CN108957031A - Wide range high sensitivity vibration of optical sensor based on vibration coupling - Google Patents
Wide range high sensitivity vibration of optical sensor based on vibration coupling Download PDFInfo
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- CN108957031A CN108957031A CN201810895747.6A CN201810895747A CN108957031A CN 108957031 A CN108957031 A CN 108957031A CN 201810895747 A CN201810895747 A CN 201810895747A CN 108957031 A CN108957031 A CN 108957031A
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- vibration coupling
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The present invention relates to a kind of wide range high sensitivity vibration of optical sensor based on vibration coupling.The vibrating sensor includes laser (1), lens (2), transmission-type grating (3), vibration coupling pick-up unit (4), photodetector (5)；On the beam that the vibration bandwidth that transmission-type grating is rigidly fixed in vibration coupling pick-up unit is expanded (middle position beam), output light path of the direction of displacement perpendicular to laser；Vibration coupling pick-up unit includes multiple cantilever beams to intercouple；The laser that laser issues after lens converge vertical incidence to grating, when pedestal, which exists, to be vibrated, transmission-type grating and laser optical path generate relative motion in vertical direction, relative displacement signal is carried through the emergent light of grating, it is detected through photodetector, vibration information can be calculated in conjunction with known pick-up unit intermediate beam Frequency Response.The present invention has many advantages, such as to measure that frequency spectrum is wide, high sensitivity, structure are simple, strong antijamming capability and at low cost.
Description
Technical field
The invention belongs to accurate acceleration analysis technical fields, more particularly to a kind of for measuring the base of small acceleration
In the wide range high sensitivity vibration of optical sensor of vibration coupling.
Background technique
Vibrating sensor mainly includes two parts, displacement measurement part and pick-up unit part.Wherein vibration of optical passes
Sensor is mostly based on optical interference method and realizes relative displacement measurement, i.e., using optical wavelength as scale, and requires measurement frequency remote
Resonant frequency from pick-up unit.The interference displacement measurement part system that this method uses is complicated, and higher cost, system is stablized
Property it is poor, and because of resonant frequency of the measurement frequency far from pick-up unit, the Frequency Response of vibration pick-up structure is poor, causes entire
The performance of acceleration measurement system is poor, acceleration lack of resolution.Due to the accurate displacement measuring system based on laser, grating
Structure it is simple, performance is stable and displacement measurement resolution is preferable, it is possible to instead of the displacement measurement portion based on optical interference
Point.And the resonance effects of pick-up unit can also be used for improving the Frequency Response of vibration pick-up structure, to improve acceleration analysis sensitivity.
It is different from traditional optical interference displacement measurement method, laser grating displacement measurement system not using optical maser wavelength as
The benchmark of displacement or linear measure longimetry, and the pitch to be grating is as measuring basis.This measurement method structure is simple, laser
Be incident on the grating for being placed in focal point after focusing, pick-up unit drives grating vertical movement, can be obtained with acceleration frequency and
The relevant stripe signal of amplitude, by handling and can be calculated acceleration information.And when interference technique displacement wavelength be easy by
To the influence of the external environments such as temperature, lead to measurement error, and can be with by choosing the grating of low thermal coefficient of expansion in the present invention
Which greatly enhances measuring systems to the adaptive faculty of external environment, reduces systematic measurement error.
Resonant frequency from conventional need measurement frequency far from pick-up unit is different, herein using resonance effects to measured object
The amplification of body acceleration signal improves the Frequency Response of Vibration pickup, with system acceleration measurement capability, but it is single outstanding
The resonance peak width of arm beam is narrow, it is meant that Measurement bandwidth is narrow, realizes that resonance coupling can be with by reasonable disposition cantilever array
The resonance bandwidth of a certain cantilever beam is widened, to achieve the effect that wide spectrum acceleration analysis.
Summary of the invention
Goal of the invention: the wide range high sensitivity vibration of optical sensing based on vibration coupling that the object of the present invention is to provide a kind of
Device, it is using the pitch of transmission-type grating as relative displacement measuring basis, is a kind of using vibration coupling structure as pick-up unit
Structure is simple, strong antijamming capability, measurement frequency spectrum are wide, high sensitivity low-cost optical vibrating sensor.
Technical solution: a kind of wide range high sensitivity vibration of optical sensor based on vibration coupling of the invention includes laser
Device, lens, transmission-type grating, vibration coupling pick-up unit, photodetector；The transmission-type grating is rigidly fixed in vibration coupling
It closes on pick-up unit, is placed on the output light path of laser, output light of the transmission-type grating direction of displacement perpendicular to laser
Road；The vibration coupling pick-up unit includes multiple cantilever beams, and the multiple cantilever beam passes through coil spring or plane bullet respectively
Spring is connect with middle position cantilever beam；The laser that the laser issues after condenser lens vertical incidence to transmission-type light
Grid, when there are acceleration, transmission-type grating and laser beam generate relative motion, carry opposite position through the emergent light of grating
Shifting signal, the photodetector are placed on transmission grating emitting light path.
The vibration coupling pick-up unit, wherein each cantilever beam structure is vertical or configured in parallel.
The vibration coupling pick-up unit, wherein the intrinsic frequency of each cantilever beam is different, between spacing it is equal.
The vibration coupling pick-up unit, wherein if each cantilever beam configures vertically, two sides cantilever beam passes through three-dimensional buckshot
Spring is connect with middle position cantilever beam respectively；If each cantilever beam configured in parallel, two sides cantilever beam passes through plane spring (strip
Beam) it is connect respectively with centre displacement cantilever beam.
The transmission-type grating, output striped are sinusoidal wave, and a sine streak corresponds to the transmission-type grating
D relative to laser beam is displaced, and D is screen periods.
The transmission-type grating, material are the quartz of low thermal coefficient of expansion or the glass material of zero thermal expansion.
Vertical incidence is to transmission-type grating after condenser lens for the laser that the laser issues, when there are acceleration
When, grating and laser beam generate relative motion, detect through photodetector, special in conjunction with known pick-up unit intermediate beam frequency response
Property can calculate vibration information.
The utility model has the advantages that compared with prior art, the present invention its remarkable result are as follows:
1, the displacement measurement part of vibrating sensor of the present invention uses laser grating displacement measurement method, does not need tradition
Complicated optical component and multiple photodetectors needed for interferometry measurement displacement, simple and compact for structure, optical path adjusting is convenient,
It is at low cost.
2, the present invention using grating pitch and non-wavelength as measuring basis.Measurement accuracy is not by air, temperature and light source
The influence of wave；Permission uses in the biggish situation of variation of ambient temperature, and the noise of system is also smaller.
3, for the present invention using pick-up unit to the enlarge-effect of vibration acceleration signal, the response for greatly improving system is special
Property.
4, the present invention has expanded the resonance range using pick-up unit using vibration coupling method, has widened and has utilized resonance effect
The bandwidth of acceleration should be measured.
Detailed description of the invention
Fig. 1 is principle schematic diagram of the invention.
Through grating when Fig. 2 is displacement measurement Some principles schematic diagram (a) and simulation grating, laser beam relative displacement
Optical signal (b).
Fig. 3 is pick-up unit (vibration coupling cantilever beam configures vertically) structural schematic diagram in example 1, (a) front view,
(b) top view, (c) side view, (d) perspective view.
Fig. 4 is pick-up unit (configuration of vibration coupling outrigger horizontal) structural schematic diagram in example 2, (a) front view,
(b) top view, (c) side view, (d) perspective view.
Fig. 5 is software processing flow figure when vibrating sensor of the present invention carries out acceleration analysis.
Have in figure: laser 1, condenser lens 2, transmission-type grating 3, vibration coupling pick-up unit 4 are vertical to configure fixed light
Grid cantilever beam 41, three-dimensional coil spring 411, horizontal arrangement fixed grating cantilever beam 42, plane spring 421, photodetector 5.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific example.
Embodiment 1
Such as Fig. 1 and Fig. 3, wide range high sensitivity vibration of optical sensor of the present embodiment based on vibration coupling, including laser
Device 1, condenser lens 2, transmission-type grating 3, vibration coupling unit such as Fig. 3, photodetector 5；Transmission-type grating 3 is rigidly fixed in
On a certain vertical configuration fixed grating cantilever beam 41 of vibration coupling unit, it is placed on the output light path of laser, transmission-type light
Output light path of 3 direction of displacement of grid perpendicular to laser；Such as Fig. 3, cantilever beam configures vertically in vibration coupling pick-up unit, each beam
Length, width, thickness it is identical, but tip end mass block varies in weight, and causes the intrinsic frequency of each beam different, each cantilever beam point
Not Tong Guo the different coil spring of coefficient of elasticity (such as three-dimensional coil spring 411) and middle position configure fixed grating cantilever beam 41 vertically
Connection；In the presence of acceleration, the laser that the laser 1 issues after condenser lens 2 vertical incidence to transmission-type grating 3,
Transmission-type grating 3 and laser beam generate relative motion, carry relative displacement signal through the emergent light of grating, the photoelectricity is visited
It surveys device 5 to be placed on transmission grating emitting light path, be detected through photodetector 5, in conjunction with known pick-up unit intermediate beam frequency response
Characteristic can calculate vibration information.Fig. 2 (a) is displacement measurement schematic diagram, generation pair when such as laser facula and grating relative motion
The class sine streak signal such as Fig. 2 (b) answered.
Embodiment 2
Such as Fig. 1 and Fig. 4, wide range high sensitivity vibration of optical sensor of the present embodiment based on vibration coupling, including laser
Device 1, condenser lens 2, transmission-type grating 3, vibration coupling unit such as Fig. 4, photodetector 5；Transmission-type grating 3 is rigidly fixed in
Vibration coupling unit certain level configures on fixed grating cantilever beam 42, is placed on the output light path of laser, transmission-type light
Output light path of 3 direction of displacement of grid perpendicular to laser；Such as Fig. 4, outrigger horizontal configuration, each beam in vibration coupling pick-up unit
Length, width, thickness it is identical, but tip end mass block varies in weight, and causes the intrinsic frequency of each beam different, each cantilever beam point
Not Tong Guo the different plane spring of coefficient of elasticity (can by change strip Liangping diaphragm flexures length realize, such as plane bullet
Spring 421) and middle position cantilever beam, that is, connection of horizontal arrangement fixed grating cantilever beam 42；In the presence of acceleration, the laser 1
The laser of sending vertical incidence to transmission-type grating 3, grating and laser beam after condenser lens 2 generates relative motion, thoroughly
The emergent light for crossing grating carries relative displacement signal, and the photodetector 5 is placed on transmission grating emitting light path, through photoelectricity
Detector 5 detects, and can calculate vibration information in conjunction with known pick-up unit intermediate beam Frequency Response.Fig. 2 (a) is displacement measurement
Schematic diagram, as generated corresponding class sine streak signal such as Fig. 2 (b) when laser facula is with grating relative motion.
As shown in figure 5, based on the above-mentioned wide range high sensitivity vibration of optical sensor based on vibration coupling, the present invention is into one
Step, which is provided, realizes the measurement of wide range high sensitivity optical acceleration and analysis method, specific steps are as follows: pass through using vibration coupling
The transmitted light intensity stripe signal of 5 pairs of photodetector carrying relative displacements is acquired, by class sinusoidal signal in the monocycle
It carries out counting to get monocycle relative displacement, then passes through the Frequency Response curve of monocycle relative value and known Vibration pickup
Acceleration value is calculated, to realize the measurement of acceleration.
Claims (6)
1. a kind of wide range high sensitivity vibration of optical sensor based on vibration coupling, which is characterized in that the sensor includes swashing
Light device (1), lens (2), transmission-type grating (3), vibration coupling pick-up unit (4), photodetector (5)；The transmission-type light
Grid (3) are rigidly fixed on vibration coupling pick-up unit (4), are placed on the output light path of laser (1), transmission-type grating
(3) output light path of the direction of displacement perpendicular to laser (1)；The vibration coupling pick-up unit (4) includes multiple cantilever beams, institute
It states multiple cantilever beams and passes through coil spring or plane spring respectively and connect with middle position cantilever beam；What the laser issued swashs
Vertical incidence is to transmission-type grating after condenser lens for light, and when there are acceleration, transmission-type grating and laser beam are generated
Relative motion carries relative displacement signal through the emergent light of grating, and the photodetector is placed on transmission grating emergent light
On the road.
2. a kind of wide range high sensitivity vibration of optical sensor based on vibration coupling as described in claim 1, feature exist
In the vibration coupling pick-up unit (4), wherein each cantilever beam structure is vertical or configured in parallel.
3. a kind of wide range high sensitivity vibration of optical sensor based on vibration coupling as described in claim 1, feature exist
In the vibration coupling pick-up unit (4), wherein the intrinsic frequency of each cantilever beam is different, between spacing it is equal.
4. a kind of wide range high sensitivity vibration of optical sensor based on vibration coupling as described in claim 1, feature exist
In: the vibration coupling pick-up unit (4), wherein if each cantilever beam configures vertically, two sides cantilever beam passes through three-dimensional coil spring
It is connect respectively with middle position cantilever beam；If each cantilever beam configured in parallel, two sides cantilever beam is by plane spring respectively in
Between displacement cantilever beam connection.
5. a kind of wide range high sensitivity vibration of optical sensor based on vibration coupling as described in claim 1, feature exist
In: the transmission-type grating (3), output striped are sinusoidal wave, and a sine streak corresponds to the transmission-type grating phase
D displacement for laser beam, D is screen periods.
6. a kind of wide range high sensitivity vibration of optical sensor based on vibration coupling as described in claim 1, feature exist
In: the transmission-type grating (3), material are the quartz of low thermal coefficient of expansion or the glass material of zero thermal expansion.
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| CN201810895747.6A CN108957031A (en) | 2018-08-07 | 2018-08-07 | Wide range high sensitivity vibration of optical sensor based on vibration coupling |
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| CN201810895747.6A CN108957031A (en) | 2018-08-07 | 2018-08-07 | Wide range high sensitivity vibration of optical sensor based on vibration coupling |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110208576A (en) * | 2019-06-18 | 2019-09-06 | 上海应用技术大学 | A kind of micro-acceleration sensor can be changed diffraction grating with period stretch formula |
| CN114674378A (en) * | 2021-03-16 | 2022-06-28 | 中国启源工程设计研究院有限公司 | Electroplate centralized control district electroplating effluent treatment record structure based on light sensing |
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| CN1712904A (en) * | 2005-05-25 | 2005-12-28 | 山西大学 | Displacement sensor with single grating |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110208576A (en) * | 2019-06-18 | 2019-09-06 | 上海应用技术大学 | A kind of micro-acceleration sensor can be changed diffraction grating with period stretch formula |
| CN110208576B (en) * | 2019-06-18 | 2022-02-11 | 上海应用技术大学 | Micro-acceleration sensor with period telescopic variable diffraction grating |
| CN114674378A (en) * | 2021-03-16 | 2022-06-28 | 中国启源工程设计研究院有限公司 | Electroplate centralized control district electroplating effluent treatment record structure based on light sensing |
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