CN112729124A - Light source component of spectrum confocal displacement sensor and spectrum confocal displacement sensor - Google Patents
Light source component of spectrum confocal displacement sensor and spectrum confocal displacement sensor Download PDFInfo
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- CN112729124A CN112729124A CN202011611715.2A CN202011611715A CN112729124A CN 112729124 A CN112729124 A CN 112729124A CN 202011611715 A CN202011611715 A CN 202011611715A CN 112729124 A CN112729124 A CN 112729124A
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention provides a light source component of a spectrum confocal displacement sensor and the spectrum confocal displacement sensor. According to the invention, the semiconductor laser replaces a traditional LED light source and is applied to the spectrum confocal displacement sensor, so that the coupling efficiency of the light source and the optical fiber is obviously improved, the core diameter of the optical fiber can be effectively reduced, and the (longitudinal) resolution of the displacement sensor is improved; because a light source with smaller power can be adopted, the heating value can be reduced, the volume of the radiator is reduced, the volume of the sensor controller is further reduced, the purposes of more miniaturization and microminiaturization use are achieved, and the use reliability and the service life can be improved.
Description
Technical Field
The invention relates to the field of precision displacement measurement, in particular to a light source component of a spectrum confocal displacement sensor and the spectrum confocal displacement sensor.
Background
The spectrum confocal displacement sensor is a precise displacement measuring device and has the following principle: a beam of polychromatic light (white) with a wide spectrum is emitted from a light source, spectral dispersion is generated through a dispersion lens, monochromatic light with different wavelengths is formed in a measuring range, and a focus of each wavelength corresponds to a distance value. The measuring light is emitted to the surface of an object and is reflected back, only monochromatic light meeting confocal conditions can be sensed by the spectrometer through the small hole, and the distance value is obtained through conversion by calculating the wavelength of a sensed focus. The spectral confocal displacement sensor is widely used in precise non-contact measurement, and is one of the few feasible schemes in the submicron field and the field of diversification of the surface of a measured object.
The spectral confocal displacement sensor has two main performance parameters, linearity and resolution. The resolution is divided into a transverse resolution and a longitudinal resolution, and the transverse resolution is generally understood to be the precision of the sensor under an ideal condition, such as 1nm and 2 nm; the longitudinal resolution is related to the diameter of the spot formed by the sensor on the reflecting surface, and it can be understood that the smaller the spot, the higher the measurement resolution. The transverse resolution and the longitudinal resolution play roles in different occasions, when the sensor is used for measuring displacement, the measuring surface is mostly a smooth surface (without high and low fluctuation, the longitudinal resolution does not play a role), the resolution of the sensor mostly refers to the transverse resolution in the occasion, when the sensor is used for measuring surface roughness and an object fluctuates in three dimensions, the measuring surface is mostly a rough surface in the moment, the resolution of the sensor in the occasion is determined by the transverse resolution and the longitudinal resolution together, of course, the sensor is generally required to be used in the two most common occasions, and therefore, the transverse resolution and the longitudinal resolution of the sensor are required to be higher and better.
The method of coupling the sensor light source to the optical fiber in the prior art is basically that the LED is directly coupled with the optical fiber, and the coupling efficiency is extremely low (laboratory modeling, the LED with the light emitting area of 1.6mm × 1.6mm, the light emitting angle of 135 ° and the power of 6W is coupled with the optical fiber with the core diameter of 50 microns and the numerical aperture of 0.22, and the coupling efficiency is only 0.013%). By adopting the coupling mode, the optical power of the LED coupled to the optical fiber can be improved by only two methods, namely the power of the LED is improved, and the core diameter of the optical fiber is improved. Since the core diameter of an optical fiber is related to the spot size and resolution, the core diameter of an optical fiber is generally as small as possible. The high-power LED has large heat productivity, emits light at the maximum power for a long time, easily causes unstable power of the LED, and has short service life, so that a large radiator is needed for radiating the LED, and the size of the sensor controller is large.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a light source component with higher coupling efficiency with an optical fiber, so that the optical fiber core diameter of a spectrum confocal displacement sensor can be reduced, the resolution is further improved, and the size of a sensor controller is reduced.
In order to achieve the above object, the present invention provides a light source assembly of a spectral confocal displacement sensor, which includes a semiconductor laser, a collimator, a phosphor, and a coupling lens sequentially disposed in front of the semiconductor laser, and an optical fiber of the spectral confocal displacement sensor is aligned with the coupling lens.
Further, the semiconductor laser is a blue semiconductor laser, and the fluorescent powder is yellow fluorescent powder.
Further, the collimator includes a fast axis collimating lens and a slow axis collimating lens, the fast axis collimating lens is disposed at a front position of the light path, and the slow axis collimating lens is disposed at a rear position of the light path.
The invention also provides a spectrum confocal displacement sensor, and a light source component adopting the spectrum confocal displacement sensor.
Further, the lens group of the spectral confocal displacement sensor comprises at least two dispersive objective lenses, wherein a light shielding plate is coaxially arranged between the two dispersive objective lenses.
Further, the light shielding plate is provided with an annular light passing strip.
Further, a diaphragm is coaxially arranged between the two dispersive objective lenses.
Further, the lens group is composed of a first dispersive objective lens and a second dispersive objective lens.
Furthermore, the light beam reflected back from the lens group enters the spectrometer along the optical fiber, and a receiving component of the spectrometer comprises a collimating lens, a reflection grating, a focusing lens and a CCD array detector which are sequentially arranged along a light path, so that the light path is distributed in a V shape.
The scheme of the invention has the following beneficial effects:
according to the light source assembly provided by the invention, the semiconductor laser replaces a traditional LED light source and is applied to the spectrum confocal displacement sensor, so that the coupling efficiency of the light source and the optical fiber is obviously improved, the core diameter of the optical fiber can be effectively reduced, the (longitudinal) resolution of the displacement sensor is improved, and the light source with smaller power can be adopted, so that the heat productivity can be reduced, the volume of a radiator is reduced, the volume of a sensor controller is further reduced, the purposes of more miniaturization and microminiaturization use are achieved, and the use reliability and the service life can be improved;
according to the spectrum confocal displacement sensor, the light shading plate and the diaphragm are arranged between the dispersion lens groups, so that the intermediate light beams and the outermost light beams of the incident light beams, which are ineffective in ranging, are filtered, the light beams are prevented from being reflected and coupled into the optical fibers and the spectrometer, the influence of interference light beams is reduced, and the signal-to-noise ratio and the accuracy of later data processing are improved;
the spectrometer receiving component provided by the invention adopts the collimating lens and the focusing lens to replace a collimating reflector and a focusing reflector in the prior art, simplifies the light path and enables the whole controller to be miniaturized for use.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of a spectral confocal displacement sensor of the prior art;
FIG. 3 is a schematic diagram of a spectral confocal displacement sensor of the present invention;
FIG. 4 is an elevation view of a shutter plate and diaphragm of the present invention;
FIG. 5 is a schematic view of a spectrometer receiving assembly of the present invention;
FIG. 6 is a schematic diagram of a spectrometer receiving assembly of the prior art.
[ description of reference ]
1-an optical fiber; 2-a semiconductor laser; 3-fast axis collimating lens; 4-slow axis collimating lens; 5-fluorescent powder; a 6-coupling lens; 7-a first dispersive objective lens; 8-a second dispersive objective lens; 9-a light screen; 10-a spectrometer; 11-a diaphragm; 12-a collimating lens; 13-a reflective grating; 14-a focusing lens; 15-a CCD array detector; 16-a collimating mirror; 17-focusing mirror.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Etendue is the product of the light emitting area of a light source and the solid angle of the light beam. When a light beam passes through the optical system, the beam source area and the solid angle change, and if the energy loss is not considered, the etendue is not changed, and if the energy loss is considered, the etendue becomes large. The LED light source commonly used in the prior art usually has a large etendue, and the light beam angle emitted by the emitter generally constituting the LED array is very large, and in order to achieve the purpose of reducing the light beam and reducing the light beam angle, a shutter or a pattern sheet with a small light-transmitting hole is usually inserted into the light path to reduce the light beam and keep the light beam angle unchanged, thereby reducing the light spot size and improving the sensor resolution. Since the total etendue is not reduced, the above method inevitably significantly reduces the light energy utilization rate, and the light energy loss phenomenon is serious.
It is often necessary to place a large reflector or lens (often referred to as a collection cup) behind the LED light source that can convert a wide beam angle into a more practical beam angle. According to the law of conservation of etendue, the light exit must be made large, since a smaller beam angle means a larger light emitting area. If the light outlet is not large enough, the efficiency of the light-gathering cup is very low, resulting in a great waste of light energy.
No matter what optical system is adopted, under the condition of ensuring the efficiency, the optical expansion of the LED light source finally pointing to the optical fiber 1 of the spectral confocal displacement sensor cannot be reduced, so that the optical expansion finally converged to the inlet of the optical fiber 1 is also a larger value. The numerical aperture of the commonly used optical fiber 1 in the market at present is mostly between 0.1 and 0.22, and does not exceed 0.22 (the numerical aperture represents the capability of receiving light of the optical fiber 1, the larger the numerical aperture, the stronger the capability of receiving light of the optical fiber 1 is, and 0.22 is the maximum numerical aperture of the optical fiber 1 in the market at present). Experiments prove that the coupling efficiency is only 0.013% when an LED light source with the light emitting area of 1.6mm x 1.6mm, the light emitting angle of 135 degrees and the power of 6W is coupled with the optical fiber 1 with the core diameter of 50 micrometers and the numerical aperture of 0.22. Therefore, when the LED light source with a large etendue is used, the optical power (i.e. the luminous flux) entering the optical fiber 1 can only be ensured by increasing the core diameter of the optical fiber 1 or the overall optical power of the LED light source, so as to meet the luminous flux requirement detected by the sensor. And increasing 1 core footpath of optic fibre can lead to the facula diameter to increase, resolution ratio reduces, promotes LED light source power and makes calorific capacity increase, and is in the luminous unstable LED power that easily causes of maximum power for a long time, and the life-span is short, consequently needs huge radiator to carry out the heat dissipation treatment to LED, leads to sensor controller volume increase, influences miniaturized use.
Based on this, the embodiment of the invention reduces the optical expansion amount by changing the light source component of the spectral confocal displacement sensor, so as to increase the coupling efficiency of the light source and the optical fiber 1, and achieve the purposes of further reducing the core diameter of the optical fiber 1 and improving the resolution of the sensor. Specifically, as shown in fig. 1, the light source assembly for the spectral confocal displacement sensor provided in this embodiment employs a semiconductor laser 2(LD), a collimator, a phosphor 5, and a coupling lens 6 are sequentially disposed in front of the semiconductor laser 2, and an optical fiber 1 of the spectral confocal displacement sensor is aligned with the coupling lens 6.
The semiconductor laser 2 is used as a laser source, laser emitted by the laser is collimated by a collimator and then irradiates fluorescent powder to form white light, and the white light is converged by a coupling lens 6 and then enters an optical fiber. The semiconductor laser 2 has the characteristics of small light-emitting area, small divergence angle and small optical expansion compared with an LED light source, and has high coupling efficiency with the optical fiber through the optical system.
When being applied to the confocal displacement sensor of spectrum with above-mentioned light source subassembly, the luminous flux (luminous power) of coupling has obviously promoted in optic fibre 1 compared in prior art, consequently can adopt the optic fibre of the less core footpath than prior art, and then improves the resolution ratio (mainly longitudinal resolution ratio) of the confocal displacement sensor of whole spectrum.
For example:
the core diameter of a light source optical fiber 1 of a common spectral confocal sensor in the prior art is 50 micrometers, the numerical aperture is 0.22, the light receiving angle is 60 degrees, and under the condition of not considering energy loss, the radius of a light spot on a detection surface when the sensor performs measurement is calculated in the following way (a schematic diagram is shown in fig. 2):
252*3.14*arcsin(0.22)＝r2*3.14*(60/2)
the spot radius r was calculated to be 16.2 μm.
Through tests, under the condition that the optical fiber is not changed, the optical fiber coupling efficiency of the light source component provided by the embodiment can reach 5 percent and is far higher than 0.013 percent (384 times of the coupling efficiency). When the required luminous flux coupled into the optical fiber 1 is not changed, the core diameter of the light source optical fiber 1 of the light source optical fiber can be less than 50 microns inevitably, and the spot radius on the detection surface of the spectral confocal displacement sensor adopting the light source component is less than that on the detection surface in the prior art inevitably.
In addition, the process of exciting the fluorescent powder by the semiconductor laser 2 is photoluminescence, the generated white light is no longer laser, and the white light is safe and harmless to human eyes in the using process. In this embodiment, the semiconductor laser is a blue semiconductor laser, the phosphor is a yellow phosphor, and the blue laser irradiates the yellow phosphor to generate white luminescence. In other embodiments, a specific phosphor is also irradiated by a violet semiconductor laser.
The collimator comprises a fast axis collimating lens 3(FAC) and a slow axis collimating lens 4(SAC), the fast axis collimating lens 3 is arranged at the front position of the light path, the slow axis collimating lens 4 is arranged at the back position of the light path, and a specific collimator combination is formed by matching the fast axis collimating lens and the slow axis collimating lens to enable light beams generated by the semiconductor laser 2 to be irradiated to a panel where the fluorescent powder 5 is located in parallel, so that the utilization rate of the light is improved.
The spectrum confocal displacement sensor adopting the light source component has the advantages of high resolution, small size and reliability in use.
Generally speaking, the curvature of the lens center part of the lens group of the spectral confocal displacement sensor is relatively large, the light ray transmission direction passing through the lens center is not greatly changed, and the light ray transmission direction still nearly vertically transmits to the detected obstacle, so that after passing through the lens center, the partial white light beams can be coupled into the optical fiber when returning from the obstacle after the optical axes of different wavelengths are dispersed, the light intensity of the partial white light beams does not obviously change, and the partial white light beams do not have a minimum focusing light spot and a strongest peak represented on a spectrometer when the distances of the obstacles are different like the distances of side light beams.
Therefore, as a further improvement, in the present embodiment, the lens group is set to the first dispersive objective lens 7 and the second dispersive objective lens 8 of the positive-negative combination on the basis of the above-described spectral confocal displacement sensor, and the light shielding plate 9 is disposed between the first dispersive objective lens 7 and the second dispersive objective lens 8, as shown in fig. 3 and 4. Wherein, the light shielding plate 9 is arranged coaxially with the lens group and has a ring-shaped light transmission band, so that when the light beam passing through the first dispersive objective 7 is emitted to the second dispersive objective 8, the light beam passing through the center of the lens is shielded by the light shielding plate 9 and cannot be continuously transmitted backwards. Through the setting of light screen 9, ensure that the middle part is filtered to the invalid light beam of range finding, and can not reflect and couple into optic fibre 1 and spectrum appearance 10, reduce the influence of interfering with the light beam to improve SNR, later stage data processing accuracy.
In addition, the light intensity of the light source coupled into the optical fiber 1 is gaussian distributed (in common, the light intensity is strong in the middle and weak on the outer side), and the light beam on the outer side is easily coupled to the edge of the optical fiber 1 or the cladding of the optical fiber 1, and this part of the light beam is also an interference light beam, which also affects the accuracy of the post data processing.
In this embodiment, therefore, a diaphragm 11 is also provided, which is likewise situated coaxially between the first and second diffusion mirrors 7, 8 and is arranged behind the shutter plate 9. After the size of the diaphragm 11 is adaptively selected, the outer light beam emitted by the first dispersive objective 7 can be shielded, light coupled into the edge of the optical fiber 1 and the cladding can be filtered as much as possible, the signal-to-noise ratio can also be improved, and the post data processing is more accurate.
In addition, as shown in fig. 5, in order to further optimize the size of the spectral confocal displacement sensor, in this embodiment, the receiving components of the spectrometer 10 are arranged as a collimating lens 12, a reflection grating 13, a focusing lens 14 and a CCD array detector 15 which are sequentially distributed along the optical path, so that the receiving optical path is in a V-shaped distribution. As shown in fig. 6, the optical path of the receiving component of the spectrometer in the prior art is generally M-shaped, and a collimating mirror 16 and a focusing mirror 17 are used. In the embodiment, the collimating mirror 16 and the focusing mirror 17 are replaced by the collimating lens 12 and the focusing lens 14, so that the optical path is changed from an M shape to a V shape, the optical path is simplified, and the whole controller can be miniaturized and used.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (9)
1. The light source component of the spectrum confocal displacement sensor is characterized by comprising a semiconductor laser, wherein a collimator, fluorescent powder and a coupling lens are sequentially arranged in front of the semiconductor laser, and an optical fiber of the spectrum confocal displacement sensor is aligned to the coupling lens.
2. The light source assembly of a spectral confocal displacement sensor of claim 1, wherein the semiconductor laser is a blue semiconductor laser and the phosphor is a yellow phosphor.
3. The light source assembly of a spectral confocal displacement sensor of claim 1, wherein the collimator comprises a fast axis collimating lens and a slow axis collimating lens, the fast axis collimating lens being disposed at a forward position of the light path, and the slow axis collimating lens being disposed at a rearward position of the light path.
4. A spectral confocal displacement sensor, characterized in that a spectral confocal displacement sensor light source assembly according to any one of claims 1 to 3 is used.
5. The spectral confocal displacement sensor of claim 4, wherein the lens set of the spectral confocal displacement sensor comprises at least two dispersive objectives, wherein a light shield is coaxially arranged between the two dispersive objectives.
6. The spectroscopic confocal displacement sensor of claim 5, wherein the shutter plate is provided with an annular clear band.
7. The spectroscopic confocal displacement sensor of claim 6, wherein a stop is further coaxially disposed between the two dispersive objectives.
8. The confocal spectral displacement sensor of claim 5, wherein the lens group consists of a first dispersive objective and a second dispersive objective.
9. The confocal displacement sensor of claim 5, wherein the light beam reflected from the lens group enters a spectrometer along an optical fiber, and the receiving component of the spectrometer comprises a collimating lens, a reflection grating, a focusing lens and a CCD array detector arranged in sequence along an optical path, so that the optical path is distributed in a V shape.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111879239A (en) * | 2020-06-11 | 2020-11-03 | 东莞市神州视觉科技有限公司 | Spectrum confocal measuring device and measuring method |
| CN113916151A (en) * | 2021-10-22 | 2022-01-11 | 珠海横琴美加澳光电技术有限公司 | Device and method for confocal measurement of surface type or thickness through spectrum black hole |
| CN114001645A (en) * | 2021-10-28 | 2022-02-01 | 山西大学 | Three-wavelength optical fiber point differential confocal microscopic detection method and device |
| CN114295061A (en) * | 2021-12-30 | 2022-04-08 | 广州市合熠智能科技股份有限公司 | Color confocal displacement sensor and measuring method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204065472U (en) * | 2014-07-11 | 2014-12-31 | 北京工业大学 | A kind of simple fiber-optics taper-coupled imaging system efficiently |
| CN110260799A (en) * | 2019-07-29 | 2019-09-20 | 海伯森技术（深圳）有限公司 | A kind of Spectral Confocal displacement sensor |
-
2020
- 2020-12-30 CN CN202011611715.2A patent/CN112729124A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204065472U (en) * | 2014-07-11 | 2014-12-31 | 北京工业大学 | A kind of simple fiber-optics taper-coupled imaging system efficiently |
| CN110260799A (en) * | 2019-07-29 | 2019-09-20 | 海伯森技术（深圳）有限公司 | A kind of Spectral Confocal displacement sensor |
Non-Patent Citations (1)
| Title |
|---|
| 江秋月等: "《小纵横比光电器件发射端耦合工艺研究及优化》", 《激光技术》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111879239A (en) * | 2020-06-11 | 2020-11-03 | 东莞市神州视觉科技有限公司 | Spectrum confocal measuring device and measuring method |
| CN111879239B (en) * | 2020-06-11 | 2022-09-02 | 东莞市神州视觉科技有限公司 | Spectrum confocal measuring device and measuring method |
| CN113916151A (en) * | 2021-10-22 | 2022-01-11 | 珠海横琴美加澳光电技术有限公司 | Device and method for confocal measurement of surface type or thickness through spectrum black hole |
| CN113916151B (en) * | 2021-10-22 | 2024-04-30 | 珠海横琴美加澳光电技术有限公司 | Device and method for confocal measurement of surface shape or thickness of spectrum black hole |
| CN114001645A (en) * | 2021-10-28 | 2022-02-01 | 山西大学 | Three-wavelength optical fiber point differential confocal microscopic detection method and device |
| CN114001645B (en) * | 2021-10-28 | 2024-04-12 | 山西大学 | Three-wavelength optical fiber point differential confocal microscopic detection method and device |
| CN114295061A (en) * | 2021-12-30 | 2022-04-08 | 广州市合熠智能科技股份有限公司 | Color confocal displacement sensor and measuring method |
| CN114295061B (en) * | 2021-12-30 | 2023-03-10 | 广州市合熠智能科技股份有限公司 | Color confocal displacement sensor and measuring method |
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