CN103575229A - Common-light-path type multiple inclined wave surface compensation nonzero-digit interference measurement device - Google Patents
Common-light-path type multiple inclined wave surface compensation nonzero-digit interference measurement device Download PDFInfo
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Abstract
The invention discloses a common-light-path type multiple inclined wave surface compensation nonzero-digit interference measurement device which comprises a Fizeau interferometer, a standard optical flat, a free-form surface gradient compensation module and a free-form surface to be measured. A primary optical axis of the free-form surface gradient compensation module coincides with a primary optical axis of the interference measurement device, a parallel light beam emitted by the Fizeau interferometer passes through the standard optical flat and is divided into two light beams, one light beam is reflected by the surface of the standard optical flat back to the Fizeau interferometer to be used as reference light, the other light beam enters in the free-form surface gradient compensation module and is emitted out of the free-form surface gradient compensation module, and testing light beams with different inclined angles are formed to irradiate the free-form surface to be measured in an incident mode, are reflected by the free-form surface to be measured back to the free-form surface gradient compensation module, finally are emitted out of the free-form surface gradient compensation module and return to the Fizeau interferometer to form test light. According to the test, high-precision measurement on the optical free-form surface large in local gradient and transportability modularization on the measurement device are achieved simultaneously.
Description
Technical field
The invention belongs to optical precision measurement field, is a kind of for measuring the device of freeform optics surface.
Background technology
In the Design and manufacturing process of traditional Large optical system, in order to obtain good optical quality, tend to use the optical element of some larger caliber, these optical element volumes are large, processing and manufacturing is difficult, cost is high, face type quality is subject to environment and stress influence is large.Freeform optics surface, not only can obtain than the better optical quality of traditional optical face type, has greatly reduced the volume size of optical element simultaneously, have lightweight, debug conveniently, low cost and other advantages.Freeform optics surface is in a large number for different field such as astronomical sight, national defence weapons.Yet the measurement level of freeform optics surface has seriously limited the raising of freeform optics surface processing and manufacturing level.Because freeform optics surface face type degree of freedom is higher, partial face type graded is large, adopts conventional interference measurement mechanism to measure, and often interference fringe density is excessive, the detection dynamic range that has surpassed detector, cannot obtain the face type quality that stripe information is measured freeform optics surface.
The at present domestic pointolite array that also do not adopt is realized the device that freeform optics surface is measured, conventionally adopt many be to measure freeform optics surface (J. C. Wyant and V. P. Bennett, Using Computer Generated Holograms to Test Aspheric Wavefronts) by calculation holographic method (CGH).Adopt the method for calculation holographic, can measure in theory any optical surface type, but along with being tested surface type becomes increasingly complex, surface graded change is large, the incisure density of CGH also increases thereupon, and this has increased CGH processing and manufacturing difficulty and error.Meanwhile, the different optical surface to be measured of each piece must processing and manufacturing corresponding CGH with it, this has increased cost and the time of measuring undoubtedly, is difficult to realize the universalization of measuring.The development that external freeform optics surface is measured, a kind of measurement mechanism (Eugenio Garbusi of the similar freeform optics surface based on pointolite array is inventing in the Osten of Stuttgart, Germany university professor team, Goran Baer, Wolfgang Osten, Advanced studies on the measurem ent of aspheres and freeform surfaces with the Tilted-wave Interferometer), adopt this measurement device free form surface maximum can compensate the surface graded of 10o, measuring accuracy is better than 1/10 λ.What yet this device adopted is the bifocal path structure of Tyman interference system.Due to what adopt, be bifocal path structure, light path characteristic altogether, causes its systematic error to increase, and in order to guarantee that the increase that measuring accuracy makes up systematic error must have higher requirement to the processing of device, has increased the cost that processing is installed.In addition, measure how bigbore freeform optics surface and just need to manufacture the Amici prism of corresponding bore, and the processing and manufacturing of the bigbore Amici prism of high-quality is very difficult thing.This means and adopt this device cannot realize the measurement to larger caliber freeform optics surface.
Summary of the invention
The object of the present invention is to provide a kind of compensation of the multiple inclination of light path type corrugated altogether nonzero digit interferometric measuring means, it has realized the larger high-acruracy survey of freeform optics surface and the portable modularization of proving installation of partial gradient simultaneously.
The technical solution that realizes the object of the invention is: a kind of compensation of the multiple inclination of light path type corrugated altogether nonzero digit interferometric measuring means, comprise Feisuo interferometer, standard optic plane glass crystal, free form surface gradient compensating module, free form surface to be measured, standard optic plane glass crystal is between Feisuo interferometer and free form surface to be measured, between standard optic plane glass crystal and free form surface to be measured, also inserted free form surface gradient compensating module, the primary optical axis of free form surface gradient compensating module and Feisuo interferometer, the primary optical axis that standard optic plane glass crystal and free form surface to be measured form overlaps, Feisuo interferometer, standard optic plane glass crystal, free form surface gradient compensating module and free form surface to be measured form the primary optical axis of interferometric measuring means, the parallel beam sending of Feisuo interferometer is divided into two-beam after standard optic plane glass crystal, light beam returns Feisuo interferometer from standard optic plane glass crystal surface reflection and forms reference light, another light beam freedom of entry surface gradient compensating module, and from the outgoing of free form surface gradient compensating module, the test beams that forms differing tilt angles incides free form surface to be measured, through free form surface to be measured, reflect back into free form surface gradient compensating module, finally from the outgoing of free form surface gradient compensating module, return to Feisuo interferometer and form test light.
The present invention compared with prior art, its remarkable advantage:
1. without redesigning interference system, only need in the measurement port of commercial Feisuo interferometer, add the free form surface gradient compensating module being formed by microlens array and offset lens group (being the empty frame part of Fig. 1), just can complete surveying work.Compare with foreign technology, the method belongs to the functions expanding to existing interferometer, is easy to realize through engineering approaches application, has huge industrialization potential, can be provided to rapidly each optics processing enterprise and without procuring equipment again;
2. this design has adopted the feature of the common light channel structure of Feisuo type, compare the bifocal path structure of the graceful Green's type of external Thailand, the systematic error of interference system can be cancelled out each other by optical system for testing and reference path, thereby reduced the impact of systematic error, the manufacture claim of interference system and cost are reduced greatly;
3. adopt microlens array to cut apart light beam, to form the beamlet of some bundle different angle, freeform optics surface is carried out to partial gradient compensation, increased interference fringe resolution, expanded the range of dynamic measurement of interferometer, cancel the error that traditional sub-inside diameter measurement process sub-aperture mechanical motion brings, can realize the detection to the large surface graded freeform optics surface of heavy caliber;
4. the structure of the common light path of employing is compared the technology of external double light path, can avoid using bigbore Amici prism in system, and the Precision Machining of the Amici prism of this kind of bore is difficult to realize.
Accompanying drawing explanation
Fig. 1 is the compensation of the multiple inclination of light path type corrugated altogether nonzero digit interferometric measuring means light path schematic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
In conjunction with Fig. 1, the multiple inclination of light path type corrugated compensation nonzero digit interferometric measuring means is by Feisuo interferometer 1 altogether, standard optic plane glass crystal 2, free form surface gradient compensating module 10 and free form surface to be measured 3 form, the primary optical axis of free form surface gradient compensating module 10 and Feisuo interferometer 1, the primary optical axis that standard optic plane glass crystal 2 and free form surface to be measured 3 form overlaps, Feisuo interferometer 1, standard optic plane glass crystal 2, free form surface gradient compensating module 10 and free form surface to be measured 3 form the primary optical axis of the primary optical axis formation interferometric measuring means of interferometric measuring means, wherein free form surface gradient compensating module 10 comprises microlens array 4, pinhole array 5, dynamic mask plate 6, collimator objective 7 and standard lens 8, microlens array 4 is arranged in the parallel light path at standard optic plane glass crystal 2 rears, pinhole array 5 is positioned on microlens array 4 focal planes, 5 normals of pinhole array are parallel with interferometric measuring means primary optical axis, pinhole array 5 is corresponding one by one with the lens cells 9 on microlens array 4, dynamically mask plate 6 is parallel to pinhole array 5, be located at pinhole array 5 rears, pinhole array 5 and the dynamically spacing between mask plate 6 guarantee that the adjacent beams being irradiated on dynamic mask plate 6 does not overlap, collimator objective 7 focal planes overlap with microlens array 4 focal planes, standard lens 8 is positioned at collimator objective 7 rears, free form surface to be measured 3 vertex curvature centers overlap with the focus of standard lens 8.
The principle of device is as follows: by Feisuo interferometer 1, penetrate parallel beam, a part of light reflects back into Feisuo interferometer 1 through standard optic plane glass crystal 2 and forms reference light, another part light transmission standard optic plane glass crystal 2, after microlens array 4 and pinhole array 5, be split into several pointolite arrays of confocal, pinhole array 5 overlaps with microlens array 4 focal planes and is corresponding one by one with microlens array 4 single lens units 9, pointolite array is by dynamic mask plate 6 translation on the two-dimensional directional perpendicular to interferometric measuring means primary optical axis at pinhole array 5 rears, when realizing control section pointolite gating, close other pointolite, pointolite array is by collimator objective 7, collimator objective 7 focal planes overlap with microlens array 4 focal planes, make the pointolite array light beam of microlens array 4 outgoing after collimator objective 7, become the parallel beam of differing tilt angles, finally the multi beam standard ball ground roll of the rear formation different angle of standard lens 8 by collimator objective 7 150mm ~ 155mm places, rear is irradiated on free form surface 3 to be measured.Microlens array 4 numerical apertures are not less than 0.13, and microlens array 4 single lens unit 9 diameters are 0.1mm-0.12mm.Due to the compensation to free form surface 3 gradients to be measured of the multi beam standard ball ground roll of different angle, meet the light beam of partial gradient compensation condition through free form surface 3 reflections to be measured, return to free form surface gradient compensating module 10, through standard lens 8, form local thin parallel beam after collimator objective 7, again by dynamic mask plate 6, again focus in the respective apertures of pinhole array 5 at microlens array 4 focal plane places, finally by microlens array 4 and standard optic plane glass crystal 2, return to Feisuo interferometer 1, form test light wave, this test light has carried the face shape information of free form surface 3 to be measured.Test light wave and reference light wave form interferogram, by the face graphic data to the tested curved surface 3 of calculating of interferogram.
Later stage is carried out Treatment Analysis by computing machine to interferogram, and the face type information that can obtain whole free form surface to be measured 3 is integrated in the calculating to stripe information of robot calculator.
Claims (4)
1. one kind is total to the multiple inclination of light path type corrugated compensation nonzero digit interferometric measuring means, comprise Feisuo interferometer (1), standard optic plane glass crystal (2) and free form surface to be measured (3), standard optic plane glass crystal (2) is positioned between Feisuo interferometer (1) and free form surface to be measured (3), it is characterized in that: between standard optic plane glass crystal (2) and free form surface to be measured (3), also inserted free form surface gradient compensating module (10), the primary optical axis of free form surface gradient compensating module (10) and Feisuo interferometer (1), the primary optical axis that standard optic plane glass crystal (2) and free form surface to be measured (3) form overlaps, Feisuo interferometer (1), standard optic plane glass crystal (2), free form surface gradient compensating module (10) and free form surface to be measured (3) form the primary optical axis of interferometric measuring means, the parallel beam that Feisuo interferometer (1) sends is divided into two-beam after standard optic plane glass crystal (2), light beam returns Feisuo interferometer (1) from standard optic plane glass crystal (2) surface reflection and forms reference light, another light beam freedom of entry surface gradient compensating module (10), and from free form surface gradient compensating module (10) outgoing, the test beams that forms differing tilt angles incides free form surface to be measured (3), through free form surface to be measured (3), reflect back into free form surface gradient compensating module (10), finally from free form surface gradient compensating module (10) outgoing, return to Feisuo interferometer (1) and form test light.
2. the multiple inclination of light path type corrugated altogether according to claim 1 compensates nonzero digit interferometric measuring means, it is characterized in that: described free form surface gradient compensating module (10) comprises microlens array (4), pinhole array (5), dynamic mask plate (6), collimator objective (7) and standard lens (8), test light sees through standard optic plane glass crystal (2) and incides on the microlens array (4) of free form surface gradient compensating module (10), parallel beam focuses on the focal plane of microlens array (4) and forms pointolite array through microlens array (4), then by the pinhole array (5) that overlaps with microlens array (4) focal plane and the dynamic mask plate (6) of reference mark light source gating, incide on collimator objective (7), through collimator objective (7), form the collimated light beam of differing tilt angles, finally the multi beam standard ball ground roll by standard lens (8) formation differing tilt angles is irradiated on free form surface to be measured (3), through free form surface to be measured (3) reflection, the beam reflection that meets local equalize's condition is got back to standard lens (8) and is again formed the thin parallel beam of multi beam, by again focusing in pinhole array (5) respective apertures after (6) after collimator objective (7) and dynamic mask plate, then pass through microlens array (4), see through standard optic plane glass crystal (2) and return to Feisuo interferometer (1) formation test beams, this test beams has carried free form surface to be measured (3) face type information pinhole array (5) and microlens array (4) focal plane coincidence and corresponding one by one with microlens array (4) single lens unit (9).
3. the compensation of the multiple inclination of light path type corrugated altogether nonzero digit interferometric measuring means according to claim 2, is characterized in that: the distance between standard lens (8) and collimator objective (7) is 150mm ~ 155mm.
4. the multiple inclination of light path type corrugated altogether according to claim 2 compensates nonzero digit interferometric measuring means, it is characterized in that: microlens array (4) numerical aperture is not less than 0.13, microlens array (4) single lens unit (9) diameter is 0.1mm ~ 0.12mm.
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| CN103852030A (en) * | 2014-03-17 | 2014-06-11 | 南京理工大学 | Free surface shape reconstruction method for nonzero-digit TWI system |
| CN107560565A (en) * | 2017-08-24 | 2018-01-09 | 南京理工大学 | The surface shape detection apparatus and detection method of carrier frequency interference are tilted based on dynamic sharing |
| CN109781032A (en) * | 2019-02-28 | 2019-05-21 | 西安交通大学 | Based on the optical freeform optics surface face shape interferometric measuring means of cascade adaptive and measurement method |
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| CN107560565A (en) * | 2017-08-24 | 2018-01-09 | 南京理工大学 | The surface shape detection apparatus and detection method of carrier frequency interference are tilted based on dynamic sharing |
| CN109781032A (en) * | 2019-02-28 | 2019-05-21 | 西安交通大学 | Based on the optical freeform optics surface face shape interferometric measuring means of cascade adaptive and measurement method |
| CN109781032B (en) * | 2019-02-28 | 2020-05-22 | 西安交通大学 | Optical free-form surface shape interference measurement device and method based on cascade adaptive optics |
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