CN202709996U - Device capable of measuring film thickness accurately - Google Patents
Device capable of measuring film thickness accurately Download PDFInfo
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- CN202709996U CN202709996U CN 201220340914 CN201220340914U CN202709996U CN 202709996 U CN202709996 U CN 202709996U CN 201220340914 CN201220340914 CN 201220340914 CN 201220340914 U CN201220340914 U CN 201220340914U CN 202709996 U CN202709996 U CN 202709996U
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- film thickness
- measuring
- hardware
- michelson interferometer
- catoptron
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Abstract
The utility model provides a device capable of measuring a film thickness accurately, comprising a Michelson interferometer, an image sensor CCD, a data acquisition module, a hardware and a driving circuit. The Michelson interferometer is used to generate interference fringes and is equipped with a point light source, the CCD is used to record the interference fringes generated by the Michelson interferometer and is electrically connected with the data acquisition module, and the data acquisition module is equipped with a counter which is used to count the interference fringes and transmits the counting result to the hardware; the hardware is electrically connected with the data acquisition module and is equipped with a data processing and output module which processes and outputs the information in the hardware, and the driving circuit is electrically connected with the CCD. The device capable of measuring the film thickness accurately of the utility model has the advantages of being rapid and accurate, having no damage, being large in measurement range, etc., can be widely used in the industrial production on-line detection, and also has a certain application value in the nanometer technology basic research.
Description
Technical field
The utility model relates to the optical measurement field, refers to especially a kind of device of realizing that film thickness is accurately measured.
Background technology
The machinery thicknessmeter generally has a contact and face contact type two classes, adopt the most traditional thickness measuring method, data stabilization is reliable, and sample is not had selectivity, but because this thicknessmeter can apply certain pressure at sample surfaces when carrying out thickness measure, sample is caused certain damage.The core parts of machinery thicknessmeter, i.e. it is all very responsive that measuring head and measurement regards to small vibration, so must use in laboratory environment.For fear of the vibration of self, and reduce as much as possible the impact of extraneous vibration, plant bottom case all adopts heavy and wide metal is made, and this has guaranteed the thickness measuring precision to a certain extent, has brought very large difficulty for also miniaturization and the lighting of mechanical thicknessmeter.The measuring accuracy of the mechanical thicknessmeter on the market is uneven, generally can reach about 10 μ m.
Eddy current thickness meter and magnetic thickness tester generally all are small portable apparatus, have utilized respectively eddy current principle and electromagnetic induction principle.Be exclusively used in the measurement of various specific coating thicknesses, but larger for the thickness time error of measuring film, paper.
Supersonic thickness meter is also mostly to be small portable apparatus, utilizes the ultrasonic reflections principle, can survey the thickness of metal, plastics, pottery, glass and other any ultrasound wave good conductor.Can at high temperature work, this is that the thicknessmeter of a lot of other types is not available, but the kind of test samples is had selectivity.
The utility model content
The utility model proposes a kind of device of realizing that film thickness is accurately measured, solved that measuring accuracy is inhomogeneous in the prior art, measuring error large and kind few problem of test samples, utilize optical principle to carry out thickness measuring, can reach high measuring accuracy from test philosophy, have measuring accuracy evenly, measure accurately, fast, the advantage such as not damaged and measurement range be large.
The technical solution of the utility model is achieved in that
A kind of device of realizing that film thickness is accurately measured comprises:
Michelson interferometer, described Michelson interferometer are for generation of interference fringe, and described Michelson interferometer is provided with the pointolite that produces light intensity;
CCD image sensor, described CCD is used for the interference fringe that the record Michelson interferometer produces, and described CCD and the electric connection of described data acquisition module;
Data acquisition module, described data acquisition module is provided with counter, and described counter is used for described interference fringe is counted, and described counter is delivered to described hardware with count results;
Hardware, described hardware and described data acquisition module are electrically connected, and are provided with data processing and output module in the described hardware, and described data are processed and output module is processed the information in the described hardware and export;
Driving circuit, described driving circuit and described CCD are electrically connected.
Further, described hardware is computing machine.
Further, described data processing and output module are the LabView handler module.
Further, described counter is delivered to described LabView handler module with counting structure.
Further, described pointolite is sent by laser instrument.
Further, described pointolite is located at light source incident place of described Michelson interferometer.
Further, described Michelson interferometer is provided with beam-splitter, catoptron and compensating plate.
Further, described catoptron comprises the first catoptron and the second catoptron, and described the first catoptron is mutually vertical with described the second catoptron.
Further, the accurate device of measuring of described realization film thickness further is provided with motor.
The utility model utilizes optical principle to carry out thickness measuring, can reach high measuring accuracy from test philosophy, the utlity model has fast, accurately, the advantage such as not damaged and measurement range be large.The utility model can be applicable to industrial online detection, and certain using value is also arranged in the basic research of nanometer technology simultaneously.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structured flowchart that the utility model is realized the device that film thickness is accurately measured;
Fig. 2 is the structural representation that the utility model is realized the device that film thickness is accurately measured;
Fig. 3 is the index path of the utility model michelson interferometer measurement thickness.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
With reference to Fig. 1, Fig. 2 and Fig. 3, a kind of device 1 of realizing that film thickness is accurately measured comprises Michelson interferometer 2, CCD image sensor (not shown), data acquisition module (not shown), hardware 3 and driving circuit (not shown); Described Michelson interferometer 2 is for generation of interference fringe (not shown), and described Michelson interferometer 2 is provided with the pointolite 21 that produces light intensity; Described CCD is used for the interference fringe that the record Michelson interferometer produces, and described CCD and the electric connection of described data acquisition module; Described data acquisition module is provided with counter (not shown), and described counter is used for described interference fringe is counted, and described counter is delivered to described hardware 3 with count results; Described hardware and described data acquisition module are electrically connected, and are provided with data processing and output module (not shown) in the described hardware, and described data are processed and output module is processed the information in the described hardware and export; Described driving circuit and described CCD are electrically connected.
The utility model counter is to utilize NI data collecting card and LabVIEW Development of Software Platform and go out, and described CCD is a kind of semiconductor devices, can be converted into digital signal to optical image, and with the image transfer that gathers to data acquisition module.Described driving circuit is used for driven CCD to be responded to the data image information, and the drive data acquisition module carries out digital image acquisition.
Further, described hardware 3 is computing machine.Described CCD is used for the interference fringe that the record Michelson interferometer produces, and be delivered in the computing machine and also show on computers, and because of computing machine and data processing and output module electric connection, therefore just can process the image, the data that collect on the CCD by computing machine, each parameter is adjusted.
Further, described data processing and output module are the LabView handler module.LabVIEW, English full name are Laboratory Virtual Instrument Engineering Workbench, are a kind of graphical programming languages that replaces line of text establishment application program with icon, and it can accurately read the variation of 0.5 interference fringe.
Further, described counter is delivered to described LabView handler module with counting structure.Described counter is delivered to corresponding LabView handler module in the computing machine with count results, obtains after treatment the one-tenth-value thickness 1/10 of testing sample.
Further, described pointolite 21 is sent by laser instrument.
Further, described pointolite 21 is located at light source incident place (not shown) of described Michelson interferometer 2.
Further, described Michelson interferometer 2 is provided with beam-splitter 22, catoptron (not shown) and compensating plate 24.
Further, described catoptron comprises the first catoptron 231 and the second catoptron 232, and described the first catoptron 231 is mutually vertical with described the second catoptron 232.
Further, the accurate device of measuring of described realization film thickness further is provided with motor (not shown).The setting of described motor, convenient center line and motor with testing sample is electrically connected, and realizes the rotation of testing sample by the rotation of motor, thereby can monitor the variation of interference fringe.
The optical measuring system of the utility model realization measurement film thickness at first is electrically connected Michelson interferometer, CCD, data acquisition module, hardware and driving circuit in use successively, and pointolite is opened; Then choose data collection point, the staff is arranged to mutually vertical at the first catoptron and the second catoptron, and the second catoptron has the virtual image, the first catoptron below is located in the virtual image, the virtual image is strictly parallel with the first catoptron furnishing, under the irradiation of the pointolite of expanding, the light path that all incident angles are identical, the light beam that is parallel to each other that reflects to form through described the first catoptron, pass through again the convergence of described beam-splitter and described compensating plate, will intersect at the focal plane and a bit interfere herein, by calculating, draw that striped is closeer more outward, thinner simultaneously, otherwise becoming, striped dredges chap, so the annulus interference fringe is not equally spaced, according to this phenomenon, the point that the staff chooses near the central center of circle is that reference point is carried out data acquisition; Testing sample A is placed between beam-splitter and the first catoptron, testing sample A center line is strictly parallel with the first catoptron, center line and the motor of testing sample A link together, rotation by motor, realize the rotation of testing sample A, thereby can monitor the variation of interference fringe, by the variation of these interference fringes, the processing of LabVIEW handler module in hardware can obtain the thickness of testing sample.
Determining of thickness measuring precision, according to analyzing and calculating, the testing sample rotational angle is larger, the optical path difference of Michelson interferometer two ends the first light path and the second light path changes greatly, the interference fringe that causes " emit " go out or " falling into " to enter number more, can read the variation of 0.5 interference fringe because of the utility model counter, therefore the variation of the interference fringe that the angle sum counter that rotates according to the refractive index of testing sample, testing sample is read can calculate the thickness measuring precision of testing sample.
To measure a transparent membrane as example, measure the optical measuring system of film thickness measures with the utility model realization, in the first light path, place transparent membrane to be measured, rotate film, change the optical path difference of the first light path and the second light path, interference fringe " is emitted " and is gone out or " falling into " enters, described image capture module just gets off the optical information recording of transparent membrane, process and the processing of output module by described data, with the THICKNESS CALCULATION of transparent membrane out, and output display on computers.
The utility model utilizes optical principle to carry out thickness measuring, can reach high measuring accuracy from test philosophy, the utlity model has fast, accurately, the advantage such as not damaged and measurement range be large.The utility model can be applicable to industrial online detection, and certain using value is also arranged in the basic research of nanometer technology simultaneously.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (9)
1. a device of realizing that film thickness is accurately measured is characterized in that, comprising:
Michelson interferometer, described Michelson interferometer are for generation of interference fringe, and described Michelson interferometer is provided with the pointolite that produces light intensity;
CCD image sensor, described CCD is used for the interference fringe that the record Michelson interferometer produces, and described CCD and the electric connection of described data acquisition module;
Data acquisition module, described data acquisition module is provided with counter, and described counter is used for described interference fringe is counted, and described counter is delivered to described hardware with count results;
Hardware, described hardware and described data acquisition module are electrically connected, and are provided with data processing and output module in the described hardware, and described data are processed and output module is processed the information in the described hardware and export;
Driving circuit, described driving circuit and described CCD are electrically connected.
2. the accurate device of measuring of realization film thickness as claimed in claim 1 is characterized in that, described hardware is computing machine.
3. the accurate device of measuring of realization film thickness as claimed in claim 2 is characterized in that, described data are processed and output module is the LabView handler module.
4. the accurate device of measuring of realization film thickness as claimed in claim 3 is characterized in that, described counter is delivered to described LabView handler module with counting structure.
5. the accurate device of measuring of realization film thickness as claimed in claim 4 is characterized in that, described pointolite is sent by laser instrument.
6. the accurate device of measuring of realization film thickness as claimed in claim 5 is characterized in that, described pointolite is located at light source incident place of described Michelson interferometer.
7. the device of accurately measuring such as each described realization film thickness among the claim 1-6 is characterized in that described Michelson interferometer is provided with beam-splitter, catoptron and compensating plate.
8. the accurate device of measuring of realization film thickness as claimed in claim 7 is characterized in that, described catoptron comprises the first catoptron and the second catoptron, and described the first catoptron is mutually vertical with described the second catoptron.
9. the accurate device of measuring of realization film thickness as claimed in claim 8 is characterized in that, the device that described realization film thickness is accurately measured further is provided with motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220340914 CN202709996U (en) | 2012-07-13 | 2012-07-13 | Device capable of measuring film thickness accurately |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220340914 CN202709996U (en) | 2012-07-13 | 2012-07-13 | Device capable of measuring film thickness accurately |
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| CN202709996U true CN202709996U (en) | 2013-01-30 |
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| CN 201220340914 Expired - Fee Related CN202709996U (en) | 2012-07-13 | 2012-07-13 | Device capable of measuring film thickness accurately |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105115429A (en) * | 2015-05-26 | 2015-12-02 | 雷艳梅 | Reflection-type chemical liquid applying uniformity detection method and device |
| CN107607051A (en) * | 2017-10-26 | 2018-01-19 | 京东方科技集团股份有限公司 | A kind of film thickness detecting device |
| CN108461657A (en) * | 2014-12-31 | 2018-08-28 | 上海微电子装备（集团）股份有限公司 | The frit packaging method of laser assisted |
| CN117571506A (en) * | 2024-01-15 | 2024-02-20 | 西南交通大学 | Shear modulus measuring device and method based on Michelson equal-thickness interference |
-
2012
- 2012-07-13 CN CN 201220340914 patent/CN202709996U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108461657A (en) * | 2014-12-31 | 2018-08-28 | 上海微电子装备（集团）股份有限公司 | The frit packaging method of laser assisted |
| CN108461657B (en) * | 2014-12-31 | 2019-12-20 | 上海微电子装备（集团）股份有限公司 | Laser-assisted frit encapsulation method |
| CN105115429A (en) * | 2015-05-26 | 2015-12-02 | 雷艳梅 | Reflection-type chemical liquid applying uniformity detection method and device |
| CN107607051A (en) * | 2017-10-26 | 2018-01-19 | 京东方科技集团股份有限公司 | A kind of film thickness detecting device |
| CN107607051B (en) * | 2017-10-26 | 2019-07-30 | 京东方科技集团股份有限公司 | A kind of film thickness detecting device |
| CN117571506A (en) * | 2024-01-15 | 2024-02-20 | 西南交通大学 | Shear modulus measuring device and method based on Michelson equal-thickness interference |
| CN117571506B (en) * | 2024-01-15 | 2024-03-29 | 西南交通大学 | Shear modulus measuring device and method based on Michelson equal-thickness interference |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20180713 |
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| CF01 | Termination of patent right due to non-payment of annual fee |