CN108844493A - The double light comb topography measurement devices of Electro-optical Modulation and its method of calibration - Google Patents
The double light comb topography measurement devices of Electro-optical Modulation and its method of calibration Download PDFInfo
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- CN108844493A CN108844493A CN201810726965.7A CN201810726965A CN108844493A CN 108844493 A CN108844493 A CN 108844493A CN 201810726965 A CN201810726965 A CN 201810726965A CN 108844493 A CN108844493 A CN 108844493A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
Abstract
A kind of double light comb topography measurement devices of Electro-optical Modulation and its method of calibration, the double light comb topography measurement devices of the Electro-optical Modulation include：The double light comb generation modules of Electro-optical Modulation, for generating the centre frequency optical frequency com different with repetition rate；More one-dimensional range finder modules of heterodyne, for measuring one-dimensional distance information of the measured object on its shoot laser direction；Two dimensional motion module for driving testee to spin movement, and provides the two-dimensional distance information on the direction measured object x and the direction y；Calculation processing unit generates the three-dimensional appearance of testee for the range information on the direction confluence analysis measured object z, the direction x and the direction y.The double light comb topography measurement devices of Electro-optical Modulation of the invention and its method of calibration use the synthetic wavelength range unit based on the double light combs of Electro-optical Modulation, can obtain very high z direction ranging precision, and device is easily adjusted, and can facilitate and realize the work such as verticality verification.
Description
Technical field
The invention belongs to measuring three-dimensional morphology technical fields, and in particular to a kind of double light comb topography measurement devices of Electro-optical Modulation
And its method of calibration.
Background technique
Measuring three-dimensional morphology technology has a wide range of applications in fields such as quality testing, IC manufacturing, industry assemblings,
As long as traditional topography is divided into two aspects：Suitable for the visual method on big measured object surface and suitable for small items
The white light interference technique and sonde method measuring technique of topography measurement.The measurable area of visual method suitable for big measured object surface
Greatly, but it is limited to the performance of camera, it is difficult to obtain very accurate measurement accuracy；The white light interference technique of small items topography measurement
Not only measuring speed is slow with sonde method measuring technique, but also belongs to increment measurement method, encounters big contoured surface or rank
Tread can not measure numerical value.Present industrial circle lacks a kind of compatible big measured surface of energy and small measured surface, and precision is high, Shandong
The strong three-dimensional measurement technology of stick.
Summary of the invention
In view of the deficiencies of the prior art, the purpose of the present invention is to provide the double light comb topography measurement device of Electro-optical Modulation and its
Method of calibration, at least one of to solve the above problems.
The present invention is achieved through the following technical solutions：
As one aspect of the present invention, a kind of double light comb topography measurement devices of Electro-optical Modulation are provided, including：Electro-optical Modulation
Double light comb generation modules, for generating the centre frequency optical frequency com different with repetition rate；More one-dimensional range finder modules of heterodyne,
Using one-dimensional distance information of the double optics frequency comb measurement measured object on its shoot laser direction, more heterodynes are one-dimensional
The shoot laser direction of range finder module is the direction z；Two dimensional motion module for driving testee to spin movement, and provides
Two-dimensional distance information on the direction measured object x and the direction y；Calculation processing unit, for more one-dimensional surveys of heterodyne described in confluence analysis
The two-dimensional distance information on the direction x and the direction y that the z directional information and the two dimensional motion module obtained away from module obtains, it is raw
At the three-dimensional appearance of testee.
Preferably, the double light comb generation modules of the Electro-optical Modulation include：Continuous-wave laser, fiber coupler, main vibration electricity
Optical modulator, main vibration acousto-optic modulator, local oscillator electrooptic modulator and local oscillator acousto-optic modulator；Wherein, the continuous wave laser
The light that device issues is divided into two beams by the fiber coupler, wherein a branch of pass through the main vibration electrooptic modulator and the main vibration
Acousto-optic modulator generates main vibration optical frequency com；Another beam passes through the local oscillator electrooptic modulator and the local oscillator acousto-optic modulator
Generate local oscillator optical frequency com；The center frequency difference of the main vibration optical frequency com and the main vibration optical frequency com is Δ f0、
Repetition rate difference is Δ frep。
Preferably, the one-dimensional range finder module of more heterodynes includes：Main vibration optical frequency com, is divided into reference light through beam splitter
With measurement light；And local oscillator optical frequency com；It is divided into reference light and measurement light through beam splitter；Wherein, main vibration optical frequency com
Directly pass through coupler with the reference light of local oscillator optical frequency com and merges together feeding detector beat frequency；Main vibration optical frequency com
Measurement light emitting to testee surface, converge after reflection with the measurement light of local oscillator optical frequency com, be re-fed into photodetection
Device beat frequency.
Preferably, the ranging calculated relationship of the one-dimensional range finder module of more heterodynes is：
Wherein, c is the spread speed of light in air,It is the phase difference of reference light and measurement light under n rank synthetic wavelength,
The frequency for the synthetic wavelength that the different frequency of the main vibration optical frequency com is formed at subassembly is nfrep, n is positive integer, frep
Based on shake optical frequency com repetition rate.
Preferably, the two dimensional motion module includes：Turntable, the surfaces of revolution is perpendicular to more one-dimensional ranging moulds of heterodyne
The shoot laser of block；Installing mechanism is located at the side close to more one-dimensional range finder modules of heterodyne of the turntable, is used for
Measured object is installed；Translation stage for fixing the turntable, and makes the rotation stage translation, and the direction of motion is perpendicular to described
The shoot laser of more one-dimensional range finder modules of heterodyne.
Preferably, the two dimensional motion module further includes：Adjustment frame is located at below the surfaces of revolution, with pitching and
Beat function, for guaranteeing the verticality of shoot laser and the surfaces of revolution；Lifting platform is located at below the adjustment frame, for adjusting
The height of the whole turntable guarantees complete measurement measured object surface；And turning table control motor, it is located at the turntable
Back to the side of more one-dimensional range finder modules of heterodyne, uniform angular velocity circular motion is done for controlling the turntable.
Preferably, a circle is carved on the turntable of the two dimensional motion module using the shaft center of circle as the center of circle, radius is the circle of X
Whether ring, the shoot laser for verifying the one-dimensional range finder module of more heterodynes as judgement line are vertical with the surfaces of revolution.
As another aspect of the present invention, a kind of verification of double light comb topography measurement devices of Electro-optical Modulation above-mentioned is provided
Method includes the following steps：(1) lifting platform and the translation stage are adjusted, the outgoing of the one-dimensional range finder module of more heterodynes is swashed
Light gets to the center point of the rotary shaft of turntable；(2) by the mobile X of the translation stage, the one-dimensional range finder module of more heterodynes is checked
Shoot laser whether get on the judgement line；(3) if got on the judgement line, shoot laser and the surfaces of revolution hang down
Directly；(4) if do not got on the judgement line, the adjustment frame is adjusted, step (1) is returned and starts to verify.
It can be seen from the above technical proposal that the double light comb topography measurement devices of Electro-optical Modulation of the invention and its method of calibration
It has the advantages that：
(1) using the synthetic wavelength range unit based on the double light combs of Electro-optical Modulation, very high z direction ranging essence can be obtained
Degree；
(2) device is easily adjusted, and can be facilitated and be realized the work such as verticality verification.
Detailed description of the invention
Fig. 1 is the overall structure figure of the double light comb topography measurement devices of Electro-optical Modulation in the embodiment of the present invention；
Fig. 2 is frequency comb shoot laser and turntable surface vertical check block diagram；
Fig. 3 is that the double light combs of Electro-optical Modulation generate structure chart；
【Figure elements explanation】
1- collimator；2- collimator；
3- collimator；4- semi-transparent semi-reflecting lens；
5- semi-transparent semi-reflecting lens；6- semi-transparent semi-reflecting lens；
7- semi-transparent semi-reflecting lens；8- fiber coupler；
9- photodetector；10- photodetector；
11- turntable；12- turntable controls motor；
13- determines line；14- pitching beat platform；
15- lifting platform；16- manual translation platform；
17- motorized precision translation stage；18- motorized precision translation stage controls motor；
The one-dimensional range finder module of the more heterodynes of 19-；20- calculation processing unit；
21- is continuously by laser；22- fiber coupler；
The main vibration electrooptic modulator of 23-；24- local oscillator electrooptic modulator；
The main vibration acousto-optic modulator of 25-；26- local oscillator acousto-optic modulator.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in further detail.
A kind of double light comb topography measurement devices of Electro-optical Modulation and its method of calibration, the double light comb topography measurements of the Electro-optical Modulation
Device includes：The double light comb generation modules of Electro-optical Modulation, for generating the centre frequency optical frequency com different with repetition rate；It is more
The one-dimensional range finder module of heterodyne, for measuring one-dimensional distance information of the measured object on its shoot laser direction；Two dimensional motion module,
For driving testee to spin movement, and provide the two-dimensional distance information on the direction measured object x and the direction y；Calculation processing
Unit generates the three-dimensional appearance of testee for the range information on the direction confluence analysis measured object z, the direction x and the direction y.
The double light comb topography measurement devices of Electro-optical Modulation of the invention and its method of calibration use the composite wave based on the double light combs of Electro-optical Modulation
Long range unit can obtain very high z direction ranging precision, and device is easily adjusted, and can facilitate and realize the work such as verticality verification.
Specifically, as one aspect of the present invention, a kind of double light comb topography measurement devices of Electro-optical Modulation are provided, including：
The double light comb generation modules of Electro-optical Modulation, for generating the centre frequency optical frequency com different with repetition rate；More heterodynes are one-dimensional
Range finder module, it is described using one-dimensional distance information of the double optics frequency comb measurement measured object on its shoot laser direction
The shoot laser direction of more one-dimensional range finder modules of heterodyne is the direction z；Two dimensional motion module, for driving testee to spin shifting
It is dynamic, and the two-dimensional distance information on the direction measured object x and the direction y is provided；Calculation processing unit, for mostly outer described in confluence analysis
The two-dimensional distance on the direction x and the direction y that the z directional information and the two dimensional motion module that the one-dimensional range finder module of difference obtains obtain
Information generates the three-dimensional appearance of testee.
Preferably, the double light comb generation modules of the Electro-optical Modulation include：Continuous-wave laser, fiber coupler, main vibration electricity
Optical modulator, main vibration acousto-optic modulator, local oscillator electrooptic modulator and local oscillator acousto-optic modulator；Wherein, the continuous wave laser
The light that device issues is divided into two beams by the fiber coupler, wherein a branch of pass through the main vibration electrooptic modulator and the main vibration
Acousto-optic modulator generates main vibration optical frequency com；Another beam passes through the local oscillator electrooptic modulator and the local oscillator acousto-optic modulator
Generate local oscillator optical frequency com；The center frequency difference of the main vibration optical frequency com and the main vibration optical frequency com is Δ f0、
Repetition rate difference is Δ frep's.
Preferably, the one-dimensional range finder module of more heterodynes includes：Main vibration optical frequency com, is divided into reference light through beam splitter
With measurement light；And local oscillator optical frequency com；It is divided into reference light and measurement light through beam splitter；Wherein, main vibration optical frequency com
Directly pass through coupler with the reference light of local oscillator optical frequency com and merges together feeding detector beat frequency；Main vibration optical frequency com
Measurement light emitting to testee surface, converging after reflection with the measurement light of local oscillator optical frequency com, be re-fed into photoelectricity spy
Survey device beat frequency.
Preferably, the ranging calculated relationship of the one-dimensional range finder module of more heterodynes is：
Wherein, c is the spread speed of light in air,It is the phase difference of reference light and measurement light under n rank synthetic wavelength,
The frequency for the synthetic wavelength that the different frequency of the main vibration optical frequency com is formed at subassembly is nfrep, n is positive integer, frep
Based on shake optical frequency com repetition rate.
Preferably, the two dimensional motion module includes：Turntable, the surfaces of revolution is perpendicular to more one-dimensional ranging moulds of heterodyne
The shoot laser of block；Installing mechanism is located at the side close to more one-dimensional range finder modules of heterodyne of the turntable, is used for
Measured object is installed；Translation stage for fixing the turntable, and makes the rotation stage translation, and the direction of motion is perpendicular to described
The shoot laser of more one-dimensional range finder modules of heterodyne.
Preferably, the two dimensional motion module further includes：Adjustment frame is located at below the surfaces of revolution, with pitching and
Beat function, for guaranteeing the verticality of shoot laser and the surfaces of revolution；Lifting platform is located at below the adjustment frame, for adjusting
The height of the whole turntable guarantees complete measurement measured object surface；And turning table control motor, it is located at the turntable
Back to the side of more one-dimensional range finder modules of heterodyne, uniform angular velocity circular motion is done for controlling the turntable.
Preferably, a circle is carved on the turntable of the two dimensional motion module using the shaft center of circle as the center of circle, radius is the circle of X
Whether ring, the shoot laser for verifying the one-dimensional range finder module of more heterodynes as judgement line are vertical with the surfaces of revolution.
As another aspect of the present invention, a kind of verification of double light comb topography measurement devices of Electro-optical Modulation above-mentioned is provided
Method includes the following steps：(1) lifting platform and the translation stage are adjusted, the outgoing of the one-dimensional range finder module of more heterodynes is swashed
Light gets to the center point of the rotary shaft of turntable；(2) by the mobile X of the translation stage, the one-dimensional range finder module of more heterodynes is checked
Shoot laser whether get to determine line on；(3) determine on line if got to, shoot laser is vertical with the surfaces of revolution；(4) if
It does not get to and determines to adjust the adjustment frame on line, return step (1) and start to verify.
Below in conjunction with specific embodiments and the drawings, to the double light comb topography measurement devices of Electro-optical Modulation of the invention and its verification
Method is described in further detail.
Fig. 1 is the overall structure figure of the double light comb topography measurement devices of Electro-optical Modulation in the embodiment of the present invention.As shown in Figure 1,
Two-way frequency comb measures the direction the z range information of measured object through the one-dimensional range finder module 19 of more heterodynes, in the one-dimensional ranging mould of more heterodynes
In block, main vibration optical frequency com collimator 1 becomes spatial light, is divided into reference light and measurement light, reference light by beam splitter 4
The reference light separated with local oscillator optical frequency com through fiber coupler 8 and collimator 2 reaches spy after closing beam by semi-transparent semi-reflecting lens 5
It surveys and is used as reference signal on device 9, the measurement light of main vibration optical frequency com is passed through by reaching measured object surface after semi-transparent semi-reflecting lens 6
It is reflected after measured object surface reflection by semi-transparent semi-reflecting lens 6, last and local oscillator optical frequency com measurement light collimator 3 exists
Close beam on semi-transparent semi-reflecting lens 7, be fed together on detector 10 as measurement light, after reflection with the measurement light of local oscillator optical frequency com
Converge on semi-transparent semi-reflecting lens, be re-fed into photodetector beat frequency, the signal that detector detects is with two-way optical frequency com
Center frequency difference Δ f0Centered on, with repetition rate difference Δ frepFor a series of frequency contents at equal intervals at interval, each frequency
Ingredient all based on shake the lower frequency reducing of the corresponding optical frequency of optical frequency com, phase change is also equal to main vibration optical frequency com phase
The phase change of corresponding optical frequency；When calculating, the different frequency ingredient combination of two of main vibration optical frequency com forms composite wave
Long, the frequency of synthetic wavelength is nfrep, wherein n is positive integer, frepBased on shake optical frequency com repetition rate, then root
According to the principle of Laser Range Finding Based on Phase, which is calculated as follows：
Wherein, c is the spread speed of light in air,It is the phase difference of reference light and measurement light under n rank synthetic wavelength.
The two dimensional motion module includes translation stage 17 and turntable 11, and translation stage 17 is controlled by translation stage control motor 18
Do linear uniform motion, shoot laser of the direction of motion perpendicular to above-mentioned more one-dimensional range finder modules of heterodyne, and the rotation of turntable
Turn the shoot laser that face is also perpendicularly to the one-dimensional range finder module 19 of above-mentioned more heterodynes, in order to guarantee that shoot laser is vertical with the surfaces of revolution
Degree places the adjustment frame 14 for having pitching and beat function under the surfaces of revolution, in order to guarantee complete measurement measured object surface, also
Accurate adjustment lifting platform 15 and translation stage 16 need to be placed under turntable, and shoot laser is first got into turntable before the start of the measurement
Center location gets to the testee outer farthest from the center of circle or the place other than it.The rotation of the two dimensional motion module
A circle is carved on platform using the shaft center of circle as the center of circle, radius is the judgement line 13 of X with whether vertical with the surfaces of revolution, the school that verifies shoot laser
It is as shown in Figure 2 to test step：
Step 1: adjusting lifting and translation stage, shoot laser is got to the center point of rotary shaft；
Step 2: whether observation shoot laser, which is got to, determines on line by the mobile X of horizontal position moving stage；
Step 3: determining to illustrate that shoot laser is vertical with the surfaces of revolution on line if got to；
Step 3: determining to adjust pitching platform and beat platform on line, return step and verify at the beginning if do not got to.
The calculation processing unit 20, the direction the z letter obtained for the above-mentioned more one-dimensional range finder modules 19 of heterodyne of confluence analysis
The two-dimentional x-y directional information of breath and two dimensional motion module, generates the three-dimensional appearance of testee.
Fig. 3 shows the specific structure of the double light comb generation modules of Electro-optical Modulation, and the light that continuous-wave laser 21 issues passes through
Fiber coupler 22 is divided into two-beam, wherein generating all the way by a main vibration electrooptic modulator 23 and main vibration acousto-optic modulator 25
Main vibration optical frequency com, another way also passes through local oscillator electrooptic modulator 24 and local oscillator acousto-optic modulator 26 generates local oscillator optical frequency
Comb；The rf modulated signal of main vibration electrooptic modulator 23 and local oscillator electrooptic modulator 24 is mentioned by signal source 27 and signal source 28 respectively
For the output frequency of the two signal sources is different, and allowing for two-way frequency comb has a repetition rate difference Δ frep, and main vibration sound
It optical modulator 25 and is provided respectively by signal source 29 and signal source 30 with the rf modulated signal of local oscillator acousto-optic modulator 26, this two
The output frequency of a signal source differs Δ f0, finally obtaining two-way center frequency difference is Δ f0It is Δ f with repetition rate differencerepMaster
Shake optical frequency com and main vibration optical frequency com.
In conclusion the double light comb topography measurement devices of Electro-optical Modulation of the invention and its method of calibration use and are based on electric light tune
The synthetic wavelength range unit for making double light combs, can obtain very high z direction ranging precision, and device is easily adjusted, can facilitate realization
The work such as verticality verification.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (8)
1. a kind of double light comb topography measurement devices of Electro-optical Modulation, which is characterized in that including：
The double light comb generation modules of Electro-optical Modulation, for generating the centre frequency optical frequency com different with repetition rate；
More one-dimensional range finder modules of heterodyne, it is one-dimensional on its shoot laser direction using double optics frequency comb measurement measured object
Range information, the shoot laser direction of more one-dimensional range finder modules of heterodyne are the direction z；
Two dimensional motion module for driving testee to spin movement, and provides the two dimension on the direction measured object x and the direction y
Range information；
Calculation processing unit, the z directional information and the two dimension obtained for the one-dimensional range finder module of more heterodynes described in confluence analysis
The two-dimensional distance information on the direction x and the direction y that motion module obtains, generates the three-dimensional appearance of testee.
2. the double light comb topography measurement devices of Electro-optical Modulation according to claim 1, which is characterized in that
The double light comb generation modules of the Electro-optical Modulation include：Continuous-wave laser, fiber coupler, main vibration electrooptic modulator, master
Shake acousto-optic modulator, local oscillator electrooptic modulator and local oscillator acousto-optic modulator；
Wherein, the light that the continuous-wave laser issues is divided into two beams by the fiber coupler, wherein described in a branch of process
Main vibration electrooptic modulator and the main vibration acousto-optic modulator generate main vibration optical frequency com；Another beam passes through the local oscillator electric light tune
Device processed and the local oscillator acousto-optic modulator generate local oscillator optical frequency com；
The center frequency difference of the main vibration optical frequency com and the main vibration optical frequency com is Δ f0, repetition rate difference be Δ
frep。
3. the double light comb topography measurement devices of Electro-optical Modulation according to claim 1, which is characterized in that
The one-dimensional range finder module of more heterodynes includes：
Main vibration optical frequency com is divided into reference light and measurement light through beam splitter；And
Local oscillator optical frequency com；It is divided into reference light and measurement light through beam splitter；
Wherein, it is main vibration optical frequency com and local oscillator optical frequency com reference light directly pass through coupler merge together feeding visit
Survey device beat frequency；
The measurement light emitting of main vibration optical frequency com exists after reflection with the measurement light of local oscillator optical frequency com to testee surface
Converge, is re-fed into photodetector beat frequency.
4. the double light comb topography measurement devices of Electro-optical Modulation according to claim 1, which is characterized in that
The ranging calculated relationship of the one-dimensional range finder module of more heterodynes is：
Wherein, c is the spread speed of light in air,It is the phase difference of reference light and measurement light under n rank synthetic wavelength, it is described
The frequency for the synthetic wavelength that the different frequency of main vibration optical frequency com is formed at subassembly is nfrep, n is positive integer, frepBased on
The repetition rate of vibration optical frequency com.
5. the double light comb topography measurement devices of Electro-optical Modulation according to claim 1, which is characterized in that
The two dimensional motion module includes：
Turntable, shoot laser of the surfaces of revolution perpendicular to more one-dimensional range finder modules of heterodyne；
Installing mechanism is located at the side close to more one-dimensional range finder modules of heterodyne of the turntable, tested for installing
Object；
Translation stage for fixing the turntable, and makes the rotation stage translation, and the direction of motion is perpendicular to more heterodynes one
Tie up the shoot laser of range finder module.
6. the double light comb topography measurement devices of Electro-optical Modulation according to claim 1, which is characterized in that
The two dimensional motion module further includes：
Adjustment frame is located at below the surfaces of revolution, has pitching and beat function, for guaranteeing shoot laser and the surfaces of revolution
Verticality；
Lifting platform is located at below the adjustment frame, for adjusting the height of the turntable, guarantees complete measurement measured object table
Face；And
Turning table control motor is located at the side back to more one-dimensional range finder modules of heterodyne of the turntable, for controlling
The turntable does uniform angular velocity circular motion.
7. the double light comb topography measurement devices of Electro-optical Modulation according to claim 1, which is characterized in that
A circle is carved on the turntable of the two dimensional motion module using the shaft center of circle as the center of circle, radius is the annulus of X, as judgement
Whether the shoot laser that line verifies the one-dimensional range finder module of more heterodynes is vertical with the surfaces of revolution.
8. a kind of method of calibration of the double light comb topography measurement devices of Electro-optical Modulation according to any one of claims 1 to 7, special
Sign is, includes the following steps：
(1) lifting platform and the translation stage are adjusted, the shoot laser of the one-dimensional range finder module of more heterodynes is got into turntable
The center point of rotary shaft；
(2) by the mobile X of the translation stage, check whether the shoot laser of the one-dimensional range finder module of more heterodynes gets to the judgement
On line；
(3) if got on the judgement line, shoot laser is vertical with the surfaces of revolution；
(4) if do not got on the judgement line, the adjustment frame is adjusted, step (1) is returned and starts to verify.
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| CN109557547A (en) * | 2018-12-27 | 2019-04-02 | 武汉万集信息技术有限公司 | Laser radar, range measurement and/or method for determining speed and storage medium |
| CN109579707A (en) * | 2018-11-23 | 2019-04-05 | 北京空间飞行器总体设计部 | A kind of six degree of freedom high-precision base line measurement system and method based on femtosecond light comb |
| CN111289223A (en) * | 2019-12-19 | 2020-06-16 | 西安空间无线电技术研究所 | Real-time phase measurement system and method based on double-optical comb beat frequency |
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