CN108802170A - A kind of electromechanical detection method of whole audience formula defect using electronic speckle technology - Google Patents
A kind of electromechanical detection method of whole audience formula defect using electronic speckle technology Download PDFInfo
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Abstract
The present invention relates to a kind of array Lorentz force microparticle probe methods, can be used for the microparticle in detecting conductor and defect.On the basis of Lorentz force microparticle probe method; it is arranged and is popped one's head in using array; the sample rotated N weeks with fixed speed is scanned, and monitors the variation of the cantilever Liang Sicheng caused by microparticle or defect in real time using electronic speckle Dynamic Micro-Deformation measurement method；In signal acquisition process, the angular displacement of spinning sample is detected using angular encoder, the trigger signal control high speed camera for forming specific time sequence is carried out the acquisition of speckle interference figure by certain logic sequential, can get cantilever beam displacement change curve after pressing the time sequencing processing of acquisition；Analysis finally is carried out to displacement amount variation curve and obtains Lorentz force variable quantity, and then extracts the characteristic information of defect；The sampling process of angular encoder and relevant control circuit control high speed camera is introduced in measurement process of the present invention；Measurement method is simple；Accuracy of measurement is high；Measurement efficiency is high.
Description
Technical field
The present invention relates to a kind of array Lorentz force microparticle probe method, this method can be used for defect in detecting conductor
Detection, belongs to field of non destructive testing.
Background technology
The metal materials such as pipe, wire rod and thin plate class may contain impurity (such as oxygen due to raw material and preparation process
Compound, sulfide grain etc.) hole, crackle the defects of, this will seriously affect the usage performance of material.It is clear that micro-
Grain or defect effectively detect and monitor having important production meaning.At present in metal material defect online lossless inspection
Survey technology mainly has optics, ultrasound, vortex etc..Optical detection precision is high, it is distinguishable go out specimen surface micron order defect, but it is examined
The defect measured depends on the exposed defect part size on surface after prepared by sample, exist must contingency, and nothing
Defect inside method judgment object and distribution, and more demanding, equipment complex and expensive and the quantization to defect are prepared to sample
Assessment is difficult.Ultrasound detection is limited to the frequency of ultrasonic wave, method poor accuracy, and ultrasound detection often needs couplant,
Which also limits its applications in terms of associated metal fault in material monitoring.In all kinds of methods, EDDY CURRENT high sensitivity, operation
Convenient, speed is soon and consuming is low.According to traditional EDDY CURRENT principle, EDDY CURRENT is to study the mutual pass of vortex and test specimen
A kind of conventional lossless detection method based on system.Eddy detection technology biggest advantage is that surface and near surface may be implemented
The detection of defect, but due to the adverse effect of Kelvin effect and Lift-off effect, and excitation coil and detection coil are difficult to be made
Very little determines the certain limitation of eddy current detection method, such as：Insensitive to the shape of detected object, this is to detecting such as
The bigger defect of the major diameters such as crackle is very unfavorable.Therefore develop effectively easy, non-contact, lossless detection method it is very necessary and
With important, real national economy and science and techniques of defence meaning.
University of Chinese Academy of Sciences Wang Xiaodong professor proposes：Lorentz force microparticle probe method (Deutsche Bundespatent：
102013018318.9 and 102013006182.2), as shown in Figure 1a：This method is that a kind of detected based on electromagnetic induction principle is led
The method of defect in body makes to generate relative motion between small permanent magnet and conductor to be measured, can by the Theory of Electromagnetic Field of Maxwell
Eddy current will be generated in the conductor by knowing, eddy current generates Lorentz force with permanent magnet interaction and acts on sample, root in sample
According to Newton's third law, there are a reaction force acts opposite with Lorentz force direction equal in magnitude in permanent magnet；In Fig. 1 b
It is shown：Since the presence of microparticle in metal material will cause eddy current size and distribution to change, and then act on sample
On Lorentz force and the reaction force that acts on permanent magnet also change therewith, pass through the reaction force detected on permanent magnet and become
The characteristic parameter of detectable defect is measured in change.Detection amount electromagnetic force (vector) obtained by this method is vector, this characteristic determines
Relative to traditional eddy current detection method, the information more horn of plenty of defect can be known by this method, such as would know that defect
The information such as shape, the spatial distribution of crackle.But using single permanent magnet as probe in this method, and individually permanent magnet magnetosensitive
Sensillary area domain is 1 millimeter of rank, therefore smaller to sample scans region, and the sample to be tested larger to area needs Multiple-Scan that can just obtain
Obtain the statistical information of defect in sample.It is smaller in turn herein for sensitizing range is measured in single Lorentz force microparticle probe method of popping one's head in
This relatively low problem of measurement efficiency, it is proposed that a kind of array Lorentz force microparticle probe method can be realized rapidly and accurately to leading
The defects of body is detected and is positioned.
Invention content
The purpose of the present invention is being directed to, measurement sensitizing range is smaller in single probe Lorentz force microparticle probe method and then measures
This less efficient problem, it is proposed that a kind of array Lorentz force microparticle probe method can be realized rapidly and accurately in conductor
Defect is detected and is positioned；
And in array Lorentz force microparticle probe method, in permanent magnet-cantilever beam system of space array formula arrangement
The real-time monitoring of cantilever beam displacement is the key that the probe method functionization of array Lorentz force microparticle, and without correlation in market
Method can realize the function, therefore this paper presents a kind of based on Electronic Speckle Pattern Interferometry to the Dynamic Micro-Deformation of multiple cantilever beams
Amount measures, and then keeps array Lorentz force microparticle probe method practical.The light path of Electronic speckle pattern interferometry has not
Same type, for this item purpose special applications, this instrument uses shearing electronic speckle interference light path, makes to come from tested outstanding
The reflected light of arm beam and periphery object (crossbeam for installing cantilever beam) interferes, and forms shear interference.Traditional shearing electronic
The shearing displacement of speckle interference technology will be much smaller than the size of testee, and the result measured is the spatial gradient of ohject displacement；
And shearing displacement is greater than testee size in this project, measurement result is directly the displacement of object, this measurement method
It is called big shearing electronic speckle interference technology.It should be noted that relative to common electronic speckle interference light path, (big) shearing
Electronic speckle interference light path belongs to optics common path interference, and anti-interference ability is stronger, light path reliability higher, and to testee
Global displacement (i.e. rigid body displacement) susceptibility of (including crossbeam) is lower.
The method includes：
Step 1, it is placed on turntable containing defective sample and is rotated N weeks with fixed speed；
Step 2, array arrangement permanent magnet-cantilever beam system is scanned the sample certain area of rotation, and uses
Electronic speckle Dynamic Micro-Deformation measurement method monitors the variation of the cantilever Liang Sicheng caused by microparticle or defect in real time；
Step 3, the angular displacement of angular encoder detection rotating object forms the trigger signal control high speed phase of specific time sequence
Machine is carried out acquisition (first week T in such as step 1 of speckle interference figure by certain logic sequential1Moment), that is, it obtains cantilever beam and becomes
Shape process T1The displacement at moment.
Step 4, repetition step 3, but the 2nd week T in step 11Next moment T2Carry out adopting for speckle interference figure
Collection obtains cantilever beam deformation process T2The displacement at moment.
Step 5, step 3 n-th, in n-th swing circle, the T relative to a upper swing circle (N-1) are repeatedN-1
Next moment T at momentNThe acquisition of speckle interference figure is carried out, that is, obtains cantilever beam deformation process TNThe displacement at moment.
Step 6, defect warp is obtained by the time sequencing processing of acquisition to the n times cantilever beam displacement obtained in above-mentioned steps
Cross caused cantilever beam displacement change curve when electromagnetic susceptibility area.
Step 7, Lorentz force variable quantity is obtained according to the cantilever beam displacement change curve analysis obtained in step 6, into
And obtain the characteristic information of defect.
Further, sample described in the step 1 is placed on turntable is rotated N weeks with fixed speed, contained in sample
Defect or microparticle are also moved in a circle n times with fixing linear velocity.
Further, in the step 2, each permanent magnet magnetic sensitizing range (spatial electromagnetic field distribution) phase of array arrangement
It is mutually independent, it does not interfere with each other, but in terms of measurement angle, array arrangement probe detection sensitizing range is complementary to one another, no measurement dead area, because
The arrangement mode of multiple permanent magnets is a key point of this method in this array probe.
Further, the step 2 is specifically, array arrangement permanent magnet-cantilever beam system is certain to the sample of rotation
Region is scanned because defect or microparticle contained by the sample in step 1 are moved in a circle with fixing linear velocity, when defect or
When microparticle n times pass through the specific electromagnetic susceptibility area of array arrangement permanent magnet-cantilever beam system, N occurs for corresponding cantilever beam
Secondary stress deformation process；And the cantilever beam that zero defect passes through is then without corresponding displacement, i.e., by the characteristic information of defect in sample with
The response characteristic information of array cantilever beam corresponds, and the signal that measuring probe obtains in one cycle is a series of
Pulse signal with randomness, but periodicity is then presented in n times swing circle.
Further, in the step 2, cantilever beam displacement is bigger, then the size of microparticle or heterogeneous defect is bigger；It is outstanding
Pulse signal is corresponding with microparticle or heterogeneous defect caused by the variation of arm Liang Sicheng；By to position occurs in array probe
Cantilever beam-permanent magnet systems the information for moving variation is analyzed, can position existing for defect in Fast Calibration sample.
Further, the multiple cantilever beams arranged to array using electronic speckle Dynamic Micro-Deformation instrument in the step 2
Displacement carries out while monitoring is the key that the array detection method is practical, electronic speckle Dynamic Micro-Deformation measurement method
Measurement of full field characteristic to be detected multiple cantilever beams in large area measured zone.
Further, the angular displacement of rotating disk is obtained using angular encoder and controls high speed camera in the step 3
Sampling is the key that this method is realized；The wherein angular displacement of angular encoder detection rotating object, exports weekly specific a pulse,
The trigger signal that specific time sequence is formed after the processing of high speed camera trigger circuit, makes the height inside shearing electronic speckle interference gauge head
Fast camera is carried out the acquisition of speckle interference figure by certain logic sequential
Further, N will independently be repeated based on cantilever beam displacement change curve caused by defect in step 1-2
It is secondary, in the step 4-7, cantilever beam displacement change curve is divided into N-1 equal portions and displacement amount is changed in specific period N
The corresponding speckle pattern of n-th point displacement in curve is sampled.N is bigger, and the cantilever beam displacement change curve of acquisition is got over
Accurately.
The present invention is based on shearing electronic speckle interference method to the cantilever beam displacement in array Lorentz force microparticle into
Row measures, and measuring principle is clear；Measurement method is simple in structure；Accuracy of measurement is high；Using array probe, measurement efficiency is high；
Without special measuring condition, application range is more extensive.
Description of the drawings
Fig. 1：Lorentz force microparticle probe method schematic diagram
Fig. 2：Array probe arrangement mode in array Lorentz force microparticle probe method
Fig. 3：Electronic speckle measuring principle figure
Fig. 4：Electronic speckle Dynamic Micro-Deformation measurement method sampling principle
Fig. 5：Array Lorentz force microparticle probe method flow chart -- it is measured based on electronic speckle Dynamic Micro-Deformation
1：Permanent magnet；2：Cantilever beam；3：Microparticle or defect；4：Sample to be tested
Smaller, the magnetic field of permanent magnet zone of action (magnetic for magnet size in single Lorentz force microparticle probe method of popping one's head in
Sensitizing range) it is limited and then limited to sample detection zone, large area sample is checked relatively time-consuming；Set forth herein a kind of arrays
Formula Lorentz force microparticle probe method, probe arrangement mode are as shown in Figure 2 a：Using two rows of permanent magnet interphase distributions, used per mining
Equidistant (the d of multiple permanent magnets1) arrangement, two rows of permanent magnets are at a distance of d2, in array probe as shown in Figure 2 a：Each permanent magnet magnetic is sensitive
Region is not interfere with each other, but from measurement angle, and magnetic susceptibility region is complementary to one another, no measurement dead area.Permanent magnet bonding as shown in Figure 2 b
On a cantilever beam：When defective some permanent magnet magnetic sensitizing range of process, the reaction force that permanent magnet is subject to changes,
The displacement of cantilever beam also changes therewith；In Lorentz force microparticle probe method, in single cantilever beam-permanent magnet systems, cantilever
The displacement of beam can be obtained by commercial lasers displacement sensor, but such as array Lorentz force microparticle detection in Fig. 2 a, b
In method, monitoring need to be carried out at the same time to the displacement of multiple cantilever beams in permanent magnet-cantilever beam system of array arrangement, for this
There are following difficult points for measurement problem：
1)：The adjacent d of X-direction1The displacements of multiple permanent magnets need to measure simultaneously, existing commercial lasers displacement sensor
In, majority measures the displacement of certain point position on object for single lasing light emitter, and measurement point area depends on lasing light emitter
It is irradiated to spot size at body surface, general measure precision is higher, and LASER SPECKLE is smaller, and magnitude is 20 μm.To array Lip river
In Lun Zili microparticle survey meters, the equidistant multiple permanent magnet displacements of one row can now be carried out while be surveyed without effective ways at present
Amount, and permanent magnet-cantilever beam system of array arrangement is multiple rows of multiple row, the displacement in a face need to be surveyed by being equivalent to
Amount；
2)：It is also in depth of field problem from optical measurement angle between two rows of permanent magnets of array arrangement, also without business displacement
Sensor can preferably solve the problems, such as this；
In summary：In array Lorentz force microparticle detection method, to permanent magnet-cantilever beam of array arrangement
Multiple cantilever beam displacements carry out in system while monitoring is a crucial step, and are produced without correlation in existing commercial displacement sensor
Product can meet the requirement, thus set forth herein and develop a kind of Dynamic Micro-Deformation measurement method based on electronic speckle and solve this and ask
Topic.
Electronic speckle Dynamic Micro-Deformation measurement method principle：
Electronic speckle Dynamic Micro-Deformation measurement method carries out cantilever Liang Sicheng using electronic/digital speckle interference measuring principle
It measures.Electronic speckle pattern interferometry is a kind of optics measured (based on diffusing reflection phenomenon) for Non-optical surfaces object
Interference technique can measure 3 D deformation, strain, vibration distribution and non-destructive testing of object etc., the survey of surface deformation
Examination sensitivity reaches 30nm.Electronic speckle interference belongs to measurement of full field, can obtain the deformation of any point on measured object/opposite
Displacement.
The light path of Electronic speckle pattern interferometry has different types, for the spy of array Lorentz force microparticle probe method
Different application, instrument use shearing electronic speckle interference light path, make to come from tested cantilever beam and periphery object (installs cantilever
The crossbeam of beam) reflected light interfere, formed shear interference.The shearing displacement of traditional shearing electronic speckle interference technology is remote small
In the size of testee, the result measured is the spatial gradient of ohject displacement；And in this problem shearing displacement be greater than it is tested
Dimension of object, measurement result are directly the displacement of object, and this measurement method is also referred to as big shearing electronic speckle interference technology.
It should be noted that relative to common electronic speckle interference light path, it is total that (big) shearing electronic speckle interference light path belongs to optics
Road is interfered, and anti-interference ability is stronger, light path reliability higher, and to the global displacement of testee (including crossbeam)
(i.e. rigid body displacement) susceptibility is lower.
The basic light path schematic diagram that shearing electronic speckle interference technology measures acoplanarity displacement is as shown in Figure 3.It is defeated from laser
The light gone out is irradiated to measured object surface after expanding, and diffuses and is divided into two-beam after Amici prism, respectively through plane mirror 1
With the image sensor surface (ccd array in figure) of 2 reflection post-concentrations to camera, interference is formed.Wherein plane mirror 2 slightly inclines
Tiltedly so that the obtained two width figure of camera slightly misplaces, that is, realizes cutting imagination.When object deforms, body surface phase
Adjacent 2 points of displacement simultaneously differs, and resulting light path change also differs, i.e. the optical path difference of interference signal changes, because
The phase of this interference signal is changed.When the variable quantity for measuring interferometric phase, you can it is (close to obtain adjacent 2 points of displacement difference
It is similar to the gradient of body surface deformation).And in the big shearing electronic speckle interference system of this item purpose, due to participating in the ginseng of interference
It examines light and comes from fixed different crossbeam, therefore measured displacement difference is the absolute displacement of cantilever beam.Cantilever beam displacement
Measurement process it is as follows：
1) high-speed camera obtains the electronic speckle interference figure of reflection cantilever beam change in displacement；
2) processing of electronic speckle interference figure phase difference；
It needs to obtain the phase changing capacity (being called phase difference) of interference signal in this method, could calculate displacement, and phase
Information is difficult to directly obtain in the speckle interference figure acquired from camera.The intensity distribution of speckle interference figure can be expressed as：
I (x, y)=I0(x, y) [1+ μ (x, y) cos φ (x, y)] (1)
Wherein I0It is background light intensity, μ is modulation degree, and φ is phase angle to be measured, these three amounts are all unknown.It can be seen that nothing
Method direct solution from formula (1) obtains phase mass.
This instrument solves phase using 4+4 phase-shifting techniques, drives plane mirror 1 to move by controlling piezoelectric ceramic tube,
The artificial phase for changing interference signal, often step increase by 90.Phase constructs its excess-three formula, obtains：
Four equatioies in simultaneous formula (2), can solve：
Wherein φ (x, y) is the phase distribution corresponded to before deformation of body.Same method can be in the hope of deformation of body
Phase distribution afterwards, the two, which is subtracted each other, can be obtained phase difference.
It is relatively long using the time of measuring needed for 4+4 phase-shifting techniques in this project.4+1 phase shifts can also be used in this instrument
Technology can significantly reduce time of measuring, and improve dynamic measurement capability.
3) displacement calculates
This instrument can measure the acoplanarity displacement of testee, i.e., the actual displacement of cantilever beam in this project.It is specific to survey
It is as follows to measure formula：
Wherein w is shift value, and α is light angle (laser incident angle), and Δ φ is obtained phase change.
In summary：Electronic speckle interference belongs to measurement of full field, can be to battle array in array Lorentz force microparticle probe method
Permanent magnet-cantilever beam system of column arrangement carries out whole monitoring and exports related data in real time.The measurement of full field of this method is special
Property be conducive to design for large area sample to be tested array measuring probe rapidly and efficiently.
But if all being sampled to cantilever beam change in displacement whole process using high-speed camera and obtaining speckle interference
High to high-speed camera performance requirement if scheming and carrying out image procossing, the amount of images of acquisition is larger, and post processing of image is multiple
It is miscellaneous to take.And in array Lorentz force microparticle probe method this special applications, when defect passes through electromagnetic susceptibility area, Lip river
The variation of Lun Zili is as shown in Figure 1 b, so in Figure 1b shown in force effect Analysis of A Cantilever Beam Under displacement also have similar pulse letter
Number；In array Lorentz force microparticle probe method, sample makees periodical circular motion with turntable, and then caused by defect
Cantilever beam displacement period of change repeats, and as shown in Figure 4 b, turntable rotates n times, then defect is logical in electromagnetic susceptibility area
N times are crossed, and then obtain n times cantilever beam displacement pulse signals.For measuring signal in array Lorentz force microparticle probe method
(change in displacement of cantilever beam), which is repeated cyclically, there is this feature, and the present invention proposes that solving conditional electronic with Downsapling method dissipates
Two difficult points that spot method is encountered in array Lorentz force microparticle probe method application：1) to high-speed camera performance requirement pole
Height, therefore cost increase；2) amount of images obtained is larger, post processing of image complicated and time consumption.
As shown in fig. 4 a：Cantilever beam change in displacement process in a cycle is divided into N-1 equal portions in the present invention, i.e., by arm
Discrete Liang Sicheng change curve is N number of point, is similarly understood：Cantilever can be obtained after such as obtaining this N number of discrete data in measurement process
Liang Sicheng change curve.In this method, cantilever beam period of change repeats, therefore the T in the N-1 periodsN-1Moment carries out
Primary sampling, and the T in the N periods being separated byNMoment is once sampled, and the process is repeated, and N is used in N number of period
It is secondary, cantilever beam complete displacement changing curve in one cycle is can get after the sampled data at this N number of moment is handled.
Specific implementation method is as follows：
The angular displacement of rotating object is detected using angular encoder, is exported 2000 pulses weekly, is triggered through high speed camera
The trigger signal that specific time sequence is formed after processing of circuit, makes the high speed camera inside shearing electronic speckle interference gauge head be patrolled by specific
Collect the acquisition that sequential carries out speckle interference figure
As shown in Figure 4 b：
T in the 1st period1Moment, angular encoder output signal control high speed camera are sampled at the moment
And obtain T1The displacement of moment cantilever beam, other moment high speed cameras in the swing circle are without sampling；
Because cantilever beam change in displacement is in periodical, the T in the 2nd period2Moment, angular encoder output signal control
High speed camera processed is sampled at the moment and obtains T2The displacement of moment cantilever beam, other moment in the swing circle are high
Fast camera is without sampling；
It is repeated the above process in the 3rd period to the N-2 period；
T in the N-1 periodsN-1Moment, angular encoder output signal control high speed camera are sampled at the moment
And obtain TN-1The displacement of moment cantilever beam, other moment high speed cameras in the swing circle are without sampling；
T in the N periodsNMoment, angular encoder output signal control high speed camera are sampled simultaneously at the moment
Obtain TNThe displacement of moment cantilever beam, other moment high speed cameras in the swing circle are without sampling；
Cantilever beam displacement as is shown in fig. 4 a is obtained by acquisition time successively fitting to above-mentioned data.
Multiple cantilever beam displacement acquisitions are consistent with the above process, can at lower cost, quick and precisely by this method
Ground obtains the displacement of multiple cantilever beams in array Lorentz force microparticle probe method, and then obtains the feature of defect in sample
Information.
Entire measurement process can be stated by Fig. 5 flow charts：It as described in Figure, can by Lorentz force microparticle measuring principle
Know, the defect of different volumes passes through caused Lorentz force variable quantity difference when electromagnetic susceptibility area, and then causes cantilever beam big
The displacement occurred under small different force effect is different；In terms of surveying angle, by the analysis to cantilever beam displacement variable,
Establish the relational expression between Lorentz force F and displacement w, i.e. F=f (w)；And the pass between Lorentz force F and defect volume V
Be formula, i.e. V=f (F)；And then defect volume size can be distinguished by measuring the displacement of cantilever beam.In the method, laser
The laser of device transmitting is irradiated to after expanding on cantilever beam, and the laser reflected on cantilever beam and cantilever mounted beam header portion are anti-
The laser coherence penetrated in cantilever beam front space forms speckle interference figure after relating to, and is acquired and speckle interference figure and is stored in using CCD
In computer, the software of independent development obtains wrapped phase value to speckle interference figure by phase-shifting technique, then is obtained by unpacking
True phase value is obtained, and then passes through formula 4 and obtains cantilever beam displacement w；Using Lorentz force F as intermediate variable, cantilever beam is established
Contact between displacement w and defect volume V.It can be seen that being applied to array Lorentz force microparticle using Electronic Speckle Pattern Interferometry
In probe method, by directly measured quantities -- phase differenceIt establishes and contacts with defect volume V.
The present invention relates to a kind of array Lorentz force microparticle probe method, have the characteristics that and advantage：
1, the method for the present invention is repeated cyclically circular motion, and then array Lorentz using rotational structure Control Assay
Periodicity is also presented in the change in displacement of cantilever beam in force method, using the periodicity of signal flaw indication is just confirmed repeatedly into
And improve measurement accuracy；
2, periodically based on the presentation of cantilever beam change in displacement, single is adopted under the control of angular encoder to a cycle
Sample, and to N number of periodic sampling n times；Sampling number is more, lower to the performance requirement of high speed camera, the cantilever Liang Sicheng of acquisition
It is abundanter to measure information.
3, measurement method is designed according to the method for the present invention, and simple in structure, detection efficiency is high, it is easy to accomplish automates and small-sized
Change, can be applied in more fields and environment.
4, the cantilever beam displacement measurement method proposed according to the method for the present invention makes array Lorentz force microparticle detect
Method cost is lower, and application is more extensive.
Above-described specific implementation mode has carried out further the purpose of the present invention, technical solution and advantageous effect
It is described in detail, it should be understood that the foregoing is merely the specific implementation mode of the present invention, is not intended to limit the present invention
Protection domain, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should all include
Within protection scope of the present invention.
Claims (8)
1. a kind of array Lorentz force microparticle probe method of microparticle and defect in detecting conductor, feature exist
In, the method includes：
Step 1, it is placed on turntable containing defective sample and is rotated N weeks with fixed speed；
Step 2, array arrangement permanent magnet-cantilever beam system is scanned the sample certain area of rotation, and uses electronics
Speckle Dynamic Micro-Deformation measurement method monitors the variation of the cantilever Liang Sicheng caused by microparticle or defect in real time；
Step 3, the angular displacement of angular encoder detection rotating object, the trigger signal control high speed camera for forming specific time sequence are pressed
Certain logic sequential carries out acquisition (first week T in such as step 1 of speckle interference figure1Moment), that is, it obtains cantilever beam and deformed
Journey T1The displacement at moment；
Step 4, repetition step 3, but the 2nd week T in step 11Next moment T2The acquisition of speckle interference figure is carried out,
Obtain cantilever beam deformation process T2The displacement at moment；
Step 5, step 3 n-th, in n-th swing circle, the T relative to a upper swing circle (N-1) are repeatedN-1Moment
Next moment TNThe acquisition of speckle interference figure is carried out, that is, obtains cantilever beam deformation process TNThe displacement at moment；
Step 6, defect is obtained by electricity by the time sequencing processing of acquisition to the n times cantilever beam displacement obtained in above-mentioned steps
Caused cantilever beam displacement change curve when magnetosensitive sensillary area.
Step 7, Lorentz force variable quantity, Jin Erti are obtained according to the cantilever beam displacement change curve analysis obtained in step 6
Take out the characteristic information of defect；
2. according to the method described in claim 1, it is characterized in that, sample described in the step 1 is placed on turntable with solid
Constant speed degree rotates N weeks, and contained defect or microparticle are also moved in a circle n times with fixing linear velocity in sample.
3. according to the method described in claim 1, it is characterized in that, in the step 2, each permanent magnet magnetosensitive of array arrangement
Sensillary area domain (spatial electromagnetic field distribution) independently of each other, is not interfere with each other, but in terms of measurement angle, and array arrangement probe detection is sensitive
Area is complementary to one another, no measurement dead area, therefore the arrangement mode of multiple permanent magnets is a key of this method in array probe
Point.
4. according to the method described in claim 1, it is characterized in that, in the step 2, array is arranged permanent magnet-cantilever beam
System is scanned the sample certain area of rotation, because defect or microparticle are to fix linear speed contained by the sample in step 1
Degree moves in a circle, when defect or microparticle n times are arranged by array the specific electromagnetic susceptibility area of permanent magnet-cantilever beam system
When, n times stress deformation process occurs for corresponding cantilever beam；And the cantilever beam that zero defect passes through will try then without corresponding displacement
The characteristic information of defect and the response characteristic information of array cantilever beam correspond in sample, and measuring probe is in a cycle
The signal of middle acquisition is a series of pulse signals with randomness, but periodicity is then presented in n times swing circle.
5. according to the method described in claim 1, it is characterized in that, in the step 2, cantilever beam displacement is bigger, then micro-
The size of grain or heterogeneous defect is bigger；Pulse signal caused by cantilever beam change in displacement is opposite with microparticle or heterogeneous defect
It answers；It is analyzed by the cantilever beam to being subjected to displacement variation in array probe-permanent magnet systems information, it can Fast Calibration examination
Position existing for defect in sample.
6. according to the method described in claim 1, it is characterized in that, array cantilever beam change in displacement information in the step 2
It is a series of pulse signals, and the multiple cantilever Liang Sichengs arranged to array using electronic speckle Dynamic Micro-Deformation measurement method
Amount carries out while monitoring is the key that the array detection method is practical, the whole audience of electronic speckle Dynamic Micro-Deformation measurement method
Characteristic is measured to be detected multiple cantilever beams in larger measured zone.
7. according to the method described in claim 1, it is characterized in that, being rotated using angular encoder in the step 3
The angular displacement of disk and control high speed camera sampling be the key that this method realize；The wherein angle of angular encoder detection rotating object
Displacement exports weekly certain pulses, and the trigger signal of specific time sequence is formed after the processing of high speed camera trigger circuit, keeps shearing electric
High speed camera inside sub- speckle interference gauge head is carried out the acquisition of speckle interference figure by certain logic sequential.
8. according to the method described in claim 1, it is characterized in that, based on cantilever beam displacement caused by defect in step 1-2
Change curve will independently repeat n times, in the step 4-7, by cantilever beam displacement change curve be divided into N-1 equal portions and
The corresponding speckle pattern of n-th point displacement changed in curve to displacement amount in specific period N samples.N is bigger, acquisition
Cantilever beam displacement change curve is more accurate.
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