CN102768184A - System for Young modulus measurement of film - Google Patents
System for Young modulus measurement of film Download PDFInfo
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- CN102768184A CN102768184A CN2012102559073A CN201210255907A CN102768184A CN 102768184 A CN102768184 A CN 102768184A CN 2012102559073 A CN2012102559073 A CN 2012102559073A CN 201210255907 A CN201210255907 A CN 201210255907A CN 102768184 A CN102768184 A CN 102768184A
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Abstract
The invention discloses a system for Young modulus measurement of a film. The system comprises a pulsed laser, wherein the pulsed laser emits pulse laser, which is divided into 7/10 pulse laser and 3/10 pulse laser by a 3:7 spectroscope after being collimated and broadened by a first beam expander, and the 7/10 pulse laser is focused on the surface of a sample under test through a cylinder focusing lens to generate an acoustic surface wave signal under excitation; and the acoustic surface wave signal is converted into an electrical signal through a first detection channel and/or a second detection channel, and the electrical signal is output to a computer for processing after being displayed by an oscillograph. The system not only has the advantages of large signal amplitude, high applicability in testing environment with large disturbance and the like of the piezoelectric laser acoustic surface wave detection technology, but also inherits the advantages of rapid, accurate and non-contact measurement and high signal to noise ratio and the like of the difference confocal laser acoustic surface wave detection technology; and the system has higher applicability and wider range of applicability. Meanwhile, based on the advantage of high measurement bandwidth of the difference confocal laser acoustic surface wave detection technology, the measurement resolution is greatly improved.
Description
Technical field
The present invention relates to utilize the Young modulus field of Laser Ultrasonic Technique MEASUREMENTS OF THIN, relate in particular to a kind of system that the film Young modulus is measured that is used for.
Background technology
In recent years, Laser Ultrasonic Technique is obtaining extensive concern aspect the measuring mechanical characteristics such as film Young modulus, and in laser ultrasonic system, the surface acoustic wave Detection Techniques emerge in an endless stream.In the present technology; Piezoelectricity laser sonic surface wave detection technique based on PVDF (Kynoar) film is the technology that widely adopts; PVDF piezoelectric membrane acoustic impedance matching properties is good, and responsive bandwidth is big, power electricity converting sensitivity advantages of higher; Make piezoelectricity laser sonic surface wave detection system based on the PVDF film have measurement bandwidth (up to 120MHz), and have excellent measurement stability (the uncertainty of measurement error is ± 1%) far above general optical detection system.
Based on the responsive difference confocal laser surface acoustic wave detection technique that detects of light deflection be during the optical non-contact surface acoustic wave detects faster, accurately and the higher measuring technique of degree of accuracy, the light deflection sensitivity detects the system that guaranteed and has the high sensitivity and the ability of response fast in this technology; Measure bandwidth and be extended to 300MHz, improved the resolution characteristic of system the high-frequency sound surface wave signal; Adopt the sample of signal of differential type, eliminated common mode interference such as the fluctuation of detector luminous power, surrounding air convection current and electronic noise, improved the signal to noise ratio (S/N ratio) of system; And this technology is not damaged, non-contact measurement, is specially adapted to the ultra-clean test environment that integrated circuit etc. requires.
Above-described two kinds of surface acoustic wave detection techniques, though aspect the measurement of film Young modulus, have excellence in the characteristic of other detection techniques, in some particular sample, respectively there is weak point special screne test aspect.For example: based on the piezoelectric effect device (publication number: CN102252967A of PVDF piezoelectric membrane LSAW location; Open day: the four-quadrant surface acoustic wave of announcing on November 23rd, 2011) detected; Though it has improved measuring accuracy to a certain extent; But it remains contact and detects, and can not be used to measure the sample that material is soft, porosity is high, and be difficult to be applicable to the super-clean environment that requires in the integrated circuit; LSAW positioning measurment system (publication number: CN102221397A based on the Sagnac interferometer; Open day: the method that afterwards detects was located by the elder generation that announces on October 19th, 2011); Though can accurately locate the position of surface acoustic wave in time, thereby carry out more high-precision measurement, it is based on the non-contact measurement of optics all the time; Can not be used to measure the sample that reflection coefficient is low, transparency is high, and receive the influence that noise in the environment etc. disturbs easily.
Summary of the invention
The invention provides a kind of system that the film Young modulus is measured that is used for, the present invention has realized under different scenes the measurement of different samples has been realized cross validation, has avoided The noise, sees hereinafter for details and describes:
A kind of system that is used for the measurement of film Young modulus; Comprise: pulsed laser; Said pulsed laser emission pulse laser is behind the first beam expanding lens collimator and extender; Be divided into 7/10 pulse laser and 3/10 pulse laser by the 3:7 spectroscope, said 7/10 pulse laser excites to produce the surface acoustic wave signal through the surface of cylindrical focusing lens focus at sample;
Said surface acoustic wave signal converts electric signal into through first sense channel and/or second sense channel, and handles through being transferred to computing machine after the oscillograph demonstration.
Said first sense channel comprises: piezoelectric probe,
After PVDF piezoelectric film sensor under the said piezoelectric probe detects said surface acoustic wave signal, be said electric signal with said surface acoustic wave conversion of signals; Said 3/10 pulse laser triggers photodiode as trigger pip, exports said electric signal to amplifier through lead, and the signal after being amplified by filtering arrives said oscillograph, and said oscillograph obtains said electric signal.
Said second sense channel comprises: the He-Ne laser instrument of 632.8nm,
The He-Ne laser instrument of said 632.8nm sends detection light; Behind the second beam expanding lens collimator and extender; Produced transmitted light by the polarization of 1:1 polarization spectroscope; Said transmitted light focuses on the surface of sample behind first plane mirror, λ/4 wave plates and first condenser lens; Obtain behind the said surface acoustic wave signal through producing reflected light behind said first condenser lens, said λ/4 wave plates, said first plane mirror and the said 1:1 polarization spectroscope, said reflected light transfers to the 1:1 spectroscope and is divided into the first via reflected light and the second road reflected light; Said first via reflected light gets into a detection mouth of difference photodetector behind second plane mirror, first diaphragm, second condenser lens and first optical filter; Said the second road reflected light gets into another detection mouth of said difference photodetector behind the 3rd plane mirror, second diaphragm, the 3rd condenser lens and second optical filter; Said difference photodetector is exported said electric signal and is transferred to said oscillograph, and said oscillograph obtains said electric signal.
Said first optical filter and said second optical filter are specially: wavelength is the spike interference filter of 632.8nm.
The beneficial effect of technical scheme provided by the invention is: this system not only have piezoelectricity laser sonic surface wave detection technique signal amplitude big, in the big test environment of disturbance advantages such as applicability is strong; Also inherited difference confocal laser surface acoustic wave detection technique fast, accurately, advantages such as non-cpntact measurement and signal to noise ratio (S/N ratio) height; Applicability is stronger, and the scope of application is wider.Simultaneously, based on the advantage of difference confocal laser surface acoustic wave detection technique high measurement bandwidth, integrated system has the measurement bandwidth higher than conventional measurement techniques, has improved Measurement Resolution greatly, has following advantage:
1. inherited the advantage of the confocal two kinds of LSAW detection techniques of piezoelectricity and difference; Two sense channels respectively have weak point when using separately, can remedy deficiency separately each other, performance advantage separately after integrated; Make measurement effect reach optimum, table 1 has been listed the relative merits of two detection techniques.
2. two sense channels are arranged, and the user can select to be suitable for the detection mode of specific sample and scene as the case may be flexibly, has listed the sample and the test scene of two each self application of passage in the table 2.
3. the sample and the test scene that are suitable for simultaneously for two sense channels can be realized the real-time, interactive checking, guarantee measurement result accurately and reliably; The surface acoustic wave signal can directly obtain the measurement result of film Young modulus after treatment, need not to contrast with traditional nano-hardness tester measurement result again, has simplified film Young modulus measuring process.
4. repeatable the detection, under the condition that condition does not change, the identical sample of duplicate measurements can obtain identical Wave data.
Description of drawings
Fig. 1 is a kind of structural representation that is used for the system of film Young modulus measurement provided by the invention.
In the accompanying drawing, the list of parts of each label representative is following:
1: pulsed laser; 2: the first beam expanding lenss;
The 3:3:7 spectroscope; 4: the cylindrical focusing lens;
5: sample; 6: objective table;
The 7:He-Ne laser instrument; 8: the second beam expanding lenss;
The 9:1:1 polarization spectroscope; 10: the first plane mirrors;
11: λ/4 wave plates; 12: the first condenser lenses;
The 13:1:1 spectroscope; 14: the second plane mirrors;
15: the first diaphragms; 16: the three plane mirrors;
17: the second diaphragms; 18: the second condenser lenses;
19: the three condenser lenses; 20: the first optical filters;
21: the second optical filters; 22: the difference photodetector;
23: piezoelectric probe; The 24:PVDF piezoelectric film sensor;
25: amplifier; 26: photodiode;
27: oscillograph; 28: computing machine.
Embodiment
For making the object of the invention, technical scheme and advantage clearer, will combine accompanying drawing that embodiment of the present invention is done to describe in detail further below.
In order to be implemented under the different scenes measurement to different samples, realize cross validation, avoid The noise, the embodiment of the invention provides a kind of system that the film Young modulus is measured that is used for, and referring to Fig. 1, sees hereinafter for details and describes:
A kind of system that is used for the measurement of film Young modulus; Comprise: pulsed laser 1; Pulsed laser 1 emission pulse laser behind first beam expanding lens, 2 collimator and extenders, by 3:7 spectroscope 3 separated into two parts, 7/10 pulse laser and 3/10 pulse laser; 7/10 pulse laser focuses on the surface of sample 5 through cylindrical focusing lens 4, excites to produce the surface acoustic wave signal; The surface acoustic wave signal converts electric signal into through first sense channel and/or second sense channel, and handles through being transferred to computing machine 28 after oscillograph 27 demonstrations.
During concrete the realization, realized that through first sense channel PVDF piezoelectric membrane surface acoustic wave detects; Realized that through second sense channel confocal surface acoustic wave of difference detects.
Wherein, when specifically realizing, tested article 5 are placed on the objective table 6.
Wherein, 28 pairs of electric signal of computing machine carry out computing, realize the measurement to the film Young modulus, and concrete calculation procedure is conventionally known to one of skill in the art, and the embodiment of the invention is not done at this and given unnecessary details.
Wherein, first sense channel comprises: piezoelectric probe 23 after the PVDF piezoelectric film sensor 24 under the piezoelectric probe 23 detects the surface acoustic wave signal, is an electric signal with the surface acoustic wave conversion of signals, is exaggerated device 25 filtering then and amplifies; 3/10 pulse laser triggers photodiode 26 as trigger pip, exports electric signal to amplifier 25 through lead, and the signal after being amplified by filtering arrives oscillograph 27, and oscillograph 27 obtains electric signal.
Wherein, Second sense channel comprises: the He-Ne laser instrument 7 of 632.8nm; 632.8nm He-Ne laser instrument 7 send detection light; Behind second beam expanding lens, 8 collimator and extenders, produced transmitted lights by 1:1 polarization spectroscope 9 polarization, transmitted light focuses on the surface of sample 5 behind first plane mirror 10, λ/4 wave plates 11 and first condenser lens 12; Obtain behind the surface acoustic wave signal through first condenser lens 12, λ/4 wave plate 13, first plane mirror 10 and 1:1 polarization spectroscope 9 backs and produce reflected light, reflected light transfers to 1:1 spectroscope 13 and is divided into the first via reflected light and the second road reflected light; First via reflected light gets into of difference photodetector 22 and surveys mouthful behind second plane mirror 14, first diaphragm 15, second condenser lens 18 and first optical filter 20; The second road reflected light behind the 3rd plane mirror 16, second diaphragm 17, the 3rd condenser lens 19 and second optical filter 21, get into difference photodetector 22 another survey mouthful; Difference photodetector 22 output electric signal also transfer to oscillograph 27, and oscillograph 27 obtains electric signal.
Wherein, can regulate the diameter and the incident intensity of incident beam through first diaphragm 15 and second diaphragm 17.
Further, in order to eliminate the influence of parasitic light, first optical filter 20 and second optical filter 21 are preferably: wavelength is the spike interference filter of 632.8nm.
Wherein, When realizing that through second sense channel confocal surface acoustic wave of difference detects, at first to regulate the position of second plane mirror 14 and the 3rd plane mirror 16, guarantee that first via reflected light has identical optical path difference with the second road reflected light; Then through regulating the position of 1:1 spectroscope 13; The two-beam that gets into difference photodetector 22 being equated by force, amplify difference channel because difference photodetector 22 inside are broadbands, is zero so at this moment export signal.When the focusing He-Ne spot area on the sample 5 has the surface acoustic wave process; Folded light beam produces the trace skew because of reflection angle changes; Cause the catoptrical intensity that two bundles incide difference photodetector 22 to change; Corresponding output also changes, thereby can detect the ultrasonic surface wave on the sample 5.
The relative merits of table 1 liang detection technique
The sample and the test scene of table 2 liang each self application of sense channel
Its workflow is when realizing that through first sense channel PVDF piezoelectric membrane surface acoustic wave detects:
Pulsed laser 1 emission pulse laser is behind first beam expanding lens, 2 collimator and extenders; By 3:7 spectroscope 3 separated into two parts; 7/10 pulse laser and 3/10 pulse laser, 7/10 pulse laser focuses on the surface of sample 5 through cylindrical focusing lens 4, excites to produce the surface acoustic wave signal; After PVDF piezoelectric membrane detector 24 below the piezoelectric probe 23 detects the surface acoustic wave signal; 3/10 pulse laser triggers photodiode 26 as trigger pip; Pass through energy conversion; By lead electric signal is outputed to amplifier 25, the signal after being amplified by filtering arrives oscillograph 27, gets into computing machine 28 at last and carries out the electric signal processing.
Its workflow is when realizing that through second sense channel confocal surface acoustic wave of difference detects:
Pulsed laser 1 emission pulse laser is behind first beam expanding lens, 2 collimator and extenders; By 3:7 spectroscope 3 separated into two parts; 7/10 pulse laser and 3/10 pulse laser, 7/10 pulse laser focuses on the surface of sample 5 through cylindrical focusing lens 4, excites to produce the surface acoustic wave signal; Wavelength is the detection light that the He-Ne laser instrument 7 of 632.8nm sends; Through being polarized by 1:1 polarization spectroscope 910 behind first beam expanding lens, 8 beam-expanding collimations; Make wherein transmitted light behind first plane mirror 10, λ/4 wave plates 11 and first condenser lens 12, focus on the surface of sample 5, return by former road after obtaining surface acoustic wave.Because survey the polarisation of light direction and change 90 ° through λ/4 wave plates for twice, when arriving 1:1 polarization spectroscope 9 once more, transmissive can only not be reflected.This reflected light arrives 1:1 spectroscope 13 and is divided into two-way light, and wherein first via reflected light gets into of difference photodetectors 22 through second plane mirror 14, first diaphragm 15, second condenser lens 18 and first optical filter, 20 backs and surveys mouthful.The second road reflected light gets into another detection mouth of difference photodetector 22 through the 3rd plane mirror 16, the second diaphragms 17, the three condenser lenses 19, the second optical filters 21 backs.At last, the output electric signal of difference photodetector 22 is shown by oscillograph 27, and sends into computing machine 28 and handle.
Its workflow is when realizing that through first sense channel and second sense channel PVDF piezoelectric membrane surface acoustic wave and the confocal surface acoustic wave of difference detect:
First sense channel and second sense channel will be worked simultaneously, when regulating, because second sense channel is complicated more, at first will regulates second sense channel according to actual conditions, and then regulate first sense channel.First sense channel and the detected electric signal of second sense channel can be simultaneously show and store at oscillograph 27, can intuitively compare first sense channel and second sense channel test case to same sample 5 under identical environment.
Wavelength is the detection light that the He-Ne laser instrument 7 of 632.8nm sends; Through being polarized by 1:1 polarization spectroscope 9 behind first beam expanding lens, 8 beam-expanding collimations; Make wherein transmitted light behind first plane mirror 10, λ/4 wave plates 11 and first condenser lens 12, focus on the surface of sample 5, return by former road after obtaining surface acoustic wave.Because survey the polarisation of light direction and change 90 ° through λ/4 wave plates for twice, when arriving 1:1 polarization spectroscope 9 once more, transmissive can only not be reflected.This reflected light arrives 1:1 spectroscope 13 and is divided into two-way light, and wherein first via reflected light gets into of difference photodetectors 22 through second plane mirror 14, first diaphragm 15, second condenser lens 18 and first optical filter, 20 backs and surveys mouthful.The second road reflected light gets into another detection mouth of difference photodetector 22 through the 3rd plane mirror 18, the second diaphragms 17, the three condenser lenses 19, the second optical filters 21 backs.At last, the output electric signal of difference photodetector 22 is shown by oscillograph 27, and sends into computing machine 28 and handle.
In sum; The embodiment of the invention provides a kind of system that the film Young modulus is measured that is used for; This this system not only have piezoelectricity laser sonic surface wave detection technique signal amplitude big, in the big test environment of disturbance advantages such as applicability is strong; Also inherited difference confocal laser surface acoustic wave detection technique fast, accurately, advantages such as non-cpntact measurement and signal to noise ratio (S/N ratio) height, applicability is stronger, the scope of application is wider.Simultaneously, based on the advantage of difference confocal laser surface acoustic wave detection technique high measurement bandwidth, integrated system has the measurement bandwidth higher than conventional measurement techniques, has improved Measurement Resolution greatly.
It will be appreciated by those skilled in the art that accompanying drawing is the synoptic diagram of a preferred embodiment, the invention described above embodiment sequence number is not represented the quality of embodiment just to description.
The above is merely preferred embodiment of the present invention, and is in order to restriction the present invention, not all within spirit of the present invention and principle, any modification of being done, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (4)
1. one kind is used for the system that the film Young modulus is measured; Comprise: pulsed laser (1); Said pulsed laser (1) emission pulse laser is behind first beam expanding lens (2) collimator and extender; Be divided into 7/10 pulse laser and 3/10 pulse laser by 3:7 spectroscope (3), said 7/10 pulse laser focuses on the surface of sample (5) through cylindrical focusing lens (4), excites to produce the surface acoustic wave signal; It is characterized in that,
Said surface acoustic wave signal converts electric signal into through first sense channel and/or second sense channel, and handles through being transferred to computing machine (28) after oscillograph (27) demonstration.
2. a kind of system that the film Young modulus is measured that is used for according to claim 1 is characterized in that said first sense channel comprises: piezoelectric probe (23),
After PVDF piezoelectric film sensor (24) under the said piezoelectric probe (23) detects said surface acoustic wave signal, be said electric signal with said surface acoustic wave conversion of signals; Said 3/10 pulse laser triggers photodiode (26) as trigger pip, exports said electric signal to amplifier (25) through lead, and the signal after being amplified by filtering arrives said oscillograph (27), and said oscillograph (27) obtains said electric signal.
3. a kind of system that the film Young modulus is measured that is used for according to claim 1 is characterized in that said second sense channel comprises: the He-Ne laser instrument (7) of 632.8nm,
The He-Ne laser instrument (7) of said 632.8nm sends detection light; After crossing second beam expanding lens (8) collimator and extender; Produced transmitted light by 1:1 polarization spectroscope (9) polarization; Said transmitted light focuses on the surface of sample (5) behind first plane mirror (10), λ/4 wave plates (11) and first condenser lens (12); Produce reflected light through said first condenser lens (12), said λ/4 wave plates (11), said first plane mirror (10) and said 1:1 polarization spectroscope (9) back after obtaining said surface acoustic wave signal, said reflected light transfers to 1:1 spectroscope (13) and is divided into the first via reflected light and the second road reflected light; Said first via reflected light gets into a detection mouth of difference photodetector (22) behind second plane mirror (14), first diaphragm (15), second condenser lens (18) and first optical filter (20); Said the second road reflected light gets into another detection mouth of said difference photodetector (22) behind the 3rd plane mirror (16), second diaphragm (17), the 3rd condenser lens (19) and second optical filter (21); Said difference photodetector (22) the said electric signal of output also transfers to said oscillograph (27), and said oscillograph (27) obtains said electric signal.
4. a kind of system that the film Young modulus is measured that is used for according to claim 3 is characterized in that said first optical filter (20) and said second optical filter (21) are specially: wavelength is the spike interference filter of 632.8nm.
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103054610A (en) * | 2012-11-29 | 2013-04-24 | 华南师范大学 | Photoacoustic imaging device free of limitation of ultrasonic transducer frequency bands and detection method of photoacoustic imaging device |
CN104897578A (en) * | 2015-06-09 | 2015-09-09 | 天津大学 | Detection method of detecting Young modulus of anisotropic material surface layer based on surface acoustic wave |
CN105078412A (en) * | 2015-07-07 | 2015-11-25 | 上海理工大学 | Tissue elasticity analysis method and device based on opticoacoustic spectral analysis |
CN105203461A (en) * | 2015-09-17 | 2015-12-30 | 天津大学 | Method for detecting piezoelectric material surface layer Young modulus through laser acoustic surface waves |
CN108693247A (en) * | 2017-04-07 | 2018-10-23 | 天津大学 | Laser sonic surface wave detection system and its application method based on double measuring beams |
CN109521090A (en) * | 2018-10-18 | 2019-03-26 | 天津大学 | A kind of optimization method of laser nondestructive characterisation (NDC) film Young's modulus |
CN110220975A (en) * | 2018-03-01 | 2019-09-10 | 国家电投集团科学技术研究院有限公司 | Laser-ultrasound modulus measuring device |
CN111157617A (en) * | 2019-11-21 | 2020-05-15 | 南京理工大学 | System and method for measuring temperature-dependent Young modulus of solid material |
CN112285505A (en) * | 2020-10-27 | 2021-01-29 | 国网重庆市电力公司电力科学研究院 | GIS detection imaging device based on laser focusing enhancement technology |
CN112285506A (en) * | 2020-10-27 | 2021-01-29 | 国网重庆市电力公司电力科学研究院 | Laser ultrasonic focusing detection imaging system |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001208729A (en) * | 2000-01-24 | 2001-08-03 | Toshiba Corp | Defect detector |
KR20110106211A (en) * | 2010-03-22 | 2011-09-28 | 장원권 | Method for diagnosing performance of a surface acoustic wave device using laser interference |
CN102221397A (en) * | 2011-04-06 | 2011-10-19 | 天津大学 | LSAW positioning measuring system based on Sagnac interferometer |
CN102252967A (en) * | 2011-04-06 | 2011-11-23 | 天津大学 | Piezoelectric detection device based on LSAW (laser surface acoustic wave) locating of PVDF (Polyvinylidene Fluoride) piezoelectric thin film |
CN202748307U (en) * | 2012-07-19 | 2013-02-20 | 天津大学 | System for measuring thin film Young modulus |
-
2012
- 2012-07-19 CN CN2012102559073A patent/CN102768184A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001208729A (en) * | 2000-01-24 | 2001-08-03 | Toshiba Corp | Defect detector |
KR20110106211A (en) * | 2010-03-22 | 2011-09-28 | 장원권 | Method for diagnosing performance of a surface acoustic wave device using laser interference |
CN102221397A (en) * | 2011-04-06 | 2011-10-19 | 天津大学 | LSAW positioning measuring system based on Sagnac interferometer |
CN102252967A (en) * | 2011-04-06 | 2011-11-23 | 天津大学 | Piezoelectric detection device based on LSAW (laser surface acoustic wave) locating of PVDF (Polyvinylidene Fluoride) piezoelectric thin film |
CN202748307U (en) * | 2012-07-19 | 2013-02-20 | 天津大学 | System for measuring thin film Young modulus |
Non-Patent Citations (4)
Title |
---|
BAI MAOSEN ET AL: "Young’s modulus determination of low-k porous films by wide-band DCC/LD LSAW", 《JOURNAL OF SEMICONDUCTORS》 * |
白茂森 等: "应用于激光超声检测的新型光偏转探测技术", 《传感器与微系统》 * |
白茂森: "激光声表面波法测量薄膜杨氏模量的理论与系统研究", 《中国博士学位论文全文数据库》 * |
郝晶晶 等: "利用PVDF传感器检测激光超声的实验研究", 《应用光学》 * |
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CN103054610A (en) * | 2012-11-29 | 2013-04-24 | 华南师范大学 | Photoacoustic imaging device free of limitation of ultrasonic transducer frequency bands and detection method of photoacoustic imaging device |
CN103054610B (en) * | 2012-11-29 | 2014-11-05 | 华南师范大学 | Photoacoustic imaging device free of limitation of ultrasonic transducer frequency bands and detection method of photoacoustic imaging device |
CN104897578A (en) * | 2015-06-09 | 2015-09-09 | 天津大学 | Detection method of detecting Young modulus of anisotropic material surface layer based on surface acoustic wave |
CN105078412A (en) * | 2015-07-07 | 2015-11-25 | 上海理工大学 | Tissue elasticity analysis method and device based on opticoacoustic spectral analysis |
CN105203461A (en) * | 2015-09-17 | 2015-12-30 | 天津大学 | Method for detecting piezoelectric material surface layer Young modulus through laser acoustic surface waves |
CN105203461B (en) * | 2015-09-17 | 2018-03-13 | 天津大学 | The method of laser sonic surface wave detection piezoelectric top layer Young's modulus |
CN108693247A (en) * | 2017-04-07 | 2018-10-23 | 天津大学 | Laser sonic surface wave detection system and its application method based on double measuring beams |
CN108693247B (en) * | 2017-04-07 | 2020-09-01 | 天津大学 | Laser surface acoustic wave detection system based on double measuring beams and use method thereof |
CN110220975A (en) * | 2018-03-01 | 2019-09-10 | 国家电投集团科学技术研究院有限公司 | Laser-ultrasound modulus measuring device |
CN109521090A (en) * | 2018-10-18 | 2019-03-26 | 天津大学 | A kind of optimization method of laser nondestructive characterisation (NDC) film Young's modulus |
CN111157617A (en) * | 2019-11-21 | 2020-05-15 | 南京理工大学 | System and method for measuring temperature-dependent Young modulus of solid material |
CN111157617B (en) * | 2019-11-21 | 2022-06-24 | 南京理工大学 | System and method for measuring temperature-dependent Young modulus of solid material |
CN112285505A (en) * | 2020-10-27 | 2021-01-29 | 国网重庆市电力公司电力科学研究院 | GIS detection imaging device based on laser focusing enhancement technology |
CN112285506A (en) * | 2020-10-27 | 2021-01-29 | 国网重庆市电力公司电力科学研究院 | Laser ultrasonic focusing detection imaging system |
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Application publication date: 20121107 |