CN105203199A - Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system - Google Patents
Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system Download PDFInfo
- Publication number
- CN105203199A CN105203199A CN201510388610.8A CN201510388610A CN105203199A CN 105203199 A CN105203199 A CN 105203199A CN 201510388610 A CN201510388610 A CN 201510388610A CN 105203199 A CN105203199 A CN 105203199A
- Authority
- CN
- China
- Prior art keywords
- vibration
- sheet
- light beam
- shakes
- vibration transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention relates to the technical field of vibration measurement, and discloses an ultra-high sensitivity vibration sensor based on a micro-nano scale material optical mechanical and electrical system. The ultra-high sensitivity vibration sensor comprises an optical path system, a vibration sensing array, an acquisition unit and a processing unit, and is characterized in that the optical path system is used for generating a detection light beam; the vibration sensing array comprises a base and a vibration sensing piece which is arranged on the base and used for sensing the vibration state, wherein the vibration sensing piece is constructed to be used for receiving the detection light beam and forming a reflection light beam; the acquisition unit is used for acquiring location information of the reflection light beam so as to generate an offset signal; and the processing unit is used for receiving the offset signal, thereby parsing the vibration state according to the location information of the reflection light beam. The vibration sensor disclosed by the invention can measure vibrations with sub-micron level amplitude sensitively, that is, acceleration which is greater than or equal to the magnitude of 10<-8>G or 10<-9>m/s<2> can be well detected, thereby being capable of well meeting measurement requirements of high sensitivity and high precision of vibration signals.
Description
Technical field
The present invention relates to vibration measurement technique field, specifically, relate to a kind of vibration transducer; More particularly, relate to a kind of hypersensitivity vibration transducer based on micro/nano-scale material optical electro-mechanical system.
Background technology
As everyone knows, vibrate ubiquitous in daily life, such as, wind, tide, sound, mechanical motion all can produce vibration, vibrate the actual environment situation not only reflected residing for object, and on the normal operation of machinery, equipment, biosome etc., measuring accuracy, serviceable life, all there is important impact, therefore accurately the size of measuring vibrations and direction are very important.Current measuring vibrations mainly adopts acceleration transducer, comprise piezoelectric type, pressure resistance type, condenser type, servo-type etc., for piezoelectric type, it mainly utilizes the piezoelectric effect of piezoelectric ceramics or quartz crystal, when piezoelectric acceleration transducer receives vibration, the power that mass adds on the piezoelectric element also changes thereupon, when the natural frequency of tested vibration frequency far below the accelerometer in piezoelectric acceleration transducer, the change of accelerometer is directly proportional to by measuring acceleration, thus can measuring vibrations.The sensitivity of current such as piezoelectric type uniform acceleration sensor is all lower, only can measure 10
-3the vibration of G magnitude, cannot meet the measurement of microvibration signal, thus usually there will be test leakage phenomenon, cannot meet high precision vibration measurement demand.
Summary of the invention
Content of the present invention is to provide a kind of vibration transducer, and it can overcome certain or some defect of prior art.It is a kind of hypersensitivity vibration transducer based on micro/nano-scale material optical electro-mechanical system, and it can measure the vibration of sub-micron level amplitude comparatively sensitively, namely preferably can detect and be more than or equal to 10
-8g magnitude (or 10
-9m/s
2acceleration) vibration, thus preferably can meet high sensitivity, high-precision vibration measurement demand.
According to a kind of vibration transducer of the present invention, it comprises:
Light path system, it is for generation of detection light beam;
Sense is shaken array, and it comprises pedestal and the sense for induction vibration state be arranged on pedestal and to shake sheet, and wherein the sense sheet that shakes is configured for receiving and detects light beam and form folded light beam;
Collecting unit, it is for gathering the positional information of folded light beam thus generating shifted signal; And
Processing unit, it is for receiving shifted signal, thus parses described vibrational state according to the positional information of folded light beam.
In the present invention, feel the array that shakes and can be used in impression vibration, feel the sheet that shakes and form faintly flexural deformation when experiencing vibration because inertia effect can depart from original equilibrium position preferably, and this faintly flexural deformation can preferably be amplified through light path system, thus can collected unit collection preferably, and form observable significant signal after treated cell processing.By above-mentioned structure, collecting unit of the present invention can be gathered the vibration information after light path system amplification, thus can comparatively accurately detect faint vibration signal.
As preferably, feel the sheet that shakes and adopt micro/nano-scale material to form.
In the present invention, feeling the sheet that shakes can adopt such as micro/nano-scale material to form, due to micro/nano-scale material have that inertia is little, smooth surface, vibration time Bending Deformation larger radius of curvature little, thus can make can comparatively delicately, accurately measure in the present invention to be not less than 10
-8g magnitude (or 10
-9m/s
2) vibration acceleration, thus preferably can measure the vibration of sub-micron level amplitude.In addition, because the resonant frequency of micro/nano-scale material is far above the frequency of extraneous vibration signal, thus can preferably ensure job stability of the present invention, can possess preferably linear.
As preferably, feel the sheet that shakes and can be configured to the bar-shaped or sheet that length is micron or Nano grade.
In the present invention, the sense sheet that shakes can be configured to the bar-shaped or sheet that length is micron or Nano grade, thus makes the sense sheet that shakes preferably can experience vibration information, and preferably vibration information can be converted to sense and to shake the deformation of sheet self.
As preferably, the shake length of sheet of sense is not less than 20nm, and the shake length-diameter ratio of sheet or aspect ratio structures of sense becomes to be not less than 10:1.
In the present invention, the length feeling the sheet that shakes preferably is not less than 20nm, length-diameter ratio (bar-shaped) or the length breadth ratio (sheet) of feeling the sheet that shakes preferably are configured to be not less than 10:1, this is because, draw after carrying out theoretical modeling analysis through practical operation and the sheet that shakes to sense, sense shakes the length of sheet and length-diameter ratio (bar-shaped) or length breadth ratio (sheet) when being configured in above-mentioned scope, preferably can experience vibration, thus can detect weak vibration more accurately.
As preferably, pedestal is configured with boss, is configured to groove between the boss of arbitrary neighborhood, the sense sheet that shakes is configured to one or both ends and is fixedly installed on boss and part is suspended on above groove.
In the present invention, pedestal can there is such as multiple boss by array, and groove between arbitrary neighborhood boss, can be configured to, and multiple sense is shaken, sheet can be arranged on boss in array, thus make above-mentioned multiple sense sheet that shakes jointly can detect vibration information, thus weak vibration information can be detected more accurately, delicately, and above-mentioned multiple sense is shaken cooperatively interacting or making between sheet, and the present invention preferably can detect direction of vibration.In addition, in the present invention, the shake fit system of sheet and boss of arbitrary sense can be fixedly installed on boss and part be suspended on above groove for one or both ends, thus makes above-mentioned multiple sense sheet that shakes can cooperatively interact and all preferably to detect the vibration information of multiple directions.
As preferably, light path system comprises light source and catoptron, and light source is for providing the pointolite of energy stabilization, line source or area source, and catoptron is used for reflection source thus is formed detecting light beam.
In the present invention, catoptron preferably can increase light path, thus can preferably reduce bulk of the present invention, in addition, can also be adjusted the position of photoelectric displacement detector, thus make the present invention can be convenient to debugging by the position changing catoptron.
As preferably, between light source and catoptron, be provided with grating.
In the present invention, can also be provided with grating between light source and catoptron, grating can mask the part that beam edge is irregular or intensity is unstable that light source sends, thus can improve the stability of light path system.
As preferably, be provided with lens between light source and grating, lens arrangement becomes to move back and forth between light source and grating.
In the present invention, lens can be provided with between light source and grating, lens can be used in the effect adjusting the beam state that light source sends, the light beam that light source sends can be adjusted to parallel by adjustment lens position, disperse or focus state, thus make the present invention can provide differently measuring condition, the present invention can preferably be measured in different types of vibration.
As preferably, collecting unit adopts optical displacement sensor.
In the present invention, collecting unit can comprise optical displacement sensor, and optical displacement sensor can comprise the photo-sensitive cell be made up of such as ultraviolet light, visible or infrared light sensitive element, thus make the present invention can according to different testing environments, corresponding selection goodly can experience the optical displacement sensor of the light of different-waveband, and then make the present invention can drop to minimum by the interference of extraneous light according to actual testing environment, thus can preferably promote measuring accuracy of the present invention.
In a preferred embodiment of the present invention, also optical filtering is comprised in light path system, optical filtering to the light sensitive of particular range of wavelengths can be only at collecting unit, and elimination is in the light of unwanted wavelength coverage, thus can promote measuring accuracy of the present invention further.
As preferably, detecting light beam can be that ultraviolet waves is to the monochromatic light in infrared band or polychromatic light for wavelength.
Accompanying drawing explanation
Fig. 1 be a kind of vibration transducer in embodiment 1 light path system, feel the principle of work schematic diagram shaken between array and collecting unit;
Fig. 2 is the system architecture diagram of a kind of vibration transducer in embodiment 1.
Embodiment
For understanding content of the present invention further, the present invention is described in detail in conjunction with the accompanying drawings and embodiments.Should be understood that, embodiment is only to make an explanation to the present invention and and non-limiting.
Embodiment 1
Provide a kind of vibration transducer in the present embodiment, it is a kind of hypersensitivity vibration transducer based on micro/nano-scale material optical electro-mechanical system.
As shown in Figure 1, shown in Fig. 2, disclose principle of work and the system architecture of a kind of vibration transducer in the present embodiment, it comprises light path system, array, collecting unit 140, processing unit and power supply are shaken in sense, wherein power supply is used for powering for light path system, collecting unit 140 and processing unit, light path system is for generation of detection light beam 115, sense shakes array for receiving detection light beam 115 and forming folded light beam 116, and collecting unit 140 is for gathering the positional information of folded light beam 116 thus generating shifted signal; Processing unit for receiving shifted signal, thus parses described vibrational state according to the positional information of folded light beam 116.
In the present embodiment, the sense array that shakes comprises pedestal 120 and the sense for induction vibration state be arranged on pedestal 120 and to shake sheet 130, wherein, pedestal 120 is configured with boss 121, groove 122 is configured between the boss 121 of arbitrary neighborhood, multiple sense shakes sheet 130 array on pedestal 120, wherein above-mentioned multiple sense sheet 130 that shakes can be fixed on boss 121 according to the whole one end of actual testing requirement or all two ends are fixed on boss or part one end is fixed on boss 121 upper part two ends and is fixed on boss, and the connected mode that in the present embodiment, above-mentioned multiple sense is shaken between sheet 130 and boss 121 adopts part one end to be fixed on boss 121 upper part two ends is fixed on mode on boss, thus can preferably detect Oscillation Amplitude and direction of vibration.
Feel the sheet 130 that shakes reflect detection light beam 115 thus form folded light beam 116, feeling the sheet 130 that shakes adopts micro/nano-scale material to form, the sense sheet 130 that shakes is configured to the club-shaped material that length is micron level, and the shake length configuration of sheet 130 of single sense becomes 20um, and the shake length-diameter ratio of sheet 130 of single sense is configured to 10:1.
In addition, light path system comprises light source 111 and catoptron 114, and light source 111 can according to actual testing requirement for providing the pointolite of energy stabilization, line source or area source, and in the present embodiment, light source 111 is for providing line source; Catoptron 114 is for reflection source 111 thus formation detects light beam 115.
In the present embodiment, collecting unit 140 adopts optical displacement sensor, and photoelectric displacement sensor can according to actual testing environment, choose ultraviolet light, the optical displacement sensor that visible or infrared light etc. are responsive, thus effective interference reducing extraneous light and collecting unit 140 is caused, photoelectric displacement sensor in the present embodiment chooses the optical displacement sensor to ultraviolet-sensitive, and the optical band that light source 111 provides can adjust according to the responsive optical band of photoelectric displacement sensor, in this enforcement, light source 111 is for providing wavelength at the monochromatic light of ultraviolet band.
In the present embodiment, when the vibration passing in the external world shakes array to sense, it is bending that above-mentioned multiple sense shakes that sheet 130 produces in various degree due to inertia effect, again because the sense sheet 130 that shakes is all be made up of micro/nano-scale material, and the resonant frequency that micro/nano-scale material is formed is far above extraneous vibration signal frequency, therefore above-mentioned multiple sense bending that the free end (one end is fixed on boss 121) of sheet 130 or axial centre point (two ends are fixed on boss) produce that shake is directly proportional to vibration acceleration.Especially, because during micro/nano-scale material vibrating, Bending Deformation larger radius of curvature is little, and the feature that micro/nano-scale material is smooth, thus make, above-mentioned multiple sense sheet 130 that shakes can experience extraneous vibration comparatively delicately, and preferably detection light beam 115 can be reflexed to collecting unit 140 place, collecting unit 140 can gather shifted signal and send to processing unit, and processing unit parses very faint extraneous vibration state after can carrying out the process such as filtering, amplification, noise reduction to shifted signal.
A kind of vibration transducer in the present embodiment, it can measure the vibration of sub-micron level amplitude comparatively sensitively, namely can detect and be more than or equal to 10
-8g magnitude (10
-9m/s
2vibration acceleration) vibration, thus meet high sensitivity, high-precision vibrational state measurement demand.
Embodiment 2
A kind of vibration transducer is provided in the present embodiment, the difference of itself and embodiment 1 is: be provided with lens 112 successively between light source 111 and catoptron 114, grating 113 and optical filter, the single sense sheet 130 that shakes is configured to the flaky material that length is Nano grade, the shake length of sheet 130 of single sense can be configured to be not less than according to concrete testing requirement the random length of 20nm, the shake length breadth ratio of sheet 130 of single sense can be configured to be not less than any one ratio of 10:1 according to concrete testing requirement, should be understood that, single sense shake the length of sheet 130 and length breadth ratio in above-mentioned scope time, its length is larger, length breadth ratio is less, and the precision measured is less, and when single sense shake the length of sheet 130 exceed above-mentioned scope time, the shake manufacture difficulty of sheet 130 and assembly difficulty of single sense will promote greatly, and lifting in obvious accuracy of detection cannot be brought, and when single sense shake the length breadth ratio (length-diameter ratio) of sheet 130 exceed above-mentioned scope time, the reduction of obvious measuring accuracy will be caused, therefore above-mentioned scope only there is provided a kind of preferable range of the present invention, and not should be understood to invention has been any restriction, in the present embodiment, choosing the shake length breadth ratio of sheet 130 of single sense is 20:1, and the shake length of sheet 130 of single sense is 20nm.
Schematically above be described the present invention and embodiment thereof, this description does not have restricted, and also just one of the embodiments of the present invention shown in accompanying drawing, actual structure is not limited thereto.So, if those of ordinary skill in the art enlightens by it, when not departing from the invention aim, designing the frame mode similar to this technical scheme and embodiment without creationary, all should protection scope of the present invention be belonged to.
Claims (10)
1. a vibration transducer, it comprises:
Light path system, it is for generation of detection light beam (115);
Feel the array that shakes, it comprises pedestal (120) and the sense for induction vibration state be arranged on pedestal (120) and to shake sheet (130), and wherein the sense sheet (130) that shakes is configured for receiving and detects light beam (115) and form folded light beam (116);
Collecting unit (140), it is for gathering the positional information of folded light beam (116) thus generating shifted signal; And
Processing unit, it is for receiving shifted signal, thus parses described vibrational state according to the positional information of folded light beam (116).
2. according to a kind of vibration transducer described in claim 1, it is characterized in that: feel the sheet (130) that shakes and adopt micro/nano-scale material to form.
3. according to a kind of vibration transducer described in claim 1 or 2, it is characterized in that: feel the sheet (130) that shakes and be configured to the bar-shaped or sheet that length is micron or Nano grade.
4. according to a kind of vibration transducer described in claim 3, it is characterized in that: the length feeling the sheet (130) that shakes is not less than 20nm, length-diameter ratio or the aspect ratio structures of feeling the sheet (130) that shakes become to be not less than 10:1.
5. according to a kind of vibration transducer described in claim 1, it is characterized in that: pedestal (120) is configured with boss (121), be configured to groove (122) between the boss (121) of arbitrary neighborhood, the sense sheet (130) that shakes is configured to one or both ends and is fixedly installed on that boss (121) is upper and part is suspended on groove (122) top.
6. according to a kind of vibration transducer described in claim 5, it is characterized in that: light path system comprises light source (111) and catoptron (114), light source (111) is for providing the pointolite of energy stabilization, line source or area source, and catoptron (114) is for reflection source (111) thus formed and detect light beam (115).
7. according to a kind of vibration transducer described in claim 6, it is characterized in that: between light source (111) and catoptron (114), be provided with grating (113).
8. according to a kind of vibration transducer described in claim 7, it is characterized in that: between light source (111) and grating (113), be provided with lens (112).
9. according to a kind of vibration transducer described in claim 1, it is characterized in that: collecting unit (140) adopts optical displacement sensor.
10., according to a kind of vibration transducer described in claim 1, it is characterized in that: detect light beam (115) for wavelength be that ultraviolet waves is to the monochromatic light in infrared band or polychromatic light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510388610.8A CN105203199A (en) | 2015-06-30 | 2015-06-30 | Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510388610.8A CN105203199A (en) | 2015-06-30 | 2015-06-30 | Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105203199A true CN105203199A (en) | 2015-12-30 |
Family
ID=54951001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510388610.8A Pending CN105203199A (en) | 2015-06-30 | 2015-06-30 | Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105203199A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109839514A (en) * | 2019-03-19 | 2019-06-04 | 合肥工业大学 | A kind of high-precision optical accelerometer with from zeroing function |
| CN109990886A (en) * | 2019-04-28 | 2019-07-09 | 陕西师范大学 | A kind of vibration detecting structure |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2419594Y (en) * | 2000-03-30 | 2001-02-14 | 中国科学院上海光学精密机械研究所 | Optical Measuring Instrument for Object Vibration Amplitude |
| CN1302524A (en) * | 1997-05-08 | 2001-07-04 | 艾利森公司 | Sound Transducer and method having light detector for detecting displacement of transducer diaphragm |
| US20040252587A1 (en) * | 2003-04-03 | 2004-12-16 | Philip Melese | Method and apparatus for real-time vibration imaging |
| CN1869710A (en) * | 2006-06-29 | 2006-11-29 | 浙江大学 | High resolution micronano optical accelerometer |
| CN1945237A (en) * | 2006-11-03 | 2007-04-11 | 北京航空航天大学 | Vibration measuring device based on micro opto-electromechanic system |
| CN101907485A (en) * | 2010-08-25 | 2010-12-08 | 福州大学 | Non-contact structure micro-vibration monitoring device |
| CN102139855A (en) * | 2010-02-03 | 2011-08-03 | 中国科学院物理研究所 | Manufacturing method of micro-nano cantilever beam structure for hypersensitive detection |
| CN103364068A (en) * | 2012-03-28 | 2013-10-23 | 联想(北京)有限公司 | Vibration measuring device and method |
| CN103900639A (en) * | 2014-04-09 | 2014-07-02 | 福州大学 | High-speed multi-scale vibration and deformation detecting device and method |
| CN104501842A (en) * | 2014-12-08 | 2015-04-08 | 周秀娟 | Optical sensing device and optical sensing method based on micro-electromechanical system |
-
2015
- 2015-06-30 CN CN201510388610.8A patent/CN105203199A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1302524A (en) * | 1997-05-08 | 2001-07-04 | 艾利森公司 | Sound Transducer and method having light detector for detecting displacement of transducer diaphragm |
| CN2419594Y (en) * | 2000-03-30 | 2001-02-14 | 中国科学院上海光学精密机械研究所 | Optical Measuring Instrument for Object Vibration Amplitude |
| US20040252587A1 (en) * | 2003-04-03 | 2004-12-16 | Philip Melese | Method and apparatus for real-time vibration imaging |
| CN1869710A (en) * | 2006-06-29 | 2006-11-29 | 浙江大学 | High resolution micronano optical accelerometer |
| CN1945237A (en) * | 2006-11-03 | 2007-04-11 | 北京航空航天大学 | Vibration measuring device based on micro opto-electromechanic system |
| CN102139855A (en) * | 2010-02-03 | 2011-08-03 | 中国科学院物理研究所 | Manufacturing method of micro-nano cantilever beam structure for hypersensitive detection |
| CN101907485A (en) * | 2010-08-25 | 2010-12-08 | 福州大学 | Non-contact structure micro-vibration monitoring device |
| CN103364068A (en) * | 2012-03-28 | 2013-10-23 | 联想(北京)有限公司 | Vibration measuring device and method |
| CN103900639A (en) * | 2014-04-09 | 2014-07-02 | 福州大学 | High-speed multi-scale vibration and deformation detecting device and method |
| CN104501842A (en) * | 2014-12-08 | 2015-04-08 | 周秀娟 | Optical sensing device and optical sensing method based on micro-electromechanical system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109839514A (en) * | 2019-03-19 | 2019-06-04 | 合肥工业大学 | A kind of high-precision optical accelerometer with from zeroing function |
| CN109839514B (en) * | 2019-03-19 | 2021-01-15 | 合肥工业大学 | High-precision optical accelerometer with self-zero-adjusting function |
| CN109990886A (en) * | 2019-04-28 | 2019-07-09 | 陕西师范大学 | A kind of vibration detecting structure |
| CN109990886B (en) * | 2019-04-28 | 2021-03-09 | 陕西师范大学 | Vibration detection structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FI127063B (en) | Self-test in closed loop vibration gyroscope | |
| Weng et al. | Compact FBG diaphragm accelerometer based on L-shaped rigid cantilever beam | |
| CN101628704A (en) | Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element | |
| CN102589446A (en) | High precision micro-displacement measurement apparatus and method | |
| CN202285022U (en) | Probe of double fiber bragg grating accelerometer | |
| Lei et al. | A high-precision two-dimensional micro-accelerometer for low-frequency and micro-vibrations | |
| KR20150131955A (en) | Vibration sensor | |
| CN109945965A (en) | The arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam | |
| CN105203199A (en) | Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system | |
| CN115267253A (en) | Flow velocity measuring method based on unbalanced mach zehnder interferometer and fiber grating | |
| US7453256B2 (en) | Micro-electromechanical system (MEMS) based current and magnetic field sensor | |
| CN106403821A (en) | Displacement sensor, usage and manufacturing method thereof and interferometer | |
| CN116754107B (en) | High-sensitivity resonant pressure sensor with amplifying structure and signal conditioning method | |
| CN203069261U (en) | Modal test system based on single-point laser continuous plane scanning vibration measurement | |
| CN108801438B (en) | A kind of vibration displacement measuring device based on optical interference | |
| CN105300368B (en) | A kind of direct output frequency oscillation gyro of holohedral symmetry decoupling | |
| CN106443068B (en) | Torsional differential quartz resonance acceleration sensor chip | |
| US20150089693A1 (en) | Multi-resonant detection system for atomic force microscopy | |
| CN208432333U (en) | A kind of table top assembly | |
| KR100934217B1 (en) | Microsensor for vibration measurement | |
| KR101097768B1 (en) | Micro force sensor and micro force measurement method using double ended fork vibration | |
| Li et al. | A microgyroscope with piezoresistance for both high-performance coriolis-effect detection and seesaw-like vibration control | |
| CN109839514B (en) | High-precision optical accelerometer with self-zero-adjusting function | |
| JP2011185828A (en) | Acceleration sensor | |
| CN207197534U (en) | Decoupling microthrust test device certainly based on Moire fringe detection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20151230 |