CN109839514A - A kind of high-precision optical accelerometer with from zeroing function - Google Patents
A kind of high-precision optical accelerometer with from zeroing function Download PDFInfo
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- CN109839514A CN109839514A CN201910209227.XA CN201910209227A CN109839514A CN 109839514 A CN109839514 A CN 109839514A CN 201910209227 A CN201910209227 A CN 201910209227A CN 109839514 A CN109839514 A CN 109839514A
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- beryllium copper
- plane mirror
- copper reed
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- unit
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Abstract
The invention discloses a kind of high-precision accelerometers with from zeroing function, are made of pick-up unit and sensing unit；Pick-up unit is set as vertical elastic using center fixed plate and outer ring pressure ring bunchiness by least two panels beryllium copper reed and supports, and it is fixedly mounted on cyclic annular top cover using outer ring pressure ring, mass block is fixedly installed on the lower surface center of bottom beryllium copper reed, the first plane mirror is set in the bottom surface of mass block；In sensing unit the emergent light of laser successively via the reflection of second plane mirror and the first plane mirror after, be incident to the photosurface of cmos sensor；Using the output signal of cmos sensor as the detection output signal of accelerometer.The present invention can be realized highly sensitive low-frequency vibration detection, have adjustment conveniently, at low cost, the advantages such as adaptable.
Description
Technical field
The present invention relates to vibration detection field, more specifically it is a kind of can be applied to microvibration detection there is self-regulated
The high-precision optical accelerometer of zero power energy.
Background technique
Accurate survey including micro-nano three coordinate measuring machine, atomic force microscope and high-precision laser interferometer etc.
Measuring appratus will receive the influence of external interference at work, and microvibration is one of main interference factors.For example, road surface crosses one
Vehicle, someone pass by, microvibration caused by sound etc. can all interfere the use of precision instrument.Therefore, it is necessary to develop
For high-precision microvibration measuring system to realize active vibration isolation, the resolution ratio of the amplitude of system detection needs to reach micron order, and
It is able to carry out real-time high-precision measurement.
Accelerometer in the prior art, such as PZT accelerometer, sensitivity is lower, and sensitivity is generally in the water of mV/g
It is quasi-；Strain-type accelerometer is because there are temperature drifts not to be suitable for accurate measurement；The detection accuracy of FBG accelerometer is depending on its modulation
The precision of demodulation, higher cost needed for reaching high-precision；Mems accelerometer is needed using micro-processing technology, processing cost
Height, furthermore the output signal of mems accelerometer is weaker.These accelerometers are unable to satisfy the needs of the detection of microvibration.
Summary of the invention
The present invention is to avoid above-mentioned existing deficiencies in the technology, and providing one kind can be applied to microvibration inspection
That surveys has the high-precision optical accelerometer from zeroing function, to obtain high-precision microvibration detection and then realize low
The accurate inhibition of frequency microvibration, at the same it is adaptable it is strong, repacking property is stronger, it is at low cost, exempt to adjust and adjustment facilitates
Advantage.
The present invention adopts the following technical scheme that in order to solve the technical problem
The present invention have the characteristics that from the high-precision accelerometer of zeroing function to be made of pick-up unit and sensing unit；
The pick-up unit is set as vertical using center fixed plate and outer ring pressure ring bunchiness by least two panels beryllium copper reed
Elastic bearing, the vertical elastic bearing is fixedly mounted on cyclic annular top cover using outer ring pressure ring, under the beryllium copper reed of bottom
Mass block is fixedly installed on position in centre of surface, and the first plane mirror is arranged in the bottom surface of the mass block；
The sensing unit constitutes detector cavity by bottom plate and the support side plate stood upright on bottom plate, in the detection
Laser, cmos sensor and second plane mirror are respectively set in cavity；The ring-type top cover is fixed at the branch
The top of side plate is supportted, the first plane mirror in pick-up unit is in the top surface of the detection cavity, and first plane is anti-
It penetrates under the reflecting surface horizontal direction of mirror；The emergent light of the laser is successively via second plane mirror and the first plane mirror
Reflection after, be incident on the photosurface of cmos sensor；It is defeated as the detection of accelerometer using the output signal of cmos sensor
Signal out.
The present invention has the characteristics that lie also in from the high-precision accelerometer of zeroing function: the beryllium copper reed is using double circles
Ring cruciform symmetry configuration has spider, inner ring and outer ring, by being in the four of cross distribution between the spider and inner ring
The road Ge Nei spring beam is connected, by being connected in four outer course spring beams of cross distribution between the inner ring and outer ring, institute
It is staggeredly arranged between the road Shu Nei spring beam and outer course spring beam；The center fixed plate and mass block are to be in spider institute in place
It sets, the outer ring pressure ring is on the outer ring position of beryllium copper reed.
The present invention has the characteristics that lie also in from the high-precision accelerometer of zeroing function:
Two panels beryllium copper reed is set in the pick-up unit, is the first beryllium copper reed and the second beryllium copper reed respectively；
The inner ring of the pick-up unit is from top to bottom successively are as follows: the first center fixed plate for being axially fixed by screw,
The spider of one beryllium copper reed, the second center fixed plate, the spider of the second beryllium copper reed, mass block and the first plane reflection
Mirror；
The outer ring of the pick-up unit is from top to bottom successively are as follows: the first pressure ring, the first beryllium copper being axially fixed by screw
The outer ring of the outer ring of reed, the second pressure ring and the second beryllium copper reed.
The present invention has the characteristics that lie also in from the high-precision accelerometer of zeroing function: described in the sensing unit
The emergent light of laser is incident on second plane mirror with 45° angle, and the reflected light reflected by the second plane mirror is same
Sample is incident on the first plane mirror with 45° angle, by the reflected light vertical incidence of first plane mirror reflection to CMOS
The photosurface of sensor.
The present invention has the characteristics that lie also in from the high-precision accelerometer of zeroing function: the cmos sensor includes passing
Sensor ontology and photosurface；When the luminous point on original incident to photosurface occurs for ambient temperature variation or other factors influence
When offset, the luminous point current location on photosurface is determined according to the output signal of cmos sensor, and with the luminous point present bit
It sets and carries out data processing as co-ordinate zero point, realize from zeroing function.
The present invention has the characteristics that lie also in from the high-precision accelerometer of zeroing function: the pick-up unit is by more
The beryllium copper reed of different-thickness and the mass block of different quality are changed, to realize different frequency detection ranges, it is widened and answers
Use range.
The present invention has the characteristics that lie also in from the high-precision accelerometer of zeroing function: the cmos sensor is replaced
For four-quadrant photo switches, photo sensors QPD or position sensitive detectors PSD.
Compared with the prior art, the invention has the advantages that:
1, microvibration detection may be implemented in the present invention；
2, the present invention constitutes vertical elastic bearing using double beryllium copper reeds, can effectively inhibit the horizontal hunting of mass block,
Effectively improve the detection accuracy of accelerometer；
3, the present invention is using cmos sensor as sensing device, and optical path is simple, detection accuracy is high；
4, the present invention is able to achieve automatic zero set by after-treatment system, therefore using cmos sensor as sensing device
No setting is required null setting, improves the stability of accelerometer.
Detailed description of the invention
Fig. 1 is appearance schematic diagram of the present invention；
Fig. 2 is schematic diagram of internal structure of the present invention；
Fig. 3 is vibration pickup component structure diagram in the present invention；
Fig. 4 is pick-up device assembly decomposition diagram in the present invention；
Fig. 5 is reed shape schematic diagram in the present invention；
Fig. 6 is cmos sensor schematic diagram in the present invention；
Fig. 7 be in the present invention cmos sensor from zeroing function schematic diagram；
Fig. 8 is light path schematic diagram in the present invention；
Figure label: 1 pick-up unit, the first center 1a fixed plate, the first pressure ring of 1b, 1c the first beryllium copper reed, 1d second
Center fixed plate, the second pressure ring of 1e, 1f the second beryllium copper reed, 1g mass block, the first plane mirror of 1h, 2 cyclic annular top covers, 3 senses
Unit is surveyed, 4 support side plates, 5 be cmos sensor, 5b photosurface, 5c luminous point, 6 bottom plates, 7 second plane mirrors, 8 lasers,
11 spiders, 12 inner ring, 13 outer rings, road spring beam in 14,15 outer course spring beams.
Specific embodiment
Referring to Fig. 1 and Fig. 2, having in the present embodiment from the high-precision accelerometer of zeroing function is by 1 He of pick-up unit
Sensing unit 3 is constituted.
As shown in Figure 3 and Figure 4, pick-up unit 1 by least two panels beryllium copper reed using center fixed plate and outer ring pressure ring at
String is set as vertical elastic bearing, and vertical elastic bearing is fixedly mounted on cyclic annular top cover 2 using outer ring pressure ring, in bottom beryllium copper
Mass block 1g is fixedly installed on the lower surface center of reed, the first plane mirror 1h is set in the bottom surface of mass block 1g；
As shown in Fig. 2, sensing unit 3 constitutes detector cavity by bottom plate 6 and the support side plate 4 stood upright on bottom plate 6,
Laser 8, cmos sensor 5 and second plane mirror 7 is respectively set in detection cavity；Cyclic annular top cover 2 is fixed at branch
The top of side plate 4 is supportted, the first plane mirror 1h in pick-up unit 1 is in the top surface of detection cavity, the first plane mirror
Reflecting surface horizontal direction under；The emergent light of laser 8 is successively via the reflection of second plane mirror and the first plane mirror
Afterwards, it is incident on the photosurface 5b of cmos sensor 5；It is exported by the detection of accelerometer of the output signal of cmos sensor 5
Signal.
In specific implementation, as shown in Figure 4 and Figure 5, beryllium copper reed has spider using double annulus cruciform symmetry configurations
11, inner ring 12 and outer ring 13, by being connected in four road Ge Nei spring beams 14 of cross distribution between spider 11 and inner ring 12
Connect, by being connected in four outer course spring beams 15 of cross distribution between inner ring 12 and outer ring 13, interior road spring beam 14 with it is outer
It is staggeredly arranged between road spring beam 15；Center fixed plate and mass block are to be in 11 position of spider, and outer ring pressure ring is place
On the outer ring position of beryllium copper reed.
Two panels beryllium copper reed is set in pick-up unit in the present embodiment, is the first beryllium copper reed 1c and the second beryllium copper reed
1f；The inner ring of pick-up unit 1 is from top to bottom successively are as follows: the first center fixed plate 1a, the first beryllium copper being axially fixed by screw
Spider, mass block 1g and the first plane reflection of the spider of reed 1c, the second center fixed plate 1d, the second beryllium copper reed 1f
Mirror 1h；The outer ring of pick-up unit 1 is from top to bottom successively are as follows: the first pressure ring 1b, the first beryllium copper reed being axially fixed by screw
The outer ring of the outer ring of 1c, the second pressure ring 1e and the second beryllium copper reed 1f is arranged the structure type of double beryllium copper reeds, improves pick-up
Unit it is vertical to rigidity, it is suppressed that the influence that the horizontal direction of mass block is swung improves the detection accuracy of accelerometer.
Referring to Fig. 8, accelerometer response and difficulty of processing are comprehensively considered, going out for the laser 8 in sensing unit 3 is set
It penetrates light and second plane mirror 7 is incident on 45° angle, the reflected light reflected by second plane mirror 7 is equally with 45° angle incidence
To the first plane mirror 1h, by the first plane mirror 1h reflection reflected light vertical incidence to cmos sensor photosurface
5b。
Referring to Fig. 6 and Fig. 7, using cmos sensor as core sensing element in the present embodiment, determining for one
CCD sensitive area size, can determine suitable spot diameter, to ensure that hot spot will not run out of the sensitive area of CCD because of drift,
Self calibration zeroing is realized by the poster processing soft, is made accelerometer realization exempt to adjust use, is improved the reliability of accelerometer；
Cmos sensor 5 includes sensor body 5a and photosurface 5b；When ambient temperature variation or other factors influence make initially to enter
When the luminous point 5c being mapped on photosurface 5b shifts, the light on photosurface 5b is determined according to the output signal of cmos sensor 5
Point current location, and data processing is carried out using luminous point current location as co-ordinate zero point, it realizes from zeroing function.
In specific implementation, pick-up unit 3 is the mass block of the beryllium copper reed and different quality by replacement different-thickness,
To realize different frequency detection ranges, its application range is widened；Cmos sensor 5 can also be replaced with into four-quadrant photoelectricity
Sensor QPD, position sensitive detectors PSD or other photoelectric sensors may be implemented higher in the case where not changing optical path
Detection accuracy or wider range acceleration detection, widen its application range.
The model for the cmos sensor selected in the present embodiment are as follows: Basler acA4600-10uc (Basler Co.), table
1 show the performance parameter of Basler acA4600-10uc type cmos sensor, and table 2 show property achieved by the present invention
It can parameter.
Table 1
| Target surface size | 1/2.3 very little |
| Horizontal/vertical resolution | 4608×3288 |
| Resolution ratio | 14MP |
| Frame rate | 10fps |
Table 2
| Minimum detectable range measured frequency | 0.4Hz |
| Sensitivity | 17.4V/g |
| Minimum detectable range measuring acceleration | 3×10-4g |
| Noise equivalent acceleration | 16μg(Hz)-1/2 |
The present invention cooperates the vibration pickup with highly sensitive and high stability by using high-precision cmos sensor, by
High-precision outer treatment circuit, image pick-up card and the detection of self-regulated zero data based on dsp chip, may be implemented frequency
0.4Hz, acceleration is down to 3 × 10-4The microvibration of g detects, and the sensitivity of accelerometer is 17.4V/g, accurately realizes small
The detection of vibration.
Claims (7)
1. a kind of high-precision accelerometer with from zeroing function, it is characterized in that by pick-up unit (1) and sensing unit (3) structure
At；
The pick-up unit (1) is set as vertical using center fixed plate and outer ring pressure ring bunchiness by least two panels beryllium copper reed
Elastic bearing, the vertical elastic bearing are fixedly mounted on cyclic annular top cover (2) using outer ring pressure ring, the beryllium copper reed in bottom
Mass block (1g) is fixedly installed on the center of lower surface, the first plane mirror is set in the bottom surface of the mass block (1g)
(1h)；
The sensing unit (3) constitutes detector cavity by bottom plate (6) and the support side plate (4) stood upright on bottom plate (6),
Laser (8), cmos sensor (5) and second plane mirror (7) are respectively set in the detection cavity；The ring-type top cover
(2) it is fixed at the top of the support side plate (4), the first plane mirror (1h) in pick-up unit (1) is in described
The top surface for detecting cavity, under the reflecting surface horizontal direction of first plane mirror；The emergent light of the laser (8) successively passes through
After reflection by second plane mirror and the first plane mirror, it is incident on the photosurface (5b) of cmos sensor (5)；With
The output signal of cmos sensor (5) is the detection output signal of accelerometer.
2. the high-precision accelerometer according to claim 1 having from zeroing function, it is characterized in that: the beryllium copper reed
Using double annulus cruciform symmetry configurations, there is spider, inner ring and outer ring, by being in cross between the spider and inner ring
Four road Ge Nei spring beams of distribution are connected, by four outer course spring beam phases in cross distribution between the inner ring and outer ring
Connection, is staggeredly arranged between the interior road spring beam and outer course spring beam；The center fixed plate and mass block are to be in center
Disk position, the outer ring pressure ring are on the outer ring position of beryllium copper reed.
3. the high-precision accelerometer according to claim 2 having from zeroing function, it is characterized in that:
Two panels beryllium copper reed is set in the pick-up unit, is the first beryllium copper reed (1c) and the second beryllium copper reed respectively
(1f)；
The inner ring of the pick-up unit (1) is from top to bottom successively are as follows: the first center fixed plate (1a) for being axially fixed by screw,
The spider of first beryllium copper reed (1c), the second center fixed plate (1d), the second beryllium copper reed (1f) spider, mass block
(1g) and the first plane mirror (1h)；
The outer ring of the pick-up unit (1) is from top to bottom successively are as follows: the first pressure ring (1b), the first beryllium being axially fixed by screw
The outer ring of the outer ring of copper reed (1c), the second pressure ring (1e) and the second beryllium copper reed (1f).
4. the high-precision accelerometer according to claim 1 having from zeroing function, it is characterized in that: the sensing unit
(3) emergent light of the laser (8) in is incident on second plane mirror (7) with 45° angle, by second plane reflection
The reflected light of mirror (7) reflection is equally incident on the first plane mirror (1h) with 45° angle, by first plane mirror (1h)
The reflected light vertical incidence of reflection to cmos sensor photosurface (5b).
5. the high-precision accelerometer according to claim 4 having from zeroing function, it is characterized in that: the CMOS is sensed
Device (5) includes sensor body (5a) and photosurface (5b)；When ambient temperature variation or other factors influence make original incident
When luminous point (5c) on to photosurface (5b) shifts, photosurface (5b) is determined according to the output signal of cmos sensor (5)
On luminous point current location, and carry out data processing using the luminous point current location as co-ordinate zero point, realize from zeroing function.
6. the high-precision accelerometer according to claim 1 having from zeroing function, it is characterized in that: the pick-up unit
It (3) is by the mass block of the beryllium copper reed and different quality of replacing different-thickness, to realize different frequency detecting models
It encloses, widens its application range.
7. the high-precision accelerometer according to claim 1 having from zeroing function, it is characterized in that: the CMOS is passed
Sensor (5) replaces with four-quadrant photo switches, photo sensors QPD or position sensitive detectors PSD.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115015578A (en) * | 2022-06-15 | 2022-09-06 | 华中科技大学 | Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5359445A (en) * | 1987-10-30 | 1994-10-25 | Alliedsignal Inc. | Fiber optic sensor |
| GB2333601B (en) * | 1996-08-12 | 2000-07-19 | Mimosa Acoustics | Method and apparatus for measuring acoustic power flow within an ear canal |
| US20040112135A1 (en) * | 1995-08-15 | 2004-06-17 | Letrondo Norberto P. | Star patterned accelerometer reed |
| CN101285700A (en) * | 2007-04-11 | 2008-10-15 | 中国科学院半导体研究所 | Piston type optical fibre grating sonic device |
| CN101419243A (en) * | 2008-11-28 | 2009-04-29 | 中国地震局工程力学研究所 | Isotropy equilibrium acceleration sensor |
| CN101782593A (en) * | 2010-03-01 | 2010-07-21 | 龙兴武 | Double Y-shaped cavity double-frequency laser accelerometer |
| CN102045037A (en) * | 2011-01-07 | 2011-05-04 | 瑞声声学科技(深圳)有限公司 | Piezoelectric vibrator |
| CN103364068A (en) * | 2012-03-28 | 2013-10-23 | 联想(北京)有限公司 | Vibration measuring device and method |
| CN103925987A (en) * | 2013-09-27 | 2014-07-16 | 安徽省传感器厂 | Inertia moving coil type electric sensor |
| CN204154384U (en) * | 2014-10-23 | 2015-02-11 | 中国南方电网有限责任公司电网技术研究中心 | High voltage electric power equip ment sound intersity measurement probe composite shield cover |
| CN105203199A (en) * | 2015-06-30 | 2015-12-30 | 庄重 | Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system |
| CN107175194A (en) * | 2017-05-31 | 2017-09-19 | 合肥工业大学 | The one-dimensional micro-nano shake table of closed loop |
| CN108646053A (en) * | 2018-08-13 | 2018-10-12 | 湖南庄耀光电科技有限公司 | A kind of laser accelerometer |
-
2019
- 2019-03-19 CN CN201910209227.XA patent/CN109839514B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5359445A (en) * | 1987-10-30 | 1994-10-25 | Alliedsignal Inc. | Fiber optic sensor |
| US20040112135A1 (en) * | 1995-08-15 | 2004-06-17 | Letrondo Norberto P. | Star patterned accelerometer reed |
| GB2333601B (en) * | 1996-08-12 | 2000-07-19 | Mimosa Acoustics | Method and apparatus for measuring acoustic power flow within an ear canal |
| CN101285700A (en) * | 2007-04-11 | 2008-10-15 | 中国科学院半导体研究所 | Piston type optical fibre grating sonic device |
| CN101419243A (en) * | 2008-11-28 | 2009-04-29 | 中国地震局工程力学研究所 | Isotropy equilibrium acceleration sensor |
| CN101782593A (en) * | 2010-03-01 | 2010-07-21 | 龙兴武 | Double Y-shaped cavity double-frequency laser accelerometer |
| CN102045037A (en) * | 2011-01-07 | 2011-05-04 | 瑞声声学科技(深圳)有限公司 | Piezoelectric vibrator |
| CN103364068A (en) * | 2012-03-28 | 2013-10-23 | 联想(北京)有限公司 | Vibration measuring device and method |
| CN103925987A (en) * | 2013-09-27 | 2014-07-16 | 安徽省传感器厂 | Inertia moving coil type electric sensor |
| CN204154384U (en) * | 2014-10-23 | 2015-02-11 | 中国南方电网有限责任公司电网技术研究中心 | High voltage electric power equip ment sound intersity measurement probe composite shield cover |
| CN105203199A (en) * | 2015-06-30 | 2015-12-30 | 庄重 | Ultra-high sensitivity vibration sensor based on micro-nano scale material optical mechanical and electrical system |
| CN107175194A (en) * | 2017-05-31 | 2017-09-19 | 合肥工业大学 | The one-dimensional micro-nano shake table of closed loop |
| CN108646053A (en) * | 2018-08-13 | 2018-10-12 | 湖南庄耀光电科技有限公司 | A kind of laser accelerometer |
Non-Patent Citations (1)
| Title |
|---|
| 李瑞君 等: "基于DVD 光学读取头的悬臂式低频加速度计", 《机械工程学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115015578A (en) * | 2022-06-15 | 2022-09-06 | 华中科技大学 | Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure |
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