CN103162645B - A kind of rolling measurement method and apparatus measured based on the ellipse degree of bias - Google Patents
A kind of rolling measurement method and apparatus measured based on the ellipse degree of bias Download PDFInfo
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- CN103162645B CN103162645B CN201310073479.7A CN201310073479A CN103162645B CN 103162645 B CN103162645 B CN 103162645B CN 201310073479 A CN201310073479 A CN 201310073479A CN 103162645 B CN103162645 B CN 103162645B
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- bias
- wave plates
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Abstract
The invention discloses a kind of rolling measurement method measured based on the ellipse degree of bias, when comprising the primary importance that 1/2nd wave plates are on measured piece, line polarisation is incided in 1/2nd wave plates be slidably matched with measured piece, line polarisation through 1/2nd wave plates forms oval thickness through quarter-wave plate, described oval thickness is irradiated on the analyzer of rotation again, and the light intensity change analyzing analyzer outgoing beam obtains the first ellipse degree of bias; / 2nd wave plates are moved to the second place, obtains the second ellipse degree of bias according to the method same with the first ellipse degree of bias, the ellipse degree of bias of comparative analysis first and the second ellipse degree of bias, obtain the roll angle error between the primary importance of measured piece and the second place.The invention also discloses a kind of rolling measurement device measured based on the ellipse degree of bias.
Description
Technical field
The present invention relates to high-accuracy optical fields of measurement, particularly a kind of rolling measurement method and apparatus measured based on the ellipse degree of bias.
Background technology
Along with the development of science and technology, more and more higher to the requirement of machine error in high-precision machine tool, boats and ships, aerospace field large-scale workpiece assembling process, simultaneously in numerous machine error, it is larger that roll angle error belongs to impact, controls the error that cost compare is high.
The method of current optical measurement roll angle mainly contains following four kinds:
Based on interferometric method: although some interference system can obtain very high measurement resolution, system is too complicated, cost is high, if publication number is the roll angle measurement method disclosed in the patent documentation of CN1335483A;
Measuring method based on holographic grating diffraction: utilize holographic grating diffraction phenomena to realize to rolling angle measurement, its shortcoming is that measuring accuracy is not high, measuring head is with following cable simultaneously, cause into in-site measurement inconvenient, if publication number is the transfer angle measuring method disclosed in the patent documentation of US6316779B1;
Measuring method based on polarization benchmark: Polarization Method is a kind of method that research is more at present, but its resolution measured and stability need to strengthen further, if publication number is the roll angle measurement method disclosed in the patent documentation of CN1687701A;
Based on collimated light measuring method: the measuring principle of this method is relatively simple, utilize geometrical optics measuring principle, publication number is the method that patent document discloses a kind of collimation laser measurement roll angle of US5798828A, and the method calculates roll angle size based on parallel rays by the linearity measuring two diverse locations.Improve measurement sensistivity, need to increase the distance between collimation parallel rays, and with cable in measuring head, make troubles to scene.Chien-HungLiu is being entitled as " Developmentofalaser-basedhigh-precisionsix-degrees-of-fr eedommotionerrorsmeasuringsystemforlinearstage " (ReviewofScientificinstruments, 2005,76,055110) propose in utilize prism of corner cube retrodirective reflection, thus make systematic survey slip-on head not tape cable, thus overcome the shortcoming that slip-on head has cable, but, so, two measure light aerial light path also adding at double, and air also increases the impact of measuring.In addition, measuring the method for roll angle based on parallel rays, Measurement Resolution be improved, by increasing the distance between parallel rays, thus the volume of measuring system can only be increased.
Therefore, the requirement of roll angle error is accurately controlled in the big machineries such as current existing rolling angle measurement system, still cannot meet in high-precision machine tool, Aero-Space, Marine engineering processing assembling economically.
Summary of the invention
For overcoming the deficiencies in the prior art, promote the measuring accuracy of roll angle error, apparatus structure is simplified, the invention provides a kind of method and apparatus of high-acruracy survey roll angle error, polarized light, through 1/2nd wave plates be associated with tested track, obtains the roll angle information of track by the change of measuring outgoing light polarization angle.
Based on the rolling measurement method that the ellipse degree of bias is measured, comprise the following steps:
1) when 1/2nd wave plates are in the primary importance on measured piece, line polarisation incides 1/2nd wave plates, line polarisation through 1/2nd wave plates forms oval thickness through quarter-wave plate, described oval thickness is irradiated on the analyzer of rotation again, and the light intensity change analyzing analyzer outgoing beam obtains the first ellipse degree of bias;
2) when 1/2nd wave plates slide into the second place along measured piece, line polarisation incides 1/2nd wave plates, line polarisation through 1/2nd wave plates forms oval thickness through quarter-wave plate, described oval thickness is irradiated on the analyzer of rotation again, and the light intensity change analyzing analyzer outgoing beam obtains the second ellipse degree of bias;
3) the ellipse degree of bias of comparative analysis first and the second ellipse degree of bias, obtain the roll angle error between the primary importance of measured piece and the second place.
Preferably, the fast axle clamp angle of described line polarisation and 1/2nd wave plates is 0 °, the fast axle of quarter-wave plate is parallel with the fast axle of 1/2nd wave plates, like this when the primary importance on measured piece and the second place do not exist roll angle error, the polarized light polarization state through 1/2nd wave plates and quarter-wave plate is constant.
Present invention also offers a kind of rolling measurement device measured based on the ellipse degree of bias to comprise and arranging successively along light path:
Line polarisation generation module, comprises the light source that sends laser beam and the modulator for described laser beam being modulated into line polarisation;
Sensing module, comprises 1/2nd wave plates be slidably fitted on measured piece;
Detection module, comprises along the quarter-wave plate of light path arrangement, analyzer and light intensity detector, and the computing machine for analyzing the information of described light intensity detector.
To be measured of the present invention is guide rail or corresponding workpiece, and is provided with the pedestal be slidably matched with guide rail or workpiece, and 1/2nd described wave plates are fixed on pedestal.
Described modulator is the polarizer, is provided with condenser lens, aperture and collimation lens successively between described light source and the polarizer.Wherein aperture is positioned at the back focus place of condenser lens, and the back focus of condenser lens and the front focus of collimation lens overlap.
Principle of work of the present invention is as follows:
By the polarizer, uniform laser beam is modulated into line polarisation, line polarisation is after 1/2nd wave plates, the polarization direction of line polarisation changes, polarization direction and the fast rotational symmetry of polarization direction about 1/2nd wave plates inciding the line polarisation on 1/2nd wave plates of the line polarisation after 1/2nd wave plates.Line polarisation through 1/2nd wave plates is irradiated on quarter-wave plate, line polarisation becomes oval thickness, analyzer again by rotating, the laser intensity be irradiated on light intensity detector will fluctuate, light intensity maximal value is that analyzer polarization direction overlaps with the long axis direction of oval thickness, and light intensity minimum value is that the polarization direction of analyzer overlaps with the short-axis direction of oval thickness.By calculating the ellipse degree of bias of polarized light.By the ellipse degree of bias comparing calculation of the ellipse degree of bias that obtains in real time and initial position, real-time roll angle information can be obtained.
Optimally, the line polarisation after the polarizer is
The fast axle of 1/2nd wave plates and line polarisation angle are 0 °, are become by line polarisation after 1/2nd wave plates
Polarized light E
1during the quarter-wave plate overlapped with 1/2nd wave plates by fast axle again, linearly polarized light becomes circularly polarized light
Through the analyzer emergent light rotated be
wherein ω is frequency of light wave, ω
1for the gyro frequency of analyzer,
for under analyzer starting condition with the angle of polarized light.Can find out that, when 1/2nd wave plates do not deflect time, the emergent light light intensity through analyzer becomes complete sinusoidal variations, the ellipse degree of bias is 0.Suppose that certain rotation occurs 1/2nd wave plates, suppose that rotational angle is θ
e, then by after 1/2nd wave plates, linearly polarized light can be expressed as
Elliptically polarized light is become again by linearly polarized light during quarter-wave plate
The line polarisation expression formula obtained after polaroid when elliptically polarized light is
wherein θ
efor roll angle error, ω is frequency of light wave, ω
1for analyzer rotational frequency,
for the initial angle of analyzer, therefrom we can find out that light intensity follows θ
e, ω
1relevant with t, due to ω
1all can accurately control with t, so just θ can be obtained from intensity signal
e, i.e. the roll angle error of our needs.
In the present invention, by measuring roll angle error to the Measurement accuracy of the ellipse degree of bias, adopting and being total to the mode of road from reference, light path is the shortest, avoid the error of air and other non-co-road reason generations greatly, while having good precision, device is also closely convenient to Installation and Debugging.
Compared with prior art, the present invention has following useful technique effect:
1, system signal noise ratio is high, adopts the mode from reference, can greatly improve the signal to noise ratio (S/N ratio) of system;
2, light path is the most succinct, only has a light path in whole measuring process, participates in device few, assembles simple source of error few;
3, precision is higher, overlaps experimentally equipment can reach the precision of 2 second of arcs through inspection at this;
4, moving component is few, only has 1/2nd wave plates along with measurement base motion, can measure the roll angle error of large scale track and workpiece in whole measuring process.
Accompanying drawing explanation
Fig. 1 is the structural representation of rolling measurement device of the present invention;
Fig. 2 simulates ellipse degree of bias data result figure when roll angle error changes by 1080 second of arcs at every turn;
Fig. 3 simulates ellipse degree of bias data result figure when roll angle error changes by 2.16 second of arcs at every turn.
Embodiment
As shown in Figure 1, a kind of device measuring roll angle error by measuring the ellipse degree of bias, comprising: line polarisation generation module 1, sensing module 2, angle detection module 3.Its center line polarisation generation module 1 comprises: laser instrument 101, condenser lens 102, aperture 103, collimation lens 104, the polarizer 105.Sensing module 2 comprises: 1/2nd wave plates 201, pedestal 202.Angle detection module 3 comprises: quarter-wave plate 301, the analyzer 302 of rotation, light intensity detector 303, master control counter 304.
Wherein, laser instrument 101 sends laser beam, condenser lens 102, aperture 103, collimation lens 104, and the polarizer 105 is placed on the direction of propagation of laser beam successively, and primary optical axis overlaps with laser beam.Aperture 103 is placed on the back focal plane of condenser lens 102, and the front focal plane of collimation lens overlaps with condenser lens back focal plane.
Sensing module 2 is placed on tested track or workpiece, and be closely connected by pedestal 202 and workpiece, the primary optical axis of 1/2nd wave plates 201 overlaps substantially with laser beam.Pedestal 202 is closely slidably matched with tested track or workpiece, the roll angle error of track or workpiece can be delivered in the rotation of 1/2nd wave plates 201 accurately.Pedestal 202 linearly can slide on track and workpiece, and in the process of sliding, the primary optical axis of 1/2nd wave plates 201 overlaps substantially with laser beam.
Angle detection module 3 does not contact with measuring workpieces, laser beam is successively by quarter-wave plate 301, the analyzer 302 rotated is irradiated on light intensity detector 303, wherein laser beam overlaps with quarter-wave plate 301 and analyzer 302 primary optical axis rotated, light intensity detector 303 light-receiving mouth center overlaps with laser beam, and the analyzer 302 of rotation is connected with light intensity detector 303 difference main control computer 304.Control analyzer 302 rotating speed by main control computer 304 and read the data of light intensity detector 303.
Adopt the ellipse degree of bias of the measurement shown in Fig. 1 to measure roll angle error approach, its process is as follows:
(1) pedestal 202 is in the initial position on tested track or workpiece, and laser instrument 101 launches light beam, and line focus lens 102 focus on aperture 103, is collimated again, obtain uniform collimated light beam after aperture 103 filtering by collimation lens 104; This collimated light beam is modulated to linearly polarized light through the polarizer 105, is then irradiated to the center of 1/2nd wave plates 201, because the fast axle of 1/2nd wave plates overlaps with polarization direction, so polarization direction does not change.
(2) time initial, pedestal 202 and 1/2nd wave plates 201 motionless.Angle detection module 3, be placed on a stabilised platform, line polarisation is irradiated on quarter-wave plate 301, become oval thickness from line polarisation, when on the analyzer 302 being irradiated to rotation, analyzer 302 can by component identical for polarization direction through, the intensity signal of initial position measured by light intensity detector 303, main control computer 304 reads intensity signal, draws the ellipse degree of bias of initial position, record as the reference in measuring process according to the floating information of light intensity.
(3) in actual measurement process, pedestal 202 carries out rectilinear motion along with track or workpiece, when roll angle error exists, / 2nd wave plates 201 rotate, there is the change of twice roll angle error angle in the polarization direction through the line polarisation of 1/2nd wave plates, after line polarisation is irradiated to quarter-wave plate 301, oval thickness will be become, be irradiated on the analyzer 302 of rotation, the analyzer 302 rotated can through the identical polarized component in polarization direction with it, maximal value is wherein the component of ellipse partially round long axis direction, minimum value is the component of ellipse partially round short-axis direction, the real-time ellipse degree of bias of polarized light can be obtained by comparing calculation, track or the workpiece roll angle error at diverse location can be obtained by contrasting with the reference position in step (2).As can be seen from Fig. 2 and Fig. 3 we, by simulation roll angle error, native system can detect 1000 second of arc 2 second of arcs and even less roll angle error accurately.
Claims (3)
1., based on the rolling measurement method that the ellipse degree of bias is measured, it is characterized in that, comprise the following steps:
1) when 1/2nd wave plates are in the primary importance on measured piece, line polarisation incides 1/2nd wave plates, line polarisation through 1/2nd wave plates forms oval thickness through quarter-wave plate, described oval thickness is irradiated on the analyzer of rotation again, and the light intensity change analyzing analyzer outgoing beam obtains the first ellipse degree of bias;
The fast axle clamp angle of described line polarisation and 1/2nd wave plates is 0 °, and the fast axle of described quarter-wave plate is parallel with the fast axle of 1/2nd wave plates;
2) when 1/2nd wave plates slide into the second place along measured piece, line polarisation incides 1/2nd wave plates, line polarisation through 1/2nd wave plates forms oval thickness through quarter-wave plate, described oval thickness is irradiated on the analyzer of rotation again, and the light intensity change analyzing analyzer outgoing beam obtains the second ellipse degree of bias;
3) the ellipse degree of bias of comparative analysis first and the second ellipse degree of bias, obtain the roll angle error between the primary importance of measured piece and the second place.
2. the rolling measurement method measured based on the ellipse degree of bias as claimed in claim 1, is characterized in that, the light intensity change of described analyzer outgoing beam is collected by light intensity detector.
3. based on the rolling measurement device that the ellipse degree of bias is measured, to it is characterized in that, comprise and arranging successively along light path:
Line polarisation generation module, comprises the light source that sends laser beam and the modulator for described laser beam being modulated into line polarisation;
Described modulator is the polarizer, is provided with condenser lens, aperture and collimation lens successively between described light source and the polarizer;
Sensing module, comprises 1/2nd wave plates be slidably fitted on measured piece;
Detection module, comprises along the quarter-wave plate of light path arrangement, analyzer and light intensity detector, and the computing machine for analyzing the information of described light intensity detector;
The fast axle clamp angle of described line polarisation and 1/2nd wave plates is 0 °, and the fast axle of described quarter-wave plate is parallel with the fast axle of 1/2nd wave plates.
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Cited By (1)
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| CN108709514A (en) * | 2018-03-16 | 2018-10-26 | 华中科技大学 | A kind of compact rolling angle sensor device and measurement method |
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| TWI502170B (en) * | 2014-01-22 | 2015-10-01 | Academia Sinica | Optical measurement system and method for measuring linear displacement, rotation and rolling angles |
| CN104567744A (en) * | 2015-01-08 | 2015-04-29 | 佛山轻子精密测控技术有限公司 | Learning-type high-precision angular encoder and measurement method thereof |
| CN108278980B (en) * | 2017-12-27 | 2020-02-11 | 中国科学院长春光学精密机械与物理研究所 | Torsion angle dynamic measurement device and method based on piezoelectric deflection table |
| WO2019144254A1 (en) * | 2018-01-23 | 2019-08-01 | 大连理工大学 | Method for quickly detecting rotation angle error of linear shaft of numerical control machine tool |
| CN109813253A (en) * | 2019-02-27 | 2019-05-28 | 深圳大学 | A kind of rotary shaft rotation angle detecting device |
| CN109870120A (en) * | 2019-03-09 | 2019-06-11 | 中国人民解放军国防科技大学 | High-sensitivity monitoring system for micro angular displacement of rotating body based on laser polarization measurement |
| CN110749552B (en) * | 2019-12-02 | 2020-12-15 | 南开大学 | System and method for determining second-order nonlinear polarizability of material |
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