CN108957031A - Wide range high sensitivity vibration of optical sensor based on vibration coupling - Google Patents
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
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Abstract
Description
技术领域technical field
本发明属于精密加速度测量技术领域，具体地涉及一种用于测量微小加速度的基于振动耦合的宽谱高灵敏度光学振动传感器。The invention belongs to the technical field of precision acceleration measurement, in particular to a wide-spectrum high-sensitivity optical vibration sensor based on vibration coupling for measuring tiny acceleration.
背景技术Background technique
振动传感器主要包含两个部分，位移测量部分和拾振单元部分。其中光学振动传感器大多基于光学干涉方法实现相对位移测量，即以光波长作为标尺，并要求测量频率远离拾振单元的共振频率。这种方法使用的干涉位移测量部分系统复杂，成本较高，系统稳定性差，且因为测量频率远离拾振单元的共振频率，所以拾振结构的频响特性较差，导致整个加速度测量系统的性能较差，加速度分辨率不足。由于基于激光、光栅的精密位移测量系统的结构简单、性能稳定且位移测量分辨率较好，所以可以代替基于光学干涉的位移测量部分。而拾振单元的共振效应也可用于提高拾振结构的频响特性，以提高加速度测量灵敏度。The vibration sensor mainly consists of two parts, the displacement measurement part and the vibration pickup unit part. Most of the optical vibration sensors are based on the optical interference method to achieve relative displacement measurement, that is, the wavelength of light is used as the scale, and the measurement frequency is required to be far away from the resonance frequency of the vibration pickup unit. The interference displacement measurement system used in this method is complex, the cost is high, and the system stability is poor, and because the measurement frequency is far away from the resonance frequency of the vibration pickup unit, the frequency response characteristics of the vibration pickup structure are poor, resulting in poor performance of the entire acceleration measurement system. Poor, insufficient acceleration resolution. Since the precision displacement measurement system based on laser and grating has simple structure, stable performance and good displacement measurement resolution, it can replace the displacement measurement part based on optical interference. The resonance effect of the vibration pickup unit can also be used to improve the frequency response characteristics of the vibration pickup structure, so as to improve the sensitivity of acceleration measurement.
与传统光学干涉位移测量方法不同，激光-光栅位移测量系统不以激光波长作为位移或者长度测量的基准，而以是光栅的栅距作为测量基准。这种测量方法结构简单，激光聚焦后入射到置于焦点处的光栅，拾振单元带动光栅垂直运动，即可获得和加速度频率和振幅相关的条纹信号，经过处理和计算可得加速度信息。且干涉方法测位移时波长容易受到温度等外界环境的影响，导致测量误差，而本发明中通过选取低热膨胀系数的光栅可以这大大提高了测量系统对外部环境的适应力，降低系统测量误差。Different from the traditional optical interference displacement measurement method, the laser-grating displacement measurement system does not use the laser wavelength as the reference for displacement or length measurement, but the grating pitch as the measurement reference. This measurement method has a simple structure. After the laser is focused, it is incident on the grating placed at the focal point. The vibration pickup unit drives the grating to move vertically, and the fringe signal related to the acceleration frequency and amplitude can be obtained. After processing and calculation, the acceleration information can be obtained. And when the displacement is measured by the interference method, the wavelength is easily affected by the external environment such as temperature, resulting in measurement errors. However, in the present invention, by selecting a grating with a low thermal expansion coefficient, this can greatly improve the adaptability of the measurement system to the external environment and reduce system measurement errors.
与传统要求测量频率远离拾振单元的共振频率不同，本文利用共振效应对被测物体加速度信号的放大作用来提高拾振元件的频响特性，以系统加速度测量能力，但是单悬臂梁的共振峰半高宽窄，意味着测量带宽窄，通过合理配置悬臂梁阵列实现共振耦合可以拓宽某一悬臂梁的共振带宽，以达到宽频谱加速度测量的效果。Different from the traditional requirement that the measurement frequency be far away from the resonant frequency of the vibration pickup unit, this paper uses the resonance effect to amplify the acceleration signal of the measured object to improve the frequency response characteristics of the vibration pickup element, so as to measure the acceleration of the system, but the resonance peak of the single cantilever beam The narrow half-height width means that the measurement bandwidth is narrow, and the resonant coupling of a certain cantilever beam can be widened by rationally configuring the cantilever beam array to achieve the effect of wide-spectrum acceleration measurement.
发明内容Contents of the invention
发明目的：本发明的目的是提供一种基于振动耦合的宽谱高灵敏度光学振动传感器，它以透射式光栅的栅距作为相对位移测量基准，以振动耦合结构作为拾振单元，是一种结构简单、抗干扰能力强、测量频谱宽、灵敏度高的低成本光学振动传感器。Purpose of the invention: The purpose of the invention is to provide a wide-spectrum high-sensitivity optical vibration sensor based on vibration coupling, which uses the grating pitch of the transmission grating as the relative displacement measurement reference, and uses the vibration coupling structure as the vibration pickup unit, which is a structure Simple, low-cost optical vibration sensor with strong anti-interference ability, wide measurement spectrum and high sensitivity.
技术方案：本发明的一种基于振动耦合的宽谱高灵敏度光学振动传感器包括激光器、透镜、透射式光栅、振动耦合拾振单元、光电探测器；所述透射式光栅刚性固定在振动耦合拾振单元上，并置于激光器的输出光路上，透射式光栅位移方向垂直于激光器的输出光路；所述振动耦合拾振单元包括多个悬臂梁，所述多个悬臂梁分别通过圆弹簧或者平面弹簧与中间位置悬臂梁连接；所述激光器发出的激光经过聚焦透镜后垂直入射至透射式光栅，当存在加速度时，透射式光栅与激光光束产生相对运动，透过光栅的出射光携带相对位移信号，所述光电探测器放置在透射光栅出射光路上。Technical solution: A wide-spectrum high-sensitivity optical vibration sensor based on vibration coupling of the present invention includes a laser, a lens, a transmissive grating, a vibration-coupling pickup unit, and a photodetector; the transmissive grating is rigidly fixed on the vibration-coupling pickup On the unit, and placed on the output optical path of the laser, the displacement direction of the transmissive grating is perpendicular to the output optical path of the laser; the vibration coupling pickup unit includes a plurality of cantilever beams, and the plurality of cantilever beams pass through circular springs or planar springs respectively It is connected with the cantilever beam in the middle position; the laser light emitted by the laser is vertically incident on the transmissive grating after passing through the focusing lens. When there is acceleration, the transmissive grating and the laser beam generate relative motion, and the outgoing light passing through the grating carries a relative displacement signal. The photodetector is placed on the outgoing light path of the transmission grating.
所述振动耦合拾振单元，其中各悬臂梁结构竖直或者平行配置。In the vibration coupling pickup unit, each cantilever beam structure is arranged vertically or in parallel.
所述振动耦合拾振单元，其中各悬臂梁的固有频率互不相同，之间的间距相等。In the vibration coupling pickup unit, the natural frequencies of the cantilever beams are different from each other, and the distances between them are equal.
所述振动耦合拾振单元，其中，若各悬臂梁竖直配置，则两侧悬臂梁通过立体圆弹簧分别与中间位置悬臂梁连接；若各悬臂梁平行配置，则两侧悬臂梁通过平面弹簧(长条梁)分别与中间位移悬臂梁连接。The vibration coupling pickup unit, wherein, if the cantilever beams are arranged vertically, the cantilever beams on both sides are respectively connected to the cantilever beams in the middle position through three-dimensional circular springs; (Long beams) are respectively connected with intermediate displacement cantilever beams.
所述透射式光栅，其输出条纹为类正弦波，一个正弦条纹对应于所述透射式光栅相对于激光光束的D位移，D为光栅周期。The output fringes of the transmissive grating are sinusoidal waves, and one sine fringe corresponds to the D displacement of the transmissive grating relative to the laser beam, and D is the grating period.
所述透射式光栅，其材料为低热膨胀系数的石英或零膨胀的玻璃材料。The transmission grating is made of quartz with low thermal expansion coefficient or glass material with zero expansion.
所述激光器发出的激光经过聚焦透镜后垂直入射至透射式光栅，当存在加速度时，光栅与激光光束产生相对运动，经光电探测器探测，结合已知的拾振单元中间梁频响特性可计算出振动信息。The laser light emitted by the laser is vertically incident on the transmissive grating after passing through the focusing lens. When there is acceleration, the grating and the laser beam produce relative motion, which is detected by the photodetector and combined with the known frequency response characteristics of the middle beam of the vibration pickup unit. The vibration can be calculated information.
有益效果：本发明与现有技术相比，其显著效果为：Beneficial effect: the present invention compares with prior art, and its notable effect is:
1、本发明振动传感器的位移测量部分采用激光-光栅位移测量方法，不需要传统干涉法测量位移所需的复杂光学元器件和多个光电探测器，结构简单紧凑，光路调节方便，成本低。1. The displacement measurement part of the vibration sensor of the present invention adopts a laser-grating displacement measurement method, which does not require complex optical components and multiple photodetectors required for displacement measurement by traditional interferometry, and has a simple and compact structure, convenient optical path adjustment, and low cost.
2、本发明以光栅栅距而非波长作为测量基准。测量精度不受空气、温度以及光源波的影响；允许在环境温度变化较大的情况下使用，系统的噪声也较小。2. The present invention takes the grating pitch instead of the wavelength as the measurement benchmark. The measurement accuracy is not affected by air, temperature and light source waves; it is allowed to be used when the ambient temperature changes greatly, and the noise of the system is also small.
3、本发明利用拾振单元对振动加速度信号的放大效应，大大提升了系统的响应特性。3. The present invention utilizes the amplification effect of the vibration acceleration signal by the vibration pickup unit to greatly improve the response characteristics of the system.
4、本发明利用振动耦合方法拓展了利用拾振单元的共振范围，拓宽了利用共振效应测量加速度的带宽。4. The present invention expands the resonance range of the vibration pickup unit by using the vibration coupling method, and widens the bandwidth of the acceleration measurement by the resonance effect.
附图说明Description of drawings
图1是本发明的结构原理示意图。Fig. 1 is a schematic diagram of the structure principle of the present invention.
图2是位移测量部分原理示意图(a)和模拟光栅、激光光束相对位移时透过光栅的光信号(b)。Fig. 2 is a schematic diagram of the principle of the displacement measurement part (a) and an optical signal (b) transmitted through the grating when the analog grating and the laser beam are relatively displaced.
图3是实例1中的拾振单元(振动耦合悬臂梁竖直配置)结构示意图，(a)正视图，(b)俯视图，(c)侧视图，(d)立体图。3 is a structural schematic diagram of the vibration pickup unit (vibration-coupled cantilever beam vertical configuration) in Example 1, (a) front view, (b) top view, (c) side view, (d) perspective view.
图4是实例2中的拾振单元(振动耦合悬臂梁水平配置)结构示意图，(a)正视图，(b)俯视图，(c)侧视图，(d)立体图。Fig. 4 is a structural schematic diagram of the vibration pickup unit (vibration-coupled cantilever beam horizontal configuration) in Example 2, (a) front view, (b) top view, (c) side view, (d) perspective view.
图5是本发明振动传感器进行加速度测量时的软件处理流程图。Fig. 5 is a flow chart of software processing when the vibration sensor of the present invention performs acceleration measurement.
图中有：激光器1，聚焦透镜2，透射式光栅3，振动耦合拾振单元4，竖直配置固定光栅悬臂梁41，立体圆弹簧411，水平配置固定光栅悬臂梁42，平面弹簧421，光电探测器5。In the figure there are: laser 1, focusing lens 2, transmissive grating 3, vibration coupling pickup unit 4, vertical fixed grating cantilever beam 41, three-dimensional circular spring 411, horizontal fixed grating cantilever beam 42, planar spring 421, photoelectric Detector 5.
具体实施方式Detailed ways
以下将结合说明书附图和具体实例对本发明做进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings and specific examples.
实施例1Example 1
如图1和图3，本实施例基于振动耦合的宽谱高灵敏度光学振动传感器，包括激光器1、聚焦透镜2、透射式光栅3、振动耦合单元如图3、光电探测器5；透射式光栅3刚性固定在振动耦合单元某一竖直配置固定光栅悬臂梁41上，并置于激光器的输出光路上，透射式光栅3位移方向垂直于激光器的输出光路；如图3，振动耦合拾振单元中悬臂梁竖直配置，各梁的长度、宽度、厚度相同，但是顶端质量块重量不同，导致各梁的固有频率不同，各悬臂梁分别通过弹性系数不同的圆弹簧(如立体圆弹簧411)和中间位置竖直配置固定光栅悬臂梁41连接；加速度存在时，所述激光器1发出的激光经过聚焦透镜2后垂直入射至透射式光栅3，透射式光栅3与激光光束产生相对运动，透过光栅的出射光携带相对位移信号，所述光电探测器5放置在透射光栅出射光路上，经光电探测器5探测，结合已知的拾振单元中间梁频响特性可计算出振动信息。图2(a)为位移测量原理图，如激光光斑与光栅相对运动时产生对应的类正弦条纹信号如图2(b)。As shown in Fig. 1 and Fig. 3, the wide-spectrum high-sensitivity optical vibration sensor based on vibration coupling in this embodiment includes a laser 1, a focusing lens 2, a transmissive grating 3, a vibration coupling unit as shown in Fig. 3, and a photodetector 5; a transmissive grating 3 is rigidly fixed on a vertical fixed grating cantilever beam 41 of the vibration coupling unit, and placed on the output optical path of the laser. The displacement direction of the transmissive grating 3 is perpendicular to the output optical path of the laser; as shown in Figure 3, the vibration coupling pickup unit The middle cantilever beams are arranged vertically. The length, width, and thickness of each beam are the same, but the weights of the top masses are different, resulting in different natural frequencies of each beam. Each cantilever beam passes through circular springs with different elastic coefficients (such as three-dimensional circular spring 411) It is connected with a fixed grating cantilever beam 41 vertically arranged at the middle position; when the acceleration exists, the laser light emitted by the laser 1 passes through the focusing lens 2 and then vertically enters the transmissive grating 3, and the transmissive grating 3 and the laser beam generate relative motion, and transmit The outgoing light of the grating carries a relative displacement signal. The photodetector 5 is placed on the outgoing light path of the transmission grating. After detection by the photodetector 5, the vibration information can be calculated in combination with the known frequency response characteristics of the middle beam of the vibration pickup unit. Figure 2(a) is the principle diagram of displacement measurement, such as the corresponding sinusoidal fringe signal generated when the laser spot and the grating move relative to each other, as shown in Figure 2(b).
实施例2Example 2
如图1和图4，本实施例基于振动耦合的宽谱高灵敏度光学振动传感器，包括激光器1、聚焦透镜2、透射式光栅3、振动耦合单元如图4、光电探测器5；透射式光栅3刚性固定在振动耦合单元某一水平配置固定光栅悬臂梁42上，并置于激光器的输出光路上，透射式光栅3位移方向垂直于激光器的输出光路；如图4，振动耦合拾振单元中悬臂梁水平配置，各梁的长度、宽度、厚度相同，但是顶端质量块重量不同，导致各梁的固有频率不同，各悬臂梁分别通过弹性系数不同的平面弹簧(可通过改变长条梁平面弹簧的长、宽、高实现，如平面弹簧421)和中间位置悬臂梁即水平配置固定光栅悬臂梁42连接；加速度存在时，所述激光器1发出的激光经过聚焦透镜2后垂直入射至透射式光栅3，光栅与激光光束产生相对运动，透过光栅的出射光携带相对位移信号，所述光电探测器5放置在透射光栅出射光路上，经光电探测器5探测，结合已知的拾振单元中间梁频响特性可计算出振动信息。图2(a)为位移测量原理图，如激光光斑与光栅相对运动时产生对应的类正弦条纹信号如图2(b)。As shown in Fig. 1 and Fig. 4, the wide-spectrum high-sensitivity optical vibration sensor based on vibration coupling in this embodiment includes a laser 1, a focusing lens 2, a transmissive grating 3, a vibration coupling unit as shown in Fig. 4, and a photodetector 5; a transmissive grating 3. Rigidly fixed on a certain horizontal fixed grating cantilever beam 42 of the vibration coupling unit, and placed on the output optical path of the laser, the displacement direction of the transmissive grating 3 is perpendicular to the output optical path of the laser; as shown in Figure 4, in the vibration coupling pickup unit The cantilever beams are arranged horizontally. The length, width, and thickness of each beam are the same, but the weights of the top masses are different, resulting in different natural frequencies of each beam. The length, width and height are realized, such as planar spring 421) and the cantilever beam in the middle position, that is, the horizontally configured fixed grating cantilever beam 42 is connected; when the acceleration exists, the laser light emitted by the laser device 1 passes through the focusing lens 2 and is vertically incident on the transmissive grating 3. The grating and the laser beam generate relative motion, and the outgoing light through the grating carries a relative displacement signal. The photodetector 5 is placed on the outgoing light path of the transmission grating, detected by the photodetector 5, and combined with the known vibration pickup unit Beam frequency response characteristics can be calculated vibration information. Figure 2(a) is the principle diagram of displacement measurement, such as the corresponding sinusoidal fringe signal generated when the laser spot and the grating move relative to each other, as shown in Figure 2(b).
如图5所示，基于上述基于振动耦合的宽谱高灵敏度光学振动传感器，本发明进一步提供了利用振动耦合实现宽谱高灵敏度光学加速度测量及分析方法，具体步骤为：通过光电探测器5对携带相对位移的透射光强条纹信号进行采集，通过对单周期内类正弦信号进行计数得到单周期相对位移值，再通过单周期相对值和已知的拾振元件的频响特性曲线计算加速度值，从而实现加速度的测量。As shown in Figure 5, based on the above-mentioned wide-spectrum high-sensitivity optical vibration sensor based on vibration coupling, the present invention further provides a measurement and analysis method for wide-spectrum high-sensitivity optical acceleration using vibration coupling. The specific steps are: through 5 pairs of photodetectors The transmitted light intensity fringe signal carrying relative displacement is collected, and the single-period relative displacement value is obtained by counting the sinusoidal signal in a single period, and then the acceleration value is calculated by the single-period relative value and the known frequency response characteristic curve of the vibration pickup element , so as to realize the measurement of acceleration.
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