CN204902763U - Acousto -optic modulation moves looks interferometer - Google Patents
Acousto -optic modulation moves looks interferometer Download PDFInfo
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- CN204902763U CN204902763U CN201520276832.6U CN201520276832U CN204902763U CN 204902763 U CN204902763 U CN 204902763U CN 201520276832 U CN201520276832 U CN 201520276832U CN 204902763 U CN204902763 U CN 204902763U
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Abstract
The utility model relates to an acousto -optic modulation moves looks interferometer, it is main including laser instrument (1), a plurality of beam expanding lenss, splitting system (3), a plurality of modulators, speculum (7), a plurality of spectroscopes, refer to mirror (12) and imaging lens (15), wherein, a plurality of beam expanding lenss include first beam expanding lens (2) and second beam expanding lens (5), a plurality of modulators include first modulator (4) and second modulator (10), a plurality of spectroscopes include first spectroscope (8), second spectroscope (9) and third spectroscope (14). The utility model provides an acousto -optic modulation moves looks interferometer utilizes AOM to set a camera the wave frequency to carry out high frequency ladder modulation, realized the fringe phase and surveyed and move the looks interferometry, simultaneously still with its as the initiative compensation component, realized in the interferometer of big optical path difference that the phase error that the pairing vibration led to the fact carries out the self -adaptation compensation.
Description
Technical field
The utility model relates to one and utilizes AOM to carry out high frequency step modulation to frequency of light wave, achieves the interferometer of fringe phase detection and phase-shifting interference measuring, particularly relates to a kind of acoustooptic modulation phase-shifting interferometer, belong to interferometer field.
Background technology
Shift-phase interferometry is the non-contact measuring technology in units of optical wavelength, has high measuring accuracy and sensitivity, is considered to one of most exact technical detecting precision element.Before more than 200 years, people just notice the interference of light of knowing clearly, and start planned control interference.But until the succeeding in developing of nineteen sixty first ruby laser, interference just starts to be widely used in fields of measurement.Traditional interfere measurement technique is mainly by take a picture or human eye directly observes interference fringe, and the mode of hand computation measurement result is carried out, and inefficiency, subjective error is larger.Phase detection technology in communication field is incorporated in optical measurement by the people such as Bruning in 1974 first, makes classical interfere measurement technique stride into nanoscale from micron order, realizes the important breakthrough of Optical metrology and measurement.Since the eighties, along with the progressively application of technology in optic test such as laser technology, detecting technique, computer technology, image processing techniques and precision optical machineries, Phase-Shifting Interferometry is further developed, achieve in real time, fast, multiparameter, robotization measurement.
The usual time phase-shifting method of traditional movable phase interfere, utilizes the piezoelectric property of PZT to promote phase shifting component and at the uniform velocity moves, realize the phase shift at equal intervals of interferogram.During this period, the factor such as ambient vibration, air turbulence all can affect the precision of phase shift step-length, reduces the measuring accuracy of phase-shifting interferometer.Under prevailing experimental conditions, interferometer is positioned on optical table usually, and now its natural frequency is lower, the amplitude com parison that the ambient vibration of low frequency is corresponding is large, the vibration of these low frequency large amplitudes can make interferogram image blurring, has a strong impact on the contrast of interferogram, the measuring accuracy of obvious reduction system.
Utility model content
In order to overcome the deficiencies in the prior art, resolving the problem of prior art, making up the deficiency of existing existing product in the market.
The utility model provides a kind of acoustooptic modulation phase-shifting interferometer, mainly comprise laser instrument, multiple beam expanding lens, the multiple modulator of beam splitting system, catoptron, multiple spectroscope, reference mirror and imaging len, wherein, multiple beam expanding lens comprises the first beam expanding lens and the second beam expanding lens, multiple modulator comprises the first modulator and the second modulator, and multiple spectroscope comprises the first spectroscope, the second spectroscope and the 3rd spectroscope.
Preferably, above-mentioned laser instrument is helium-neon laser.
Preferably, above-mentioned first beam expanding lens is λ/2 lens, and the second beam expanding lens is λ/4 lens.
Preferably, above-mentioned catoptron is spherical reflector.
Preferably, diaphragm is provided with between above-mentioned second beam expanding lens and catoptron.
Preferably, interferometer also comprises DSP, and described DSP is connected with the second modulator.
Preferably, interferometer also comprises CCD, and described CCD is connected with imaging len.
Preferably, the laser that above-mentioned laser instrument is launched arrives beam splitting system (3) and is divided into two-way after the first beam expanding lens, one tunnel arrives catoptron through the first modulator and the second beam expanding lens, road after the first spectroscope and the second spectroscope, another road arrives measured piece, and after the second spectroscope, another road arrives imaging len after the 3rd spectroscope.
The acoustooptic modulation phase-shifting interferometer that the utility model provides utilizes AOM to carry out high frequency step modulation to frequency of light wave, achieve fringe phase detection and phase-shifting interference measuring, simultaneously also used as Active Compensation element, achieve in the interferometer of large optical path difference and carry out adaptive equalization to vibrating the phase error caused.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Reference numeral: 1-laser instrument; 2-first beam expanding lens; 3-beam splitting system; 4-first modulator; 5-second beam expanding lens; 6-diaphragm; 7-catoptron; 8-first spectroscope; 9-second spectroscope; 10-second modulator; 11-measured piece; 12-reference mirror; 13-DSP; 14-the 3rd spectroscope; 15-imaging len; 16-CCD.
Embodiment
Understand for the ease of those of ordinary skill in the art and implement the utility model, below in conjunction with the drawings and the specific embodiments, the utility model being described in further detail.
As shown in Figure 1, the acoustooptic modulation phase-shifting interferometer that the utility model provides, acoustooptic modulation phase-shifting interferometer mainly comprises laser instrument 1, multiple beam expanding lens, beam splitting system 3, multiple modulator, catoptron 7, multiple spectroscope, reference mirror 12 and imaging len 15, wherein, multiple beam expanding lens comprises the first beam expanding lens 2 and the second beam expanding lens 5, multiple modulator comprises the first modulator 4 and the second modulator 10, and multiple spectroscope comprises the first spectroscope 8, second spectroscope 9 and the 3rd spectroscope 14.
Wherein, laser instrument 1 is helium-neon laser.First beam expanding lens 2 is λ/2 lens, and the second beam expanding lens 5 is λ/4 lens.Catoptron 7 is spherical reflector.Diaphragm 6 is provided with between second beam expanding lens 5 and catoptron 7.In addition, interferometer also comprises DSP13, and DSP13 is connected with the second modulator 10.Also comprise CCD16, CCD16 is connected with imaging len 15.
Method of work of the present utility model is: the laser that laser instrument 1 is launched arrives beam splitting system 3 and is divided into two-way after the first beam expanding lens 2, one tunnel arrives catoptron 7 through the first modulator 4 and the second beam expanding lens 5, road after the first spectroscope 8 and the second spectroscope 9, another road arrives measured piece 11, and after the second spectroscope 9, another road arrives imaging len 15 after the 3rd spectroscope 14.
The acoustooptic modulation phase-shifting interferometer that the utility model provides, according to acoustooptic modulation (AOM) principle, AOM is utilized to carry out high frequency step modulation to frequency of light wave, achieve fringe phase detection and phase-shifting interference measuring, simultaneously also used as Active Compensation element, achieve in the interferometer of large optical path difference and carry out adaptive equalization to vibrating the phase error caused.Its main thought utilizes the acoustooptic effect of crystal---being changed by the frequency of laser during acousto-optic crsytal, by controlling acousto-optic crsytal, changing the frequency of laser, realize, to the compensation of the phase place change that ambient vibration produces, obtaining stable interference fringe.
The embodiment of the above is better embodiment of the present utility model; not limit concrete practical range of the present utility model with this; scope of the present utility model comprises and is not limited to this embodiment, and the equivalence change that all shapes according to the utility model, structure are done is all in protection domain of the present utility model.
Claims (7)
1. an acoustooptic modulation phase-shifting interferometer, it is characterized in that: described acoustooptic modulation phase-shifting interferometer mainly comprises laser instrument (1), multiple beam expanding lens, beam splitting system (3), multiple modulator, catoptron (7), multiple spectroscope, reference mirror (12) and imaging len (15), wherein, multiple beam expanding lens comprises the first beam expanding lens (2) and the second beam expanding lens (5), multiple modulator comprises the first modulator (4) and the second modulator (10), multiple spectroscope comprises the first spectroscope (8), second spectroscope (9) and the 3rd spectroscope (14), the laser that laser instrument (1) is launched arrives beam splitting system (3) and is divided into two-way after the first beam expanding lens (2), one tunnel arrives catoptron (7) through the first modulator (4) and the second beam expanding lens (5), road after the first spectroscope (8) and the second spectroscope (9), another road arrives measured piece (11), after the second spectroscope (9), another road arrives imaging len (15) after the 3rd spectroscope (14).
2. acoustooptic modulation phase-shifting interferometer according to claim 1, is characterized in that: described laser instrument (1) is helium-neon laser.
3. acoustooptic modulation phase-shifting interferometer according to claim 1, is characterized in that: described first beam expanding lens (2) is λ/2 lens, and the second beam expanding lens (5) is λ/4 lens.
4. acoustooptic modulation phase-shifting interferometer according to claim 1, is characterized in that: described catoptron (7) is spherical reflector.
5. according to the acoustooptic modulation phase-shifting interferometer one of claim 1-4 Suo Shu, it is characterized in that: between described second beam expanding lens (5) and catoptron (7), be provided with diaphragm (6).
6. according to the acoustooptic modulation phase-shifting interferometer one of claim 1-4 Suo Shu, it is characterized in that: described interferometer also comprises DSP (13), described DSP (13) is connected with the second modulator (10).
7. according to the acoustooptic modulation phase-shifting interferometer one of claim 1-4 Suo Shu, it is characterized in that: described interferometer also comprises CCD (16), described CCD (16) is connected with imaging len (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520276832.6U CN204902763U (en) | 2015-04-28 | 2015-04-28 | Acousto -optic modulation moves looks interferometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520276832.6U CN204902763U (en) | 2015-04-28 | 2015-04-28 | Acousto -optic modulation moves looks interferometer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105549370A (en) * | 2016-02-23 | 2016-05-04 | 中国科学院光电研究院 | Synthetic aperture digital holographic method and device based on multichannel low-frequency heterodyne |
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2015
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105549370A (en) * | 2016-02-23 | 2016-05-04 | 中国科学院光电研究院 | Synthetic aperture digital holographic method and device based on multichannel low-frequency heterodyne |
| CN105549370B (en) * | 2016-02-23 | 2018-11-09 | 中国科学院光电研究院 | Synthetic aperture digital hologram method and device based on multichannel low frequency heterodyne |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151223 Termination date: 20160428 |