CN108225182A - Reflective phase-shifted digital holographic apparatus and method based on light splitting pupil - Google Patents
Reflective phase-shifted digital holographic apparatus and method based on light splitting pupil Download PDFInfo
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- CN108225182A CN108225182A CN201810015537.3A CN201810015537A CN108225182A CN 108225182 A CN108225182 A CN 108225182A CN 201810015537 A CN201810015537 A CN 201810015537A CN 108225182 A CN108225182 A CN 108225182A
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- light
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- speculum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02047—Interferometers characterised by particular imaging or detection techniques using digital holographic imaging, e.g. lensless phase imaging without hologram in the reference path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
Abstract
The present invention relates to a kind of reflective phase-shifted digital holographic apparatus and method based on light splitting pupil.Parallel input light forms elliptically polarized light after polarizer and quarter-wave plate, is divided into two beams by polarization splitting prism；It is a branch of through the first speculum reflection after, irradiate depolarization Amici prism；For another Shu Yici after the first lens, light splitting pupil entrance pupil and object lens, parallel oblique incidence irradiates depolarization Amici prism after object lens, light splitting pupil emergent pupil, the second speculum and the second lens successively on object under test after object under test reflects；The two-beam converged through depolarization Amici prism, generation interference forms interference pattern in image sensor plane after the second polarizer；It rotates the first polarizer and forms phase shifting interference, acquired and uploaded in computer by imaging sensor；Object under test phase is calculated using computer.The configuration of the present invention is simple without 3-D scanning mechanism, is more suitable for the scatterer whole audience and quantifies three-dimensional measurement.
Description
Technical field
The invention belongs to digital hologram detection field, more particularly to a kind of reflective phase-shifted digital based on light splitting pupil is holographic
Apparatus and method.
Background technology
Digital hologram is that a kind of non-contact, high-precision whole audience quantifies method for three-dimensional measurement, is widely used in optics
Surface deformation, thickness and cell measurement.Digital hologram is based on principle of interference, frequently with off-axis method, temporal phase-shifting method and synchronization
Phase shift method etc..Off-axis interferometry by introducing inclination angle between object light and reference light, makes interference pattern generate carrier wave, thus will be extensive
Item needed for complex phase position is detached with distracter, and the phase of object under test can be recovered using a width interference pattern, is had stronger
Real-time, but the spatial bandwidth utilization rate of imaging sensor is low.Phase shift method is coaxially interfered by object light and reference light, can be fully sharp
With the spatial bandwidth of imaging sensor, wherein synchronous phase shift method acquires several phase shifting interferences by single exposure, it is real-time,
But the utilization ratio of visual field of imaging sensor is low or needs multiple cameras；Although temporal phase-shifting method need to record the more of time series
Width phase shifting interference, real-time is poor, but can make full use of the visual field of camera, so as to which large range high resolution power is suitble to measure.
In terms of structure, Digital Holography can be divided into reflective and transmission-type again.Reflective structure is mainly used to measure not
Transparent object, transmission-type structure are mainly used to measure transparent substance.With industrialized development, integrated, micromation is
As main trend, reflective digital holographic technique attracts wide attention.But light is measured when body surface reflects, by
In object surface appearance complexity, some stray lights are often introduced while measuring, drastically influence the imaging measurement of object under test
Quality.
Zhao Weiqian of Beijing Institute of Technology etc. proposes a kind of confocal microscopy device based on light splitting pupil, such as ZL
201310404307.3 " a kind of light splitting pupil confocal laser Raman spectra test method and devices ", divide object lens window using pupil is divided
Mouthful, respectively as entrance pupil and emergent pupil, light beam is made tiltedly to focus on object under test, effectively inhibit the table of sample to be tested
Face stray light.But the device uses light focus point measurement structure, not only complicated, of high cost when completing three-dimensional measurement, and
And real-time is poor.
Invention content
It is an object of the invention to be directed to the shortcoming of above-mentioned technology, provide it is a kind of can inhibit stray light based on light splitting
The reflective phase-shifted digital holographic apparatus of pupil, and also provide it is a kind of meet and applicable above device based on light splitting pupil it is reflective
Phase-shifted digital holographic method.
What the object of the invention was realized in：
A kind of reflective phase-shifted digital holographic apparatus based on light splitting pupil, including light source, collimating and beam expanding system, the first polarization
Piece, quarter-wave plate, polarization splitting prism, the first speculum, depolarization Amici prism, the second polarizer, imaging sensor
And computer, the device further include the first lens, light splitting pupil, object lens, the second speculum, the second lens；The light beam of light source transmitting
Successively after the first collimating and beam expanding system, the first polarizer and quarter-wave plate, it is divided into two by polarization splitting prism
Shu Guang；Light beam irradiates depolarization Amici prism after the reflection of the first speculum, and another light beam is successively by the first lens, light splitting
After pupil and object lens, parallel oblique incidence is on object under test, after object under test reflects, then successively by object lens, light splitting pupil, second
After speculum and the second lens, depolarization Amici prism is irradiated；The light beam that converges after depolarization Amici prism passes through second partially
It shakes and is received by the light receiving surface of imaging sensor after piece, the image letter of the image signal output end connection computer of imaging sensor
Number input terminal；The light transmission shaft of first polarizer and the placement into θ angle of y-axis direction；The fast axis direction and y of quarter-wave plate
It places at axis direction angle at 45 °；First speculum is placed with optical axis z directions overturning angle at 45 °；The back focal plane and object lens of first lens
Front focal plane it is coplanar；Pupil is divided close to the entrance port plane of object lens；Second speculum is put with optical axis z directions overturning angle at 45 °
It puts；The light transmission shaft of second polarizer is placed with y-axis direction angle at 45 °；Imaging sensor is placed in the back focal plane of the second lens.
The invention also includes：
Light splitting pupil is divided into entrance pupil A and emergent pupil B, and entrance pupil A and the first lens common optical axis, emergent pupil B
With the second lens common optical axis.
A kind of holographic method of the reflective phase-shifted digital holographic apparatus based on light splitting pupil, includes the following steps：Adjust light
Source makes the light beam that light source emits after collimating and beam expanding system collimator and extender, successively by the first polarizer and quarter-wave
Elliptically polarized light is formed after piece, is divided into the mutually orthogonal two-beam in polarization direction through polarization splitting prism；Light beam is anti-through first
After penetrating mirror reflection, reference light is formed, irradiates depolarization Amici prism, it is characterised in that：This method further includes another light beam successively
By the first lens, be divided pupil entrance pupil and object lens after, parallel oblique incidence is on object under test, after object under test reflects
Object light is formed, successively after object lens, the emergent pupil for being divided pupil, the second speculum and the second lens, irradiation depolarization light splitting
Prism；The reference light and object light of depolarization Amici prism are met at, is produced in image sensor plane after the second polarizer
Raw interference forms interference pattern；The first polarizer is rotated, light transmission shaft and the y-axis direction for adjusting the first polarizer are into θ angle, in interference pattern
It is middle to be introduced into phase shift and acquired and uploaded in computer by imaging sensor；Determinand is completed using coaxial phase shift Phase Retrieve Algorithm
Body three dimensional Phase is restored.
Reflective phase-shifted digital holographic method based on light splitting pupil has following characteristics and advantageous effect：
1. relative to Digital Holography, the present invention is transformed into using pupil is divided, by incident beam by vertical incidence oblique
It penetrates, effectively inhibits the stray light of sample surfaces, measured so as to be more suitable for scatterer, this is the innovative point for being different from the prior art
One of；
2. relative to light splitting pupil confocal technology, oblique incidence focus on light beam is replaced with oblique incidence collimated light beam by the present invention, and
Interference technique is introduced, any sweep mechanism is not required to and three-dimensional whole field quantitative measurment can be completed, not only measuring speed is fast, resolving power
Height, and it is simple in structure, at low cost, and this is the two of the innovative point for being different from the prior art.
The device of the invention has following distinguishing feature：
1. apparatus of the present invention are suitble to the scatterer whole audience to quantify three-dimensional measurement；
2. apparatus of the present invention are simple in structure, without 3-D scanning mechanism.
Description of the drawings
Fig. 1 is the reflective phase-shifted digital holographic structure schematic diagram based on light splitting pupil；
Fig. 2 is light splitting pupil structure diagram；
Specific embodiment
Piece number explanation in figure：1 light source, 2 collimating and beam expanding systems, 3 first polarizers, 4 quarter-wave plates, 5 polarization spectros
Prism, 6 first speculums, 7 first lens, 8 light splitting pupils, 9 object lens, 10 objects under test, 11 second speculums, 12 second lens,
13 depolarization Amici prisms, 14 second polarizers, 15 imaging sensors, 16 computers, A are the entrance pupil for being divided pupil, and B is divides
The emergent pupil of pupil.
Shown in Fig. 1 it is a kind of based on light splitting pupil reflective phase-shifted digital holographic apparatus, including light source, collimating and beam expanding system,
First polarizer, quarter-wave plate, polarization splitting prism, the first speculum, the first lens, light splitting pupil, object lens, the second reflection
Mirror, the second lens, depolarization Amici prism, the second polarizer, imaging sensor and computer.
According to the path description of light, the light beam of light source transmitting is successively by collimating and beam expanding system, the first polarizer and four points
One of after wave plate, be divided into two-beam through polarization splitting prism；Light beam through the first speculum reflected illumination depolarization Amici prism,
Another light beam successively after the first lens, light splitting pupil and object lens, on object under test by object under test reflect by oblique incidence
Afterwards, then successively after object lens, light splitting pupil, the second speculum and the second lens, depolarization Amici prism is irradiated；Through depolarization point
The light beam that converges after light prism is received after the second polarizer by the light receiving surface of imaging sensor, the image of imaging sensor
Signal output end connects the picture signal input terminal of computer；The light transmission shaft of first polarizer with y-axis direction is into θ angle puts
It puts；The fast axis direction of quarter-wave plate is placed with y-axis direction angle at 45 °；First speculum and optical axis z directions angle lapping at 45 °
Tiltedly place；The back focal plane of first lens and the front focal plane of object lens are coplanar；Pupil is divided close to the entrance port plane of object lens；Second is anti-
Mirror is penetrated to place with optical axis z directions overturning angle at 45 °；The light transmission shaft of second polarizer is placed with y-axis direction angle at 45 °；Image passes
Sensor is placed in the back focal plane of the second lens.
Light splitting pupil is divided into entrance pupil A and emergent pupil B, and entrance pupil A and the first lens common optical axis, emergent pupil B
With the second lens common optical axis.
A kind of reflective phase-shifted digital holographic method based on light splitting pupil, includes the following steps：Light source is adjusted, sends out light source
The light beam penetrated forms ellipse after the first polarizer and quarter-wave plate successively after collimating and beam expanding system collimator and extender
Polarised light is divided into the mutually orthogonal two-beam in polarization direction through polarization splitting prism；Light beam is after the reflection of the first speculum, shape
Into reference light, depolarization Amici prism is irradiated, it is characterised in that：This method further include another light beam successively by the first lens,
After being divided the entrance pupil and object lens of pupil, parallel oblique incidence forms object light, successively on object under test after object under test reflects
After object lens, the emergent pupil for being divided pupil, the second speculum and the second lens, depolarization Amici prism is irradiated；It meets at and disappears
The reference light and object light of polarization splitting prism generate interference and are formed and interfere after the second polarizer in image sensor plane
Figure；The first polarizer is rotated, light transmission shaft and the y-axis direction for adjusting the first polarizer are into θ angle, and phase shift is introduced in interference pattern and is schemed
As sensor acquires and uploads in computer；It is extensive that object under test three dimensional Phase is completed using coaxial phase shift Phase Retrieve Algorithm
It is multiple.
It elaborates below in conjunction with the accompanying drawings to the embodiment of the present invention.
The inventive system comprises：Light source 1, collimating and beam expanding system 2, the first polarizer 3, quarter-wave plate 4, polarization point
Light prism 5, the first speculum 6, the first lens 7, light splitting pupil 8, object lens 9, object under test 10, the second speculum 11, the second lens
12nd, depolarization Amici prism 13, the second polarizer 14, imaging sensor 15 and computer 16, wherein light source 1 are wavelength
632.8nm He-Ne laser；The light transmission shaft of first polarizer 3 is placed with y-axis direction initial position into 0 ° of angle；Quarter-wave
The fast axis direction of piece 4 is placed with y-axis direction angle at 45 °；First speculum 5 is placed with optical axis z directions overturning angle at 45 °；First
Lens 7,9 and second lens 12 of object lens focal length be f=200mm；The back focal plane of first lens 7 and the front focal plane of object lens 9 are total to
Plane；Pupil 8 is divided close to the entrance port plane of object lens 9；The front focal plane of the back focal plane of object lens 9 and the second lens 12 is coplanar；It treats
Object 10 is surveyed to be located on the back focal plane of object lens 9；Second speculum 11 is placed with optical axis direction overturning angle at 45 °；Second polarizer
14 light transmission shaft is placed with y-axis direction angle at 45 °；The light receiving surface of imaging sensor 15 is located at the rear burnt flat of the second lens 12
Face.
The operating path of the device light is：The light beam that light source 1 emits forms flat after 2 collimator and extender of collimating and beam expanding system
Row light forms elliptically polarized light after the first polarizer 3 and quarter-wave plate 4 successively, is divided into partially through polarization splitting prism 5
Shake the mutually orthogonal two-beam in direction；Light beam forms reference light irradiation depolarization Amici prism after the reflection of the first speculum 6
13, another light beam is successively after the first lens 7, the light splitting entrance pupil A of pupil 8 and object lens 9, and parallel oblique incidence is in object under test
On 10, object light is formed after the reflection of object under test 10, successively by object lens 9, emergent pupil B, the second speculum 11 of light splitting pupil 8
After the second lens 12, irradiation depolarization Amici prism 13；The reference light and object light of depolarization Amici prism 13 are met at, is passed through
Interference is generated in image sensor plane form interference pattern after second polarizer 14；Rotate the first polarizer 3 so that deflection angle
Degree θ is respectively 0, pi/2, π, 3 pi/2s, and exposes acquisition respectively with imaging sensor 15 and obtain phase shifting interference I1、I2、I3And I4On
It passes in computer 16, calculates the phase distribution of testee
Apparatus of the present invention are simple in structure, without 3-D scanning mechanism, are more suitable for the scatterer whole audience and quantify three-dimensional measurement.
Claims (3)
1. a kind of reflective phase-shifted digital holographic apparatus based on light splitting pupil, including light source (1), collimating and beam expanding system (2), first
Polarizer (3), quarter-wave plate (4), polarization splitting prism (5), the first speculum (6), depolarization Amici prism (13),
Two polarizers (14), imaging sensor (15) and computer (16), it is characterised in that：The device further includes the first lens (7), divides
Pupil (8), object lens (9), the second speculum (11), the second lens (12)；The light beam of light source (1) transmitting is successively by the first collimation
After beam-expanding system (2), the first polarizer (3) and quarter-wave plate (4), it is divided into two-beam by polarization splitting prism (5)；
Light beam irradiation depolarization Amici prism (13), another light beam after the first speculum (6) reflection pass through the first lens successively
(7), after being divided pupil (8) and object lens (9), parallel oblique incidence is on object under test (10), after object under test (10) reflection, then according to
It is secondary after object lens (9), light splitting pupil (8), the second speculum (11) and the second lens (12), irradiation depolarization Amici prism
(13)；Converge light beam after the second polarizer (14) by the light of imaging sensor (15) after depolarization Amici prism (13)
Receiving plane receives, the picture signal input terminal of the image signal output end connection computer (16) of imaging sensor (15)；It is described
The first polarizer (3) light transmission shaft and the placement into θ angle of y-axis direction；The fast axis direction of quarter-wave plate (4) and y-axis direction
It places at angle at 45 °；First speculum (5) is placed with optical axis z directions overturning angle at 45 °；The back focal plane and object lens of first lens (7)
(9) front focal plane is coplanar；Pupil (8) is divided close to the entrance port plane of object lens (9)；Second speculum (11) and optical axis z directions
Overturning angle at 45 ° is placed；The light transmission shaft of second polarizer (14) is placed with y-axis direction angle at 45 °；Imaging sensor (15) is
The back focal plane of two lens (12) is placed.
2. a kind of reflective phase-shifted digital holographic apparatus based on light splitting pupil according to claim 1, it is characterised in that：Institute
It states light splitting pupil (8) and is divided into entrance pupil A and emergent pupil B, and entrance pupil A and the first lens (7) common optical axis, emergent pupil B
With the second lens (12) common optical axis.
3. a kind of a kind of holography of reflective phase-shifted digital holographic apparatus based on light splitting pupil based on described in claims 1 or 2
Method includes the following steps：Light source is adjusted, the light beam that light source emits is made to be passed through successively after collimating and beam expanding system collimator and extender
Elliptically polarized light is formed after crossing the first polarizer and quarter-wave plate, it is mutually orthogonal to be divided into polarization direction through polarization splitting prism
Two-beam；Light beam forms reference light after the reflection of the first speculum, irradiates depolarization Amici prism, it is characterised in that：It should
Method further include another light beam successively by the first lens, be divided pupil entrance pupil and object lens after, parallel oblique incidence is to be measured
On object, object light is formed after object under test reflects, successively by object lens, be divided the emergent pupil of pupil, the second speculum and the
After two lens, depolarization Amici prism is irradiated；The reference light and object light of depolarization Amici prism are met at, by the second polarizer
Interference is generated in image sensor plane afterwards and forms interference pattern；The first polarizer is rotated, adjusts the light transmission shaft of the first polarizer
It is into θ angle with y-axis direction, phase shift is introduced into interference pattern and is acquired and uploaded in computer by imaging sensor；Utilize coaxial phase
Jayrator recovery algorithms are completed object under test three dimensional Phase and are restored.
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| CN201810015537.3A CN108225182A (en) | 2018-01-08 | 2018-01-08 | Reflective phase-shifted digital holographic apparatus and method based on light splitting pupil |
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| CN201810015537.3A CN108225182A (en) | 2018-01-08 | 2018-01-08 | Reflective phase-shifted digital holographic apparatus and method based on light splitting pupil |
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| CN113091624A (en) * | 2021-03-04 | 2021-07-09 | 上海精测半导体技术有限公司 | Device and method for detecting change of reflected light |
| CN113391506A (en) * | 2020-03-12 | 2021-09-14 | 中强光电股份有限公司 | Illumination system and projection device |
| US11333963B2 (en) | 2020-04-30 | 2022-05-17 | Coretronic Corporation | Illumination system and projection device |
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Application publication date: 20180629 |