CN104634282B - Phase error compensation device in the measurement of optical probe interferometric phase - Google Patents
Phase error compensation device in the measurement of optical probe interferometric phase Download PDFInfo
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Abstract
The present invention provides phase error compensation device in a kind of optical probe interferometric phase measurement, including：Optical microscope for scanning near field module is used to carry out 3-D scanning to testing sample, difference interference light path module is used to measure the light field phase of testing sample and compensate the error that phase causes environmental change, and signal acquisition obtains the optical field amplitude and phase information of corresponding points and export to host computer with synchronous demodulation module for being demodulated to the signal for receiving；Host computer is used for optical field amplitude and phase information according to output, generates synchronous locus topology figure and corresponding optical field amplitude, phase distribution figure, realizes field distribution measurement and 3D the solid field distribution measurement in space arbitrary height section.Said apparatus can carry out real-Time Compensation to the drift in existing nanometer light field phase measurement and error, reduce influence of the external environment to measurement result, improve the precision of measurement result.
Description
Technical field
The present invention relates to the phase measurement field of nanometer light field, more particularly to a kind of measurement of optical probe interferometric phase
Middle phase error compensation device.
Background technology
Nanometer light field phase measurement is the study hotspot of international rise in recent years.Intensity point can be obtained by phase distribution
The unavailable deeper information of cloth institute, the characteristic to studying light field is significant.
In existing nanometer light field phase measurement, exist carries out light field phase using aperture type near-field optical probe
The method of measurement.Only one of which stellar interferometer in the measuring method, does not have phase compensation reference interferometer, therefore without phase
Position error compensation function, and the measurement result of the method easily receives external environment disturbing influence, is unfavorable for improving nanometer light field phase
Position certainty of measurement.
In consideration of it, how to overcome drift in existing nanometer light field phase measurement and error to improve the precision of measurement result
As the technical problem for being currently needed for solving.
The content of the invention
The present invention provides phase error compensation device in a kind of optical probe interferometric phase measurement, can be to existing nanometer light
Drift and error in field phase measurement carry out real-Time Compensation, reduce influence of the external environment to measurement result, improve measurement knot
The precision of fruit.
In a first aspect, the present invention provides phase error compensation device in a kind of optical probe interferometric phase measurement, including：Sweep
Retouch NFM module, difference interference light path module, signal acquisition and synchronous demodulation module, host computer；
The optical microscope for scanning near field module, including：Scan table, probe, control cabinet and it is fixed on the scanning
Near field optic aperture probes on head；
The scan table is piezoelectric ceramics 3-D scanning platform, for carrying testing sample and probe；
The control cabinet, for controlling the scan table, the optical field amplitude and phase letter of the output of receiving phase demodulation module
Breath, the host computer is arrived by the optical field amplitude and phase information output；
The difference interference light path module, including：Light source, the first beam splitter, the second beam splitter, the 3rd smooth beam splitting
Device, the first acousto-optic frequency shifters, the second acousto-optic frequency shifters, the first combiner device, the second combiner device；
The signal acquisition and synchronous demodulation module, including：First photodetector, the second photodetector, phase solution
Mode transfer block, pll reference signal generator；
The light source obtains measurement light and compensation reference light by first beam splitter, and the measurement light is by described
The measurement light after frequency displacement is obtained after first acousto-optic frequency shifters, the compensation reference light is obtained by after second acousto-optic frequency shifters
There is default frequency difference, institute in the compensation reference light after frequency displacement, the compensation reference light after measurement light and the frequency displacement after the frequency displacement
State the second beam splitter and the measurement light after the frequency displacement is divided into the first measurement light and the second measurement light, the 3rd beam splitter
Compensation reference light after the frequency displacement is divided into the first compensation reference light and the second compensation reference light, the first measurement light is treated to described
Test sample product are illuminated, and the near field optic aperture probes carry out XYZ 3-D scannings to the testing sample, gather described to be measured
The proximity field optical information of sample surfaces is simultaneously done the proximity field optical information with the first compensation reference light by the first combiner device
Light is input to the phase demodulation modules by the first photodetector all the way to relate to synthesis；Second compensation reference light and the second measurement
Light carries out interference synthesis light all the way by the second combiner device, by being input to the phase after the second photodetector
Demodulation module；The pll reference signal generator is by first acousto-optic frequency shifters and the frequency difference of second acousto-optic frequency shifters
The beat signal for causing is input to the phase demodulation modules as the reference signal of demodulation；The phase demodulation modules are using poor
Input pattern is divided to receive the measurement signal, the differential signal and the reference signal, demodulation obtains current location corresponding points
Optical field amplitude and phase information, and by the optical field amplitude and phase information output to the control cabinet；
The host computer, for the optical field amplitude and phase information that are exported according to the control cabinet, generates synchronous space
Position topology figure and corresponding optical field amplitude, phase distribution figure realize the field distribution measurement in space arbitrary height section
With 3D solid field distribution measurements.
Alternatively, the light path of described device is the light path based on optical fiber.
Alternatively, first beam splitter, the second beam splitter, the 3rd beam splitter, the first combiner device and second
Combiner device is fiber coupler.
Alternatively, the optical fiber is single-mode fiber.
Alternatively, the optical fiber is polarization maintaining optical fibre.
Alternatively, the light path of described device is spatial light light path.
Alternatively, first beam splitter is the Amici prism or semi-transparent semi-reflecting lens for space optical path；
And/or,
Second beam splitter is the Amici prism or semi-transparent semi-reflecting lens for space optical path；
And/or,
3rd beam splitter is the Amici prism or semi-transparent semi-reflecting lens for space optical path.
Alternatively, first photodetector is avalanche diode or PIN pipes or photomultiplier；
And/or,
Second photodetector is avalanche diode or PIN diode or photomultiplier.
Alternatively, the phase demodulation modules are commercial lock-in amplifier, or the phase built based on lock-in amplifier principle
Position demodulation module.
As shown from the above technical solution, phase error compensation device, pin in optical probe interferometric phase measurement of the invention
To the drift in phase measurement and error, the dual interferometer light path based on the common light path of structure is proposed, common mode inhibition signal transacting is right
Phase drift and error carry out real-Time Compensation, are independent of the mass data treatment in later stage, can be without having priori to error source
Anticipation, can simultaneously compensate the phase error that multiple factors cause, influence of the external environment to measurement result can be reduced, carry
The precision of high measurement result.
Brief description of the drawings
The structure of phase error compensation device in the optical probe interferometric phase measurement that Fig. 1 is provided for one embodiment of the invention
Schematic diagram；
Reference：
1st, light source；2nd, the first beam splitter；3rd, the second beam splitter；4th, the 3rd beam splitter；5th, the first combiner device；6、
Second combiner device；7th, the first acousto-optic frequency shifters；8th, the second acousto-optic frequency shifters；9th, near field optic aperture probes；10th, scan table；
11st, probe；12nd, the first photodetector；13rd, the second photodetector；14th, pll reference signal generator；15th, phase solution
Mode transfer block；16th, control cabinet；17th, host computer.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the invention is described in further detail.Hereinafter implement
Example is not limited to the scope of the present invention for illustrating the present invention.
The structure of phase error compensation device in the optical probe interferometric phase measurement that Fig. 1 is provided for one embodiment of the invention
Schematic diagram, as shown in figure 1, phase error compensation device in the optical probe interferometric phase measurement of the present embodiment, including：Scanning is near
Field optical microscope module, difference interference light path module, signal acquisition and synchronous demodulation module, host computer 17；
The optical microscope for scanning near field module, including：Scan table 10, probe 11, control cabinet 16 and it is fixed on institute
State the near field optic aperture probes 9 on probe 11；
The scan table 10 is piezoelectric ceramics 3-D scanning platform, for carrying testing sample and probe 11；
The control cabinet 16, for controlling the scan table 10, the optical field amplitude of the output of receiving phase demodulation module 15 and
Phase information, the host computer 17 is arrived by the optical field amplitude and phase information output；
The difference interference light path module, including：Light source 1, the first beam splitter 2, the second beam splitter 3, the 3rd light point
Beam device 4, the first acousto-optic frequency shifters 7, the second acousto-optic frequency shifters 8, the first combiner device 5, the second combiner device 6；
The signal acquisition and synchronous demodulation module, including：First photodetector 12, the second photodetector 13, phase
Position demodulation module 15, pll reference signal generator 14；
The light source 1 obtains measurement light and compensation reference light by first beam splitter 2, and the measurement light is by institute
The measurement light after frequency displacement is obtained after stating the first acousto-optic frequency shifters 7, the compensation reference light is by after second acousto-optic frequency shifters 8
The compensation reference light after frequency displacement is obtained, the compensation reference light after measurement light and the frequency displacement after the frequency displacement has default frequency
Measurement light after the frequency displacement is divided into the first measurement light and the second measurement light, the 3rd light by difference, second beam splitter 3
Compensation reference light after the frequency displacement is divided into the first compensation reference light and the second compensation reference light, the first measurement light by beam splitter 4
The testing sample is illuminated, 9 pairs of testing samples of the near field optic aperture probes carry out XYZ 3-D scannings, adopt
Collect the proximity field optical information on the testing sample surface and by the proximity field optical information and the first compensation reference light by first photosynthetic
Beam device 5 carries out interference synthesis, and light is input to the phase demodulation modules 15 by the first photodetector 12 all the way；Second compensation
Reference light and the second measurement light carry out interference and synthesize light all the way by the second combiner device 6, by the second photodetector 13 it
The phase demodulation modules 15 are input to afterwards；The pll reference signal generator 14 is by first acousto-optic frequency shifters 7
The beat signal caused with the frequency difference of second acousto-optic frequency shifters 8 is input to the phase demodulating as the reference signal of demodulation
Module 15；The phase demodulation modules 15 receive the measurement signal, the differential signal and described using Differential Input pattern
Reference signal, demodulation obtains the optical field amplitude and phase information of current location corresponding points, and the optical field amplitude and phase are believed
The control cabinet 16 is arrived in breath output；
The host computer 17, for the optical field amplitude and phase information that are exported according to the control cabinet 16, generation synchronization
Locus topology figure and corresponding optical field amplitude, phase distribution figure realize the field distribution in space arbitrary height section
Measurement and 3D solid field distribution measurements.
It will be appreciated that in the present embodiment, after the first photodetector 12 converts optical signals to electric signal, by the telecommunications
Number it is input to the phase demodulation modules 15 as measurement signal；Second photodetector 13 converts optical signals to electric signal
Afterwards, the phase demodulation modules 15 are input to using the electric signal as differential signal.
It will be appreciated that in the present embodiment, the first compensation reference light and the first measurement light constitute phase measurement interference light
Road, the second compensation reference light and the second measurement light composition compensation refer to optical interference circuit, and phase measurement optical interference circuit and compensation are referred to
The counterpart arm of optical interference circuit is long equal, and placement location is also identical, is in structure common light path, therefore be affected by the external environment
It is suitable.The difference of two optical interference circuits is that phase measurement optical interference circuit by sample, and will be visited using near field optic aperture
Pin collects the light field phase information of sample, and compensates reference interferometer without sample and near field optic aperture probes.Using knot
Structure common light path and common mode inhibition principle, can well eliminate the phase error that environment causes.
In a concrete application, the light path of the described device of the present embodiment can be the light path based on optical fiber, described first
Beam splitter 2, the second beam splitter 3, the 3rd beam splitter 4, the first combiner device 5 and the second combiner device 6 can be light
Fine coupler.
In a particular application, for example, the optical fiber can be single-mode fiber, or polarization maintaining optical fibre.
In another concrete application, the light path of the described device of the present embodiment can be spatial light light path, first light
Beam splitter 2 can be the Amici prism or semi-transparent semi-reflecting lens for space optical path, and/or second beam splitter 3 can be
For the Amici prism or semi-transparent semi-reflecting lens of space optical path, and/or the 3rd beam splitter 4 can be for space optical path
Amici prism or semi-transparent semi-reflecting lens.
In a particular application, first photodetector 12 of the present embodiment can for avalanche diode or PIN pipe or
Photomultiplier；
And/or,
Second photodetector 13 can be avalanche diode or PIN diode or photomultiplier.
In a particular application, the phase demodulation modules 15 of the present embodiment are commercial lock-in amplifier, or based on lock phase
The phase demodulation modules that amplifier principle is built.
Phase error compensation device is near based on aperture type probe scanning in the optical probe interferometric phase measurement of the present embodiment
Field optical microscope (scanning near-field optical microscopy, abbreviation SNOM) and two common light paths of structure
Optical-fiber laser heterodyne ineterferometer is constituted.Can be believed with the amplitude of the resolution ratio synchro measure Near-field optical field of nanometer scale and phase
Breath.Two interferometers one as phase measurement interferometer, another as phase error compensation reference interferometer, using structure
Light path and common mode inhibition principle realize real-time error compensation altogether.Light source is by being changed into four road bands after beam splitter and acousto-optic frequency shifters
There is the light beam of frequency difference.Wherein two-way constitutes stellar interferometer, in addition two-way composition compensating interferometer instrument.Due to the common light of two interferometers
Road.So the phase error that extraneous change causes is essentially identical.Wherein light beam is illuminated for sample all the way, using near
Field optics aperture probes are scanned, while collecting the proximity field optical information of sample surfaces.The information is demodulated can be obtained by it is to be measured
Phase.Finally demodulated using phase demodulation modules, and host computer (i.e. computer) is arrived into the storage of measurement data synchronous acquisition.
Phase error compensation device in the optical probe interferometric phase measurement of the present embodiment, for the drift in phase measurement
And error, the dual interferometer light path based on the common light path of structure is proposed, common mode inhibition signal transacting is carried out to phase drift and error
Real-Time Compensation, is independent of the mass data treatment in later stage, can have the anticipation of priori without being originated to error, can compensate simultaneously
The phase error that multiple factors cause, reduces influence of the external environment to measurement result, improves the precision of measurement result.
One of ordinary skill in the art will appreciate that：Realizing all or part of step of above method embodiment can pass through
Programmed instruction related hardware is completed.Foregoing program can be stored in a computer read/write memory medium.The program
Upon execution, the step of including above-mentioned each method embodiment is performed；And foregoing storage medium includes：ROM, RAM, magnetic disc or
CD etc. is various can be with the medium of store program codes.
Finally it should be noted that：Various embodiments above is merely illustrative of the technical solution of the present invention, rather than its limitations；To the greatest extent
Pipe has been described in detail with reference to foregoing embodiments to the present invention, it will be understood by those within the art that：Its according to
The technical scheme described in foregoing embodiments can so be modified, or which part or all technical characteristic are entered
Row equivalent；And these modifications or replacement, the essence of appropriate technical solution is departed from claim of the invention and protect
The scope of shield.
Claims (9)
1. phase error compensation device during a kind of optical probe interferometric phase is measured, it is characterised in that including：Scanning near-field optical
Microscope module, difference interference light path module, signal acquisition and synchronous demodulation module, host computer；
The optical microscope for scanning near field module, including：Scan table, probe, control cabinet and it is fixed on the probe
Near field optic aperture probes；
The scan table is piezoelectric ceramics 3-D scanning platform, for carrying testing sample and probe；
The control cabinet, for controlling the scan table, the optical field amplitude and phase information of the output of receiving phase demodulation module will
The host computer is arrived in the optical field amplitude and phase information output；
The difference interference light path module, including：Light source, the first beam splitter, the second beam splitter, the 3rd beam splitter,
One acousto-optic frequency shifters, the second acousto-optic frequency shifters, the first combiner device, the second combiner device；
The signal acquisition and synchronous demodulation module, including：First photodetector, the second photodetector, phase demodulating mould
Block, pll reference signal generator；
The light source obtains measurement light and compensation reference light by first beam splitter, and the measurement light is by described first
The measurement light after frequency displacement is obtained after acousto-optic frequency shifters, the compensation reference light after second acousto-optic frequency shifters by obtaining frequency displacement
There is default frequency difference in compensation reference light afterwards, the compensation reference light after measurement light and the frequency displacement after the frequency displacement, and described the
Measurement light after the frequency displacement is divided into the first measurement light and the second measurement light by two beam splitters, and the 3rd beam splitter is by institute
State the compensation reference light after frequency displacement and be divided into the first compensation reference light and the second compensation reference light, the first measurement light treats test sample to described
Product are illuminated, and the near field optic aperture probes carry out XYZ 3-D scannings to the testing sample, gather the testing sample
The proximity field optical information and the first compensation reference light are simultaneously carried out interference conjunction by the proximity field optical information on surface by the first combiner device
Into light all the way, the phase demodulation modules are input to as measurement signal after the first photodetector is converted to electric signal；
Second compensation reference light and the second measurement light carry out interference synthesis light all the way by the second combiner device, by the second photodetection
Device is input to the phase demodulation modules after being converted to electric signal as differential signal；The pll reference signal generator is by institute
State the beat signal that the frequency difference of the first acousto-optic frequency shifters and second acousto-optic frequency shifters causes defeated as the reference signal of demodulation
Enter to the phase demodulation modules；The phase demodulation modules receive the measurement signal, the difference using Differential Input pattern
Sub-signal and the reference signal, demodulation obtain the optical field amplitude and phase information of current location corresponding points, and by the light field
The control cabinet is arrived in amplitude and phase information output；
The host computer, for the optical field amplitude and phase information that are exported according to the control cabinet, generates synchronous locus
Topology figure and corresponding optical field amplitude, phase distribution figure realize the field distribution measurement and 3D in space arbitrary height section
Three-dimensional field distribution measurement.
2. device according to claim 1, it is characterised in that the light path of described device is the light path based on optical fiber.
3. device according to claim 2, it is characterised in that first beam splitter, the second beam splitter, the 3rd light
Beam splitter, the first combiner device and the second combiner device are fiber coupler.
4. device according to claim 3, it is characterised in that the optical fiber is single-mode fiber.
5. device according to claim 3, it is characterised in that the optical fiber is polarization maintaining optical fibre.
6. device according to claim 1, it is characterised in that the light path of described device is spatial light light path.
7. device according to claim 6, it is characterised in that
First beam splitter is the Amici prism or semi-transparent semi-reflecting lens for space optical path；
And/or,
Second beam splitter is the Amici prism or semi-transparent semi-reflecting lens for space optical path；
And/or,
3rd beam splitter is the Amici prism or semi-transparent semi-reflecting lens for space optical path.
8. device according to claim 1, it is characterised in that first photodetector is avalanche diode or PIN
Pipe or photomultiplier；
And/or,
Second photodetector is avalanche diode or PIN diode or photomultiplier.
9. device according to claim 1, it is characterised in that the phase demodulation modules are commercial lock-in amplifier, or
Based on the phase demodulation modules that lock-in amplifier principle is built.
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| CN110057751B (en) * | 2018-01-19 | 2021-06-29 | 清华大学 | Apparatus and method for fabricating optical particle probe |
| CN112505908B (en) * | 2020-11-16 | 2021-12-03 | 电子科技大学 | Pinhole-free scanning type confocal microscope based on heterodyne detection system |
| CN112711030A (en) * | 2020-12-21 | 2021-04-27 | 武汉光目科技有限公司 | Microscope area array sweep frequency measuring device and method |
| CN112985299B (en) * | 2021-02-19 | 2022-08-26 | 同济大学 | Optical probe online detection method based on path planning |
| CN114354141B (en) * | 2022-01-14 | 2024-05-07 | 深圳迈塔兰斯科技有限公司 | Method and system for measuring super-surface phase based on frequency domain |
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| EP2564769B1 (en) * | 2006-04-05 | 2015-06-03 | The General Hospital Corporation | Apparatus for polarization-sensitive optical frequency domain imaging of a sample |
| US7869054B2 (en) * | 2006-05-26 | 2011-01-11 | Medeikon Corporation | Polarization insensitive multiple probe |
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