaging |
| CN110186873B (en) * | 2019-06-25 | 2021-09-24 | 东北大学秦皇岛分校 | Magnetic-driven noise reduction device for optical coherence tomography |
| CN113847882A (en) * | 2021-09-08 | 2021-12-28 | 南京理工大学 | Large-caliber vertical absolute inspection method based on gravity deformation and refractive index non-uniformity compensation |
| CN113847882B (en) * | 2021-09-08 | 2023-02-28 | 南京理工大学 | Large-caliber vertical absolute inspection method based on gravity deformation and refractive index non-uniformity compensation |
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