CN110186388A - Synchronization phase shift measurement system and method based on white light interference spectrum - Google Patents
Synchronization phase shift measurement system and method based on white light interference spectrum Download PDFInfo
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- CN110186388A CN110186388A CN201910395069.1A CN201910395069A CN110186388A CN 110186388 A CN110186388 A CN 110186388A CN 201910395069 A CN201910395069 A CN 201910395069A CN 110186388 A CN110186388 A CN 110186388A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The present invention provides the synchronization phase shift measurement system based on white light interference spectrum, comprising: light source unit, measurement interference unit, image detection unit, spectral interference unit and data processing unit；Wherein the light source unit generates polarized light source signal to lighting source；The measurement interference unit generates measurement polarized light source signal P to polarized light source signal processing and refers to polarized light source signal S；Described image probe unit will measure polarized light source signal P and form interference by the analyzer before CCD camera with reference to polarized light source signal S a part, be handled by CCD camera detection, a part is transferred to the spectral interference unit；The spectral interference unit is divided to generate again to the vibration light signal P of part and with reference to polarized light source signal S, and there is the interference signal of 90 ° of phase differences to be transferred to data processing unit, the system is by introducing spatial phase shift, the two frame spectrum interference signals with 90 ° of phase differences are analyzed, realizes and the quick high accuracy of surface topography is measured.
Description
Technical field
The invention belongs to optical precision measurement fields, are related to a kind of synchronization phase-shift measurement system based on white light interference spectrum
System and method.
Background technique
In micro-nano technology field, the high-precision rapid survey to each parameter of micro nano structure is always the weight of researcher's concern
Point.In micro-nano-scale, the primary measured parameter of micro nano structure be include that length and surface roughness of structure etc. exist
Interior geometric parameter, material property, three-dimensional appearance, surface film thickness etc..These parameters are largely influenced and are determined micro-
The service performance and application field of nano-device.Therefore, in order to make micro-nano device realize its function, for wherein micro-nano knot
The high-precision rapid survey of structure various characteristics is even more important.It, can be respectively by optimizing hardware when carrying out measuring surface form
Structure and adjustment calculation method improve measuring speed, but with the continuous improvement of level of hardware, the method for structure of optimizing hardware
Measuring speed cannot be significantly improved, then, reduce side of the data volume for solving surface topography information to improve measuring speed
Method receives the concern of scholars.
When solving surface topography, phase is extracted usually using phase shift method, it, can according to the difference for the mode for introducing phase-shift phase
Phase shift interference technology is divided into two major classes, temporal phase-shifting method and spatial phase-shifting method.Temporal phase-shifting method is to connect in different time points
It is continuous to obtain the identical at least three width phase shifting interference images of phase difference, and analyzed to obtain having dephased interference signal
Original phase distribution.Temporal phase-shifting method introduces time-parameters, although there is no the influence of time-parameters in solution process,
It is the phase displacement error of the signal that acquires in different time points due to extraneous vibration, the influence of air agitation and phase-shifter, calculates
Phase causes measurement result to generate biggish error it is possible that error.Therefore, temporal phase-shifting method can only meet to static right
The measurement of elephant is difficult to apply among dynamic measurement process.Phase shift interference signal is acquired not in different moments with temporal phase-shifting method
With spatial phase-shifting method is the space different location in synchronization while acquiring several frames, there is the interference of certain phase difference to believe
Number, and analyzed to obtain original phase distribution having dephased interference signal.Spatial phase-shifting method does not introduce the time
Variable, same time point acquire signal, influence of the interference of external environment to every frame phase shift interference signal be it is identical, effectively
Ground avoids introducing because error caused by the time, avoids between phase shift interference signal due to extraneous vibration, air agitation
It influences and generates biggish error.Meanwhile spatial phase-shifting method does not need the movement mechanisms such as phase-shifter, efficiently avoids phase-shifter
The error of introducing.Spatial phase-shifting method can be realized the real-time detection to dynamic or transition object, can be used for the dynamic to sample
In measurement, therefore there is very big development potentiality.
Currently, being based on CCD camera spatial phase shift system when use space phase shift method carries out measuring surface form more.It uses
The spatial phase shift system cost of more CCD cameras is expensive, and adjustment is complicated, and the consistency of multiple CCD cameras is difficult to ensure, image matter
The difference of amount will affect measurement accuracy.The optical devices such as phase mask version, valence are needed using the spatial phase shift system of single CCD camera
Lattice are expensive.
Summary of the invention
To overcome the shortcomings of technology, synchronization phase shift measurement system and method based on white light interference spectrum, the system are provided
By introducing spatial phase shift, the two frame spectrum interference signals with 90 ° of phase differences are analyzed, are realized to the fast of surface topography
Fast high-acruracy survey.
For this reason, the technical scheme adopted by the present invention is that:
A kind of synchronization phase shift measurement system based on white light interference spectrum, comprising: light source unit, measurement interference unit, figure
As probe unit, spectral interference unit and data processing unit；Wherein
The light source unit generates polarized light source signal to lighting source；
The measurement interference unit generates measurement polarized light source signal P to polarized light source signal processing and refers to polarized light source
Signal S；
Described image probe unit will measure polarized light source signal P and pass through CCD phase with reference to polarized light source signal S a part
Analyzer before machine forms interference, is handled by CCD camera detection, a part is transferred to the spectral interference unit；
The spectral interference unit is divided again to the polarized light source signal P of part and with reference to polarized light source signal S, is passed through
Analyzer before spectrometer, generating, there is the interference signal of 90 ° of phase differences to be transferred to data processing unit.
The light source unit is made of collimator, diaphragm and the polarizer, and the light source passes sequentially through collimator, diaphragm and rises
Inclined device generates polarized light source signal；
The measurement interference unit is by the first Amici prism, polarization splitting prism, the wave plate of λ/4, object lens, reference mirror, scanning
Device and objective table are constituted；Parallel polarization light signal is transferred to polarization spectro rib by the first Amici prism of the measurement interference unit
Mirror, it is orthogonal that the polarization splitting prism is divided into direction of vibration to incident parallel polarization light signal, and respectively along y-axis and
The measurement light P1 and reference light S1 of x-axis, measurement light P1 the first object lens of incidence to sample back reflection, reference light S1 incidence second
For object lens to reference mirror back reflection, two-beam is opposite by becoming direction of rotation after fast axle and the wave plate of λ/4 of x-axis placement at 45 °
Two beam circularly polarized lights measure polarized light source signal P and refer to polarized light source signal S；
Described image probe unit is made of the second Amici prism, analyzer, Guan Jing, CCD camera；The second light splitting rib
The opposite measurement polarized light source signal P in two beam direction of rotation of mirror and reference polarized light source signal S are divided, and a part passes through
Analyzer before CCD camera forms interference, and by CCD camera detection imaging, a part is transferred to the spectral interference unit；
The spectral interference unit is by third Amici prism, the first analyzer, the second analyzer, convergent lens, the first light
Spectrometer, the second spectrometer are constituted；Wherein, the angle between first analyzer and second analyzer is at 90 °；Described
The measurement polarized light source signal P of part and reference polarized light source signal S are divided into two-way and are transferred to first respectively by three Amici prisms
Analyzer and the second analyzer, first analyzer and second analyzer pass through convergent lens respectively will have 90 ° of phases
The interference signal of potential difference is transferred to the first spectrometer and the second spectrometer；
The data processing unit to the interference signals of the 90 ° of phase differences transmitted in the first spectrometer and the second spectrometer into
Row data processing.
The measurement interference unit is Linnik type micro-interference structure.
In order to solve the problems, such as that the prior art exists, the present invention can also be adopted the following technical scheme that
1, sample is placed on objective table, adjusts objective table height, makes sample surfaces blur-free imaging in CCD camera；
2, reference end and measurement end optical path difference are adjusted, to be interfered；
3, using two spectrometer collection white-light spectrum interference signals and it is uploaded to computer；
4, phase information is extracted using two step phase shift methods；
5, according to phase information, absolute distance is solved, restores surface topography.
Compared with the prior art, the technical features and effects of the present invention are:
1, test macro of the invention assembly is simple, and component is common, low cost.
2, any mechanical scanning process is not needed when measuring, time of measuring significantly shortens.
3, extract the phase information in white-light spectrum interference signal using two step phase shift methods, to the coherence request of signal compared with
It is low.
4, method measurement procedure of the invention is simple, it is easy to accomplish.
Detailed description of the invention
Fig. 1 is test system structure figure.
Specific embodiment
As shown in Figure 1, the present invention provides a kind of synchronization phase shift measurement system based on white light interference spectrum, the system packet
It includes: light source unit 101, measurement interference unit 201, image detection unit 301, spectral interference unit 401 and data processing unit
501；Wherein:
The light source unit 101 generates polarized light source signal to lighting source；The light source unit is by collimator 102, light
Door screen 103 and the polarizer 104 are constituted, and the light source passes sequentially through collimator 102, diaphragm 103 and the polarizer 104 and generates polarized light source
Signal；When measurement, the light issued from halogen light source forms parallel collimated beam after collimator 102, by 103 rear portion of diaphragm
Stray light is divided to be effective filtered out, interference fringe quality increases.
The measurement interference unit 201 generates measurement polarized light source signal P to polarized light source signal processing and with reference to polarization
Light signal S；The survey light unit 201 is by the first Amici prism 202, polarization splitting prism 203, the wave plate 204 of λ/4, the first object
Mirror 205, objective table 206, the second object lens 207, reference mirror 208 and scanner 209 are constituted；The measurement interference unit 201 first
Parallel polarization light signal is transferred to polarization splitting prism 203,203 pairs of incidences of the polarization splitting prism by Amici prism 202
Parallel polarization light signal to be divided into direction of vibration orthogonal, and form measurement light P1 and reference light along y-axis and x-axis respectively
S1, measurement light P1 the first object lens 205 of incidence to 206 back reflection of sample, incident second object lens 207 of reference light S1 to reference mirror
208 back reflections, two-beam pass through the two beam circular polarization that become direction of rotation after fast axle and the wave plate of λ/4 of x-axis placement at 45 ° opposite
Light measures polarized light source signal P and refers to polarized light source signal S.In measurement process, directional light is by polarization direction and x
Become linearly polarized light after the polarizer 104 of axis placement at 45 °, is then incident upon polarization splitting prism 203 and is divided into direction of vibration
It is orthogonal, and respectively along the P1 light (measurement light) and S1 light (reference light) of y-axis and x-axis.P1 light is incident to after sample instead
It penetrates, S1 light is incident to reference mirror back reflection, and two-beam is by becoming direction of rotation after fast axle and the wave plate of λ/4 of x-axis placement at 45 °
Two opposite beam circularly polarized lights measure polarized light source signal P and refer to polarized light source signal S.
Described image probe unit 301 will measure polarized light source signal P and pass through with reference to polarized light source signal S a part
Analyzer before CCD camera forms interference, is handled by CCD camera detection, a part is transferred to the spectral interference unit；It is described
Image detection unit is made of the second Amici prism 302, analyzer 303, Guan Jing 304, CCD camera 305；The second light splitting rib
The measurement polarized light source signal P opposite to two beam direction of rotation of mirror 302 and reference polarized light source signal S are divided, a part
Interference is formed by the analyzer 303 before CCD camera 305, by CCD camera detection imaging, it is dry that a part is transferred to the spectrum
Relate to unit 401；The vibration light signal P and reference polarized light source signal S of 401 pairs of parts of the spectral interference unit are divided again,
Generating after analyzer, there is the two-way interference signal of 90 ° of phase differences to be transferred to two spectrometers, be then transferred at data
Manage unit；The spectral interference unit 401 is by third Amici prism 402, the first analyzer 403, the first convergent lens 404,
One spectrometer 405, the second analyzer 406, the second convergent lens 407 and the second spectrometer 408 are constituted；Wherein, first inspection
Angle between inclined device 403 and second analyzer 406 is at 90 °；The third Amici prism 402 polarizes the measurement of part
Light signal P and reference polarized light source signal S are divided into two-way and are transferred to the first analyzer 403 and the second analyzer 406, institute respectively
90 ° of phase differences will be had by convergent lens (404,407) respectively by stating the first analyzer 403 and second analyzer 406
Interference signal is transferred to the first spectrometer 405 and the second spectrometer 408；The opposite circularly polarized light in this two beams direction of rotation is by dividing
After light prism, a part forms interference by the analyzer before CCD camera, is detected by CCD camera, and a part is by the light splitting of rear end
After prism is divided again, the interference signal with 90 ° of phase differences is formed by two analyzers that polarization direction angle is 45 °.
Later, by the convergence of Fresnel Lenses, it is imported into optical fiber, by spectrometer collection.
The invention proposes a kind of the synchronization phase shift interference measurement method based on spectrum, specific steps are as follows:
1, it is tested using the synchronous phase shift measurement system of the micro- white light interference spectrum of Linnik type, obtaining has 90 ° of phases
Two frame white light interference spectral signals of potential difference,
Wherein, IrAnd ImRespectively the light intensity of reference light and measurement light, δ indicate the phase difference between them, that is, need to extract
Phase information.
2, white light interference spectral signal is acquired using two spectrometers and is uploaded to computer.
3, to spectrometer collection to interference signal seek coenvelope env_max, lower envelope env_min, and average
Env_ave, i.e.,
4, envelope average value is subtracted in the signal to substantially eliminate bias light IrAnd Im, signal becomes at this time
5, it directly calculates, extracts the phase information in signal.
6, according to phase information, optical path difference d is calculated separately out, surface topography is obtained；
Claims (4)
1. the synchronization phase shift measurement system based on white light interference spectrum, comprising: light source unit, measurement interference unit, image detection
Unit, spectral interference unit and data processing unit；It is characterized by:
The light source unit generates polarized light source signal to lighting source；
The measurement interference unit generates measurement polarized light source signal P to polarized light source signal processing and refers to polarized light source signal
S；
Described image probe unit will measure polarized light source signal P and pass through before CCD camera with reference to polarized light source signal S a part
Analyzer formed interference, handled by CCD detection, a part is transferred to the spectral interference unit；
The spectral interference unit is divided again to the polarized light source signal P of part and with reference to polarized light source signal S, by spectrum
Analyzer before instrument, generating, there is the interference spectrum signal of 90 ° of phase differences to be transferred to data processing unit.
2. the synchronization phase shift measurement system according to claim 1 based on white light interference spectrum, it is characterised in that:
The light source unit is made of collimator, diaphragm and the polarizer, and the light source passes sequentially through collimator, diaphragm and the polarizer
Generate polarized light source signal；
The measurement interference unit by the first Amici prism, polarization splitting prism, the wave plate of λ/4, object lens, reference mirror, scanner and
Objective table is constituted；Parallel polarization light signal is transferred to polarization splitting prism by the first Amici prism of the measurement interference unit,
It is orthogonal that the polarization splitting prism is divided into direction of vibration to incident parallel polarization light signal, and respectively along y-axis and x-axis
Measurement light P1 and reference light S1, incident first object lens of measurement light P1 to sample back reflection, incident second object of reference light S1
For mirror to reference mirror back reflection, two-beam passes through two that become direction of rotation after fast axle and the wave plate of λ/4 of x-axis placement at 45 ° opposite
Beam circularly polarized light measures polarized light source signal P and refers to polarized light source signal S；
Described image probe unit is made of the second Amici prism, analyzer, Guan Jing, CCD camera；Second Amici prism will
The opposite measurement polarized light source signal P in two beam direction of rotation and reference polarized light source signal S are divided, and a part passes through CCD
Analyzer before camera forms interference, and by CCD camera detection imaging, a part is transferred to the spectral interference unit；
The spectral interference unit is by third Amici prism, the first analyzer, the second analyzer, the first convergent lens, the second meeting
Poly- lens, the first spectrometer and the second spectrometer are constituted；Wherein, the folder between first analyzer and second analyzer
Angle is at 90 °；The third Amici prism is divided into two-way by the measurement polarized light source signal P of part and with reference to polarized light source signal S
It is transferred to the first analyzer and the second analyzer respectively, first analyzer and second analyzer pass through the first meeting respectively
To there is the interference signal of 90 ° of phase differences to be transferred to the first spectrometer and the second spectrometer for poly- lens and the second convergent lens；
The data processing unit counts the interference signal of the 90 ° of phase differences transmitted in the first spectrometer and the second spectrometer
According to processing.
3. the synchronization phase shift measurement system according to claim 1 based on white light interference spectrum, it is characterised in that: the survey
Amount interference unit is Linnik type micro-interference structure.
4. using a kind of synchronization phase shift measurement system operating method based on white light interference spectrum as described in claim 1,
It is characterized in that
1), sample is placed on objective table, objective table height is adjusted, makes sample surfaces blur-free imaging in CCD camera；
2) reference end and measurement end optical path difference are adjusted, to be interfered；
3), using two spectrometer collection white-light spectrum interference signals and it is uploaded to computer；
4), phase information is extracted using two step phase shift methods；
5), according to phase information, absolute distance is solved, restores surface topography.
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