CN103900639A - High-speed multi-scale vibration and deformation detecting device and method - Google Patents
High-speed multi-scale vibration and deformation detecting device and method Download PDFInfo
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- CN103900639A CN103900639A CN201410139589.3A CN201410139589A CN103900639A CN 103900639 A CN103900639 A CN 103900639A CN 201410139589 A CN201410139589 A CN 201410139589A CN 103900639 A CN103900639 A CN 103900639A
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- light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02035—Shaping the focal point, e.g. elongated focus
- G01B9/02037—Shaping the focal point, e.g. elongated focus by generating a transverse line focus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
Abstract
The invention relates to a high-speed multi-scale vibration and deformation detecting device and method. Light output by a light source is led into a first lens through thick optical fibers to be focused on the input ends of thin optical fibers, and light output by the thin optical fibers is collimated by a second lens to form parallel light; the parallel light is reflected by a first reflector to enter a cylindrical lens to be focused to form a line focus, and the focused light is divided into light in two paths through a light splitter; the light in the two paths is reflected by a reference mirror and a tested sample to be collimated again through a third lens in the width dimension to form parallel light, the collimated light is reflected by a second reflector to enter reflection-type optical gratings, and the light with different wave lengths is split through the reflection-type optical gratings to be focused on an area array CCD through a fourth lens to form interference fringes. By means of the high-speed multi-scale vibration and deformation detecting device and method, linear deformation of objects can be measured, and meanwhile linear vibration of tiny structures can be monitored in real time; vibration modes of the measured structures are obtained at a time, modal analysis is carried out, spot scanning is not needed, the speed is high, the measuring accuracy is high, and multi-scale sub-nanometer scale precision measurement can be achieved.
Description
Technical field
The present invention relates to the multiple dimensioned vibration of a kind of high speed and deformation detecting device and method, a device and method that particularly utilizes contactless structural deformation to nanoscale, micron order and grade amplitude and vibration to carry out high speed and precision detection, belongs to optical measurement mechanics, optical measurement vibrotechnique field.
Background technology
Deformation and vibration survey are research fields of current hot topic, and traditional deformation and vibration survey adopt the measurement of contact mostly, as acceleration transducer, piezoelectric ceramics, resistance strain gage etc.These measuring methods have certain advantage and measuring accuracy, but need high-acruracy survey occasion may not allow the measurement of contact or cannot measure at some.For some lighter structures, because acceleration transducer itself has certain mass, and a moving mass piece is placed on structure diverse location, mode is had to impact to a certain degree, finally cause affecting the modal parameter of this class formation, thereby affected precision and the reliability of structure defects detection.In addition, for the research of some vibration of thin membrane, high-temerature creep distortion, it is unpractical on film, increasing an acceleration transducer, and therefore non-contacting vibration detection is very important.Therefore along with scientific and technological development, the method that non-contact optical is measured deformation and vibration also constantly occurs, as laser Doppler measuring, laser interferometry, speckle method measurement etc.These contactless measuring methods can't produce any impact to measuring structure itself, have also just improved to a certain extent the accuracy of measuring.
Find by prior art documents, more famous distortion measurement method has: moire interference method (Chinese invention patent 200810119805.2) and Digital Speckle Correlation Method (Chinese utility model patent 200720069074.6).Although the accuracy of detection of these two kinds of optical meanss can be very high, because these methods exist phase ambiguity, so the sensing range of these methods is confined to 1/2nd wavelength of light source conventionally.The sensing range of these methods can utilize the method for phase-modulation further to expand, but will certainly increase the complexity of instrument and lower accuracy of detection.
Patent for existing vibration survey is retrieved, and its measuring method has: a. laser homodyne vibration measuring optical system and signal processing method (patent of invention number is 201010129624.5) thereof; B. all-fibre laser Doppler three-dimensional vibration meter (patent of invention number is 201110385923.X); C. a remote non-cpntact measurement vibrating device (patent of invention number is 201110424027.X); D. full optical fiber vibration measurement apparatus (utility model patent number is 03229729.7).Patent a adopts two to resemble detector, more difficult for the adjusting of interference fringe, and cannot directly obtain orthogonal signal and produce additive error for least square method in signal processing, and this device can only be measured the vibration of a point.Patent b adopts laser-Doppler method to measure the three-dimensional vibrating of object, and its system module is many, and can only simultaneously to the vibration of a point measure the same with patent c, patent d, can not carry out the disposable measurement within the scope of face or line.
Summary of the invention
In view of the deficiencies in the prior art, the object of the present invention is to provide the multiple dimensioned vibration of a kind of high speed and deformation detecting device and method, both can measure the linear change of object, the line of Real-Time Monitoring micro-structure vibration simultaneously again, can once obtain by the vibration shape of geodesic structure and carry out model analysis, do not need to carry out spot scan, speed is fast, measuring accuracy is high.
In order to realize above-mentioned object, technical scheme one of the present invention is: the multiple dimensioned vibration of a kind of high speed and deformation detecting device, comprise light source, the light of described light source output focuses on thin optic fibre input end after jumbo fiber is introduced first lens, and the light of described thin optic fibre output terminal output becomes directional light by the second collimated; Directional light is focused into line focus after entering post lens by the first catoptron reflection, and the light after focusing is divided into two-way light by spectroscope: a road is reference light, and another road is for detecting light; The light of two-way light after by reference to the reflection of mirror and sample is collimated into directional light by the 3rd lens again in width dimension, light after collimation enters reflective gratings through the second catoptron reflection, and described reflective gratings forms interference fringe through the 4th lens focus after the light of different wave length is separated on area array CCD.
Further, described light source is infrared or visible ray.
Further, the light of described thin optic fibre output terminal output is approximate pointolite.
In order to realize above-mentioned object, technical scheme two of the present invention is: the multiple dimensioned vibration of a kind of high speed and deformation detecting method, adopt the multiple dimensioned vibration of high speed as above and deformation detecting device, along with deformation and the vibration of sample structure, on area array CCD, produce the interference fringe of change in location, by every frame interference fringe being carried out to Fourier transform and the Spectrum Correction of doing displacement, the time curve that obtains the each point deformation of sample line focus place and vibration, restores deformation quantity and vibration signal.
Compared with prior art, the present invention has following beneficial effect: (1) can realize the deformation to line focus scope simultaneously and vibration is measured, do not need scanning just can obtain on a line simultaneously deformation and vibration survey a little; (2) can realize the Subnano-class precision measurement of multiple dimensioned (nanoscale, micron order and grade deformation or Oscillation Amplitude), can obtain the displacement data of any position of line focus analyzes, can disposablely carry out model analysis to object being measured, for other can only detect any measurement mechanism, there is the advantage on speed, precision and stability.In addition, sensing range of the present invention can be nanoscale, micron order or grade, does not need to utilize the method for phase-modulation further to expand sensing range as other optical means for the measurement of large scale deformation and vibration.
Below in conjunction with the drawings and specific embodiments, the present invention will be further described in detail.
Accompanying drawing explanation
Fig. 1 is the system and device figure of the embodiment of the present invention.
Fig. 2 is the line time of vibration surface chart that the present invention detects cantilever beam structure.
In figure: 1-light source, 2-first lens, 3-thin optic fibre, 4-the second lens, 5-the first catoptron, 6-post lens, 7-the 3rd lens, 8-the second catoptron, 9-area array CCD, 10-the 4th lens, 11-reflective gratings, 12-spectroscope, 13-sample, 14-reference mirror, 15-jumbo fiber.
Embodiment
As shown in Figure 1, a kind of multiple dimensioned vibration of high speed and deformation detecting device, comprise light source 1, lens (2,4,7 and 10), optical fiber (3 and 15), catoptron (5 and 8), post lens 6, area array CCD 9, reflective gratings 11, spectroscope 12, sample 13 and reference mirror 14, the light that described light source 1 is exported focuses on thin optic fibre 3 input ends after jumbo fiber 15 is introduced first lens 2, and the light of described thin optic fibre 3 output terminal outputs is collimated into directional light by the second lens 4; Directional light is focused into line focus after entering post lens 6 by the first catoptron 5 reflections, and the light after focusing is divided into two-way light by spectroscope 12: a road is reference light, and another road is for detecting light; The light of two-way light after by reference to 13 reflections of mirror 14 and sample is collimated into directional light by the 3rd lens 7 again in width dimension, light after collimation enters reflective gratings 11 through the second catoptron 8 reflections, and described reflective gratings 11 focuses on area array CCD 9 and forms interference fringe through the 4th lens 10 after the light of different wave length is separated.
In embodiments of the present invention, described light source 1 can be infrared or visible ray; The light of described thin optic fibre 3 output terminal outputs can be similar to regards pointolite as; The line focus of two-way light focuses on respectively on reference mirror 14 and sample 13 and reflects.The multiple dimensioned vibration of this high speed and deformation detecting device can be realized high precision detection and the monitoring of in real time object structures being carried out local deformation Subnano-class, and can realize the contactless Real-Time Monitoring that micro-structure dimension is carried out to line vibration; In addition, monitoring object is carried out to one dimension line sweep, can obtain the Vibration Condition of whole, and can carry out the model analysis of the whole audience.
In embodiments of the present invention, the multiple dimensioned vibration of this high speed and deformation detecting device carry out time domain collection and storage by computer to interference fringe picture, then interferogram is carried out to corresponding processing can draw deformation situation and the Vibration Condition at sample line focus place.The multiple dimensioned vibration of this high speed and deformation detecting device, owing to can dimension of object be detected simultaneously, are therefore applicable to detection and the model analysis of multiple dimensioned (nanoscale, micron order and grade amplitude) vibrational structure very much.
As shown in Figure 1 and 2, a kind of multiple dimensioned vibration of high speed and deformation detecting method, adopt the multiple dimensioned vibration of high speed as above and deformation detecting device, along with deformation and the vibration of sample structure, on area array CCD, produce the interference fringe of change in location, by every frame interference fringe being carried out to Fourier transform and the Spectrum Correction of doing displacement, obtain the time curve of the each point deformation of sample line focus place and vibration, restore deformation quantity and vibration signal.
In embodiments of the present invention, Fig. 2 utilizes the time shifting curved surface at the line focus place that the multiple dimensioned vibration of this high speed and deformation detecting device record for a cantilever beam structure under pulse excitation.The present invention is high for the accuracy of detection of vibration, and take white light source as example, its accuracy of detection can reach Subnano-class.Aspect vibration survey, also can reach non-contact measurement, avoid the impact of traditional measurement method for oscillating lower sensor on measurement result or due to the too small and non-detectable situation of vibration.
The foregoing is only preferred embodiment of the present invention, all equalizations of doing according to the present patent application the scope of the claims change and modify, and all should belong to covering scope of the present invention.
Claims (4)
1. the multiple dimensioned vibration of high speed and deformation detecting device, comprise light source, it is characterized in that: the light of described light source output focuses on thin optic fibre input end after jumbo fiber is introduced first lens, the light of described thin optic fibre output terminal output becomes directional light by the second collimated; Directional light is focused into line focus after entering post lens by the first catoptron reflection, and the light after focusing is divided into two-way light by spectroscope: a road is reference light, and another road is for detecting light; The light of two-way light after by reference to the reflection of mirror and sample is collimated into directional light by the 3rd lens again in width dimension, light after collimation enters reflective gratings through the second catoptron reflection, and described reflective gratings forms interference fringe through the 4th lens focus after the light of different wave length is separated on area array CCD.
2. the multiple dimensioned vibration of high speed according to claim 1 and deformation detecting device, is characterized in that: described light source is infrared or visible ray.
3. the multiple dimensioned vibration of high speed according to claim 1 and deformation detecting device, is characterized in that: the light of described thin optic fibre output terminal output is approximate pointolite.
4. the multiple dimensioned vibration of high speed and deformation detecting method, it is characterized in that: adopt the multiple dimensioned vibration of high speed as claimed in claim 1 and deformation detecting device, along with deformation and the vibration of sample structure, on area array CCD, produce the interference fringe of change in location, by every frame interference fringe being carried out to Fourier transform and the Spectrum Correction of doing displacement, the time curve that obtains the each point deformation of sample line focus place and vibration, restores deformation quantity and vibration signal.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410139589.3A CN103900639A (en) | 2014-04-09 | 2014-04-09 | High-speed multi-scale vibration and deformation detecting device and method |
| PCT/CN2014/075347 WO2015154313A1 (en) | 2014-04-09 | 2014-04-15 | High-speed multi-dimensional vibration and deformation detection device and method |
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| CN201410139589.3A CN103900639A (en) | 2014-04-09 | 2014-04-09 | High-speed multi-scale vibration and deformation detecting device and method |
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Cited By (5)
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| CN105203199A (en) * | 2015-06-30 | 2015-12-30 | 庄重 | Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system |
| CN106443046A (en) * | 2016-11-23 | 2017-02-22 | 福州大学 | Device and method for measuring rotating speed of rotating shaft based on variable density sine fringe |
| CN107036534A (en) * | 2016-02-03 | 2017-08-11 | 北京振兴计量测试研究所 | Method and system based on laser speckle measurement Vibration Targets displacement |
| CN109000781A (en) * | 2018-09-21 | 2018-12-14 | 福州大学 | A kind of structure micro-vibration line domain measurement device and method |
| CN110617890A (en) * | 2019-10-30 | 2019-12-27 | 福州大学 | Frequency domain F-P type speed measurement system with strong anti-interference capability and speed measurement method thereof |
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| US10788309B2 (en) | 2016-04-01 | 2020-09-29 | The University Of Liverpool | Frequency-domain optical interferometry imaging apparatus and method for astigmatistic bi-focal illumination imaging of an eye |
| CN106949916A (en) * | 2016-11-02 | 2017-07-14 | 北京信息科技大学 | A kind of temperature and strain testing method of the corrosion of use fiber end face |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105203199A (en) * | 2015-06-30 | 2015-12-30 | 庄重 | Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system |
| CN107036534A (en) * | 2016-02-03 | 2017-08-11 | 北京振兴计量测试研究所 | Method and system based on laser speckle measurement Vibration Targets displacement |
| CN107036534B (en) * | 2016-02-03 | 2020-09-08 | 北京振兴计量测试研究所 | Method and system for measuring displacement of vibration target based on laser speckle |
| CN106443046A (en) * | 2016-11-23 | 2017-02-22 | 福州大学 | Device and method for measuring rotating speed of rotating shaft based on variable density sine fringe |
| CN106443046B (en) * | 2016-11-23 | 2023-04-07 | 福州大学 | Rotating shaft rotating speed measuring device and method based on variable-density sine stripes |
| CN109000781A (en) * | 2018-09-21 | 2018-12-14 | 福州大学 | A kind of structure micro-vibration line domain measurement device and method |
| CN109000781B (en) * | 2018-09-21 | 2023-08-25 | 福州大学 | Device and method for measuring micro-vibration linear domain of structure |
| CN110617890A (en) * | 2019-10-30 | 2019-12-27 | 福州大学 | Frequency domain F-P type speed measurement system with strong anti-interference capability and speed measurement method thereof |
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| WO2015154313A1 (en) | 2015-10-15 |
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Application publication date: 20140702 |