CN109945965A - The arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam - Google Patents
The arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam Download PDFInfo
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- CN109945965A CN109945965A CN201910237658.7A CN201910237658A CN109945965A CN 109945965 A CN109945965 A CN 109945965A CN 201910237658 A CN201910237658 A CN 201910237658A CN 109945965 A CN109945965 A CN 109945965A
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Abstract
The present invention relates to a kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam, including support beam arm and center sensing unit, the center sensing unit is mounted in support beam arm；The working characteristics of the sensitive diaphragm is determined by the quantity n of support beam arm, the length L of support beam arm, the width w in support beam arm section, the effective length 2r of center sensing unit and the thickness h of integral films.Compared with prior art, the present invention has controllability strong, for reaching the ultrasonic signal in detection different frequency scope, the advantages that greatly expanding its use scope.
Description
Technical field
The present invention relates to a kind of optical fiber EFPI ultrasonic sensors, more particularly, to a kind of optical fiber EFPI ultrasonic sensor
With the arm-type sensitive diaphragm of supporting beam.
Background technique
Optical fiber extrinsic type Fabry Parot interferometer (Extrinsic Fabry-Perot Interferometer, EFPI) ultrasound
Wave sensor be it is a set of ultrasonic wave is converted into mechanical oscillation using sensitive diaphragm structure, method of reutilization Fabry-Parot interferent technology will be mechanical
Vibration is converted into optical parameter variation, finally by the super wave of high-performance sound of the conversion of the pertinent instruments such as photodetector, acquisition, demodulation
Detection system.Its systematic schematic diagram is as depicted in figs. 1 and 2, and the light that light source issues enters by optical fiber and coupler (circulator)
By the Fa-Po cavity of fiber end face and sensitive diaphragm structure composition, in Fa-Po cavity genetic method Fabry-Parot interferent back reflection back into optical fibers, finally again
Electric signal is converted by photodetector by fiber coupler, and stores, analyze and shows after high-speed data acquiring device acquisition
Show.When sensitive diaphragm structure of popping one's head in is vibrated by ultrasonic exciting, the change that Fa-Po cavity can be caused long eventually leads to method Fabry-Parot interferent
The change of light intensity or the offset of interference peak wavelength, can final recovery sound by the change or the offset of peak wavelength that acquire light intensity
Wave signal.
Optical fiber EFPI ultrasonic sensor Fa-Po cavity sonde configuration is as in Figure 3-5, generally by optical fiber, fixed sheath, set
Pipe and sensitivity assembly, and major parameter has: fiber optic aperture D, the long l of Fa-Po cavity chamber, sensitive diaphragm are with a thickness of h and effective length
2R (it is a length of 2R of effective edge that diaphragm, which is rectangular, and it be effective diameter is 2R that diaphragm, which is prototype).The thickness of sensitive diaphragm and effectively length
Degree determines two main working parameters i.e. intrinsic frequency f and the sensitivity S of EFPI ultrasonic sensor.Studies have shown that Fig. 3 institute
Show that the intrinsic frequency f of sensitive diaphragm is mainly determined by its dimensional parameters, material property and working environment medium, the intrinsic frequency of diaphragm
Rate f is directly proportional to its thickness h, is inversely proportional with the quadratic power of the effective length parameter R of diaphragm；Keeping diaphragm intrinsic frequency f not
When change, the thickness h of vibrating diaphragm is thinner, and the sensitivity of diaphragm is bigger.Above situation, so that when test object ultrasonic signal frequency
When rate range very wide arrival 100KHz or more, it is difficult to improve the sensitivity of sensor again, greatly limits optical fiber EFPI ultrasound
The use scope of wave sensor.
Summary of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of optical fiber EFPI ultrasounds
The arm-type sensitive diaphragm of wave sensor supporting beam.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam, including the sensitive list of support beam arm and center
Member, the center sensing unit are mounted in support beam arm；
The working characteristics of the sensitive diaphragm is cut by the quantity n of support beam arm, the length L of support beam arm, support beam arm
The thickness h of the width w in face, the effective length 2r of center sensing unit and integral films determine.
Preferably, the support beam arm is to be arranged symmetrically.
Preferably, the center sensing unit is circle, and the quantity of the support beam arm is odd number or even number.
Preferably, the center sensing unit is rectangular, and the quantity of the support beam arm is even number.
Preferably, it is carried out on the inside of the center sensing unit gold-plated.
Preferably, center sensing unit selection silicon or earth silicon material.
Preferably, L=142 μm of the length of the support beam arm, w=15 μm of cross-sectional width, center sensing unit have
R=79 μm of radius, h=5 μm of diaphragm thickness of effect.
Compared with prior art, the invention has the following advantages that
1, the main working parameters intrinsic frequency of optical fiber EFPI ultrasonic sensor and sensitivity etc., can be by multiple parameters
Integrated configuration is adjusted, and controllability is strong, and for reaching the ultrasonic signal in detection different frequency scope, greatly expanding it makes
Use range.
2, the Fa-Po cavity of the arm-type sensitive diaphragm of supporting beam is used to pop one's head in as non-hermetic, two sides are phase when sensitive diaphragm works
With medium and pressure difference is not present, not by working environment pressure influence, so that sensor detection characteristic intrinsic frequency, sensitivity etc.
Modeling analysis becomes simple, and performance is more stable.
Detailed description of the invention
Fig. 1 is the schematic diagram of existing optical fiber EFPI ultrasonic sensor；
Fig. 2 is the portion the A enlarged structure schematic diagram of Fig. 1；
Fig. 3 is existing optical fiber EFPI ultrasonic sensor sensitive diaphragm structural schematic diagram；
The A-A sectional view of Fig. 3 when Fig. 4 is rectangular sensitive diaphragm；
The A-A sectional view of Fig. 3 when Fig. 5 is round sensitive diaphragm；
Fig. 6 is that the present invention is illustrated using the principle of interference of the arm-type sensitive diaphragm optical fiber EFPI ultrasonic sensor of supporting beam
Figure；
Fig. 7 is the circular support beam arm formula sensitive diaphragm that the present invention uses；
Fig. 8 is the quadrate support beam arm formula sensitive diaphragm that the present invention uses.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiment is a part of the embodiments of the present invention, rather than whole embodiments.Based on this hair
Embodiment in bright, those of ordinary skill in the art's every other reality obtained without making creative work
Example is applied, all should belong to the scope of protection of the invention.
A kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam, as shown in fig. 6, include support beam arm,
Center sensing unit composition.
The arm-type sensitive diaphragm of the supporting beam, working characteristics by the quantity n of support beam arm, support beam arm length L,
The width w in support beam arm section, center sensing unit effective length 2r (as shown in Figure 7 and Figure 8, center sensing unit is circle
When shape, effective diameter 2r；When being rectangular, equivalent length of side 2r), the thickness hs of integral films determines.
The support beam arm quantity and arrangement of the arm-type sensitive diaphragm of the supporting beam, are selected as and are arranged symmetrically, center
When sensing unit is round, support beam arm quantity can be odd number or even number, when center sensing unit is rectangular, support beam arm number
Amount is even number.
On the inside of the center sensing unit of the arm-type sensitive diaphragm of the supporting beam, it can carry out gold-plated for improving reflection
Rate preferably meets the optical signal detecting of optical fiber EFPI ultrasonic sensor.
The arm-type sensitive diaphragm of the supporting beam, can choose silicon or earth silicon material, using MEMS technology according to
The frequency range that ultrasonic signal need to be detected is machined to several μm to tens of μm.
The present invention is detected in transformer oil using the optical fiber EFPI sensor of the arm-type sensitive circular film of supporting beam
The comparison of ultrasonic signal and superfrequency UHF electromagnetic wave signal is it is found that measurement dimensional parameters are as follows after processing: the length of support beam arm
Degree L=142 μm, w=15 μm of cross-sectional width, r=79 μm of the effective radius of center sensing unit, h=5 μm of diaphragm thickness.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can readily occur in various equivalent modifications or replace
It changes, these modifications or substitutions should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with right
It is required that protection scope subject to.
Claims (7)
1. a kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam, which is characterized in that including support beam arm and
Center sensing unit, the center sensing unit are mounted in support beam arm；
The working characteristics of the sensitive diaphragm is by the quantity n of support beam arm, the length L of support beam arm, support beam arm section
The thickness h of width w, the effective length 2r of center sensing unit and integral films determine.
2. a kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam according to claim 1, feature
It is, the support beam arm is to be arranged symmetrically.
3. a kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam according to claim 1, feature
It is, the center sensing unit is circle, and the quantity of the support beam arm is odd number or even number.
4. a kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam according to claim 1, feature
Be, the center sensing unit be it is rectangular, the quantity of the support beam arm is even number.
5. a kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam according to claim 1, feature
It is, is carried out on the inside of the center sensing unit gold-plated.
6. a kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam according to claim 1, feature
It is, the center sensing unit selection silicon or earth silicon material.
7. a kind of arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam according to claim 1, feature
It is, w=15 μm of L=142 μm of the length of the support beam arm, cross-sectional width, the effective radius r=79 of center sensing unit
μm, h=5 μm of diaphragm thickness.
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| CN201910237658.7A CN109945965A (en) | 2019-03-27 | 2019-03-27 | The arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam |
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Cited By (5)
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| CN110618302A (en) * | 2019-10-31 | 2019-12-27 | 国网上海市电力公司 | Manufacturing method of Fabry-Perot cavity probe of partial discharge EFPI optical fiber sensor |
| CN110849464A (en) * | 2019-11-12 | 2020-02-28 | 天津大学 | Optical fiber Fabry-Perot sound sensor based on hub-shaped vibrating diaphragm |
| CN113074803A (en) * | 2021-03-26 | 2021-07-06 | 华中科技大学 | Low-frequency acoustic wave sensor and manufacturing method of silicon micro-cantilever |
| CN113884841A (en) * | 2021-11-05 | 2022-01-04 | 全球能源互联网研究院有限公司 | Diaphragm type partial discharge sensor and manufacturing method thereof |
| CN114485904A (en) * | 2022-01-25 | 2022-05-13 | 西北大学 | Ultrasonic sensor based on conical multi-core optical fiber |
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| CN110618302A (en) * | 2019-10-31 | 2019-12-27 | 国网上海市电力公司 | Manufacturing method of Fabry-Perot cavity probe of partial discharge EFPI optical fiber sensor |
| CN110849464A (en) * | 2019-11-12 | 2020-02-28 | 天津大学 | Optical fiber Fabry-Perot sound sensor based on hub-shaped vibrating diaphragm |
| CN110849464B (en) * | 2019-11-12 | 2023-11-21 | 天津大学 | Optical fiber Fabry-Perot sound sensor based on hub-shaped vibrating diaphragm |
| CN113074803A (en) * | 2021-03-26 | 2021-07-06 | 华中科技大学 | Low-frequency acoustic wave sensor and manufacturing method of silicon micro-cantilever |
| CN113884841A (en) * | 2021-11-05 | 2022-01-04 | 全球能源互联网研究院有限公司 | Diaphragm type partial discharge sensor and manufacturing method thereof |
| CN114485904A (en) * | 2022-01-25 | 2022-05-13 | 西北大学 | Ultrasonic sensor based on conical multi-core optical fiber |
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Effective date of registration: 20200717 Address after: No. 1122 Yuanshen Road, China (Shanghai) Free Trade Pilot Area, Pudong New Area, Shanghai, 200122 Applicant after: STATE GRID SHANGHAI MUNICIPAL ELECTRIC POWER Co. Applicant after: XI'AN MAORONG ELECTRIC POWER EQUIPMENT Co.,Ltd. Applicant after: Northwestern Polytechnical University Address before: No. 1122 Yuanshen Road, China (Shanghai) Free Trade Pilot Area, Pudong New Area, Shanghai, 200122 Applicant before: STATE GRID SHANGHAI MUNICIPAL ELECTRIC POWER Co. Applicant before: EAST CHINA ELECTRIC POWER RESEARCH INSTITUTE Co.,Ltd. Applicant before: XI'AN MAORONG ELECTRIC POWER EQUIPMENT Co.,Ltd. Applicant before: Northwestern Polytechnical University |
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