CN103196419A - Femtosecond laser frequency comb ranging device and method - Google Patents
Femtosecond laser frequency comb ranging device and method Download PDFInfo
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- CN103196419A CN103196419A CN2013101113337A CN201310111333A CN103196419A CN 103196419 A CN103196419 A CN 103196419A CN 2013101113337 A CN2013101113337 A CN 2013101113337A CN 201310111333 A CN201310111333 A CN 201310111333A CN 103196419 A CN103196419 A CN 103196419A
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Abstract
The invention provides a femtosecond laser frequency comb ranging device and device. The device comprises a Fabry Perot device behind a Michelson interference optical path and in front of a spectrograph. The Fabry Perot device performs optical filtering on light of a femtosecond laser frequency comb, and reduces the frequency mode density of the optical frequency comb, so that each pixel of a CCD (charge coupled device) linear array detector of the spectrograph receives an interference signal in a single frequency mode. The device and the method achieve optical filtering of the femtosecond laser frequency comb within a broad spectrum range, and guarantee the accuracy and the stability of an interval and parallelism between optical plane reflection mirrors of the device; and the device is simple in design and structure, easy to regulate and low in cost.
Description
Technical field
The present invention relates to a kind of distance measuring equipment and method, particularly a kind of distance measuring equipment and method that adopts the femtosecond laser frequency comb to carry out the large scale high-precision laser range-finding.
Background technology
The large scale high-precision laser range-finding need solve the contradiction of two aspects, and the one, improve measuring accuracy, the 2nd, increase range.In theory, the more short measuring accuracy of wavelength is more high, and the more long range of wavelength is more big.Dual-frequency laser ranging adopts two frequency mode multiple measurement, namely combines with a upper frequency measurement with a lower frequency measurement, realizes submillimeter level measuring accuracy in tens meters ranges.
The femtosecond laser frequency comb adopts femto-second laser as light source, characteristic with wide spectrum and burst pulse, femtosecond pulse is a series of equally spaced pulse trains on the time domain, and frequency domain upper frequency comb can provide a series of equally spaced frequency distribution, i.e. optical frequency com.The femtosecond laser frequency comb can produce hundreds of thousands to millions of frequency modes, adopts the multiple measurement method, can realize nanoscale measuring accuracy in the hundreds of km range.The trend institute that adopts femtosecond laser frequency to comb to be present large scale high-precision laser range-finding to.
In the existing femtosecond laser frequency comb distance measuring equipment, after the light that adopts michelson interferometer optical path that femtosecond laser frequency is combed is interfered, be imaged on the line array CCD probe unit of spectrometer inside through the lens convergence, can observe two-way light thus, reference light and measuring light, between interference pattern.The fixed reference mirror along the optical axis traverse measurement mirror of measuring beam, because interference pattern is relevant with measurement mirror displacement L, thereby can calculate the displacement L that measures mirror by the variation of measuring interference pattern.
Suppose to adopt titanium jewel femto-second laser in the range finding, the spectral range of this light source is 750-850nm, and the interval delta λ of frequency mode is about 1.66427 * 10
-4Nm then has about 600864 frequency modes.The normal CCD linear array detector has 3648 pixel counts, and Pixel Dimensions is 8 μ m * 200 μ m, and namely CCD can only identify several thousand kinds of frequency modes.Because the detectable number of frequencies of femtosecond laser frequency comb frequency mode and photodetector differs 2 orders of magnitude, therefore will receive the interference signal of a lot of frequency modes on each pixel of CCD, can't make the interference signal that receives the single-frequency pattern on each pixel, have a strong impact on measurement.
Summary of the invention
The object of the present invention is to provide a kind of femtosecond laser frequency comb distance measuring equipment and method, the frequency mode density that it reduces the femtosecond laser frequency comb greatly makes the interference signal that receives the single-frequency pattern on each pixel of photodetector.
According to an aspect of the present invention, a kind of femtosecond laser frequency comb distance measuring equipment is provided, comprising a Fabry-Perot device, be arranged on after the michelson interferometer optical path, before the spectrometer, described Fabry-Perot device carries out optically filtering to the light of femtosecond laser frequency comb, reduce the frequency mode density of optical frequency com, make the interference signal that receives the single-frequency pattern on each pixel of CCD linear array detector of spectrometer.
Wherein, this Fabry-Perot device comprises a Fabry-Perot resonator, defined by two parallel plane mirrors, these two plane mirrors have identical reflectivity, be coated with the high inverse medium film that is suitable for the 600-850nm wavelength coverage on its inside surface, outside surface is coated with the anti-reflection film that is suitable for the 600-850nm wavelength coverage, is air between two plane mirrors.
Wherein, this Fabry-Perot device comprises an isolator, is supported between two plane mirrors, and this isolator is a whole mechanism.
Wherein, this isolator adopts low-expansion material manufacturing.
Wherein, in this Fabry-Perot device, two plane mirrors are fixed on two sleeves with a trim ring, a turn respectively, and two sleeves are fixed on two end faces of isolator by screw respectively.
Wherein, two end faces of described isolator respectively are provided with an elastic hinge, these two elastic hinges are parallel to each other, space angle is 90 degree, described two sleeves are fixed on described two elastic hinges by described screw respectively, and each elastic hinge is provided with for screw and the jackscrew of regulating two plane reflection mirror-parallelisms.
According to another aspect of the present invention, a kind of femtosecond laser frequency comb distance-finding method is provided, wherein, after michelson interferometer optical path, before the spectrometer, a Fabry-Perot device is set, light to the femtosecond laser frequency comb carries out optically filtering, reduce the frequency mode density of optical frequency com, make the interference signal that receives the single-frequency pattern on each pixel of CCD linear array detector of spectrometer.
Wherein, make two plane mirrors of this Fabry-Perot device have identical reflectivity, inside surface at two plane mirrors plates the high inverse medium film that is suitable for the 600-850nm wavelength coverage, and outside surface plates the anti-reflection film that is suitable for the 600-850nm wavelength coverage.
Wherein, in this Fabry-Perot device, described two plane mirrors are fixed on two sleeves with a trim ring, a turn respectively, isolator is supported between two plane mirrors, two end faces of described isolator respectively are provided with an elastic hinge, these two elastic hinges are parallel to each other, space angle is 90 degree, described two sleeves are fixed on described two elastic hinges by screw respectively, each elastic hinge is provided with screw and jackscrew, regulates described screw and jackscrew to regulate the depth of parallelism of two plane mirrors.
Beneficial effect of the present invention is mainly reflected in:
Utilize the Fabry-Perot device as optical filtering apparatus, realized high filtering ratio, the frequency mode density that it reduces the femtosecond laser frequency comb greatly makes the interference signal that receives the single-frequency pattern on each pixel of photodetector.
The reflectance coating that plates on two plane mirrors and anti-reflection film are to select according to the spectral range of femtosecond laser frequency comb, can realize good filtering effect.
Be a whole mechanism with isolator design wherein, can keep two spacings between the plane mirror stable.
Adopt low-expansion material to make the isolator of reflection cavity, can effectively reduce temperature to the influence of device.
Employing is arranged on screw and the jackscrew of elastic hinge one side on the isolator Fabry-Perot device is regulated, and has guaranteed that the height of two plane mirrors is parallel.
Femtosecond laser frequency comb distance measuring equipment of the present invention, utilize the Fabry-Perot device, realized the optically filtering in the femtosecond laser frequency comb wide spectral range, spacing between the device optical flat catoptron and precision and the stability of the depth of parallelism have been guaranteed, design is succinct, simple in structure, be easy to regulate, with low cost.
Description of drawings
Fig. 1 is its spectrally resolved principle of interference figure of femtosecond laser frequency comb distance measuring equipment of this case;
Fig. 2 is the femtosecond laser frequency comb distance measuring equipment optically filtering synoptic diagram of this case;
Fig. 3 is Fabry-Perot device optically filtering schematic diagram;
Fig. 4 A is the structural drawing of Fabry-Perot device used in the femtosecond laser frequency comb distance measuring equipment of this case to Fig. 4 D, and wherein Fig. 4 A is front elevation, and Fig. 4 B is side view, and Fig. 4 C is vertical view, and Fig. 4 D is for dissecing the sectional view of gained along A-A profile line among Fig. 4 A;
Fig. 5 A is the structural drawing of the Fabry-Perot device middle sleeve of Fig. 4 to Fig. 5 B, and wherein Fig. 5 A is the sleeve front elevation, and Fig. 5 B is sleeve dissects gained along A-A profile line among Fig. 5 A sectional view.
Embodiment
This case inventor is thought of as femtosecond laser frequency comb distance measuring equipment and designs a kind of optical filtering apparatus, light from femto-second laser is carried out optically filtering, reduce the frequency mode density of optical frequency com greatly, make the interference signal that can receive the single-frequency pattern on each pixel of CCD linear array detector, reduce the resolution load of photodetector.
The femtosecond laser frequency comb comprises hundreds thousand of to up to a million frequency modes, and existing filter can not satisfy the spectrum interfeerometry ranging to frequency mode requirement at interval on frequency mode resolution.
Fabry-Perot device (FP) is a kind of optical interference instrument commonly used, and traditional usage of FP is to produce optical interference effects.The inventor considers, carry out uniformly-spaced and high resolving power filtering, can utilize the Fabry-Perot device, existing relatively filter, and it has high specific filtration resistance, can satisfy the frequency interval requirement of photodetector.As shown in Figure 3, Fabry-Perot device 20, two level crossings 21,22 that are parallel to each other that comprise distance D, the light 23 that its input is had a lot of frequencies, wavelength mode, can obtain the certain frequency of exporting, the coherent light 24 of wavelength mode in the one side, and the light of all the other a large amount of frequencies, wavelength mode is filtered, and can leach thus to be fit to the frequency mode that spectrally resolved interfeerometry ranging is used.
As shown in Figure 2, in femtosecond laser frequency comb distance measuring equipment, utilize Fabry-Perot device 20 as optical filtering apparatus 10, can a large amount of wavelength mode λ 1 will be had ... the light input method Fabry-Perot-type device 20 of the femtosecond laser frequency comb of λ n, and obtain having the output light of specific wavelength pattern λ i, offer the spectrometer photodetector.
The femtosecond laser frequency comb distance measuring equipment of this case, based on the spectrally resolved interfeerometry ranging principle of femtosecond laser frequency comb, as shown in Figure 1, the light beam of femtosecond pulse frequency comb enters Amici prism through optoisolator.Tell two-beam by Amici prism, respectively directive reference mirror and measurement mirror.Overlap and the process Fabry-Perot etalon behind the light beam process Amici prism by reference mirror and measurement mirror reflection.Fabry-Perot etalon can reduce the pattern density of light comb by the resonance filter function.The light beam that comes out from Fabry-Perot etalon incides spectrometer, after wherein reflection grating reflects, because the optical diffraction angle difference of different wave length, frequency, the light beam of different wave length, frequency is propagated along different directions, be imaged on the line array CCD probe unit of spectrometer inside through the collimating mirror convergence, can observe the interference strength between reference light and the measuring light thus.The fixed reference mirror along the optical axis traverse measurement mirror of measuring beam, can be measured the displacement L of mirror.
As seen, in the femtosecond laser frequency of this case comb distance measuring equipment, the Fabry-Perot device is arranged on after the michelson interferometer optical path, before the spectrometer.
Laser ranging requires filter not influence frequency stability to frequency mode stability requirement height.Existing Fabry-Perot etalon is difficult to satisfy the filtering requirements of femtosecond laser frequency comb not at the governor motion of femtosecond laser frequency comb.The Fabry-Perot device to be applied in the range finding of femtosecond laser frequency comb, need make its frequency output stable, thereby need to guarantee the stability in Fabry-Perot device chamber long (spacings between two level crossings) and the high stability of chamber face (the two level crossing minute surfaces) depth of parallelism.
The present invention proposes a kind of Fabry-Perot device of high stability, can be used as optical filtering apparatus and is applied in the femtosecond laser frequency comb distance measuring equipment.
As Fig. 4 A to Fig. 4 D and Fig. 5 A to shown in Fig. 5 B, this Fabry-Perot device 100, comprise a Fabry-Perot resonator, wherein comprise two plane mirrors 204, one of them reflects the incident light in order to part, another is opposing parallel with it, has identical with it reflectivity, in order to part reflection and transmission light.Be coated with the high inverse medium film that is suitable for the 600-850nm wavelength coverage on two plane mirror 204 inside surfaces, outside surface is coated with the anti-reflection film that is suitable for the 600-850nm wavelength coverage.Separated by air between two plane mirrors 204, can reduce dispersive influence, the frequency mode that is conducive to the femtosecond optical frequency com leaches.
Further referring to Fig. 5 A to Fig. 5 B, it has shown the formation of sleeve assembly 200.Wherein, sleeve assembly 200(is equivalent to the sleeve assembly 109 of Fig. 4 A in Fig. 4 D) comprise sleeve 201, trim ring 202, turn 203.
The support of 101 pairs of two plane mirrors 204 of isolator is achieved in that plane mirror 204, turn 203 and trim ring 202 is installed in the sleeve 201 in order, plane mirror 204 can be fixed on the bottom of sleeve 201 by rotation trim ring 202.Then, in the front and rear surfaces of isolator 101, use two groups of screws 107,108,110,111 that two sleeve assemblies 109 are fixed on the elastic hinge 112,113 on the isolator 101 respectively.Use two groups of screws 102,104,106 and two groups of jackscrews 103,105 fine setting elastic hinges 112,113 in-plane respectively, the plane of reflection of two plane mirrors can be adjusted to strict parallel and keeping parallelism state.Wherein, screw 102,104,106 and jackscrew 103,105 be arranged on elastic hinge 112, a side of 113.Elastic hinge 112 and elastic hinge 113 are parallel to each other, and space angle is 90 degree.
Available pole is installed on the support pilot hole 114, realizes that whole Unit Installation is with fixing.
This Fabry-Perot device 100, fixedly connected between the each several part, guaranteed the stable of structure, and by screw 102,104,106 and jackscrew 103,105 adjusting, can finely tune on this basis, with the depth of parallelism of strict guarantee chamber face, make device have high stability.
Below only be concrete exemplary applications of the present invention, protection scope of the present invention is not constituted any limitation.All employing equivalents or equivalence are replaced and the technical scheme of formation, all drop within the rights protection scope of the present invention.
Claims (9)
1. a femtosecond laser frequency is combed distance measuring equipment, it is characterized in that, comprising a Fabry-Perot device, be arranged on after the michelson interferometer optical path, before the spectrometer, described Fabry-Perot device carries out optically filtering to the light of femtosecond laser frequency comb, reduce the frequency mode density of optical frequency com, make the interference signal that receives the single-frequency pattern on each pixel of CCD linear array detector of spectrometer.
2. femtosecond laser frequency according to claim 1 is combed distance measuring equipment, it is characterized in that, this Fabry-Perot device comprises a Fabry-Perot resonator, defined by two parallel plane mirrors, these two plane mirrors have identical reflectivity, be coated with the high inverse medium film that is suitable for the 600-850nm wavelength coverage on its inside surface, outside surface is coated with the anti-reflection film that is suitable for the 600-850nm wavelength coverage, is air between two plane mirrors.
3. femtosecond laser frequency comb distance measuring equipment according to claim 2 is characterized in that this Fabry-Perot device comprises an isolator, is supported between two plane mirrors, and this isolator is a whole mechanism.
4. femtosecond laser frequency comb distance measuring equipment according to claim 3 is characterized in that this isolator adopts low-expansion material manufacturing.
5. femtosecond laser frequency according to claim 4 is combed distance measuring equipment, it is characterized in that, in this Fabry-Perot device, two plane mirrors are fixed on two sleeves with a trim ring, a turn respectively, and two sleeves are fixed on two end faces of isolator by screw respectively.
6. femtosecond laser frequency according to claim 5 is combed distance measuring equipment, it is characterized in that, two end faces of described isolator respectively are provided with an elastic hinge, these two elastic hinges are parallel to each other, space angle is 90 degree, described two sleeves are fixed on described two elastic hinges by described screw respectively, and each elastic hinge is provided with for screw and the jackscrew of regulating two plane reflection mirror-parallelisms.
7. a femtosecond laser frequency is combed distance-finding method, it is characterized in that, after michelson interferometer optical path, before the spectrometer, a Fabry-Perot device is set, light to the femtosecond laser frequency comb carries out optically filtering, reduce the frequency mode density of optical frequency com, make the interference signal that receives the single-frequency pattern on each pixel of CCD linear array detector of spectrometer.
8. femtosecond laser frequency according to claim 7 is combed distance-finding method, it is characterized in that, make two plane mirrors of this Fabry-Perot device have identical reflectivity, inside surface at two plane mirrors plates the high inverse medium film that is suitable for the 600-850nm wavelength coverage, and outside surface plates the anti-reflection film that is suitable for the 600-850nm wavelength coverage.
9. femtosecond laser frequency according to claim 8 is combed distance-finding method, it is characterized in that, in this Fabry-Perot device, described two plane mirrors are used a trim ring respectively, one turn is fixed on two sleeves, isolator is supported between two plane mirrors, two end faces of described isolator respectively are provided with an elastic hinge, these two elastic hinges are parallel to each other, space angle is 90 degree, described two sleeves are fixed on described two elastic hinges by screw respectively, each elastic hinge is provided with screw and jackscrew, regulates described screw and jackscrew to regulate the depth of parallelism of two plane mirrors.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142503A (en) * | 2014-07-31 | 2014-11-12 | 天津大学 | Optical frequency comb distance measuring device and method combining flight time with light intensity detection |
| CN105067565A (en) * | 2015-08-28 | 2015-11-18 | 清华大学 | Laser cavity ring-down gas spectral measurement system based on femtosecond optical frequency combing |
| CN105589074A (en) * | 2015-11-27 | 2016-05-18 | 中国人民解放军国防科学技术大学 | Multi-wavelength interference real-time absolute distance measurement device on the basis of femtosecond optical comb synchronization frequency locking |
| CN105806306A (en) * | 2016-03-29 | 2016-07-27 | 中国科学院国家天文台 | Laser interferometer for measuring variation of spatial distance |
| CN105974396A (en) * | 2016-06-30 | 2016-09-28 | 南京信息工程大学 | Speed measurement method and system based on double etalons |
| CN106247954A (en) * | 2016-09-23 | 2016-12-21 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of femtosecond laser measuring motion based on frequency conversion principle of interference and method |
| CN106356709A (en) * | 2016-11-19 | 2017-01-25 | 山西大学 | Device and method for producing laser at any frequency based on an optical frequency comb |
| CN109031851A (en) * | 2018-08-03 | 2018-12-18 | 武汉工程大学 | The portable femtosecond light comb system of high stability and control method based on optical reference |
| CN110007310A (en) * | 2019-03-13 | 2019-07-12 | 北京空间飞行器总体设计部 | A kind of Larger Dynamic range base line measurement system and method based on double light comb rangings |
| CN110865392A (en) * | 2019-11-28 | 2020-03-06 | 天津大学 | Method based on optical frequency comb and applied to workpiece distance measurement imaging |
| CN113074665A (en) * | 2021-04-26 | 2021-07-06 | 中国石油大学(华东) | Line profile measuring method based on spectral resolution interference |
| CN113280728A (en) * | 2021-05-14 | 2021-08-20 | 南京中科神光科技有限公司 | Spectrum confocal displacement sensor |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142503B (en) * | 2014-07-31 | 2016-08-24 | 天津大学 | Optical frequency com range unit that flight time and light intensity detection combine and method |
| CN104142503A (en) * | 2014-07-31 | 2014-11-12 | 天津大学 | Optical frequency comb distance measuring device and method combining flight time with light intensity detection |
| CN105067565B (en) * | 2015-08-28 | 2017-12-19 | 清华大学 | A kind of laser cavity-type BPM gaseous spectrum measuring system based on femtosecond optical frequency comb |
| CN105067565A (en) * | 2015-08-28 | 2015-11-18 | 清华大学 | Laser cavity ring-down gas spectral measurement system based on femtosecond optical frequency combing |
| CN105589074A (en) * | 2015-11-27 | 2016-05-18 | 中国人民解放军国防科学技术大学 | Multi-wavelength interference real-time absolute distance measurement device on the basis of femtosecond optical comb synchronization frequency locking |
| CN105806306A (en) * | 2016-03-29 | 2016-07-27 | 中国科学院国家天文台 | Laser interferometer for measuring variation of spatial distance |
| CN105806306B (en) * | 2016-03-29 | 2018-03-16 | 中国科学院国家天文台 | The laser interferometer of measurement space distance change |
| CN105974396A (en) * | 2016-06-30 | 2016-09-28 | 南京信息工程大学 | Speed measurement method and system based on double etalons |
| CN106247954A (en) * | 2016-09-23 | 2016-12-21 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of femtosecond laser measuring motion based on frequency conversion principle of interference and method |
| CN106247954B (en) * | 2016-09-23 | 2019-03-26 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of femtosecond laser measuring motion and method based on frequency conversion principle of interference |
| CN106356709A (en) * | 2016-11-19 | 2017-01-25 | 山西大学 | Device and method for producing laser at any frequency based on an optical frequency comb |
| CN109031851A (en) * | 2018-08-03 | 2018-12-18 | 武汉工程大学 | The portable femtosecond light comb system of high stability and control method based on optical reference |
| CN109031851B (en) * | 2018-08-03 | 2021-08-13 | 武汉工程大学 | High-stability portable femtosecond optical comb system based on optical reference and control method |
| CN110007310A (en) * | 2019-03-13 | 2019-07-12 | 北京空间飞行器总体设计部 | A kind of Larger Dynamic range base line measurement system and method based on double light comb rangings |
| CN110007310B (en) * | 2019-03-13 | 2020-10-23 | 北京空间飞行器总体设计部 | Large-dynamic-range baseline measurement system and method based on double-optical-comb distance measurement |
| CN110865392A (en) * | 2019-11-28 | 2020-03-06 | 天津大学 | Method based on optical frequency comb and applied to workpiece distance measurement imaging |
| CN113074665A (en) * | 2021-04-26 | 2021-07-06 | 中国石油大学(华东) | Line profile measuring method based on spectral resolution interference |
| CN113280728A (en) * | 2021-05-14 | 2021-08-20 | 南京中科神光科技有限公司 | Spectrum confocal displacement sensor |
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Application publication date: 20130710 |