CN114485422B - Spectrum confocal detection method and device and electronic equipment - Google Patents
Spectrum confocal detection method and device and electronic equipment Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 214
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- 230000003595 spectral effect Effects 0.000 claims abstract description 87
- 238000005070 sampling Methods 0.000 claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 41
- 239000013307 optical fiber Substances 0.000 claims abstract description 12
- 230000002159 abnormal effect Effects 0.000 claims description 8
- 238000004458 analytical method Methods 0.000 claims description 8
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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Abstract
The embodiment of the application relates to the technical field of optical equipment, and discloses a spectral confocal detection method, a device and electronic equipment, wherein the method is operated in the spectral confocal detection equipment, the spectral confocal detection equipment at least comprises a detection platform, a light source, an optical fiber assembly, a spectrometer, a lens assembly, a control assembly and a driving assembly, and the method comprises the following steps: starting the spectral confocal detection equipment, and setting detection dimensions, detection types and detection parameters in the control assembly; calibrating the spectral confocal detection apparatus; driving the lens assembly to move so as to scan and sample the object to be detected, and obtaining all sampling data; and analyzing a detection result according to the all sampling data. By means of the mode, the embodiment of the application can directly scan and sample the object to be detected, the position of the object to be detected does not need to be manually moved in the detection process, the detection efficiency is improved, and the error of the detection result is reduced.
Description
Technical Field
The embodiment of the application relates to the technical field of optical equipment, in particular to a spectral confocal detection method and device and electronic equipment.
Background
The working principle of the spectral confocal measurement technology is that a white light source emits a beam of broad-spectrum polychromatic light, spectral dispersion occurs through a dispersion lens, wherein only monochromatic light with a certain specific wavelength is focused on the surface of a measured object and simultaneously reflected back to an optical system. The wavelength value of the monochromatic light is obtained through spectrum analysis, and the distance value of the measured object can be converted from the wavelength value. The spectral confocal sensor has the characteristics of high resolution, large measurement angle and small back image interference, and is preferentially used in spectral confocal measurement.
The inventors found in practicing embodiments of the present application that: currently, most of the spectral confocal sensors existing in the market are point-spectral confocal sensors, and when the height of the surface of an entire object needs to be measured, the sample needs to be translated to realize the measurement of the surface, which has certain inconvenience.
Disclosure of Invention
The technical problem to be solved by the embodiment of the application is to provide a spectral confocal detection method, a spectral confocal detection device and electronic equipment, which can directly scan and sample an object to be detected, do not need to manually move the position of the object to be detected in the detection process, improve the detection efficiency and reduce the error of the detection result.
In order to solve the technical problems, one technical scheme adopted by the embodiment of the application is as follows: the utility model provides a spectral confocal detection method, the method is operated in spectral confocal detection equipment, spectral confocal detection equipment includes testing platform, light source, optical fiber component, spectrum appearance, lens subassembly, control assembly and drive assembly at least, testing platform is used for placing the thing that waits to detect, testing platform's center is the benchmark origin, optical fiber component is used for receiving light that the light source sent and the light that wait to detect the thing reflection, the spectrum appearance is connected with optical fiber component, the spectrum appearance is used for analyzing the light that wait to detect the thing reflection, drive assembly respectively with control assembly with lens subassembly is connected, control assembly is used for controlling the motion of drive assembly is in order to drive the lens subassembly carries out the scanning sampling to wait to detect the thing, the method includes: starting the spectral confocal detection equipment, and setting detection dimensions, detection types and detection parameters in the control assembly; calibrating the spectral confocal detection apparatus; driving the lens assembly to move so as to scan and sample the object to be detected, and obtaining all sampling data; and analyzing a detection result according to the all sampling data.
Optionally, the step of calibrating the spectral confocal detection apparatus further comprises: acquiring a detection instruction; judging whether the driving assembly is normal or not according to the detection instruction; if the driving component is normal, judging whether the lens component is normal or not; if the lens assembly is normal, confirming that the calibration of the spectral confocal detection equipment is completed; if the lens assembly is abnormal, confirming that the spectral confocal detection equipment fails to calibrate, and giving an alarm; and if the driving assembly is abnormal, confirming that the spectral confocal detection equipment fails to calibrate, and giving an alarm.
Optionally, the step of driving the lens assembly to move to scan and sample the object to be detected to obtain all sampled data further includes: controlling the driving assembly to drive the lens assembly to move, so that light spots emitted from the lens assembly scan and sample the object to be detected along the X-axis direction to obtain a plurality of first sampling data; after one scanning sampling along the X-axis direction is completed, controlling the driving assembly to drive the lens assembly to move, so that the light spots emitted from the lens assembly move a first preset distance along the Y-axis direction; repeating the steps until the scanning sampling in the X-axis direction and the Y-axis direction is completed on the object to be detected, and collecting the plurality of first sampling data to obtain all sampling data.
Optionally, the step of analyzing the detection result according to the all sampled data further includes: acquiring a spectrum corresponding to the first sampling data; identifying peaks of the spectrum; calculating parameters of the first sampling data according to the peak value; and analyzing the result of the object to be detected according to the parameters.
Optionally, before the step of driving the lens assembly to move to scan and sample the object to be detected, the method further includes: controlling the driving assembly to drive the lens assembly to move, so that light spots emitted from the lens assembly scan and sample the object to be detected along the positive direction of the X axis from the reference origin to identify a first edge point of the object to be detected; calculating the distance between the reference origin and the first edge point to obtain a current distance; controlling the driving assembly to drive the emergent light spots of the lens assembly to move circularly by taking the reference origin as a circle center and the current distance as a radius; judging whether a next edge point exists in the circular movement process of the emergent light spots; if present; controlling the driving assembly to drive the lens assembly to move so that the emergent light spots move outwards for a second preset distance, updating the current distance and returning to the step of controlling the driving assembly to take the reference origin as a circle center, wherein the current distance is a radius, and driving the emergent light spots of the lens assembly to move circularly; if the object to be detected does not exist, determining that the circle with the reference origin as the circle center and the current distance as the radius is the primary contour range of the object to be detected.
Optionally, the detection dimension includes at least a two-dimensional profile and a three-dimensional topography; the detection type at least comprises detection length, height difference and roughness.
Optionally, the detection parameters at least include detection precision, a first preset distance and a second preset distance.
In order to solve the technical problems, another technical scheme adopted by the embodiment of the application is as follows: there is provided a spectral confocal detection apparatus, the apparatus comprising: the starting module is used for starting the spectral confocal detection equipment and setting detection dimensions, detection types and detection parameters in the control assembly; the calibration module is used for calibrating the spectral confocal detection equipment; the sampling module is used for driving the lens assembly to move so as to scan and sample the object to be detected, and all sampling data are obtained; and the analysis module is used for analyzing the detection result according to the all sampling data.
In order to solve the above technical problems, a further technical solution adopted by the embodiment of the present application is: there is provided an electronic device including: a controller, the controller comprising: at least one processor, and a memory communicatively coupled to the at least one processor; wherein the memory stores instructions executable by the at least one processor to enable the at least one processor to perform the method as described above.
In order to solve the above technical problems, a further technical solution adopted by the embodiment of the present application is: there is provided a non-transitory computer readable storage medium storing computer executable instructions for causing a server to perform a method as described above.
The embodiment of the application has the beneficial effects that: different from the situation of the prior art, the spectral confocal detection method of the embodiment of the application comprises the steps of starting the spectral confocal detection equipment, and setting detection dimensions, detection types and detection parameters in the control component; calibrating the spectral confocal detection apparatus; driving the lens assembly to move so as to scan and sample the object to be detected, and obtaining all sampling data; and analyzing a detection result according to the all sampling data. Through the steps, the embodiment of the application can directly scan and sample the object to be detected, does not need to manually move the position of the object to be detected in the detection process, improves the detection efficiency and reduces the error of the detection result.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. Like elements or portions are generally identified by like reference numerals throughout the several figures. In the drawings, elements or portions thereof are not necessarily drawn to scale.
FIG. 1 is a schematic diagram of an application environment of a spectral confocal detection method according to an embodiment of the present application;
FIG. 2 is a flow chart of a spectral confocal detection method according to an embodiment of the application;
FIG. 3 is a flowchart of step S102 in a spectral confocal detection method according to an embodiment of the application;
FIG. 4 is a flowchart of step S103 in the spectral confocal detection method according to an embodiment of the application;
FIG. 5 is a flowchart of step S104 in a spectral confocal detection method according to an embodiment of the application;
FIG. 6 is a flow chart of a spectral confocal detection method according to another embodiment of the application;
FIG. 7 is a schematic diagram of a process of determining a preliminary profile range of the object to be detected by the spectral confocal detection apparatus according to an embodiment of the present application;
FIG. 8 is a functional block diagram of a spectral confocal detection apparatus according to an embodiment of the application;
fig. 9 is a schematic diagram of an electronic device according to an embodiment of the application.
Detailed Description
In order that the application may be readily understood, a more particular description thereof will be rendered by reference to specific embodiments that are illustrated in the appended drawings. It will be understood that when an element is referred to as being "fixed" to another element, it can be directly on the other element or one or more intervening elements may be present therebetween. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or one or more intervening elements may be present therebetween. The terms "upper," "lower," "inner," "outer," "vertical," "horizontal," and the like as used in this specification, refer to an orientation or positional relationship based on that shown in the drawings, merely for convenience of description and to simplify the description, and do not denote or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the application. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used in this specification includes any and all combinations of one or more of the associated listed items.
In addition, the technical features mentioned in the different embodiments of the application described below can be combined with one another as long as they do not conflict with one another.
Referring to fig. 1, fig. 1 is a schematic diagram of an application environment of a spectral confocal detection method according to an embodiment of the present application, where the application environment includes a spectral confocal detection device 10 and an object 20 to be detected, the spectral confocal detection device 10 includes at least a detection platform 101, a light source 102, an optical fiber assembly 103, a spectrometer 104, a lens assembly 105, a control assembly 106, and a driving assembly 107, the detection platform 101 is used for placing the object 20 to be detected, a center of the detection platform 101 is a reference origin, the optical fiber assembly 103 is used for receiving light emitted by the light source 102 and light reflected by the object 20 to be detected, the spectrometer 104 is connected with the optical fiber assembly 103, the spectrometer 104 is used for analyzing the light reflected by the object 20 to be detected, the driving assembly 107 is respectively connected with the control assembly 106 and the lens assembly 105, the control assembly 106 is used for controlling the movement of the driving assembly 107 to drive the lens assembly 105 to scan and sample the object 20 to be detected, when the control assembly 106 controls the movement of the driving assembly 107 to drive the lens assembly 105 to perform the movement to scan and sample the object 20 to be detected, the spectrometer 104 is capable of detecting the object 20 to be detected, and the optical fiber optics is capable of transmitting the reflected light reflected by the object 20 to be detected, and the object 20 to be detected according to the task.
In this embodiment, the lens assembly 105 includes a dispersion lens and a galvanometer lens, the dispersion lens includes a first dispersion lens and a second dispersion lens, the galvanometer lens includes a first galvanometer lens and a second galvanometer lens, the first galvanometer lens and the second galvanometer lens are disposed between the first dispersion lens and the second dispersion lens, the first galvanometer lens is configured to enable the detection light emitted by the light source 102 to move along the X-axis direction, the second galvanometer lens is configured to enable the detection light emitted by the light source 102 to move along the Y-axis direction, the first dispersion lens is configured to collimate the white light and generate a preliminary dispersion, and the second dispersion lens is configured to generate a partial dispersion and refocus the partial dispersion into a spot.
In this embodiment, the spectrometer 104 is a multi-interface spectrometer 104, and the spectrometer 104 can be connected with a plurality of optical fiber assemblies 103, so that a plurality of lens assemblies 105 can share the spectrometer 104, thereby improving detection efficiency and reducing detection energy consumption.
Fig. 2 shows a flow chart of a spectral confocal detection method according to the application, as shown in fig. 2, comprising the steps of:
and step S101, starting the spectral confocal detection equipment, and setting detection dimensions, detection types and detection parameters in the control assembly.
In this embodiment, the detection dimension includes at least a two-dimensional contour and a three-dimensional morphology, where the two-dimensional contour refers to a contour in two directions of an X-axis direction and a Y-axis direction on the detection platform, that is, a contour of a vertical projection of the object to be detected on the detection platform; the three-dimensional appearance is that on the basis of the two-dimensional outline, the height information taking the detection platform as a reference plane is increased, namely the distance between each point on the surface of the object to be detected and the projection point of the point in vertical projection on the detection platform.
In this embodiment, the detection type includes at least a detection length, a height difference, and a roughness, where the length refers to a linear distance in a two-dimensional plane in an X-axis direction and a Y-axis direction; the height difference refers to the distance between each point on the surface of the object to be detected and the projection point of the point on the detection platform in a vertical projection mode, or one datum point is selected from the surface of the object to be detected, the projection distance between other points on the surface of the object to be detected and the datum point in the vertical direction of the detection platform is equal to the projection distance between other points on the surface of the object to be detected and the datum point, and the roughness refers to the standard deviation of the height difference of all points in the appointed area of the surface of the object to be detected.
In this embodiment, the detection parameters include at least detection precision, a first preset distance and a second preset distance, where the detection precision may be set to a plurality of precision levels artificially and reasonably, and the precision levels are inversely proportional to the detection time, i.e. the higher the precision level is, the longer the required detection time is.
The first preset distance is a distance that the driving assembly drives the lens assembly to move so that the light outgoing spot moves along the Y axis after the driving assembly drives the lens assembly to move so that the light outgoing spot finishes sampling once along the X axis, wherein the first preset distance is correlated with the precision level, when a user selects the detection precision with high precision level, the control assembly can automatically calculate and set the first preset distance, when the user automatically inputs the first preset distance, the control assembly automatically sets the detection precision, and controls the lens assembly to move so that the light outgoing spot moves along the Y axis according to the first preset distance each time, so that after the spectral confocal detection device is started, the user only needs to set one of the detection precision and the first preset distance.
The second preset distance refers to a distance that the control component controls the lens component to move so that the outgoing light spot moves outwards when the detection device is determining the primary range.
Step S102, calibrating the spectral confocal detection apparatus.
In some embodiments, referring to fig. 3, step S102 includes:
in step S1021, a detection instruction is acquired.
After the user sets related parameters such as detection dimension, detection type and detection parameters, the detection task is started, and the control component acquires a detection instruction for starting the detection task.
Step S1022, determining whether the driving component is normal according to the detection instruction.
And the control assembly controls the driving assembly to move, and if the driving assembly can stably move in a set area when the spectral confocal detection equipment leaves a factory, the driving assembly is in a normal state.
Step S1023, if the driving component is normal, judging whether the lens component is normal.
If the lens component can normally emit light spots and recover light spots and can normally deflect, the lens component is in a normal state.
Step S1024, if the lens assembly is normal, the completion of the calibration of the spectral confocal detection device is confirmed.
After calibration is completed, the control assembly controls the driving assembly and the lens assembly to return to the initial position, namely, the light spots emitted by the lens assembly vertically fall on the reference origin of the detection platform.
Step S1025, if the lens assembly is abnormal, confirming that the calibration of the spectral confocal detection device fails, and sending an alarm.
Step S1026, if the driving component is abnormal, confirming that the calibration of the spectral confocal detection device fails, and issuing an alarm.
Step S103, driving the lens assembly to move so as to scan and sample the object to be detected, and obtaining all sampling data.
In some embodiments, referring to fig. 4, step S103 includes:
step S1031, controlling the driving assembly to drive the lens assembly to move, so that the light spot emitted from the lens assembly scans and samples the object to be detected along the X-axis direction, and obtaining a plurality of first sampling data.
At this time, the second galvanometer lens is fixed, and the driving component controls the first galvanometer lens to move, so that the light spot emitted by the lens component only moves along the X-axis direction.
Step S1032, after completing one scanning sampling along the X-axis direction, controls the driving assembly to drive the lens assembly to move, so that the light spot emitted from the lens assembly moves along the Y-axis direction by a first preset distance.
When a user sets a first preset distance, the driving assembly drives the second galvanometer lens to move so that the light spots emitted from the lens assembly move along the Y-axis direction by the set first preset distance; when the user sets the detection precision, the control component calculates a first preset distance according to the detection precision, and the driving component drives the second galvanometer lens to move so that the light spot emitted from the lens component moves along the Y-axis direction by the calculated first preset distance.
The control component controls the lens component to move, so that the movement track of the light spot emitted from the lens component is S-shaped, the detection process is coherent, the movement quantity of the driving component is reduced, the detection time is shortened, and the detection efficiency is improved.
And step S1033, repeating the steps until the object to be detected is scanned and sampled in the X-axis direction and the Y-axis direction, and collecting the plurality of first sampling data to obtain all sampling data.
Step S104, analyzing the detection result according to the all sampling data.
In some embodiments, referring to fig. 5, step S104 includes:
in step S1041, a spectrum corresponding to the first sampling data is acquired.
The light spot emitted from the lens assembly scans a plurality of points on the surface of the object to be detected, each point is recorded by the spectrometer, a spectrum has a peak value, the peak value corresponds to a height, and the plurality of points correspond to the heights of a plurality of sampling points.
In step S1042, the peak of the spectrum is identified.
Step S1043, calculating a parameter of the first sampled data according to the peak value.
Step S1044, analyzing the result of the object to be detected according to the parameters.
In some embodiments, referring to fig. 6, the method further comprises:
step S105, controlling the driving assembly to drive the lens assembly to move, so that the light spot emitted from the lens assembly scans and samples the object to be detected along the positive direction of the X-axis from the reference origin, so as to identify the first edge point of the object to be detected.
Before the detection task starts, a user places the contour center of the object to be detected at the reference origin of the detection platform as much as possible, so that the scanning range of the lens assembly is reduced, and the detection efficiency is improved.
When the emergent light spot continuously moves from the object to be detected to fall on the detection platform, the spectrometer recognizes that the reflected light spot is the light spot reflected by the detection platform so as to recognize the first edge point of the object to be detected.
And step S106, calculating the distance between the reference origin and the first edge point to obtain the current distance.
The spectrometer calculates a distance of the reference origin from the first edge point and sends the identification result to the control component.
Step S107, controlling the driving assembly to drive the emergent light spots of the lens assembly to move circularly by taking the reference origin as a circle center and the current distance as a radius.
Step S108, judging whether a next edge point exists in the circular motion process of the emergent light spot.
And continuously identifying and judging whether the reflected light spots come from the detection platform by the spectrometer, if so, controlling the lens assembly to continue the circular motion, and if not, identifying a second edge point of the object to be detected.
Step S109, if present; and controlling the driving assembly to drive the lens assembly to move so that the emergent light spots move outwards for a second preset distance, updating the current distance and returning to the step of controlling the driving assembly to take the reference origin as a circle center, wherein the current distance is a radius, and driving the emergent light spots of the lens assembly to move circularly.
The second preset distance is a distance set by a user before the detection task is started; the outgoing light spot moving outwards for a second preset distance means that the driving assembly drives the lens assembly to move, so that the light spot outgoing from the lens assembly moves along the radial direction of the current circular movement away from the reference origin.
Step S110, if not, determining that the circle with the reference origin as the center and the current distance as the radius is the primary contour range of the object to be detected.
Determining the preliminary contour range of the object to be detected is beneficial to reducing the detection range of the spectral confocal detection equipment and improving the detection efficiency.
The preliminary contour range of the object to be detected is interrelated with the detection precision, when the preliminary contour range of the object to be detected is determined, the control component calculates a reasonable first preset distance according to the detection precision set by a user and the preliminary contour range, namely, when the preliminary contour range of the object to be detected is determined, the larger the precision grade of the detection precision is, the smaller the calculated first preset distance is, the smaller the precision grade of the detection precision is, and the larger the calculated first preset distance is.
Referring to fig. 7, fig. 7 shows a process of determining a preliminary contour range of the object to be detected by the spectral confocal detection apparatus.
Wherein, P1 represents an initial point of the emergent light spot, P2 represents a first edge point identified by the spectral confocal detection device, P3 represents a second edge point identified by the spectral confocal detection device, P4 represents a third edge point identified by the spectral confocal detection device, L1 represents a current distance obtained by initial calculation, L2 represents a second preset distance set by a user, C1 represents a preliminary contour range of the object to be detected, and an arrow direction in the drawing represents a movement direction of the emergent light spot.
In this embodiment, the direction of circular movement of the outgoing light spot is counterclockwise, and it is understood that in other embodiments, the direction of circular movement of the outgoing light spot may be clockwise.
The embodiment of the application has the beneficial effects that: different from the situation of the prior art, the spectral confocal detection method of the embodiment of the application comprises the steps of starting the spectral confocal detection equipment, and setting detection dimensions, detection types and detection parameters in the control component; calibrating the spectral confocal detection apparatus; driving the lens assembly to move so as to scan and sample the object to be detected, and obtaining all sampling data; and analyzing a detection result according to the all sampling data. Through the steps, the embodiment of the application can directly scan and sample the object to be detected, does not need to manually move the position of the object to be detected in the detection process, improves the detection efficiency and reduces the error of the detection result.
Referring to fig. 8, fig. 8 shows a functional block diagram of a spectral confocal detection apparatus 60 according to the present application, where the detection apparatus 60 includes a starting module 601, a calibration module 602, a sampling module 603, an analysis module 604, a first control module 605, a calculation module 606, a circular motion module 607, a determination module 608, a second control module 609, and a determination module 610. The starting module 601 is configured to start the spectral confocal detection device, and set a detection dimension, a detection type and a detection parameter in the control component; a calibration module 602 for calibrating the spectral confocal detection apparatus; the sampling module 603 is used for driving the lens assembly to move so as to scan and sample the object to be detected, and all sampling data are obtained; the analysis module 604 is configured to analyze a detection result according to the all sampled data; the first control module 605 is configured to control the driving assembly to drive the lens assembly to move, so that a light spot emitted from the lens assembly scans and samples the object to be detected along the positive direction of the X-axis from the reference origin, so as to identify a first edge point of the object to be detected; the calculation module 606 is configured to calculate a distance between the reference origin and the first edge point, so as to obtain a current distance; the circular motion module 607 is configured to control the driving component to drive the outgoing light spot of the lens component to perform circular motion with the reference origin as a center and the current distance as a radius; the judging module 608 is configured to judge whether a next edge point exists in the circular motion process of the outgoing light spot; the second control module 609 is used if present; controlling the driving assembly to drive the lens assembly to move so that the emergent light spots move outwards for a second preset distance, updating the current distance and returning to the step of controlling the driving assembly to take the reference origin as a circle center, wherein the current distance is a radius, and driving the emergent light spots of the lens assembly to move circularly; the determining module 610 is configured to determine that the circle with the reference origin as the center and the current distance as the radius is the preliminary contour range of the object to be detected if the reference origin is not present.
The calibration module 602 includes a first acquiring unit 6021, a first judging unit 6022, a second judging unit 6023, a first confirming unit 6024, a second confirming unit 6025, and a third confirming unit 6026. The first acquisition unit 6021 is configured to acquire a detection instruction; the first judging unit 6022 is configured to judge whether the driving assembly is normal according to the detection instruction; the second judging unit 6023 is configured to judge whether the lens assembly is normal if the driving assembly is normal; the first confirming unit 6024 is used for confirming that the calibration of the spectral confocal detection device is completed if the lens assembly is normal; the second confirming unit 6025 is configured to confirm that the calibration of the spectral confocal detection apparatus fails and issue an alarm if the lens assembly is abnormal; the third confirming unit 6026 is configured to confirm that the spectral confocal detection apparatus fails to calibrate if the driving assembly is abnormal, and issue an alarm.
The sampling module 603 includes a first control unit 6031, a second control unit 6032, and a collecting unit 6033. The first control unit 6031 is configured to control the driving assembly to drive the lens assembly to move, so that the light spot emitted from the lens assembly scans and samples the object to be detected along the X-axis direction, and a plurality of first sampling data are obtained; the second control unit 6032 is configured to control the driving assembly to drive the lens assembly to move after completing one scanning sampling along the X-axis direction, so that the light spot emitted from the lens assembly moves a first preset distance along the Y-axis direction; the collecting unit 6033 is configured to repeat the above steps until the scanning sampling in the X-axis direction and the Y-axis direction is completed on the object to be detected, and collect the plurality of first sample data, so as to obtain all sample data.
The analysis module 604 includes a second acquisition unit 6041, an identification unit 6042, a calculation unit 6043, and an analysis unit 6044. The second acquisition unit 6041 is configured to acquire a spectrum corresponding to the first sample data; an identification unit 6042 for identifying a peak of the spectrum; a calculation unit 6043 for calculating a parameter of the first sample data from the peak value; the analysis unit 6044 is configured to analyze a result of the object to be detected according to the parameter.
The embodiment of the application has the beneficial effects that: in contrast to the situation of the prior art, in the spectral confocal detection method according to the embodiment of the present application, the spectral confocal detection device is started by the starting module 601, and the detection dimension, the detection type and the detection parameter are set in the control component; the spectral confocal detection apparatus is then calibrated by a calibration module 602; then driving the lens assembly to move through the sampling module 603 so as to scan and sample the object to be detected, thereby obtaining all sampling data; finally, the analysis module 604 analyzes the detection result according to the all sampled data. Through the steps, the embodiment of the application can directly scan and sample the object to be detected, does not need to manually move the position of the object to be detected in the detection process, improves the detection efficiency and reduces the error of the detection result.
The present application further provides an embodiment of an electronic device 70, please refer to fig. 9, fig. 9 is a schematic diagram of an embodiment of an electronic device 70 according to an embodiment of the present application, a controller of the electronic device 70 includes: at least one processor 701; and a memory 702 communicatively coupled to the at least one processor 701, one of the processors 701 being illustrated in fig. 9. The memory 702 stores instructions executable by the at least one processor 701 to enable the at least one processor 701 to perform a spectral confocal detection method described above with respect to fig. 2-7 and to perform a spectral confocal detection apparatus described above with respect to fig. 8. The processor 701 and the memory 702 may be connected by a bus or otherwise, for example in fig. 9.
The memory 702 is used as a non-volatile computer readable storage medium for storing a non-volatile software program, a non-volatile computer executable program, and modules, such as program instructions/modules corresponding to a spectral confocal detection method in an embodiment of the present application, for example, the respective modules shown in fig. 8. The processor 701 executes various functional applications of the server and data processing by running nonvolatile software programs, instructions and modules stored in the memory 702, i.e., implements a spectral confocal detection method of the above-described method embodiment.
Memory 702 may include a storage program area that may store an operating system, at least one application program required for functionality, and a storage data area; the storage data area may store data created from the use of a spectral confocal detection apparatus, etc. In addition, the memory 702 may include high-speed random access memory, and may also include non-volatile memory, such as at least one magnetic disk storage device, flash memory device, or other non-volatile solid-state storage device. In some embodiments, memory 702 optionally includes memory remotely located relative to processor 701, which may be connected to a spectral confocal detection apparatus via a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
The one or more modules are stored in the memory 702 and when executed by the one or more processors 701 perform a spectral confocal detection method of any of the method embodiments described above, e.g., perform the method steps of fig. 2-7 described above, and perform a spectral confocal detection apparatus described above in fig. 8.
The product may perform the method provided by the embodiment of the present application, and has the corresponding functional module and beneficial effect of the performing method, and technical details not described in detail in the embodiment of the present application may be referred to the method provided by the embodiment of the present application.
Embodiments of the present application also provide a non-transitory computer readable storage medium storing computer executable instructions for execution by one or more processors, e.g., performing the steps of a spectral confocal detection method of fig. 2-7 described above, and performing a spectral confocal detection apparatus of fig. 8 described above.
Embodiments of the present application also provide a computer program product comprising a computer program stored on a non-transitory computer readable storage medium, the computer program comprising program instructions which, when executed by a computer, cause the computer to perform a method of spectral confocal detection in any of the method embodiments described above, for example, to perform the method steps of fig. 2 to 7 described above, and to perform a spectral confocal detection apparatus described above in fig. 8.
The foregoing description is only illustrative of the present application and is not intended to limit the scope of the application, and all equivalent structures or equivalent processes or direct or indirect application in other related technical fields are included in the scope of the present application.
Claims (9)
1. The method is characterized in that the method is operated in spectral confocal detection equipment, the spectral confocal detection equipment at least comprises a detection platform, a light source, an optical fiber assembly, a spectrometer, a lens assembly, a control assembly and a driving assembly, the detection platform is used for placing an object to be detected, the center of the detection platform is a reference origin, the optical fiber assembly is used for receiving light emitted by the light source and light reflected by the object to be detected, the spectrometer is connected with the optical fiber assembly, the spectrometer is used for analyzing the light reflected by the object to be detected, the driving assembly is respectively connected with the control assembly and the lens assembly, the control assembly is used for controlling the driving assembly to move so as to drive the lens assembly to scan and sample the object to be detected, and the method comprises the following steps:
starting the spectral confocal detection equipment, and setting detection dimensions, detection types and detection parameters in the control assembly;
calibrating the spectral confocal detection apparatus;
controlling the driving assembly to drive the lens assembly to move, so that light spots emitted from the lens assembly scan and sample the object to be detected along the positive direction of the X axis from the reference origin to identify a first edge point of the object to be detected;
calculating the distance between the reference origin and the first edge point to obtain a current distance;
controlling the driving assembly to drive the emergent light spots of the lens assembly to move circularly by taking the reference origin as a circle center and the current distance as a radius;
judging whether a next edge point exists in the circular movement process of the emergent light spots;
if present; controlling the driving assembly to drive the lens assembly to move so that the emergent light spots move outwards for a second preset distance, updating the current distance and returning to the step of controlling the driving assembly to take the reference origin as a circle center, wherein the current distance is a radius, and driving the emergent light spots of the lens assembly to move circularly;
if the object to be detected does not exist, determining that a circle with the reference origin as a circle center and the current distance as a radius is a preliminary contour range of the object to be detected;
driving the lens assembly to move so as to scan and sample the object to be detected, and obtaining all sampling data;
and analyzing a detection result according to the all sampling data.
2. The method of claim 1, wherein the step of calibrating the spectral confocal detection apparatus further comprises:
acquiring a detection instruction;
judging whether the driving assembly is normal or not according to the detection instruction;
if the driving component is normal, judging whether the lens component is normal or not;
if the lens assembly is normal, confirming that the calibration of the spectral confocal detection equipment is completed;
if the lens assembly is abnormal, confirming that the spectral confocal detection equipment fails to calibrate, and giving an alarm;
and if the driving assembly is abnormal, confirming that the spectral confocal detection equipment fails to calibrate, and giving an alarm.
3. The method of claim 1, wherein the step of driving the lens assembly to move to scan sample the object to be detected to obtain all sampled data further comprises:
controlling the driving assembly to drive the lens assembly to move, so that light spots emitted from the lens assembly scan and sample the object to be detected along the X-axis direction to obtain a plurality of first sampling data;
after one scanning sampling along the X-axis direction is completed, controlling the driving assembly to drive the lens assembly to move, so that the light spots emitted from the lens assembly move a first preset distance along the Y-axis direction;
repeating the steps until the scanning sampling in the X-axis direction and the Y-axis direction is completed on the object to be detected, and collecting the plurality of first sampling data to obtain all sampling data.
4. A method according to claim 3, wherein the step of analyzing the detection result based on the total sampled data further comprises:
acquiring a spectrum corresponding to the first sampling data;
identifying peaks of the spectrum;
calculating parameters of the first sampling data according to the peak value;
and analyzing the result of the object to be detected according to the parameters.
5. The method of claim 1, wherein the step of determining the position of the substrate comprises,
the detection dimension at least comprises a two-dimensional contour and a three-dimensional morphology;
the detection type at least comprises detection length, height difference and roughness.
6. The method of claim 1, wherein the step of determining the position of the substrate comprises,
the detection parameters at least comprise detection precision, a first preset distance and a second preset distance.
7. A spectral confocal detection apparatus capable of performing the method of any one of claims 1 to 6, comprising:
the starting module is used for starting the spectral confocal detection equipment and setting detection dimensions, detection types and detection parameters in the control assembly;
the calibration module is used for calibrating the spectral confocal detection equipment;
the sampling module is used for driving the lens assembly to move so as to scan and sample the object to be detected, and all sampling data are obtained;
and the analysis module is used for analyzing the detection result according to the all sampling data.
8. An electronic device, comprising:
a controller, comprising: at least one processor, and a memory communicatively coupled to the at least one processor;
wherein the memory stores instructions executable by the at least one processor to enable the at least one processor to perform the method of any one of claims 1 to 6.
9. A non-transitory computer readable storage medium storing computer executable instructions for causing a server to perform the method of any one of claims 1 to 6.
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6614537B1 (en) * | 1999-10-14 | 2003-09-02 | Minolta Co., Ltd. | Measuring apparatus and measuring method |
| CN103105141A (en) * | 2012-12-30 | 2013-05-15 | 北京理工大学 | Outline scanning measuring method and device of large-scale sphere and aspheric surface |
| CN104596464A (en) * | 2015-01-26 | 2015-05-06 | 南京理工大学 | Swing arm contour surface shape detection method based on combination of radial scanning and circular scanning |
| CN106767519A (en) * | 2017-03-13 | 2017-05-31 | 王俊民 | Spectral Confocal detecting system and method |
| CN108020171A (en) * | 2017-12-25 | 2018-05-11 | 东莞市三姆森光电科技有限公司 | Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology |
| CN110617778A (en) * | 2019-09-27 | 2019-12-27 | 广东工业大学 | Large-scale aspheric surface morphology detection method based on complex beam angle sensor |
| CN112985299A (en) * | 2021-02-19 | 2021-06-18 | 同济大学 | Optical probe on-line detection device and method based on path planning |
| CN113280728A (en) * | 2021-05-14 | 2021-08-20 | 南京中科神光科技有限公司 | Spectrum confocal displacement sensor |
-
2022
- 2022-01-27 CN CN202210099456.2A patent/CN114485422B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6614537B1 (en) * | 1999-10-14 | 2003-09-02 | Minolta Co., Ltd. | Measuring apparatus and measuring method |
| CN103105141A (en) * | 2012-12-30 | 2013-05-15 | 北京理工大学 | Outline scanning measuring method and device of large-scale sphere and aspheric surface |
| CN104596464A (en) * | 2015-01-26 | 2015-05-06 | 南京理工大学 | Swing arm contour surface shape detection method based on combination of radial scanning and circular scanning |
| CN106767519A (en) * | 2017-03-13 | 2017-05-31 | 王俊民 | Spectral Confocal detecting system and method |
| CN108020171A (en) * | 2017-12-25 | 2018-05-11 | 东莞市三姆森光电科技有限公司 | Mobile phone curved surface housing profile measuring method and its measuring apparatus based on Spectral Confocal technology |
| CN110617778A (en) * | 2019-09-27 | 2019-12-27 | 广东工业大学 | Large-scale aspheric surface morphology detection method based on complex beam angle sensor |
| CN112985299A (en) * | 2021-02-19 | 2021-06-18 | 同济大学 | Optical probe on-line detection device and method based on path planning |
| CN113280728A (en) * | 2021-05-14 | 2021-08-20 | 南京中科神光科技有限公司 | Spectrum confocal displacement sensor |
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