CN110186388B - Synchronous phase shift measurement system and method based on white light interference spectrum - Google Patents
Synchronous phase shift measurement system and method based on white light interference spectrum Download PDFInfo
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- CN110186388B CN110186388B CN201910395069.1A CN201910395069A CN110186388B CN 110186388 B CN110186388 B CN 110186388B CN 201910395069 A CN201910395069 A CN 201910395069A CN 110186388 B CN110186388 B CN 110186388B
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention provides a synchronous phase shift measurement system based on white light interference spectrum, comprising: the system comprises a light source unit, a measurement interference unit, an image detection unit, a spectrum interference unit and a data processing unit; wherein the light source unit generates a polarized light source signal for the illumination light source; the measurement interference unit processes the polarized light source signal to generate a measurement polarized light source signal P and a reference polarized light source signal S; the image detection unit enables a part of the measurement polarized light source signal P and the reference polarized light source signal S to form interference through an analyzer in front of the CCD camera, the interference is detected and processed by the CCD camera, and a part of the interference is transmitted to the spectrum interference unit; the spectrum interference unit is used for splitting light of part of the vibration light source signal P and the reference polarization light source signal S again to generate interference signals with 90-degree phase difference and transmitting the interference signals to the data processing unit, and the system analyzes two frames of spectrum interference signals with 90-degree phase difference by introducing spatial phase shift to realize rapid and high-precision measurement of surface morphology.
Description
Technical Field
The invention belongs to the field of optical precision measurement, and relates to a synchronous phase shift measurement system and method based on white light interference spectrum.
Background
In the field of micro-nano processing, high-precision and rapid measurement of various parameters of a micro-nano structure is always the focus of attention of researchers. On the micro-nano scale, the main measurement parameters of the micro-nano structure are geometric parameters including the length, width, height, surface roughness and the like of the structure, material characteristics, three-dimensional morphology, surface film thickness and the like. The parameters influence and determine the use performance and the application field of the micro-nano device to a great extent, so that the method is particularly important for high-precision and rapid measurement of various characteristics of the micro-nano structure. When the surface topography is measured, the measurement speed can be improved by respectively optimizing the hardware structure and adjusting the calculation method, but the method for optimizing the hardware structure cannot obviously improve the measurement speed along with the continuous improvement of the hardware level, so that the method for reducing the data volume of solving the surface topography information to improve the measurement speed is concerned by scholars.
When the surface topography is solved, a phase shift method is generally used for extracting phases, and the phase shift interference technology can be divided into two categories, namely a time phase shift method and a space phase shift method according to different ways of introducing phase shift quantity. The time phase shift method is to continuously acquire at least three frames of phase-shifted interference signals with the same phase difference at different time points, and analyze the interference signals with the phase difference to acquire the original phase distribution. Although the time parameter is introduced into the time phase shift method, the influence of the time parameter is not generated in the resolving process, the calculated phase may have errors due to the influence of external vibration and air disturbance and the phase shift error of the phase shifter on the signals acquired at different time points, and the measurement result has larger errors. Therefore, the time phase shift method can only satisfy the measurement of static objects, and is difficult to be applied to the dynamic measurement process. Different from the time phase shift method which collects phase shift interference signals at different moments, the spatial phase shift method collects several frames of interference signals with a certain phase difference at different spatial positions at the same moment at the same time, and analyzes the interference signals with the phase difference to obtain original phase distribution. The spatial phase shift method does not introduce time variable, and collects signals at the same time point, and the influence of the interference of the external environment on each frame of phase shift interference signals is the same, thereby effectively avoiding the introduction of errors caused by time, and avoiding the generation of larger errors among the phase shift interference signals due to the influence of external vibration and air disturbance. Meanwhile, the spatial phase shift method does not need moving mechanisms such as a phase shifter and the like, and effectively avoids errors introduced by the phase shifter. The spatial phase shift method can realize real-time detection of dynamic or transient objects, can be used for dynamic measurement of samples, and therefore has great development potential.
At present, a spatial phase shift system based on a CCD camera is mostly used for surface topography measurement by using a spatial phase shift method. The spatial phase shift system using multiple CCD cameras is expensive in cost and complex in installation and adjustment, and the consistency of the multiple CCD cameras is difficult to guarantee, and the difference of image quality affects the measurement accuracy. The spatial phase shift system using a single CCD camera requires optical devices such as a phase mask and the like, which is expensive.
Disclosure of Invention
In order to overcome the defects of the prior art, the system and the method for measuring the synchronous phase shift based on the white light interference spectrum are provided, and the system analyzes two frames of spectrum interference signals with a phase difference of 90 degrees by introducing space phase shift to realize the rapid high-precision measurement of the surface morphology.
Therefore, the technical scheme adopted by the invention is as follows:
a synchronized phase shift measurement system based on white light interference spectroscopy, comprising: the system comprises a light source unit, a measurement interference unit, an image detection unit, a spectrum interference unit and a data processing unit; wherein
The light source unit generates a polarized light source signal for the illumination light source;
the measurement interference unit processes the polarized light source signal to generate a measurement polarized light source signal P and a reference polarized light source signal S;
the image detection unit enables a part of the measurement polarized light source signal P and the reference polarized light source signal S to form interference through an analyzer in front of the CCD camera, the interference is detected and processed by the CCD camera, and a part of the interference is transmitted to the spectrum interference unit;
the spectrum interference unit is used for splitting partial polarized light source signals P and reference polarized light source signals S again, and interference signals with 90-degree phase difference are generated and transmitted to the data processing unit through the analyzer in front of the spectrometer.
The light source unit consists of a collimator, a diaphragm and a polarizer, and the light source generates a polarized light source signal sequentially through the collimator, the diaphragm and the polarizer;
the measurement interference unit consists of a first non-polarization beam splitter prism, a lambda/4 wave plate, an objective lens, a reference mirror, a scanner and an objective table; the first unpolarized beam splitter prism of the measuring interference unit transmits parallel polarized light source signals to the polarized beam splitter prism, the polarized beam splitter prism divides the incident parallel polarized light source signals into measuring light P1 and reference light S1 which have vibration directions perpendicular to each other and respectively follow the y axis and the x axis, the measuring light P1 enters the first objective lens to be reflected after a sample to be measured, the reference light S1 enters the second objective lens to be reflected after the reference lens, and the two beams of light pass through a lambda/4 wave plate arranged at an angle of 45 degrees between the fast axis and the x axis and then become two beams of circularly polarized light with opposite rotation directions, namely the measuring polarized light source signals P and the reference polarized light source signals S;
the image detection unit consists of a second non-polarizing beam splitter prism, an analyzer, a tube lens and a CCD camera;
the second non-polarization beam splitting prism splits two beams of measurement polarization light source signals P and reference polarization light source signals S with opposite rotation directions, one part of the signals form interference through an analyzer in front of the CCD camera, the interference is detected and imaged by the CCD camera, and the other part of the signals are transmitted to the spectrum interference unit;
the spectral interference unit consists of a third non-polarizing beam splitter prism, a first analyzer, a second analyzer, a convergent lens, a first spectrometer and a second spectrometer; wherein an included angle between the first analyzer and the second analyzer is 45 degrees; the third non-polarization beam splitter prism divides part of the measurement polarized light source signal P and the reference polarized light source signal S into two paths to be respectively transmitted to the first analyzer and the second analyzer, and the first analyzer and the second analyzer respectively transmit interference signals with 90-degree phase difference to the first spectrometer and the second spectrometer through the convergent lens;
and the data processing unit is used for processing data of interference signals transmitted in the first spectrometer and the second spectrometer and having a phase difference of 90 degrees.
The measuring interference unit is a Linnik type microscopic interference structure.
In order to solve the problems in the prior art, the invention can also adopt the following technical scheme:
1. placing a sample on an object stage, and adjusting the height of the object stage to enable the surface of the sample to be clearly imaged in a CCD camera;
2. adjusting the optical path difference between the reference end and the measuring end to obtain interference;
3. collecting white light spectrum interference signals by using two spectrometers and uploading the white light spectrum interference signals to a computer;
4. extracting phase information by using a two-step phase shift method;
5. and solving the absolute distance according to the phase information, and restoring the surface morphology.
Compared with the prior art, the invention has the technical characteristics and effects that:
1. the test system of the invention has simple assembly, common components and low manufacturing cost.
2. And no mechanical scanning process is needed during measurement, so that the measurement time is obviously shortened.
3. The phase information in the white light spectrum interference signal is extracted by using a two-step phase shift method, and the requirement on the consistency of the signal is low.
4. The method of the invention has simple measuring process and easy realization.
Drawings
FIG. 1 is a diagram of a test system architecture.
Detailed Description
As shown in fig. 1, the present invention provides a synchronous phase shift measurement system based on white light interference spectrum, which comprises: a light source unit 101, a measurement interference unit 201, an image detection unit 301, a spectral interference unit 401, and a data processing unit 501; wherein:
the light source unit 101 generates a polarized light source signal for the illumination light source; the light source unit is composed of a collimator 102, a diaphragm 103 and a polarizer 104, and the light source sequentially passes through the collimator 102, the diaphragm 103 and the polarizer 104 to generate a polarized light source signal; during measurement, light emitted from the halogen light source forms parallel collimated light beams after passing through the collimator 102, partial stray light is effectively filtered after passing through the diaphragm 103, and the quality of interference fringes is improved.
The measurement interference unit 201 processes the polarized light source signal to generate a measurement polarized light source signal P and a reference polarized light source signal S; the photometric unit 201 is composed of a first non-polarization beam splitter prism 202, a polarization beam splitter prism 203, a lambda/4 wave plate 204, a first objective lens 205, an objective table 206, a second objective lens 207, a reference lens 208 and a scanner 209; the first unpolarized beam splitter prism 202 of the measurement interference unit 201 transmits a parallel polarized light source signal to the polarized beam splitter prism 203, the polarized beam splitter prism 203 splits the incident parallel polarized light source signal into a measurement light P1 and a reference light S1, which have vibration directions perpendicular to each other and are respectively along the y-axis and the x-axis, the measurement light P1 enters the first objective lens 205 to be reflected by a measured sample placed on the stage 206, the reference light S1 enters the second objective lens 207 to be reflected by the reference lens 208, and the two beams of light pass through a λ/4 wave plate whose fast axis forms 45 ° with the x-axis and then become two beams of circularly polarized light with opposite rotation directions, that is, the measurement polarized light source signal P and the reference polarized light source signal S; in the measurement, the parallel light is linearly polarized after passing through the polarizer 104 whose polarization direction is 45 ° to the x-axis, and then is split into P1 light (measurement light) and S1 light (reference light) which have vibration directions perpendicular to each other and are respectively along the y-axis and the x-axis when entering the polarization splitting prism 203. The P1 light is incident on the sample to be measured placed on the stage 206 and reflected, the S1 light is incident on the reference mirror 208 and reflected, and the two lights pass through the λ/4 plate 204 whose fast axis is placed at 45 ° to the x axis and then become two circularly polarized lights with opposite rotation directions, i.e. the measurement polarized light source signal P and the reference polarized light source signal S.
The image detection unit 301 makes a part of the measurement polarized light source signal P and the reference polarized light source signal S form interference through an analyzer in front of the CCD camera, and is detected and processed by the CCD camera, and a part of the signals are transmitted to the spectrum interference unit; the image detection unit consists of a second non-polarizing beam splitter prism 302, an analyzer 303, a tube lens 304 and a CCD camera 305; the second unpolarized beam splitter prism 302 splits two measurement polarized light source signals P and reference polarized light source signals S with opposite rotation directions, a part of the signals form interference through an analyzer 303 in front of the CCD camera 305, and are detected and imaged by the CCD camera 305, and a part of the signals are transmitted to the spectral interference unit 401; during measurement, the measurement polarized light source signal P and the reference polarized light source signal S are split by the second non-polarized beam splitter prism 302, and a part of the split signals are detected and imaged by the CCD camera 305, and a part of the split signals are transmitted to the spectral interference unit 401.
The spectrum interference unit 401 splits part of the measurement polarized light source signal P and the reference polarized light source signal S again, generates two paths of interference signals with a phase difference of 90 degrees after passing through the analyzer, transmits the two paths of interference signals to the two spectrometers, and then transmits the two paths of interference signals to the data processing unit; the spectral interference unit 401 is composed of a third non-polarizing beam splitter prism 402, a first analyzer 403, a first converging lens 404, a first spectrometer 405, a second analyzer 406, a second converging lens 407 and a second spectrometer 408; wherein the included angle between the first analyzer 403 and the second analyzer 406 is 45 °; the third unpolarized beam splitter prism 402 splits part of the measurement polarized light source signal P and the reference polarized light source signal S into two paths and transmits the two paths to the first analyzer 403 and the second analyzer 406, respectively, and the first analyzer 403 and the second analyzer 406 transmit interference signals with a phase difference of 90 ° to the first spectrometer 405 and the second spectrometer 408 through converging lenses (404,407), respectively; during measurement, part of the measurement polarized light source signal P and the reference polarized light source signal S are split by the third non-polarized beam splitting prism 402, pass through two analyzers (403, 406) with an included angle of 45 degrees to form interference signals with a phase difference of 90 degrees, and are collected by a spectrometer (405,408) through converging lenses (404, 407).
The invention provides a synchronous phase shift interferometry method based on a spectrum, which comprises the following specific steps:
1. the Linnik type microscopic white light interference spectrum synchronous phase shift measurement system is used for testing to obtain two frames of white light interference spectrum signals I with 90-degree phase difference1And I2，
Wherein, IrAnd ImThe light intensities of the reference light and the measurement light, respectively, δ represents the phase difference between them, i.e., the phase information to be extracted.
2. And collecting white light interference spectrum signals by using two spectrometers and uploading the white light interference spectrum signals to a computer.
3. Solving an upper envelope env _ max and a lower envelope env _ min of interference signals acquired by a spectrometer, and solving an average value env _ ave, namely
4. Subtracting the envelope average from the signal to substantially eliminate background light IrAnd ImWhen the signal becomes
5. And (4) directly calculating and extracting phase information in the signal.
6. Respectively calculating optical path differences d according to the phase information to obtain surface topography;
Claims (4)
1. a synchronized phase shift measurement system based on white light interference spectroscopy, comprising: the system comprises a light source unit, a measurement interference unit, an image detection unit, a spectrum interference unit and a data processing unit; the method is characterized in that:
the measurement interference unit consists of a first non-polarization beam splitter prism, a lambda/4 wave plate, an objective lens, a reference mirror, a scanner and an objective table; the first unpolarized beam splitter prism of the measuring interference unit transmits parallel polarized light source signals to the polarized beam splitter prism, the polarized beam splitter prism divides the incident parallel polarized light source signals into measuring light P1 and reference light S1 which have vibration directions perpendicular to each other and respectively follow the y axis and the x axis, the measuring light P1 enters the first objective lens to be reflected after a sample to be measured, the reference light S1 enters the second objective lens to be reflected after the reference lens, and the two beams of light pass through a lambda/4 wave plate arranged at an angle of 45 degrees between the fast axis and the x axis and then become two beams of circularly polarized light with opposite rotation directions, namely the measuring polarized light source signals P and the reference polarized light source signals S; the spectral interference unit consists of a third non-polarizing beam splitter prism, a first analyzer, a second analyzer, a first convergent lens, a second convergent lens, a first spectrometer and a second spectrometer; wherein an included angle between the first analyzer and the second analyzer is 45 degrees; the third non-polarization beam splitter prism divides part of the measurement polarized light source signal P and the reference polarized light source signal S into two paths and respectively transmits the two paths of the measurement polarized light source signal P and the reference polarized light source signal S to the first analyzer and the second analyzer, and the first analyzer and the second analyzer respectively transmit interference signals with 90-degree phase difference to the first spectrometer and the second spectrometer through the first converging lens and the second converging lens;
and the data processing unit is used for processing data of interference signals transmitted in the first spectrometer and the second spectrometer and having a phase difference of 90 degrees.
2. The system according to claim 1, wherein the system comprises: the measuring interference unit is a Linnik type microscopic interference structure.
3. The system according to claim 1, wherein the system comprises: the signal processed by the data processing unit is two frames of white light spectrum signals with synchronous phase shift.
4. The data processing method of the synchronous phase shift measurement system based on the white light interference spectrum as claimed in claim 1, wherein in the phase extraction process, the upper envelope env _ max and the lower envelope env _ min of the interference signal collected by the spectrometer are respectively extracted, and the average env _ ave is obtained, that is
The envelope average is subtracted from the signal to substantially eliminate background light.
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