CN107462149B - Phase-shift interferometry system and wave plate phase-shift method thereof - Google Patents
Phase-shift interferometry system and wave plate phase-shift method thereof Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention relates to the technical field of optical interferometry and digital holographic measurement, and provides a phase-shift interferometry system and a wave plate phase-shift method thereof, wherein the phase-shift interferometry system is built and comprises a light source, a light filter, a first half wave plate, a polarization beam splitting element, a first beam splitter, a quarter wave plate, a second half wave plate, a first polaroid and a first monochromatic black-and-white image sensor, the phase-shift interferometry system realizes any phase shift by fixing the angle of the quarter wave plate to be unchanged and adjusting the rotation angle of the second half wave plate, is not limited to be combined with a phase-shift algorithm with a specific step length, and can be combined with the phase-shift algorithm with any phase-shift quantity at present to realize rapid and high-precision phase-shift interferometry; a driving device capable of accurately moving or rotating is not needed, the system is simple, and the operation is simple and convenient; the second half wave plate is equivalent to a phase shifter and does not need to be placed in an interference light path, so that the system is not influenced by mechanical motion, and the stability of the system is better.
Description
Technical Field
The invention relates to the technical field of optical interferometry and digital holographic measurement, in particular to a phase-shift interferometry system and a wave plate phase-shift method thereof.
Background
Phase shift interferometry is an optical phase measurement technique with the characteristics of non-contact, full field, non-destructive, rapid measurement, high measurement precision, capability of measuring irregular objects and the like, and is widely applied to the fields of optical surface detection, three-dimensional topography measurement, biological cell imaging, digital holography and the like. In recent years, with the development of computer technology and digital image processing technology, the technology of interferometry using light waves as measurement scale and measurement reference has been widely used.
In actual phase shift interferometry, phase shift errors of phase shifters, mechanical vibration and the like directly affect the phase measurement accuracy. Therefore, the accuracy and stability of the amount of phase shift plays a crucial role in phase-shift interferometry. The conventional time domain phase shift method mainly comprises the following steps: piezoelectric ceramic (PZT) method, moving grating method, stretched fiber method, liquid crystal phase shift method, polarization phase shift method, air phase shift method, and the like. However, these methods have the following disadvantages: (1) the system is relatively complex because of the need for a drive device that can move or rotate precisely; (2) the phase shifters are all required to be placed in an interference light path, so that the system is easily influenced by mechanical motion and has poor stability; (3) although the traditional wave plate phase shift method can realize simple phase shift, only some special phase shift values can be obtained, and random phase shift cannot be realized, so that the traditional wave plate phase shift method can only be used in combination with some specific algorithms, and the precision and the application range are limited.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides the phase shift interferometry system and the wave plate phase shift method thereof, which have the advantages of simple combination, simple and convenient operation and stability, effectively solve the phase shift problem in single-channel and multi-channel phase shift interferometry systems, and realize simple, quick, high-precision and stable phase shift.
In order to achieve the purpose, the invention adopts the following technical scheme:
a phase shift interferometry system comprises a light source, a light filter, a first quarter wave plate, a polarization beam splitting element, a first beam splitter, a quarter wave plate, a second half wave plate, a first polaroid and a first monochromatic black-and-white image sensor, wherein light emitted by the light source enters the polarization beam splitting element after passing through the light filter and the first half wave plate and is split into first light and second light, a first plane reflector and a first microscope objective are arranged in the light path direction of the first light, a second plane reflector and a second microscope objective are arranged in the light path direction of the second light, an object to be measured is placed between the second plane reflector and the second microscope objective, light reflected by the first plane reflector and the second plane reflector respectively passes through the first microscope objective and the second microscope objective and then enters the first beam splitter, and the first single-color black-and-white image sensor acquires the first single-color black-and-white image after passing through the quarter wave plate and the second half wave plate and entering the first polarizer.
Further, the first polarizer and the first monochromatic black-and-white image sensor are arranged in the optical path direction of the first light beam, the first monochromatic black-and-white image sensor is used for collecting the optical signal of the first light beam emitted from the first polarizer, the second polarizer and the second monochromatic black-and-white image sensor are further arranged in the optical path direction of the second light beam, and the second monochromatic black-and-white image sensor is used for collecting the optical signal of the second light beam emitted from the second polarizer.
Further, the polarization directions of the first polarizing plate and the second polarizing plate are set at 45 °.
A wave plate phase shifting method of a phase shifting interferometry system, comprising:
the method comprises the following steps: building the phase shift interference measurement system;
step two: adjusting the optical filter and the first one-half wave plate in the first step to adjust the contrast;
step three: and fixing the angle of the quarter wave plate to be unchanged, and adjusting the rotation angle of the second half wave plate to realize any phase shift.
Further, the direction of the light emitted by the light source is taken as the direction of the z axis, the direction of the x axis or the direction of the y axis is perpendicular to the direction of the z axis, and the fast axis of the quarter-wave plate in the first step forms 45 degrees with the x axis or the y axis.
Further, the specific method for adjusting the rotation angle of the second half-wave plate to realize any phase shift in the third step is as follows:
the reference light and object light of the interferometer are a pair of orthogonal polarized lights with polarization directions in horizontal and vertical directions respectively, and the phase difference is
Their Jones vector E1And E2Are respectively as
The Jones matrix of the first polaroid or the second polaroid with the transmission direction at 45 degrees, the Jones matrix of the quarter-wave plate with the fast axis forming 45 degrees with the x axis, and the Jones matrix of the half-wave plate with the fast axis forming theta with the x axis are respectively as follows:
the jones vector of emergent light of the reference light and the object light after passing through the quarter-wave plate, the second half-wave plate and the first polarizing plate or the second polarizing plate is expressed as:
the intensity I of the interference pattern finally formed on the imaging device is:
wherein symbol denotes conjugation, e is a natural constant, i is an imaginary unit, A1，A2The amplitudes of the reference light and the object light respectively, and it can be seen from the above formula (4) that the light intensity of a certain point in the interference field not only differs from the phase
And the second half-wave plate is arranged at a placing angle theta, so that when the second half-wave plate is rotated to change the placing angle, the brightness of interference fringes changes.
Further, the phase shift amount is 4 times of the rotation angle of the second half wave plate.
The invention has the beneficial effects that:
the phase shift method of the phase shift interferometry system can realize any phase shift, is not limited to be combined with a phase shift algorithm with a specific step length, and can be combined with the existing phase shift algorithm with any phase shift amount to realize rapid and high-precision phase shift interferometry; a driving device capable of accurately moving or rotating is not needed, the system is simple, and the operation is simple and convenient; the second half wave plate is equivalent to a phase shifter and does not need to be placed in an interference light path, so that the system is not influenced by mechanical motion, and the stability of the system is better.
Drawings
FIG. 1 is a schematic structural diagram of a two-channel simultaneous phase-shifting interference system according to a first embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a single-channel phase-shifting interference system according to a second embodiment of the present invention;
FIG. 3 is a phase-shifted interferogram acquired during experimental measurements according to a second embodiment of the present invention;
FIG. 4 is a phase shift distribution curve corresponding to 37 phase shift interferograms acquired during experimental measurement according to the second embodiment of the invention;
in the figure, 1-light source, 2-optical filter, 3-first one-half wave plate, 4-polarization beam splitting element, 5-first plane reflector, 6-second plane reflector, 7-object to be measured, 8-second microscope objective, 9-first microscope objective, 10-first beam splitter, 11-one-quarter wave plate, 12-second one-half wave plate, 13-second beam splitter, 14-first polarizer, 15-second polarizer, 16-first monochromatic black-and-white image sensor, 17-second monochromatic black-and-white image sensor, 101-light source, 102-optical filter, 103-first one-half wave plate, 104-polarization beam splitting element, 105-first plane reflector, 106-second plane reflector, 107-object to be measured, 108-second microscope objective, 109-first microscope objective, 110-first beam splitter, 111-one-quarter wave plate, 112-second one-half wave plate, 113-a first polarizer, 114-a first monochrome black and white image sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, a first embodiment of the present invention provides a dual-channel simultaneous phase-shift interferometry system, including a light source 1, a filter 2, a first quarter-wave plate 3, a polarization beam splitter 4, a first beam splitter 10, a quarter-wave plate 11, a second half-wave plate 12, and a second beam splitter 13, where light emitted from the light source 1 enters the polarization beam splitter 4 after passing through the filter 2 and the first quarter-wave plate 3, incident light is split into P-polarized light and S-polarized light by the polarization beam splitter 4, a first plane mirror 5 and a first microscope objective 9 are disposed in a light path direction of the P-polarized light, a second plane mirror 6 and a second microscope objective 8 are disposed in a light path direction of the S-polarized light, an object 7 to be measured is disposed between the second plane mirror 6 and the second microscope objective 8, the P-polarized light is reflected by the first plane mirror 5 and enters the first microscope objective 9, the S polarized light is reflected by the second plane reflector 6, passes through an object 7 to be detected and the second microscope objective 8, enters the first beam splitter 10, then the P polarized light and the S polarized light pass through the quarter-wave plate 11 and the second half-wave plate 12, enters the second beam splitter 13, a first polarizing plate 14 and a first monochromatic black-and-white image sensor 16 are arranged in the light path direction of the P polarized light, a second polarizing plate 15 and a second monochromatic black-and-white image sensor 17 are arranged in the light path direction of the S polarized light, the first monochromatic black-and-white image sensor 16 is used for collecting light signals of the P polarized light emitted from the first polarizing plate 14, and the second monochromatic black-and-white image sensor 17 is used for collecting light signals of the S polarized light emitted from the second polarizing plate 15.
In this embodiment, the light source 1 is a He — Ne laser having a wavelength of 632.8nm, and the filter 2 is a neutral density filter.
The dual-channel simultaneous phase shift interferometry system can realize any phase shift by rotating the second half-wave plate 12.
In this embodiment, the direction of the light emitted from the light source 1 is the z-axis direction, and the x-axis direction or the y-axis direction is perpendicular to the z-axis direction, so that the fast axis of the quarter-wave plate 11 is 45 ° with respect to x or y.
The parameters of the first polarizer 14 and the second polarizer 15 are the same. In the present embodiment, the polarization directions of the first polarizing plate 14 and the second polarizing plate 15 are set at 45 °.
The first monochrome black-and-white image sensor 16 and the second monochrome black-and-white image sensor 17 have the same specification.
Referring to fig. 2, the second embodiment of the present invention provides a single-channel phase-shift interferometry system, which includes a light source 101, a filter 102, a first half-wave plate 103, a polarization beam splitter 104, a first beam splitter 110, a quarter-wave plate 111, a second half-wave plate 112, a first polarizer 113, and a first monochrome image sensor 114. Light emitted by a light source 101 enters a polarization beam splitting element 104 after passing through a light filter 102 and a first half-wave plate 103, incident light is decomposed into P polarized light and S polarized light by the polarization beam splitting element 104, a first plane reflector 105 and a first microscope objective lens 109 are arranged in the light path direction of the P polarized light, a second plane reflector 106 and a second microscope objective lens 108 are arranged in the light path direction of the S polarized light, an object to be detected 107 is placed between the second plane reflector 106 and the second microscope objective lens 108, the P polarized light is reflected by the first plane reflector 105 and enters a first beam splitter 110 after passing through the first microscope objective lens 109, the S polarized light is reflected by the second plane reflector 106 and enters the first beam splitter 110 after passing through the object to be detected 107 and the second microscope objective lens 108, and then the P polarized light and the S polarized light enter a first polarizing plate 113 after passing through the quarter-wave plate 111 and a second half-wave plate 112, and is collected by the first monochrome black-and-white image sensor 114, and the first monochrome black-and-white image sensor 114 is configured to collect an optical signal of P-polarized light emitted from the first polarizing plate 113.
In this embodiment, the light source 101 is a He — Ne laser having a wavelength of 632.8nm, and the filter 2 is a neutral density filter.
The single-channel phase-shift interferometry system of the invention can realize any phase shift by rotating the second half-wave plate 112.
In this embodiment, the direction of the light emitted from the light source 101 is the z-axis direction, and the x-axis direction or the y-axis direction is perpendicular to the z-axis direction, so that the fast axis of the quarter-wave plate 111 is 45 ° to x or y.
The invention also provides a wave plate phase shift method of the phase shift interferometry system, which comprises the following steps:
the method comprises the following steps: building a phase-shift interferometry system as shown in fig. 1 or fig. 2;
step two: adjusting the optical filters 2 and 102 and the first one- half wave plates 3 and 103 in the step one to adjust the contrast;
step three: the angle of the quarter- wave plate 11, 111 is fixed and the rotation angle of the second half- wave plate 12, 112 is adjusted to achieve any phase shift.
Specifically, the fast axis of the quarter- wave plate 11, 111 in step one should be at 45 ° to the x-axis or y-axis in the illustration.
Specifically, the polarization directions of the first polarizing plate 14 and the second polarizing plate 15 in step one of the first embodiment are set at 45 °.
In the present invention, the specific method for realizing any phase shift by adjusting the rotation angle of the second half- wave plate 12, 112 in the third step is as follows:
the reference light and object light of the interferometer are a pair of orthogonal polarized lights with polarization directions in horizontal and vertical directions respectively, and the phase difference is
Their Jones vector E1And E2Are respectively as
The jones matrix of the first polarizer 14 or the second polarizer 15 with the transmission direction at 45 degrees, the jones matrix of the quarter-wave plate 11 with the fast axis forming 45 degrees with the x axis, and the jones matrix of the second half-wave plate 12 with the fast axis forming theta with the x axis are respectively as follows:
the jones vector of the emergent light of the reference light and the object light after passing through the quarter-wave plate 11, the second half-wave plate 12, and the first polarizer 14 or the second polarizer 15 is expressed as:
the intensity I of the interference pattern finally formed on the imaging device is:
wherein symbol denotes conjugation, e is a natural constant, i is an imaginary unit, A1，A2The amplitudes of the reference light and the object light respectively, and it can be seen from the above formula (4) that the light intensity of a certain point in the interference field not only differs from the phase
It also relates to the angle θ of the second half-wave plate 12, so that when the second half-wave plate 12 is rotated to change the angle of the second half-wave plate 12, the brightness of the interference fringes changes. The second half-wave plate 12 here corresponds to a time-domain phase shifter, the amount of phase shift being 4 times the rotation angle of the second half-wave plate.
To further demonstrate the utility of the method of the present invention, the present invention was experimentally measured using a second embodiment, such as the measurement optical path system shown in fig. 2. The fast axis of the quarter-wave plate 111 is kept at 45 ° with the x-direction, and the second half-wave plate 112 is rotated at an interval of 10 ° until rotating for 360 ° for one circle, and simultaneously the interferograms are correspondingly acquired by using the CCD, and finally the phase shift of the 37 interferograms is calculated by using the improved least squares iteration method (AIA), wherein one acquired phase shift interferogram is shown in fig. 3, and 37 corresponding phase shift distribution curves are shown in fig. 4. As can be seen from the results in fig. 4, any phase shift of the system can be achieved by rotating the second half wave plate 112 by an amount 4 times the rotation angle of the second half wave plate 112.
Although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (3)
1. A method of phase shifting a wave plate of a phase shifting interferometry system, comprising:
the method comprises the following steps: building a phase shift interference measurement system; the phase-shifting interferometry system comprises: the device comprises a light source, a light filter, a first half-wave plate, a polarization beam splitting element, a first beam splitter, a quarter-wave plate, a second half-wave plate, a first polaroid and a first monochromatic black-and-white image sensor, wherein light emitted by the light source enters the polarization beam splitting element after passing through the light filter and the first half-wave plate and is split into first light and second light, a first plane reflector and a first microscope objective are arranged in the light path direction of the first light, a second plane reflector and a second microscope objective are arranged in the light path direction of the second light, an object to be detected is placed between the second plane reflector and the second microscope objective, light reflected by the first plane reflector and the second plane reflector respectively passes through the first microscope objective and the second microscope objective and then enters the first beam splitter, and enters the first polaroid after passing through the quarter-wave plate and the second half-wave plate, collected by the first monochrome black and white image sensor;
the first polaroid and the first monochromatic black-and-white image sensor are arranged in the light path direction of the first light beam, the first monochromatic black-and-white image sensor is used for collecting the light signal of the first light beam emitted from the first polaroid, the light path direction of the second light beam is also provided with a second polaroid and a second monochromatic black-and-white image sensor, and the second monochromatic black-and-white image sensor is used for collecting the light signal of the second light beam emitted from the second polaroid;
the polarization directions of the first polarizer and the second polarizer are arranged at 45 degrees;
step two: adjusting the optical filter and the first one-half wave plate in the first step to adjust the contrast;
step three: fixing the angle of the quarter-wave plate to be unchanged, and adjusting the rotation angle of the second half-wave plate to realize any phase shift;
the specific method for adjusting the rotation angle of the second half-wave plate to realize any phase shift in the third step is as follows:
the reference light and object light of the interferometer are a pair of orthogonal polarized lights with polarization directions in horizontal and vertical directions respectively, and the phase difference is
Their Jones vector E1And E2Are respectively as
The Jones matrix of the first polaroid or the second polaroid with the transmission direction at 45 degrees, the Jones matrix of the quarter-wave plate with the fast axis forming 45 degrees with the x axis, and the Jones matrix of the half-wave plate with the fast axis forming theta with the x axis are respectively as follows:
the jones vector of emergent light of the reference light and the object light after passing through the quarter-wave plate, the second half-wave plate and the first polarizing plate or the second polarizing plate is expressed as:
the intensity I of the interference pattern finally formed on the imaging device is:
wherein symbol denotes conjugation, e is a natural constant, i is an imaginary unit, A1，A2The amplitudes of the reference light and the object light respectively, and it can be seen from the above formula (4) that the light intensity of a certain point in the interference field not only differs from the phase
And the second half-wave plate is arranged at a placing angle theta, so that when the second half-wave plate is rotated to change the placing angle, the brightness of interference fringes changes.
2. The wave plate phase shifting method of a phase shifting interferometry system of claim 1, wherein: and if the direction of the light rays emitted by the light source is the direction of the z axis, the direction of the x axis or the direction of the y axis is vertical to the direction of the z axis, and the fast axis of the quarter-wave plate forms 45 degrees with the x axis or the y axis in the step one.
3. The wave plate phase shifting method of a phase shifting interferometry system of claim 1, wherein: the phase shift amount is 4 times of the rotation angle of the second half wave plate.
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| CN109186764A (en) * | 2018-09-11 | 2019-01-11 | 天津大学 | A kind of acousto-optic modulation phase conjugation method for realizing scattering medium internal focus |
| CN109470173B (en) * | 2018-12-29 | 2021-01-26 | 华南师范大学 | Double-channel simultaneous phase shift interference microscope system |
| CN110186388B (en) * | 2019-05-13 | 2021-04-06 | 天津大学 | Synchronous phase shift measurement system and method based on white light interference spectrum |
| CN112945083A (en) * | 2021-01-29 | 2021-06-11 | 中国科学院长春光学精密机械与物理研究所 | Parallel phase shift digital holographic microscopic imaging system with optical fiber interconnection |
| CN113405489B (en) * | 2021-08-19 | 2021-11-02 | 南京施密特光学仪器有限公司 | Method for inhibiting wave plate delay error interference in dynamic interferometer |
| CN113899305B (en) * | 2021-09-30 | 2023-08-22 | 广东技术师范大学 | Improved phase shift phase measurement method and system |
| CN114200723A (en) * | 2021-10-29 | 2022-03-18 | 华南师范大学 | Liquid crystal variable phase delay device without transverse deviation of light beam |
| CN114459619B (en) * | 2022-01-27 | 2023-08-08 | 华南师范大学 | Real-time online phase shift measurement device and method |
| CN118130427A (en) * | 2024-02-29 | 2024-06-04 | 广东工业大学 | Polarization beam splitting common-path space phase shift double-channel digital holographic three-dimensional chromatography system |
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