CN108507981B - Silicon-based waveguide back reflection sensing device based on OFDR (optical frequency domain reflectometry) and measuring method thereof - Google Patents
Silicon-based waveguide back reflection sensing device based on OFDR (optical frequency domain reflectometry) and measuring method thereof Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
Abstract
The invention discloses a silicon-based waveguide back reflection sensing device based on OFDR and a measuring method thereof. The device comprises a tunable laser, a trigger interferometer, an optical fiber circulator, a polarization control and beam splitting module, a measurement interferometer, a coupling sensing module, a high-speed acquisition module and a computer. The tunable laser emits sweep-frequency laser, the polarization control and beam splitting module controls the polarization state of the sweep-frequency laser and splits the sweep-frequency laser, and the first path of light enters the trigger interferometer and generates a first beat-frequency signal as an external clock; the second path of light enters the full-polarization-maintaining measurement interferometer, the third path of light generates back reflection signal light through the optical fiber circulator and the coupling sensing module, the back reflection signal light and the second path of light are interfered to generate a second beat frequency signal, and the high-speed acquisition module and the computer demodulate the second beat frequency signal to obtain position information. The invention can accurately measure the partial length of the light beam of the silicon-based waveguide and the propagation quality of the light beam in the silicon-based waveguide through rapid and convenient non-invasive measurement.
Description
Technical Field
The invention relates to the technical field of distributed optical fiber sensing and system detection instruments. In particular to a silicon-based waveguide back reflection sensing device based on OFDR and a measuring method thereof.
Background
The invention and application of the silicon-based optical device on the chip taking the silicon-based waveguide as the core revolutionarily change the human life. The silicon-based waveguide is low in raw material price, and silicon is used as a high-refractive-index material and a window material of a communication waveband, so that an optical field can be limited in a structure with a micro-nano size with extremely low loss. However, in the prior art, the quality of the silicon-based waveguide is mostly observed by electron microscopy, which is costly, slow, and difficult to diagnose the condition of the internal structure of the waveguide.
An Optical Frequency Domain Reflectometer (OFDR) uses a high-coherence linear Frequency-swept laser as a light source, performs beat Frequency interference on reference light and backscattered light of a device to be measured of a measuring arm, and obtains the information of the back reflection at different positions of the device by receiving beat Frequency interference patterns and demodulating beat Frequency signals. However, if OFDR is applied to the detection of the silicon-based waveguide, the problem of coupling between the incident swept-frequency laser and the silicon-based waveguide needs to be solved, and the polarization property of the incident beam greatly affects the coupling quality, thereby affecting the final data result of OFDR.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a silicon-based waveguide back reflection sensing device based on OFDR, aiming at obtaining the back reflection information of the silicon-based waveguide at high speed, accurately and conveniently. Another object of the present invention is to provide a measuring method using the sensing device.
The device adopts the following technical scheme:
the silicon-based waveguide back reflection sensing device based on OFDR comprises a tunable frequency-sweeping laser, a polarization control and beam splitting module, a trigger interferometer, an optical fiber circulator, a measurement interferometer, a coupling sensing module, a high-speed acquisition module and a computer; the tunable frequency-sweeping laser emits sweep-frequency laser with linear periodic variation, the sweep-frequency laser is incident to the polarization control and beam splitting module, the polarization control and beam splitting module controls the polarization state of the sweep-frequency laser, the sweep-frequency laser is divided into three paths, and the three paths of the sweep-frequency laser respectively enter the triggering interferometer, the optical fiber circulator and the measuring interferometer; the triggering interferometer enables incident sweep-frequency laser to generate beat-frequency interference to generate a first beat-frequency signal; the optical fiber circulator transmits the incident sweep frequency laser to the coupling sensing module; the coupling sensing module is connected with the OFDR system and the silicon-based waveguide to be detected, generates back reflection signal light and then sends the back reflection signal light back to the optical fiber circulator; the measuring interferometer enables incident sweep-frequency laser and back reflection signal light of the optical fiber circulator to generate beat-frequency interference to generate a second beat-frequency signal; the high-speed acquisition module receives a first beat frequency signal to enable the first beat frequency signal to become an external clock signal and simultaneously receives a second beat frequency signal; and the computer performs data processing on the second beat frequency signal to obtain the relevant information of the measured silicon-based waveguide.
Further, the polarization control and beam splitting module adjusts the polarization state of the swept-frequency laser to a continuously adjustable working mode.
Further, the lengths of the two interference arms in the triggering interferometer are different.
Further, the optical fiber circulator is in a polarization maintaining working mode; the first port of the optical fiber circulator receives sweep-frequency laser from the polarization control and beam splitting module, the second port is connected with the coupling sensing module, the sweep-frequency laser is sent into the coupling sensing module, back reflection signal light from the coupling sensing module is received, and the third port sends the back reflection signal light from the second port into the measuring interferometer.
Furthermore, the coupling sensing module comprises an incident bare fiber, an incident clamp displacement table, an emergent bare fiber, an emergent clamp displacement table, an optical power meter and a computer; one end of the incident bare fiber is connected with the second port of the optical fiber circulator, and the other end of the incident bare fiber is aligned to the incident part of the silicon-based waveguide to be detected through the incident clamp displacement table; one end of the emergent bare fiber is aligned to the emergent part of the silicon-based waveguide to be detected through an emergent fixture displacement table, and the other end of the emergent bare fiber is connected with an optical power meter; the optical power meter is connected with the computer.
Further, the measuring interferometer is in a polarization maintaining working mode; one port of the measuring interferometer receives the swept laser from the polarization control and beam splitting module, and the other port receives the back-reflected signal light.
The measurement method of the silicon-based waveguide back reflection sensing device based on OFDR comprises the following steps:
building a light path: the tunable laser is controlled by a computer to emit sweep-frequency laser, the central wavelength and the sweep-frequency range of the sweep-frequency laser are set according to the propagation property of the detected silicon-based waveguide, so that the sweep-frequency laser emitted by the tunable laser can be well propagated in the waveguide, a light path is established, the sweep-frequency laser sequentially passes through a polarization control and beam splitting module, an optical fiber circulator, a coupling sensing module and an optical power meter, and a computer connected with the optical power meter can display the received optical power value in real time;
coupling coarse adjustment: respectively aligning an incident bare fiber and an emergent bare fiber of a coupling sensing module to an incident end and an emergent end of a silicon-based waveguide through an incident clamp displacement table and an emergent clamp displacement table of the coupling sensing module, and ensuring that the emergent bare fiber can be accurately aligned to the emergent end of the silicon-based waveguide;
fine tuning of coupling: fixing an emergent fixture displacement table of the coupling sensing module to be fixed, and accurately adjusting an incident bare fiber of the coupling sensing module through an incident fixture displacement table of the coupling sensing module to enable the transmitted light power to reach the maximum value, namely the optimal position of the incident bare fiber;
polarization adjustment: the incident clamp displacement table and the emergent clamp displacement table of the fixed coupling sensing module are fixed, and the polarization control and beam splitting module is continuously adjusted to ensure that the polarization state of incident frequency-sweep laser is continuously changed, so that the transmitted light power reaches a maximum value, and the optimal polarization state of the incident frequency-sweep laser is obtained;
measurement of OFDR: connecting the triggering interferometer and the measuring interferometer to a high-speed acquisition module, and removing the emergent bare optical fiber of the coupling sensing module; controlling the tunable laser to emit sweep-frequency laser by the computer, wherein the sweep-frequency laser is divided into three paths by the polarization control and beam splitting module: the first path of light enters the trigger interferometer and generates beat frequency interference to generate a first beat frequency signal, and the first beat frequency signal is received by the high-speed acquisition module and is used as an external clock signal of the high-speed acquisition module; the second path of light enters the measuring interferometer to be used as reference light; the third path of light is transmitted into the silicon-based waveguide to be detected through the first port and the second port of the optical fiber circulator and the incident bare optical fiber of the coupling sensing module, generates back scattering signal light, and is transmitted into the measurement interferometer through the third port of the optical fiber circulator; the back scattering signal light and the reference light generate beat frequency interference in the measuring interferometer to generate a second beat frequency signal, and the second beat frequency signal is received by the high-speed acquisition module;
demodulation: the computer demodulates the second beat frequency signal and obtains a reflection spectrum of the back reflection signal light of the detected silicon-based waveguide relative to the position coordinate; and analyzing the reflection spectrum to obtain the relevant information of the light beam transmitted inside the silicon-based waveguide to be tested.
The invention has the advantages and positive effects that:
(1) the invention provides a silicon-based waveguide back reflection sensing device based on OFDR (optical frequency domain reflectometry), which utilizes the perfect compatibility of the OFDR technology and the bare fiber coupling chip technology, relies on a common silicon-based waveguide chip coupling system and does not need to additionally increase a coupling device, so the structure is simple, the operation is convenient and the popularization is convenient.
(2) The method adopts the OFDR technology, has the advantages of high resolution, high speed and the like, can quickly obtain the back reflection information of the silicon-based waveguide, and can accurately obtain the partial length of the light beam of the silicon-based waveguide and the propagation quality of the light beam in the silicon-based waveguide, such as the information of loss, break points, bending, side wall roughness and the like in the silicon-based waveguide through non-invasive measurement.
Drawings
FIG. 1 is a schematic view of the overall structure of the apparatus of the present invention;
FIG. 2 is a schematic diagram of the internal structure of a coupling sensor module in the apparatus of the present invention;
FIG. 3 is a flow chart of the measurement method and steps of the apparatus of the present invention;
FIG. 4 is a graph of a first silicon-based waveguide A back-reflected signal measured using the apparatus and method of the present invention;
FIG. 5 is a graph of a second silica-based waveguide B back-reflected signal measured using the apparatus and method of the present invention.
Detailed Description
The invention will be further explained with reference to the drawings.
Fig. 1 is a schematic structural diagram for implementing the method of the present invention, and the apparatus includes a computer 1, a tunable laser 2, a polarization control and beam splitting module 3, a triggering interferometer 4, a measuring interferometer 5, a fiber circulator 6, a high-speed acquisition module 7, and a coupling sensing module 8. The tunable frequency-sweeping laser 2 is used for emitting frequency-sweeping laser with linear periodic variation, and the polarization control and beam splitting module 3 is used for controlling the polarization state of the frequency-sweeping laser, dividing the frequency-sweeping laser into three paths, and respectively entering the triggering interferometer 4, the measuring interferometer 5 and the optical fiber circulator 6; the trigger interferometer 4 is used for enabling the swept-frequency laser entering the trigger interferometer to generate beat frequency interference and generate a first beat frequency signal; the fiber circulator 6 sends the incident sweep frequency laser into the coupling sensing module 8 and receives back reflection signal light; the coupling sensing module 8 is connected with the OFDR system and the silicon-based waveguide device to be detected, receives the sweep frequency laser from the optical fiber circulator 6, generates back reflection signal light and sends the back reflection signal light to the optical fiber circulator 6; the measuring interferometer 5 is used for enabling the swept-frequency laser entering the measuring interferometer to generate beat frequency interference with back reflection signal light from the optical fiber circulator 6, and generating a second beat frequency signal.
As shown in fig. 2, which is a schematic diagram of an internal specific structure of the coupling sensing module 8, the module includes an incident fixture displacement table 9, an incident bare fiber 10, an emergent bare fiber 11, an emergent fixture displacement table 12, an optical power meter 14, a computer 1, and a silicon-based waveguide 13 to be tested. The preliminary preparation and operation of the present invention will now be described with reference to the specific apparatus therein.
Building a light path: the tunable laser 2 is controlled by the computer 1 to emit sweep-frequency laser, the central wavelength and the sweep-frequency range of the sweep-frequency laser are set according to the propagation property of the silicon-based waveguide 13 to be detected, so that the sweep-frequency laser emitted by the tunable laser 2 can be well propagated in the waveguide, a light path is established, the sweep-frequency laser sequentially passes through the polarization control and beam splitting module 3, the optical fiber circulator 6, the incident bare fiber 11, the silicon-based waveguide 13 to be detected, the emergent bare fiber 11 and the optical power meter 14, and the computer 1 connected with the optical power meter 14 can display the received optical power value in real time. The incident bare fiber 10 and the exit bare fiber 11 are both bare fibers with the outer cladding removed.
Then, coupling rough adjustment from the emergent bare fiber 11 to the silicon-based waveguide 13 is performed, and the incident bare fiber 10 and the emergent bare fiber 11 are respectively aligned to the incident end and the emergent end of the silicon-based waveguide through the incident clamp displacement table 9 and the emergent clamp displacement table 12, so that the emergent bare fiber 11 can be accurately aligned to the emergent end of the silicon-based waveguide. This step simultaneously adjusts the incident bare fiber 10 and the exit bare fiber 11, ensuring that the transmitted light can be smoothly received by the optical power meter for subsequent operations.
Then, the coupling fine adjustment from the incident bare fiber 10 to the silicon-based waveguide 13 to be detected is carried out, the emergent fixture displacement table 12 is kept still, and the emergent bare fiber 11 does not influence the transmitted light power. The incident bare fiber 10 is finely adjusted by the incident clamp displacement table 9, so that the transmitted light power reaches the maximum, and the position of the incident bare fiber 10 is the optimal position at this time, so that the sweep laser can be sent into the silicon-based waveguide 13 to be detected as much as possible, and the back reflection signal light of the silicon-based waveguide 13 to be detected can be received as much as possible during OFDR measurement.
And then, carrying out polarization adjustment on the incident swept-frequency laser, fixing the incident clamp displacement table 9 and the emergent clamp displacement table 12 to be motionless, and continuously adjusting the polarization control and beam splitting module 3 to ensure that the polarization state of the incident swept-frequency laser is continuously changed, so that the transmission light power reaches a maximum value, namely the optimal polarization state of the incident swept-frequency laser. For the silicon-based waveguide device adopting the grating coupling mode, the polarization state of the incident swept-frequency laser has great influence on the coupling effect, an optimal polarization state of the incident swept-frequency laser is required, and the coupling effect is the best at the moment.
OFDR measurements were then performed: connecting the triggering interferometer 4 and the measuring interferometer 5 to a high-speed acquisition module, and moving the emergent bare fiber 11 away; the tunable laser 2 is controlled by the computer 1 to emit sweep-frequency laser, and the sweep-frequency laser is divided into three paths by the polarization control and beam splitting module 3: the first path of light enters the trigger interferometer 4 and generates beat frequency interference to generate a first beat frequency signal, and the first beat frequency signal is received by the high-speed acquisition module 7 and is used as an external clock signal of the high-speed acquisition module, and the high-speed acquisition module is provided with an external clock trigger port and at least 2 analog input ports; the second path of light enters the measuring interferometer 5 as reference light; the third path of light is sent into the silicon-based waveguide 13 to be measured through the first port and the second port of the optical fiber circulator 6 and the incident bare optical fiber 10, backscattering signal light is generated, and the third path of light is sent into the measurement interferometer 5 through the third port of the optical fiber circulator 6. The backscattered signal light and the reference light generate beat frequency interference in the measuring interferometer 5 to generate a second beat frequency signal, and the second beat frequency signal is received by the high-speed acquisition module 7. The optical fibers at the three ports of the optical fiber circulator 6 are all in a polarization double-axis conduction working mode; the incident bare fiber 10 is in a polarization double-axis conduction working mode, and the optical power meter 14 is in a working mode for displaying power data in real time; the optical fibers of the two ports of the measuring interferometer 5 are both in a polarization biaxial conduction working mode.
Demodulation: the computer 1 demodulates the second beat frequency signal and obtains a reflection spectrum of the back reflection signal light of the silicon-based waveguide relative to the position coordinate; analyzing the reflection spectrum can obtain the relevant information of the light beam transmitted in the silicon-based waveguide 13 to be tested.
If the working length of the delay optical fiber of the trigger interferometer 4 is known to be L, the refractive index n is the frequency interval Deltav of the laser light source which can solve each triggering of the interference signal:
wherein tau istC is the speed of light; and then obtaining the number N of data points detected at one time according to the laser frequency sweeping range f:
knowing the laser sweep frequency range, the group refractive index n of the silicon-based waveguide 13 to be measuredgThe spatial resolution of the measurement system can be obtained:
fig. 4 and 5 are graphs of two silica-based waveguide 13 back-reflected signals obtained from two tests using the apparatus and method of the present invention, with the abscissa representing distance in m and the ordinate representing reflectivity in dB. The two silicon-based waveguides on the chip, which have the same length and are manufactured by the same batch process, have no obvious structural difference under an electron microscope, and are respectively named as a silicon-based waveguide A and a silicon-based waveguide B.
According to the signal curve, the two silicon-based waveguides have the same length, but the reflection characteristics of the light beams are different in the waveguides. In particular, silicon-based waveguide a has a distinct reflection peak at the beginning of the interior of the waveguide, whereas silicon-based waveguide B has no strong reflection peak as a whole. This indicates that the position of the reflection peak of the silica-based waveguide a may be due to manufacturing process problems, uneven material distribution inside the waveguide, or due to roughness on the sidewall of this region. The propagation quality of the light beam inside the silicon-based waveguide B is significantly better. Therefore, the device and the method can detect the internal characteristics of the silicon-based waveguide in a non-embedded and nondestructive mode, and have good application prospects.
Claims (9)
1. The measurement method of the silicon-based waveguide back reflection sensing device based on OFDR is characterized by comprising the following steps:
building a light path: the tunable laser is controlled by a computer to emit sweep-frequency laser, the central wavelength and the sweep-frequency range of the sweep-frequency laser are set according to the propagation property of the detected silicon-based waveguide, so that the sweep-frequency laser emitted by the tunable laser can be well propagated in the waveguide, a light path is established, the sweep-frequency laser sequentially passes through a polarization control and beam splitting module, an optical fiber circulator, a coupling sensing module and an optical power meter, and a computer connected with the optical power meter can display the received optical power value in real time;
coupling coarse adjustment: respectively aligning an incident bare fiber and an emergent bare fiber of a coupling sensing module to an incident end and an emergent end of a silicon-based waveguide through an incident clamp displacement table and an emergent clamp displacement table of the coupling sensing module, and ensuring that the emergent bare fiber can be accurately aligned to the emergent end of the silicon-based waveguide;
fine tuning of coupling: fixing an emergent fixture displacement table of the coupling sensing module to be fixed, and accurately adjusting an incident bare fiber of the coupling sensing module through an incident fixture displacement table of the coupling sensing module to enable the transmitted light power to reach the maximum value, namely the optimal position of the incident bare fiber;
polarization adjustment: the incident clamp displacement table and the emergent clamp displacement table of the fixed coupling sensing module are fixed, and the polarization control and beam splitting module is continuously adjusted to ensure that the polarization state of incident frequency-sweep laser is continuously changed, so that the transmitted light power reaches a maximum value, and the optimal polarization state of the incident frequency-sweep laser is obtained;
measurement of OFDR: connecting the triggering interferometer and the measuring interferometer to a high-speed acquisition module, and removing the emergent bare optical fiber of the coupling sensing module; controlling the tunable laser to emit sweep-frequency laser by the computer, wherein the sweep-frequency laser is divided into three paths by the polarization control and beam splitting module: the first path of light enters the trigger interferometer and generates beat frequency interference to generate a first beat frequency signal, and the first beat frequency signal is received by the high-speed acquisition module and is used as an external clock signal of the high-speed acquisition module; the second path of light enters the measuring interferometer to be used as reference light; the third path of light is transmitted into the silicon-based waveguide to be detected through the first port and the second port of the optical fiber circulator and the incident bare optical fiber of the coupling sensing module, generates back scattering signal light, and is transmitted into the measurement interferometer through the third port of the optical fiber circulator; the back scattering signal light and the reference light generate beat frequency interference in the measuring interferometer to generate a second beat frequency signal, and the second beat frequency signal is received by the high-speed acquisition module;
demodulation: the computer demodulates the second beat frequency signal and obtains a reflection spectrum of the back reflection signal light of the detected silicon-based waveguide relative to the position coordinate; and analyzing the reflection spectrum to obtain the relevant information of the light beam transmitted inside the silicon-based waveguide to be tested.
2. The OFDR-based silicon-based waveguide back reflection sensing apparatus measuring method according to claim 1, wherein the polarization control and beam splitting module adjusts the polarization state of the swept-frequency laser to a continuously adjustable operation mode.
3. The OFDR-based silicon-based waveguide back reflection sensing device measuring method as claimed in claim 1, wherein the two interference arms inside the trigger interferometer have different lengths.
4. The OFDR-based silica-based waveguide back reflection sensing apparatus measuring method of claim 1, wherein the fiber optic circulator is in a polarization maintaining mode of operation.
5. The OFDR-based silicon-based waveguide back reflection sensing device measuring method according to claim 4, wherein the optical fibers of the three ports of the optical fiber circulator are all in a polarization biaxial conduction working mode.
6. The OFDR-based silicon-based waveguide back reflection sensing device measuring method of claim 1, wherein the coupling sensing module comprises an incident bare fiber, an incident clamp displacement table, an emergent bare fiber, an emergent clamp displacement table, an optical power meter and a computer; one end of the incident bare fiber is connected with the second port of the optical fiber circulator, and the other end of the incident bare fiber is aligned to the incident part of the silicon-based waveguide to be detected through the incident clamp displacement table; one end of the emergent bare fiber is aligned to the emergent part of the silicon-based waveguide to be detected through the emergent fixture displacement table, and the other end of the emergent bare fiber is connected with the optical power meter.
7. The OFDR-based silicon-based waveguide back reflection sensing device measuring method of claim 6, wherein the incident bare fiber and the emergent bare fiber are both bare fibers with outer cladding removed, the incident bare fiber is in a polarization biaxial conduction working mode, and the optical power meter is in a working mode for displaying power data in real time.
8. The OFDR-based silicon-based waveguide back reflection sensing apparatus measuring method of claim 1, wherein the measuring interferometer is in a polarization maintaining mode; one port of the measuring interferometer receives the swept laser from the polarization control and beam splitting module, and the other port receives the back-reflected signal light.
9. The OFDR-based silica-based waveguide back reflection sensing device measuring method of claim 8, wherein the optical fibers of the two ports of the measuring interferometer are both in a polarization biaxial conduction mode of operation.
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| CN113804299A (en) * | 2021-07-20 | 2021-12-17 | 广东工业大学 | Optical fiber device distributed bidirectional polarization measuring device based on optical frequency domain interference |
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