CN106441085A - Dual carrier frequency common channel digital holographic microscope and microscopic method - Google Patents
Dual carrier frequency common channel digital holographic microscope and microscopic method Download PDFInfo
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- CN106441085A CN106441085A CN201610811018.9A CN201610811018A CN106441085A CN 106441085 A CN106441085 A CN 106441085A CN 201610811018 A CN201610811018 A CN 201610811018A CN 106441085 A CN106441085 A CN 106441085A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
- G01B9/023—Interferometers using holographic techniques for contour producing
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Abstract
The invention belongs to the digital holographic detection field, and more particularly, to a dual carrier frequency common channel digital holographic microscope and microscopic method. The dual carrier frequency common channel digital holographic microscope includes a light source, a beam expanding collimation system, an object to be measured, a microscopic objective lens, a calibration objective lens, a rectangular window, a first lens, a one-dimensional periodic grating, a second lens, an image sensor, and a computer. The invention introduces a three-hole array filter technology on the basis of a grating defocusing common circuit structure, obtains and generates by one exposure two interferograms with equal carrier frequency but opposite directions. Through the utilization of two interferograms to subtract and remove the direct current item, it is possible to not only make full use of the camera's space-bandwidth product to achieve high-resolution real-time and stable measurement, but also to achieve a high light utilization rate. Simple to operate, the method does not need any phase shift control or polarization component.
Description
Technical field
The invention belongs to digital hologram detection field is and in particular to a kind of pair of carrier frequency is total to railway digital holographic microphotography device and shows
Micro- method.
Background technology
Digital hologram detection technique is based on principle of interference, using digital camera record holography (interference) figure, and using calculating
Machine digital reproduction object surface appearance etc., due to having the particular advantages such as noncontact, whole audience quantitation, three-dimensional imaging, as pole
Its important test analysis means is widely used in the fields of measurement such as biomedicine, micro-nano device, optics micro Process.Count at present
Word holography is frequently with separation light path and common two kinds of structures of light path.With respect to separating light channel structure, light channel structure is because reference light altogether
Bundle and measuring beam, through same paths, have extraordinary antijamming capability, thus last decade is subject to Chinese scholars extensive
Concern.
G.Popescu of Massachusetts Institute Technology etc. (G.Popescu, T.Ikeda, R.R.Dasari,
M.S.Feld.Diffraction phase microscopy for quantifying cell structure and
Dynamics.Opt.Lett.2006,31,775-777) propose a kind of road altogether from axle carrier frequency digital micro-holography, its
On the basis of 4f optical system, using plane of incidence grating beam splitting technology and frequency plane pinhole filter technology, by by object under test
Diffraction of light wave is divided into the object light with certain angle and reference light interferes, and is obtained using the single width carrier frequency interference pattern being formed and treats
Survey the phase information of object, thus being suitable for moving object or the real-time measurement of dynamic process, but because using from axle construction
Separate real image and conjugate image and DC terms, the method can not make full use of the space-bandwidth product of camera, limited by resolving power；Need simultaneously
The accurately matching relationship of adjustment pinhole filter array center spacing and screen periods and the focal length of lens, so that object light and reference
Luminous energy effectively passes through pinhole filter array, thus causing device adjustment difficult.
In order to improve the simplicity of device adjustment, the present inventor applies for a kind of patent of invention " common road based on grating out of focus
Grating out of focus is divided in the spectrum space of 4f optical system by Digital holographic microscopy apparatus and method (201510756850.9) "
Light technology and hole array filtering technique combine and obtain carrier frequency interference pattern, on the basis of the real-time ensureing system, using grating
Defocusing amount finely tunes the spatial relations on matching of object light and reference light and pinhole filter array, accurate and easy, but the method is still not
The space-bandwidth product of camera can be made full use of.
In order to improve the space-bandwidth product of camera, present inventors have proposed the common road of the Dual-window based on grating out of focus for the series is light
From axle interference detection method and device, such as ZL 201210424239.2 " the interference with common path detection dress based on synchronous carrier frequency phase shift
Put and method ", the plane of incidence of 4f optical system is divided into two windows, one of them is used for placing object under test, another use
In reference windows, and introduce carrier wave in spectrum space grating out of focus light splitting technology, obtain two width carrier wave interference figures, and then utilize two
Width interference pattern subtracts each other elimination DC terms to improve the space-bandwidth product utilization rate of camera, realizes high resolution and measures in real time, but
Because the plane of incidence is divided into two windows, not only detection window utilization rate only has 1/2, and object under test is size-constrained.
Content of the invention
The purpose of the present invention be for above-mentioned the deficiencies in the prior art in place of, by grating out of focus light splitting technology and three hole arrays
Filtering technique combines, a kind of pair of carrier frequency railway digital holographic microphotography device altogether.
The present invention also aims to providing a kind of pair of carrier frequency railway digital holographic microphotography method altogether
The object of the present invention is achieved like this：
Double carrier frequency railway digital holographic microphotography device altogether, including light source, collimating and beam expanding system, object under test, microcobjective, school
Positive lens, rectangular window, the first lens, One Dimension Periodic grating, the second lens, imageing sensor and computer, this device also sets
There are three hole arrays, wherein λ is the optical wavelength of source emissioning light bundle, the light beam collimated beam-expanding system collimator and extender of light source transmitting
Afterwards, it is incident to the first lens after sequentially passing through object under test, microcobjective, correction object lens and rectangular window, converge through the first lens
Outgoing beam after poly- is divided into 0 order diffraction light and ± 1 order diffraction light after One Dimension Periodic grating, is formed through three hole array filtering
Reference light and two bundle object light directive second lens, converge the light receiving surface by imageing sensor for the light beam after the second lens transmission
Receive, the image signal output end of imageing sensor (11) connects the picture signal input of computer；The first described lens
Focal length be f1, the focal length of the second lens is all f2, the first lens and the second lens composition 4f optical system；Rectangular window is located at
On the front focal plane of the first lens；One Dimension Periodic grating is located at rear Jiao f of the first lens1At-Δ f and before the second lens
Burnt f2At+Δ f, wherein Δ f is defocusing amount, and 0<Δf<f1；The cycle of One Dimension Periodic grating is that d is all along grating with rectangular window
The width D in phase directionGBetween meet relation d=2 λ f1/DG；Three hole arrays are located at the first lens and the confocal of the second lens is put down
On face, the centre-to-centre spacing containing a two macropore A and pin hole B, two of which macropore A and pin hole B is Δ f λ/d, and pin hole B is straight
Footpath is≤1.22f2λ/D, D are the visual field width of imageing sensor, and two macropore A allow ± 1 order diffraction light all by formation two
Bundle object light, pin hole B allows 0 order diffraction light filtering diffraction to amplify by forming reference light.
Double carrier frequency railway digital holographic microphotography method altogether, comprises the steps：
1.. adjustment light source, after making the light beam collimated beam-expanding system collimator and extender that light source is launched, sequentially pass through determinand
Body, microcobjective and correction objective lens entrance are to the first lens, the outgoing beam directive One Dimension Periodic light after converging through the first lens
Grid；
2.. it is divided into 0 order diffraction light and ± 1 order diffraction light through the converging beam of One Dimension Periodic grating, filter through three hole arrays
Ripple forms a branch of reference light and two bundle object light directive second lens, and the reference light after the second lens transmission and two bundle object lights are in figure
As synchronous generation is interfered on sensor, generate two width carrier frequency interference pattern equal in magnitude, in opposite direction, gathered by imageing sensor
And be subsequently can by computer, the phase place obtaining object under test is
Wherein, HT is Hilbert transform, I+、I-For the intensity distribution of two width interference patterns, it is expressed as
I+(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)+βx]
I-(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)-βx]
Wherein, Ib(x, y) is the mean intensity of interference pattern, and γ (x, y) is the modulation degree of interference fringe, β=2 π Δ f/f1d
For carrier frequency amount.
Railway digital holographic microphotography method has following characteristics and beneficial effect to double carrier frequency altogether：
1. on the basis of grating out of focus altogether line structure, introduce three hole array filtering techniques, obtained by single exposure and generate
Two width carrier frequency interference pattern equal in magnitude, in opposite direction, and subtract each other elimination DC terms using two width interference patterns, not only can be fully sharp
With the space-bandwidth product of camera, realize the measurement of high resolution real-time stabilization, and light utilization efficiency is high, method is simple, is not required to
Any phase shift manipulation or polarizer, this is to be different from one of innovative point of prior art；
2. two width carrier frequency interference pattern contrasts are identical, are not required to carrier frequency information and realize phase place quickly reproduce, and eliminating background
While noise, the error that phase shift introduces can be avoided, to improve certainty of measurement, and then be more suitable for measurement during high-precision real, this is
Be different from prior art innovative point two；
3. system carrier frequency mapping relations are simple, can pass through grating defocusing amount Linear Control, and then the survey of linear optimization system
Amount visual field and spatial resolution, and detection window is unrestricted, this is the three of the innovative point being different from prior art.
Assembly of the invention has following distinguishing feature：
1. apparatus of the present invention structure is simple, and system positioning complexity requirement is low and easy to adjust, is also not required to any polarization unit
The special optical element such as part；
2. apparatus of the present invention adopt transmission-type point diffraction to constitute light channel structure altogether, and system rejection to disturbance ability is strong, good stability.
Brief description
Fig. 1 is double carrier frequency railway digital holographic microphotography apparatus structure schematic diagram altogether；
Fig. 2 is three hole array schematic diagrames.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described further.
Railway digital holographic microphotography apparatus and method belong to digital hologram detection field to double carrier frequency altogether, and the present invention is that solution is existing
The weak point of technology.The present invention includes light source, collimating and beam expanding system, object under test, microcobjective, correction object lens, rectangular window
Mouth, the first lens, One Dimension Periodic grating, the second lens, imageing sensor and computer, adjust light source, make the light that light source is launched
The collimated beam-expanding system of Shu Yici, object under test, microcobjective and correction objective lens entrance, to the first lens, converge through the first lens
Outgoing beam directive One Dimension Periodic grating afterwards, is divided into 0 order diffraction light through the converging beam of One Dimension Periodic grating and spreads out with ± 1 grade
Penetrate light, form a branch of reference light and two bundle object light directive second lens through three hole array filtering, through the ginseng after the second lens transmission
Examine light and two bundle object lights synchronously produce on the image sensor and interfere, generate the interference equal in magnitude, in opposite direction of two width carrier frequency
Figure, by calculating the phase place obtaining object under test.
As shown in Figure 1, 2,1 light source, 2 collimating and beam expanding systems, 3 objects under test, 4 microcobjectives, 5 correction object lens, 6
Rectangular window, 7 first lens, 8 One Dimension Periodic gratings, 9 three hole arrays, 10 second lens, 11 imageing sensors, 12 calculating
Machine.
The present invention include wavelength be λ light source, collimating and beam expanding system, object under test, microcobjective, correction object lens, rectangular window
Mouth, the first lens, One Dimension Periodic grating, the second lens, imageing sensor and computer, is characterized in that：This device is additionally provided with three
Hole array.After the light beam collimated beam-expanding system collimator and extender of light source transmitting, sequentially pass through object under test, microcobjective, correction
It is incident to the first lens, the outgoing beam after converging through the first lens is divided after One Dimension Periodic grating after object lens and rectangular window
Become 0 order diffraction light and ± 1 order diffraction light, form reference lights and two bundle object light directive second lens through three hole arrays filtering, through the
The light beam that converges after two lens transmissions is received by the light receiving surface of imageing sensor, the picture signal output of imageing sensor (11)
End connects the picture signal input of computer；The focal length of the first described lens is f1, the focal length of the second lens is all f2, the
One lens and the second lens composition 4f optical system；Rectangular window is located on the front focal plane of the first lens；One Dimension Periodic grating position
Rear Jiao f in the first lens1At-Δ f and be located at the second lens front Jiao f2At+Δ f, wherein Δ f is defocusing amount, and 0<Δf
<f1；The cycle of One Dimension Periodic grating is the d and rectangular window width D along screen periods directionGBetween meet relation d=2 λ f1/
DG；Three hole arrays are located on the conjugate focal planes of the first lens and the second lens, containing a two macropore A and pin hole B, wherein
The centre-to-centre spacing of two macropore A and pin hole B is Δ f λ/d, and pin hole B is a diameter of≤1.22f2λ/D, D are the visual field of imageing sensor
Width, two macropore A allow ± 1 order diffraction light all by forming two bundle object lights, and pin hole B allows 0 order diffraction light filtering diffraction to amplify
By forming reference light.
A kind of pair of carrier frequency railway digital holographic microphotography method altogether, comprises the steps：
1.. adjustment light source, after making the light beam collimated beam-expanding system collimator and extender that light source is launched, sequentially pass through determinand
Body, microcobjective and correction objective lens entrance are to the first lens, the outgoing beam directive One Dimension Periodic light after converging through the first lens
Grid, is characterized in that：
2.. it is divided into 0 order diffraction light and ± 1 order diffraction light through the converging beam of One Dimension Periodic grating, filter through three hole arrays
Ripple forms a branch of reference light and two bundle object light directive second lens, and the reference light after the second lens transmission and two bundle object lights are in figure
As synchronous generation is interfered on sensor, generate two width carrier frequency interference pattern equal in magnitude, in opposite direction, gathered by imageing sensor
And be subsequently can by computer, the phase place obtaining object under test is
Wherein, HT is Hilbert transform, I+、I-For the intensity distribution of two width interference patterns, it is expressed as
I+(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)+βx]
I-(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)-βx]
Wherein, Ib(x, y) is the mean intensity of interference pattern, and γ (x, y) is the modulation degree of interference fringe, β=2 π Δ f/f1d
For carrier frequency amount.
The inventive system comprises：Light source 1, collimating and beam expanding system 2, object under test 3, microcobjective 4, correction object lens 5, square
Shape window 6, the first lens 7, One Dimension Periodic grating 8, three hole arrays 9, the second lens 10, imageing sensor 11 and computer 12,
Wherein light source 1 is wavelength 632.8nm laser instrument；The focal length of the first lens 5 and the second lens 8 is 200mm；Screen periods d=
50 μm, f=150 μm of defocusing amount Δ；The center distance of hole array macropore A and pin hole B is 1.9mm, a diameter of 10 μ of pin hole B
m.
The specific embodiment of the detection method of the present invention is as follows：Shape after the collimated beam-expanding system of light beam 2 of light source 1 transmitting
Become the light beam that expands, this light beam is incident to the after sequentially passing through object under test 3, microcobjective 4, correction object lens 5 and rectangular window 6
One lens 7, the outgoing beam after converging through the first lens 7 is divided into 0 order diffraction light and spreads out with ± 1 grade after passing through One Dimension Periodic grating 8
Penetrate light, filter through three hole array 9 and form reference light and two bundle object light directive the second lens 10, through the remittance after the second lens 10 transmission
Closing light bundle synchronously produces on the image sensor 11 interferes, and generates two width carrier frequency interference pattern I equal in magnitude, in opposite direction+With
I-, gathered and processed by computer 12 by imageing sensor 11.
The two width interference pattern I that collection obtains+And I-Intensity distribution be represented by
I+(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)+βx]
I-(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)-βx]
Wherein, Ib(x, y) is the mean intensity of interference pattern, and γ (x, y) is the modulation degree of interference fringe, β=2 π Δ f/f1d
For carrier frequency amount.
Thus using the phase place that computer 12 calculates acquisition object under test being
Wherein, HT is Hilbert transform.
Claims (2)
1. a kind of pair of carrier frequency railway digital holographic microphotography device altogether, including light source (1), collimating and beam expanding system (2), object under test (3),
Microcobjective (4), correction object lens (5), rectangular window (6), the first lens (7), One Dimension Periodic grating (8), the second lens (10),
Imageing sensor (11) and computer (12) it is characterised in that：This device is additionally provided with three hole arrays (9), and wherein λ is light source (1)
The optical wavelength of transmitting light beam, after light beam collimated beam-expanding system (2) collimator and extender that light source (1) is launched, sequentially passes through determinand
It is incident to the first lens (7) after body (3), microcobjective (4), correction object lens (5) and rectangular window (6), converge through the first lens (7)
Outgoing beam after poly- is divided into 0 order diffraction light and ± 1 order diffraction light after passing through One Dimension Periodic grating (8), through three hole arrays (9) filter
Ripple forms reference light and two bundles object light directive second lens (10), and the light beam that converges after the second lens (10) transmission is passed by image
The light receiving surface of sensor (11) receives, and the image signal output end of imageing sensor (11) connects the picture signal of computer (12)
Input；The focal length of described the first lens (7) is f1, the focal length of the second lens (10) is all f2, the first lens (7) and second
Lens (10) form 4f optical system；Rectangular window (6) is located on the front focal plane of the first lens (7)；One Dimension Periodic grating (8) position
Rear Jiao f in the first lens (7)1At-Δ f and be located at the second lens (10) front Jiao f2At+Δ f, wherein Δ f is defocusing amount,
And 0<Δf<f1；The cycle of One Dimension Periodic grating (8) is d and rectangular window (6) width D along screen periods directionGBetween meet
Relation d=2 λ f1/DG；Three hole arrays (9) are located on the first lens (6) and the conjugate focal planes of the second lens (8), containing two
The centre-to-centre spacing of a macropore A and pin hole B, two of which macropore A and pin hole B is Δ f λ/d, and pin hole B is a diameter of≤1.22f2λ/
D, D are the visual field width of imageing sensor, and two macropore A allow ± 1 order diffraction light all to pass through to form two and restraint object lights, and pin hole B allows 0
Order diffraction light filtering diffraction amplifies by forming reference light.
2. a kind of pair of carrier frequency is total to railway digital holographic microphotography method it is characterised in that comprising the steps：
(1) adjust light source, after making the light beam collimated beam-expanding system collimator and extender that light source is launched, sequentially pass through object under test, show
Speck mirror and correction objective lens entrance are to the first lens, the outgoing beam directive One Dimension Periodic grating after converging through the first lens；
(2) converging beam through One Dimension Periodic grating is divided into 0 order diffraction light and ± 1 order diffraction light, filters shape through three hole arrays
A branch of reference light and two bundle object light directive second lens, the reference light after the second lens transmission and two bundle object lights are become to pass in image
On sensor, synchronous generation is interfered, and generates two width carrier frequency interference pattern equal in magnitude, in opposite direction, is gathered and quilt by imageing sensor
Computer disposal, obtain object under test phase place be
Wherein, HT is Hilbert transform, I+、I-For the intensity distribution of two width interference patterns, it is expressed as
I+(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)+βx]
I-(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)-βx]
Wherein, Ib(x, y) is the mean intensity of interference pattern, and γ (x, y) is the modulation degree of interference fringe, β=2 π Δ f/f1D is to carry
Frequency is measured.
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| CN107144954A (en) * | 2017-04-10 | 2017-09-08 | 清华大学 | Imaging system and method |
| CN107167912A (en) * | 2017-06-21 | 2017-09-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | Optical microphotograph imaging system and its imaging method |
| CN107356195A (en) * | 2017-07-19 | 2017-11-17 | 哈尔滨工程大学 | Three view field digital holographic detection devices and method based on two-dimension periodic grating and point diffraction |
| CN107356194A (en) * | 2017-07-19 | 2017-11-17 | 哈尔滨工程大学 | Four view field digital holographic detection devices and method based on two-dimension periodic grating and point diffraction |
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