CN103335704A - Vibration measurement device for laser interference rotor and measurement method thereof - Google Patents
Vibration measurement device for laser interference rotor and measurement method thereof Download PDFInfo
- Publication number
- CN103335704A CN103335704A CN2013102677572A CN201310267757A CN103335704A CN 103335704 A CN103335704 A CN 103335704A CN 2013102677572 A CN2013102677572 A CN 2013102677572A CN 201310267757 A CN201310267757 A CN 201310267757A CN 103335704 A CN103335704 A CN 103335704A
- Authority
- CN
- China
- Prior art keywords
- rotor
- spectroscope
- lens
- speed
- measurement point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention provides a technical scheme of a vibration measurement device for a laser interference rotor and a measurement method thereof. The scheme can simultaneously detect bending vibration and torsional vibration of a high-speed rotor based on beat frequency generated by laser Doppler effect, realizes frequency modulation measurement of a vibration signal under the condition of not using an expensive frequency shift device, and precisely distinguishes the directions of bending vibration and torsional vibration, has very strong anti-environment disturbance capability, and is low in manufacturing cost. The scheme belongs to non-contact measurement, the motion state of the to-be-measured rotor is free from interference, the accuracy in measurement is high, the response speed is fast, the dynamic range is wide, and the measurement can be performed at a further distance. The processing error of the rotor and measurement interference of torsional vibration and bending vibration from other vibration states are small.
Description
Technical field
What the present invention relates to is a kind of laser velocimeter device and measuring method, especially a kind of laser interference rotor vibration measuring device and measuring method thereof.
Background technology
In the prior art, technique known is: rotor is functional part the most general in the plant equipment, and its performance has decisive influence to equipment complete machine performance.Along with the development of mechanized equipment to high-speed, high precision and high reliability direction, the precision measurement of rotor actual motion state, no matter be research for new equipment rotor performance, the monitoring of still equipping the actual motion state all is very important.
The measuring method of rotor oscillation generally can be divided into contact type measurement and non-contact measurement two classes.In contact type measurement, survey sensor (as foil gauge etc.) is installed on the rotor, and along with rotor rotates together, measuring-signal transmits by collector ring or wireless transmit mode; In non-contact measurement, survey sensor (as electric capacity, inductance, eddy current sensor etc.) is installed on the support, and measuring-signal can be connected directly to surveying instrument by lead-in wire.Contact type measurement is except the special signal transmitting apparatus of needs, and there is interference in additional measurement mechanism inevitably to the running status of measured rotor; Though conventional non-cpntact measurement has overcome the weak point of contact measurement to a certain extent, but also exist the real motion state that measuring-signal does not directly reflect device, require the very close measured rotor in fixed position of sensor simultaneously, this has also brought many inconveniences.
Laser-Doppler vibration velocity measuring technique is that laser beam is focused on the measurement point that shines in moving object, and Doppler shift will take place its scattering laser, interferes with original laser beam generation beat, by measuring the movement velocity that difference frequency obtains the object measurement point.This technology belongs to laser interferometry, and Doppler shift and measuring point movement velocity are linear, and have the spatial resolution height, measure highly sensitive, response speed fast, the scope of kinetic measurement is big, be subjected to advantages such as environmental baseline and Temperature Influence are little.In addition, this technology belongs to non-cpntact measurement, and measurement mechanism can be measured the movement velocity of measuring point in larger distance.Be very suitable with its precision measurement that applies to high speed rotor vibration.
At present generally only can measure the individual event vibration based on the laser-Doppler frequency shift effect to the rotor oscillation measurement mechanism, use torsiograph comparatively generally, only can measure the flexural vibrations that the twisting vibration of rotor specified cross-section can't be measured rotor, this is the existing in prior technology weak point.
Summary of the invention
Purpose of the present invention is exactly at the existing in prior technology deficiency, and the technical scheme of a kind of laser interference rotor vibration measuring device and measuring method thereof is provided, and this scheme can record flexural vibrations, the twisting vibration of rotor specified cross-section simultaneously; If adopt multichannel measurement mechanism concurrent working of the present invention (perhaps single channel measurement mechanism of the present invention changes the measuring position), also can realize comprehensive measurement of rotor operation state.
This programme is realized by following technical measures: a kind of laser interference rotor vibration measuring device and measuring method thereof, include the laser instrument that is installed on the fixed pedestal, spectroscope A, spectroscope B, spectroscope C, reflective mirror, lens A, lens B, lens A, lens B, detector A, detector B and electronic processing component; Described electronic processing component is communicated with the output signal of detector A and detector B respectively;
The laser beam that laser instrument sends is divided into two-way laser through spectroscope C, and the transmission laser bundle is exploring laser light A, and reflection lasering beam is exploring laser light B through the reflective mirror reflection; Exploring laser light A and exploring laser light B are parallel to each other;
Exploring laser light A passes the measurement point A that spectroscope A and lens A focus on rotor surface, surveys the speed of measurement point A; Exploring laser light B passes the measurement point B that spectroscope B and lens B focus on rotor surface, surveys the speed of measurement point B;
The scattering laser of measurement point A passes lens A and passes lens A ' again by spectroscope A reflection, gathers Jiao A in detector A as measuring beam; Exploring laser light B passes spectroscope A and lens A after reflecting through spectroscope B, also focuses on detector A as the reference light beam A; The Beat Signal that measuring beam A and reference beam A interfere changes electric signal into by detector A and exports the electric treatment parts to, the speed of difference frequency reflected measurement point A on detection direction;
The scattering laser of measurement point B passes lens B and passes lens B again by spectroscope B reflection, and in detector B, exploring laser light A passes spectroscope B and lens B after reflecting through spectroscope A as poly-Jiao B of measuring beam, and B also focuses on detector B as the reference light beam; The Beat Signal that measuring beam B and reference beam B interfere changes electric signal output electric treatment parts, the speed of difference frequency reflected measurement point B on detection direction into by detector B;
The speed of detection sum of the speed of detection of gauge point A and measurement point B is the projection of sensing point rotor rotation speed on detection direction again divided by 2, has represented the velocity of rotation of rotor, and the fluctuation of velocity of rotation is the twisting vibration speed of rotor; The difference of the speed of detection of the speed of detection of gauge point A and measurement point B is the horizontal vibration speed of rotor again divided by 2.
Preferred as this programme: the position of measurement point A and measurement point B is symmetrical in the plane that rotor center and direction of measurement determine.
Preferred as this programme: measuring beam A is parallel with reference beam A; Described measuring beam B is parallel with reference beam B.
The beneficial effect of this programme can be learnt according to the narration to such scheme: because at the difference frequency of this scheme based on the laser doppler generation, can survey flexural vibrations and the twisting vibration of high speed rotor simultaneously, the present invention does not simultaneously use expensive frequency shifter, and the frequency modulation of having realized vibration signal is measured, can clearly distinguish flexural vibrations and twisting vibration direction, very strong anti-environmental interference ability is also arranged, and low cost of manufacture, the invention belongs to laser non-contact measuring, motion state to measured rotor is noiseless, the measuring accuracy height, response speed is fast, and dynamic range is big, and can measure than distant location.The mismachining tolerance of rotor and other vibration shape disturb also very little to the measurement of twisting vibration and flexural vibrations.
This shows that the present invention compared with prior art has outstanding substantive distinguishing features and progressive significantly, the beneficial effect of its enforcement also is apparent.
Description of drawings
Fig. 1 is the structural representation of the specific embodiment of the invention.
Among the figure, 1 is laser instrument, and 2 is spectroscope C, and 3 is reflective mirror, 4 is spectroscope A, and 5 is spectroscope B, and 6 is lens A, and 7 is lens B, 8 is lens A ', and 9 is lens B ', and 10 is detector A, and 11 is detector B, 12 is electronic processing component, and 13 is exploring laser light A, and 14 is exploring laser light B, 15 is measuring beam A, and 16 is reference beam A, and 17 is measuring beam B, 18 is reference beam B, and 19 is measurement point A, and 20 is measurement point B.
Embodiment
For clearly demonstrating the technical characterstic of this programme, below by an embodiment, and in conjunction with its accompanying drawing, this programme is set forth.
By accompanying drawing as can be seen, this programme includes the laser instrument that is installed on the fixed pedestal, spectroscope A, spectroscope B, spectroscope C, reflective mirror, lens A, lens B, lens A, lens B, detector A, detector B and electronic processing component; Electronic processing component respectively with detector A and detector B data UNICOM;
The laser beam that laser instrument sends is divided into two-way laser through spectroscope C, and the transmission laser bundle is exploring laser light A, and reflection lasering beam is exploring laser light B through the reflective mirror reflection; Exploring laser light A and exploring laser light B are parallel to each other;
Exploring laser light A passes the measurement point A that spectroscope A and lens A focus on rotor surface, surveys the speed of measurement point A; Exploring laser light B passes the measurement point B that spectroscope B and lens B focus on rotor surface, surveys the speed of measurement point B;
The scattering laser of measurement point A passes lens A and passes lens A ' again by spectroscope A reflection, gathers Jiao A in detector A as measuring beam; Exploring laser light B passes spectroscope A and lens A after reflecting through spectroscope B, also focuses on detector A as the reference light beam A; The Beat Signal that measuring beam A and reference beam A interfere changes electric signal into by detector A and exports the electric treatment parts to, the speed of difference frequency reflected measurement point A on detection direction;
The scattering laser of measurement point B passes lens B and passes lens B again by spectroscope B reflection, and in detector B, exploring laser light A passes spectroscope B and lens B after reflecting through spectroscope A as poly-Jiao B of measuring beam, and B also focuses on detector B as the reference light beam; The Beat Signal that measuring beam B and reference beam B interfere changes electric signal output electric treatment parts, the speed of difference frequency reflected measurement point B on detection direction into by detector B;
The speed of detection sum of the speed of detection of gauge point A and measurement point B is the projection of sensing point rotor rotation speed on detection direction again divided by 2, has represented the velocity of rotation of rotor, and the fluctuation of velocity of rotation is the twisting vibration speed of rotor; The difference of the speed of detection of the speed of detection of gauge point A and measurement point B is the horizontal vibration speed of rotor again divided by 2.
The position of measurement point A and measurement point B is symmetrical in the plane that rotor center and direction of measurement determine.
Measuring beam A is parallel with reference beam A; Described measuring beam B is parallel with reference beam B.
Optical device is installed will guarantee that exploring laser light A is parallel with exploring laser light B, measures the light velocity with parallel with reference to the light velocity, and parallel error will be controlled 10
-4Within the radian.Will estimate the normal direction of measurement point and the angle of detection direction before the actual measurement, numerical value should be less than 15
0Will adjust entire measuring device during actual measurement, make measurement point A and measurement point B be symmetrical in rotor center and direction of measurement, balanced error should be less than 0.04
l, here
lBe the distance between exploring laser light A and the exploring laser light B.The reflective membrane that strengthens the backscattering effect should be pasted in the measurement surface of rotor, or coats the uniform reflectorised paint of thickness, to guarantee to receive enough strong scattered light.
The present invention carries out preliminary test data to typical replication experiment rotor:
1. aluminum disk type rotor Φ 250mm, thickness 25mm, rotor quality 2.7Kg, rotor speed 200r/min;
2. optical maser wavelength 632.8nm, laser power 10mw, exploring laser light beam distance 25mm;
3. handle with the laggard line data of actual speed correcting measuring system.Recording the twisting vibration amplitude is 5.4r/min, is irregular oscillation, and frequency is approximately 0.4Hz; Record flexural vibrations amplitude 13.8mm/s, frequency and rotational synchronization also are 200r/min, are the simple harmonic oscillation of rule.
High speed rotor bending-twisting vibration comprehensive measuring method and measurement mechanism based on the laser-Doppler frequency shift effect of the present invention, the doppler shift effect that utilizes high speed rotor surface scattering laser beam to produce, the noncontact of the speed of the bending-twisting vibration of realization high speed rotor appointment section is accurately measured, and is applicable to the dynamic property research of high speed rotor and the real-time status monitoring of important high speed machine equipment.The present invention also has advantages such as detection sensitivity height, dynamic range is big, antijamming capability is strong except the bending and twisting vibration that can measure high speed rotor simultaneously.
Claims (3)
1. a laser interference rotor vibration measuring device and measuring method thereof is characterized in that: include the laser instrument that is installed on the fixed pedestal, spectroscope A, spectroscope B, spectroscope C, reflective mirror, lens A, lens B, lens A, lens B, detector A, detector B and electronic processing component; Described electronic processing component is communicated with the output signal of detector A and detector B respectively;
The laser beam that described laser instrument sends is divided into two-way laser through spectroscope C, and the transmission laser bundle is exploring laser light A, and reflection lasering beam is exploring laser light B through the reflective mirror reflection; Described exploring laser light A and exploring laser light B are parallel to each other;
Described exploring laser light A passes the measurement point A that spectroscope A and lens A focus on rotor surface, surveys the speed of measurement point A; Described exploring laser light B passes the measurement point B that spectroscope B and lens B focus on rotor surface, surveys the speed of measurement point B;
The scattering laser of described measurement point A passes lens A and passes lens A ' again by spectroscope A reflection, gathers Jiao A in detector A as measuring beam; Exploring laser light B passes spectroscope A and lens A after reflecting through spectroscope B, also focuses on detector A as the reference light beam A; The Beat Signal that described measuring beam A and reference beam A interfere changes electric signal into by detector A and exports the electric treatment parts to, the speed of difference frequency reflected measurement point A on detection direction;
The scattering laser of described measurement point B passes lens B and passes lens B again by spectroscope B reflection, gather Jiao B in detector B as measuring beam, exploring laser light A passes spectroscope B and lens B after reflecting through spectroscope A, and B also focuses on detector B as the reference light beam; The Beat Signal that described measuring beam B and reference beam B interfere changes electric signal output electric treatment parts, the speed of difference frequency reflected measurement point B on detection direction into by detector B;
The speed of detection sum of the speed of detection of described gauge point A and measurement point B is the projection of sensing point rotor rotation speed on detection direction again divided by 2, has represented the velocity of rotation of rotor, and the fluctuation of velocity of rotation is the twisting vibration speed of rotor; The difference of the speed of detection of the speed of detection of described gauge point A and measurement point B is the horizontal vibration speed of rotor again divided by 2.
2. a kind of laser interference rotor vibration measuring device according to claim 1 and measuring method thereof is characterized in that: the position of described measurement point A and measurement point B is symmetrical in the plane that rotor center and direction of measurement determine.
3. a kind of laser interference rotor vibration measuring device according to claim 1 and measuring method thereof, it is characterized in that: described measuring beam A is parallel with reference beam A; Described measuring beam B is parallel with reference beam B.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310267757.2A CN103335704B (en) | 2013-06-28 | 2013-06-28 | A kind of laser interference rotor vibration detecting device and measuring method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310267757.2A CN103335704B (en) | 2013-06-28 | 2013-06-28 | A kind of laser interference rotor vibration detecting device and measuring method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103335704A true CN103335704A (en) | 2013-10-02 |
| CN103335704B CN103335704B (en) | 2016-05-04 |
Family
ID=49243912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310267757.2A Expired - Fee Related CN103335704B (en) | 2013-06-28 | 2013-06-28 | A kind of laser interference rotor vibration detecting device and measuring method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103335704B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107328429A (en) * | 2017-08-09 | 2017-11-07 | 武汉隽龙科技股份有限公司 | The device and method for closely sensing stability can be improved in optical frequency domain reflection technology |
| CN104360095B (en) * | 2014-11-12 | 2018-01-02 | 西南科技大学 | A kind of method for measuring instantaneous rotation speed based on Beams, apparatus and system |
| CN114324963A (en) * | 2022-01-06 | 2022-04-12 | 中国人民解放军国防科技大学 | Rotating speed measuring system based on laser Doppler speed measurement |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85104475A (en) * | 1985-06-07 | 1987-02-04 | 浙江大学 | Measure the optical interferometer that solid surface velocity changes |
| CN101344375A (en) * | 2008-07-31 | 2009-01-14 | 上海微电子装备有限公司 | High resolution heterodyne laser interference system and method for improving definition |
| CN101887126A (en) * | 2010-06-27 | 2010-11-17 | 清华大学 | Double-frequency laser Doppler velocity measurement method and device |
| CN103162807A (en) * | 2013-03-02 | 2013-06-19 | 西南科技大学 | System for testing compound vibration of machine tool |
-
2013
- 2013-06-28 CN CN201310267757.2A patent/CN103335704B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85104475A (en) * | 1985-06-07 | 1987-02-04 | 浙江大学 | Measure the optical interferometer that solid surface velocity changes |
| CN101344375A (en) * | 2008-07-31 | 2009-01-14 | 上海微电子装备有限公司 | High resolution heterodyne laser interference system and method for improving definition |
| CN101887126A (en) * | 2010-06-27 | 2010-11-17 | 清华大学 | Double-frequency laser Doppler velocity measurement method and device |
| CN103162807A (en) * | 2013-03-02 | 2013-06-19 | 西南科技大学 | System for testing compound vibration of machine tool |
Non-Patent Citations (2)
| Title |
|---|
| 骆德渊等: "高速回转机械扭转振动测量的研究", 《中国激光》 * |
| 黄震等: "基于激光多普勒技术扭振测量的研究", 《光学学报》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360095B (en) * | 2014-11-12 | 2018-01-02 | 西南科技大学 | A kind of method for measuring instantaneous rotation speed based on Beams, apparatus and system |
| CN107328429A (en) * | 2017-08-09 | 2017-11-07 | 武汉隽龙科技股份有限公司 | The device and method for closely sensing stability can be improved in optical frequency domain reflection technology |
| CN107328429B (en) * | 2017-08-09 | 2023-05-09 | 武汉昊衡科技有限公司 | Device and method for improving proximity sensing stability in optical frequency domain reflection technology |
| CN114324963A (en) * | 2022-01-06 | 2022-04-12 | 中国人民解放军国防科技大学 | Rotating speed measuring system based on laser Doppler speed measurement |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103335704B (en) | 2016-05-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102944312B (en) | Method for measuring partially coherent vortex light beam topological charge number | |
| JP5669182B2 (en) | Vibration measuring apparatus and vibration measuring method by white interference method | |
| CN103884703A (en) | Light-splitting pupil laser differential motion confocal Brillouin-Raman spectrum measurement method and device | |
| CN104160294A (en) | Method for determining a change in distance by means of interferometry | |
| CN102062581B (en) | Device for measuring radial runout of axis system base based on pyramid prism | |
| CN103292744A (en) | Roll angle measuring device and method based on diffraction grating displacement | |
| CN101799318A (en) | Laser homodyne vibration detection optical system and method for processing signals by using same | |
| CN102192716A (en) | Laser interference detection method and system for dynamic indexes of rotary table | |
| CN105181298A (en) | Multiple reflection type laser con-focal long focal length measuring method and device | |
| CN102589446A (en) | High precision micro-displacement measurement apparatus and method | |
| CN104698468A (en) | Fiber optic coherent ranging device and method | |
| CN103134431A (en) | Vertical vibration displacement sensor based on Michalson fiber-optical interferometer | |
| CN102564309A (en) | Device and method for measuring micro-pore size based on fiber Bragg grating | |
| CN106425691A (en) | Laser interference principle-based precise main shaft rotation precision detecting device and method | |
| CN103900639A (en) | High-speed multi-scale vibration and deformation detecting device and method | |
| CN103335704B (en) | A kind of laser interference rotor vibration detecting device and measuring method thereof | |
| CN110440898A (en) | A kind of mechanical vibration measurement method of rotation | |
| CN103472254B (en) | Based on square wave current modulation and the laser of FP etalon light splitting from mixing velocity measuring system and method | |
| CN101799544A (en) | Space locating method and system based on sound waves | |
| CN202709996U (en) | Device capable of measuring film thickness accurately | |
| TWI502170B (en) | Optical measurement system and method for measuring linear displacement, rotation and rolling angles | |
| CN104330053B (en) | Micro- angle measurement method and device | |
| CN102927923B (en) | High-accuracy nanometer spacing detection device and detection method thereof | |
| CN112432766A (en) | Method for detecting performance of laser scanning galvanometer | |
| CN116772742A (en) | Method for measuring vibration mark depth of continuous casting square billet |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160504 Termination date: 20180628 |