CN106441085B - A kind of double carrier frequency are total to railway digital holographic microphotography device and microscopic method - Google Patents
A kind of double carrier frequency are total to railway digital holographic microphotography device and microscopic method Download PDFInfo
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- CN106441085B CN106441085B CN201610811018.9A CN201610811018A CN106441085B CN 106441085 B CN106441085 B CN 106441085B CN 201610811018 A CN201610811018 A CN 201610811018A CN 106441085 B CN106441085 B CN 106441085B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
- G01B9/023—Interferometers using holographic techniques for contour producing
Abstract
The invention belongs to digital hologram detection fields, and in particular to a kind of double carrier frequency are total to railway digital holographic microphotography device and microscopic method.Double carrier frequency are total to railway digital holographic microphotography device, including light source, collimating and beam expanding system, object under test, microcobjective, correction object lens, rectangular window, the first lens, One Dimension Periodic grating, the second lens, imaging sensor and computer.The present invention is on the basis of grating defocus is total to line structure, introduce three hole array filtering techniques, it is obtained by single exposure and generates two width carrier frequency interference pattern equal in magnitude, contrary, and subtract each other elimination DC terms using two width interference patterns, the space-bandwidth product of camera can be not only made full use of, realizes the measurement of high resolution real-time stabilization, and light utilization efficiency is high, method is simple and easy, is not required to any phase shift manipulation or polarizer.
Description
Technical field
The invention belongs to digital hologram detection fields, and in particular to a kind of double carrier frequency are total to railway digital holographic microphotography device and aobvious
Micro- method.
Background technique
Digital hologram detection technique is based on principle of interference, records holographic (interference) figure using digital camera, and utilize calculating
Machine digital reproduction object surface appearance etc., due to being used as pole with particular advantages such as non-contact, the whole audience is quantitative, three-dimensional imagings
Its important test analysis means is widely used in the fields of measurement such as biomedicine, micro-nano device, optics micro Process.Number at present
Word holography two kinds of structures of optical path frequently with separation optical path and altogether.Relative to separation light channel structure, light channel structure is because of reference light altogether
Beam and measuring beam pass through same paths, have extraordinary anti-interference ability, thus last decade is extensive by domestic and foreign scholars
Concern.
G.Popescu of Massachusetts Institute Technology etc. (G.Popescu, T.Ikeda, R.R.Dasari,
M.S.Feld.Diffraction phase microscopy for quantifying cell structure and
Dynamics.Opt.Lett.2006,31,775-777) a kind of off-axis carrier frequency digital micro-holography in road altogether is proposed,
On the basis of 4f optical system, using plane of incidence grating beam splitting technology and frequency plane pinhole filter technology, object under test will be passed through
Diffraction of light wave is divided into object light with certain angle and reference light interferes, using the single width carrier frequency interference pattern of formation obtain to
The phase information of object is surveyed, thus suitable for moving object or the real-time measurement of dynamic process, but because use off-axis structure
Real image and conjugate image and DC terms are separated, this method cannot make full use of the space-bandwidth product of camera, and resolving power is limited；It needs simultaneously
The matching relationship of accurate adjustment pinhole filter array center spacing and screen periods and the focal length of lens, so that object light and reference
Luminous energy effectively passes through pinhole filter array, to cause device adjustment difficult.
In order to improve the simplicity of device adjustment, the present inventor applies for a kind of patent of invention " total road based on grating defocus
Digital holographic microscopy apparatus and method (201510756850.9) ", by grating defocus point in the spectrum space of 4f optical system
Light technology and hole array filtering technique, which combine, obtains carrier frequency interference pattern, on the basis of guaranteeing the real-time of system, utilizes grating
Defocusing amount finely tunes the spatial relations on matching of object light and reference light and pinhole filter array, accurate and easy, but this method is still not
The space-bandwidth product of camera can be made full use of.
In order to improve the space-bandwidth product of camera, present inventors have proposed series based on the Dual-window of grating defocus, and to be total to road light
Off-axis interference detection method and device, as " interference with common path based on synchronous carrier frequency phase shift detects dress to ZL 201210424239.2
Set and method ", the plane of incidence of 4f optical system is divided into two windows, one of them is for placing object under test, another use
Carrier wave is introduced in reference windows, and in spectrum space grating defocus light splitting technology, obtains two width carrier wave interference figures, and then utilize two
Width interference pattern subtracts each other the space-bandwidth product utilization rate for eliminating DC terms to improve camera, realizes high resolution real-time measurement, still
Because the plane of incidence is divided into two windows, not only detection window utilization rate only has 1/2, but also object under test is size-constrained.
Summary of the invention
The purpose of the present invention is in view of the deficiencies of the prior art mentioned above, by grating defocus light splitting technology and three hole arrays
Filtering technique combines, and a kind of double carrier frequency are total to railway digital holographic microphotography device.
The object of the invention is also to provide a kind of double carrier frequency to be total to railway digital holographic microphotography method
The object of the present invention is achieved like this:
Double carrier frequency are total to railway digital holographic microphotography device, including light source, collimating and beam expanding system, object under test, microcobjective, school
Positive lens, rectangular window, the first lens, One Dimension Periodic grating, the second lens, imaging sensor and computer, the device are also set
There are three hole arrays, wherein λ is the optical wavelength of source emissioning light beam, the collimated beam-expanding system collimator and extender of light beam of light source transmitting
Afterwards, the first lens successively are incident to after object under test, microcobjective, correction object lens and rectangular window, are converged through the first lens
Outgoing beam after poly- filters to be formed through three hole arrays by being divided into 0 grade of diffraction light and ± 1 grade of diffraction light after One Dimension Periodic grating
Reference light and two beam object light the second lens of directive converge light beam by the light receiving surface of imaging sensor after the transmission of the second lens
It receives, the picture signal input terminal of the image signal output end connection computer of imaging sensor (11)；First lens
Focal length be f1, the focal length of the second lens is all f2, the first lens and the second lens form 4f optical system；Rectangular window is located at
On the front focal plane of first lens；One Dimension Periodic grating is located at the rear coke f of the first lens1At Δ f and before being located at the second lens
Burnt f2At+Δ f, wherein Δ f is defocusing amount, and 0 < Δ f < f1；The period of One Dimension Periodic grating is d and rectangular window along grating week
The width D in phase directionGBetween meet relationship d=2 λ f1/DG；Three hole arrays are located at the first lens and the confocal of the second lens is flat
On face, containing there are two the centers of macropore A and a pin hole B, two of them macropore A and pin hole B away from being Δ f λ/d, pin hole B is straight
Diameter is≤1.22f2λ/D, D are the visual field width of imaging sensor, and two macropore A allow ± 1 grade of diffraction light all to pass through formation two
Beam object light, pin hole B allow 0 grade of diffraction light filtering diffraction amplification by forming reference light.
Double carrier frequency are total to railway digital holographic microphotography method, include the following steps:
1. adjusts light source, after the collimated beam-expanding system collimator and extender of light beam for emitting light source, successively pass through determinand
The outgoing beam directive One Dimension Periodic light of body, microcobjective and correction objective lens entrance to the first lens, after the convergence of the first lens
Grid；
2. is divided into 0 grade of diffraction light and ± 1 grade of diffraction light by the converging beam of One Dimension Periodic grating, filtered through three hole arrays
Wave forms a branch of reference light and two beam object light the second lens of directive, and the reference light and two beam object lights after the transmission of the second lens are being schemed
Interference is generated as synchronous on sensor, two width carrier frequency interference pattern equal in magnitude, contrary is generated, is acquired by imaging sensor
And be subsequently can by computer, the phase for obtaining object under test is
Wherein, HT is Hilbert transform, I+、I-For the intensity distribution of two width interference patterns, it is expressed as
I+(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)+βx]
I-(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)-βx]
Wherein, Ib(x, y) is the mean intensity of interference pattern, and γ (x, y) is the modulation degree of interference fringe, the π Δ of β=2 f/f1d
For carrier frequency amount.
Double carrier frequency be total to railway digital holographic microphotography method have following characteristics and the utility model has the advantages that
1. introducing three hole array filtering techniques on the basis of grating defocus is total to line structure, being generated by single exposure
Two width carrier frequency interference pattern equal in magnitude, contrary, and subtract each other elimination DC terms using two width interference patterns, it not only can be sufficiently sharp
With the space-bandwidth product of camera, the measurement of high resolution real-time stabilization is realized, and light utilization efficiency is high, method is simple and easy, is not required to
Any phase shift manipulation or polarizer, this is one of the innovative point being different from the prior art；
2. two width carrier frequency interference pattern contrasts are identical, it is not required to carrier frequency information and realizes that phase quickly reproduces, and eliminating background
While noise, it can avoid the error that phase shift introduces, to improve measurement accuracy, and then be more suitable for high-precision real-time measurement, this is
The two of the innovative point being different from the prior art；
, can be by grating defocusing amount Linear Control 3. system carrier frequency mapping relations are simple, and then the survey of linear optimization system
Visual field and spatial resolution are measured, and detection window is unrestricted, this is the three of the innovative point being different from the prior art.
The device of the invention has following distinguishing feature:
1. apparatus of the present invention structure is simple, system positioning complexity requirement is low and easy to adjust, is also not required to any polarization member
The special opticals element such as part；
2. apparatus of the present invention constitute light channel structure altogether using transmission-type point diffraction, system rejection to disturbance ability is strong, and stability is good.
Detailed description of the invention
Fig. 1 is that double carrier frequency are total to railway digital holographic microphotography apparatus structure schematic diagram；
Fig. 2 is three hole array schematic diagrames.
Specific embodiment
The present invention is described further with reference to the accompanying drawing.
Double carrier frequency are total to railway digital holographic microphotography apparatus and method and belong to digital hologram detection field, and the present invention is that solution is existing
The shortcoming of technology.The present invention includes light source, collimating and beam expanding system, object under test, microcobjective, correction object lens, rectangular window
Mouth, the first lens, One Dimension Periodic grating, the second lens, imaging sensor and computer adjust light source, the light for emitting light source
The collimated beam-expanding system of Shu Yici, object under test, microcobjective and correction objective lens entrance are converged to the first lens through the first lens
Outgoing beam directive One Dimension Periodic grating afterwards is divided into 0 grade of diffraction light by the converging beam of One Dimension Periodic grating and ± 1 grade is spread out
Light is penetrated, filters to form a branch of reference light and two beam object light the second lens of directive through three hole arrays, the ginseng after the transmission of the second lens
Examining light and two beam object lights, synchronous generate is interfered on the image sensor, generates the interference equal in magnitude, contrary of two width carrier frequency
Figure obtains the phase of object under test by calculating.
As shown in Figure 1, 2,1 light source, 2 collimating and beam expanding systems, 3 objects under test, 4 microcobjectives, 5 correction object lens, 6 rectangular windows
Mouthful, 7 first lens, 8 One Dimension Periodic gratings, 9 three hole arrays, 10 second lens, 11 imaging sensors, 12 computers.
The present invention includes that wavelength is λ light source, collimating and beam expanding system, object under test, microcobjective, correction object lens, rectangular window
Mouth, the first lens, One Dimension Periodic grating, the second lens, imaging sensor and computer, it is characterized in that: the device is additionally provided with three
Hole array.After the collimated beam-expanding system collimator and extender of light beam of light source transmitting, successively pass through object under test, microcobjective, correction
The first lens are incident to after object lens and rectangular window, the outgoing beam after the convergence of the first lens passes through after One Dimension Periodic grating points
It at 0 grade of diffraction light and ± 1 grade of diffraction light, filters to form reference light and two beam object light the second lens of directive through three hole arrays, through
The light beam that converges after the transmission of two lens is received by the light receiving surface of imaging sensor, the image signal output end of imaging sensor 11
Connect the picture signal input terminal of computer；The focal length of first lens is f1, the focal length of the second lens is all f2, first
Lens and the second lens form 4f optical system；Rectangular window is located on the front focal plane of the first lens；One Dimension Periodic grating is located at
The rear coke f of first lens1Preceding coke f at Δ f and positioned at the second lens2At+Δ f, wherein Δ f is defocusing amount, and 0 < Δ f <
f1；The period of One Dimension Periodic grating is the width D of d and rectangular window along screen periods directionGBetween meet relationship d=2 λ f1/
DG；Three hole arrays are located on the conjugate focal planes of the first lens and the second lens, a macropore A and pin hole B containing there are two, wherein
Away from being Δ f λ/d, pin hole B diameter is≤1.22f at the center of two macropore A and pin hole B2λ/D, D are the view of imaging sensor
Field width degree, two macropore A allow ± 1 grade of diffraction light all to pass through to form two beam object lights, and pin hole B allows 0 grade of diffraction light filtering diffraction to put
Greatly by forming reference light.
A kind of double carrier frequency are total to railway digital holographic microphotography method, include the following steps:
1. adjusts light source, after the collimated beam-expanding system collimator and extender of light beam for emitting light source, successively pass through determinand
The outgoing beam directive One Dimension Periodic light of body, microcobjective and correction objective lens entrance to the first lens, after the convergence of the first lens
Grid, it is characterized in that:
2. is divided into 0 grade of diffraction light and ± 1 grade of diffraction light by the converging beam of One Dimension Periodic grating, filtered through three hole arrays
Wave forms a branch of reference light and two beam object light the second lens of directive, and the reference light and two beam object lights after the transmission of the second lens are being schemed
Interference is generated as synchronous on sensor, two width carrier frequency interference pattern equal in magnitude, contrary is generated, is acquired by imaging sensor
And be subsequently can by computer, the phase for obtaining object under test is
Wherein, HT is Hilbert transform, I+、I-For the intensity distribution of two width interference patterns, it is expressed as
I+(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)+βx]
I-(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)-βx]
Wherein, Ib(x, y) is the mean intensity of interference pattern, and γ (x, y) is the modulation degree of interference fringe, the π Δ of β=2 f/f1d
For carrier frequency amount.
The inventive system comprises: light source 1, collimating and beam expanding system 2, object under test 3, microcobjective 4, correction object lens 5, square
Shape window 6, the first lens 7, One Dimension Periodic grating 8, three hole arrays 9, the second lens 10, imaging sensor 11 and computer 12,
Wherein light source 1 is wavelength 632.8nm laser；The focal length of first lens 5 and the second lens 8 is 200mm；Screen periods d=
50 μm, f=150 μm of defocusing amount Δ；The center spacing of hole array macropore A and pin hole B is 1.9mm, and the diameter of pin hole B is 10 μ
m。
The specific embodiment of detection method of the invention is as follows: shape after the collimated beam-expanding system 2 of light beam that light source 1 emits
At the light beam expanded, which is successively incident to the after object under test 3, microcobjective 4, correction object lens 5 and rectangular window 6
One lens 7, the outgoing beam after the convergence of the first lens 7 are spread out by being divided into 0 grade of diffraction light and ± 1 grade after One Dimension Periodic grating 8
Light is penetrated, forms reference light and two the second lens of beam object light directive 10 through the filtering of three hole arrays 9, the remittance after the transmission of the second lens 10
Light combination beam is synchronous on the image sensor 11 to generate interference, generates two width carrier frequency interference pattern I equal in magnitude, contrary+With
I-, acquired and handled by computer 12 by imaging sensor 11.
Acquire the two width interference pattern I obtained+And I-Intensity distribution be represented by
I+(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)+βx]
I-(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)-βx]
Wherein, Ib(x, y) is the mean intensity of interference pattern, and γ (x, y) is the modulation degree of interference fringe, the π Δ of β=2 f/f1d
For carrier frequency amount.
To which the phase for calculating acquisition object under test using computer 12 is
Wherein, HT is Hilbert transform.
Claims (1)
1. a kind of double carrier frequency are total to railway digital holographic microphotography device, including light source (1), collimating and beam expanding system (2), object under test (3),
Microcobjective (4), correction object lens (5), rectangular window (6), the first lens (7), One Dimension Periodic grating (8), the second lens (10),
Imaging sensor (11) and computer (12), it is characterised in that: the device is additionally provided with three hole arrays (9), and wherein λ is light source (1)
Emit light beam optical wavelength, light source (1) transmitting the collimated beam-expanding system of light beam (2) collimator and extender after, successively pass through determinand
The first lens (7) are incident to after body (3), microcobjective (4), correction object lens (5) and rectangular window (6), are converged through the first lens (7)
Outgoing beam after poly- is filtered by being divided into 0 grade of diffraction light and ± 1 grade of diffraction light after One Dimension Periodic grating (8) through three hole arrays (9)
Wave forms reference light and two beam object light the second lens of directive (10), and the light beam that converges after the second lens (10) transmission is passed by image
The light receiving surface of sensor (11) receives, the picture signal of image signal output end connection computer (12) of imaging sensor (11)
Input terminal；The focal length of first lens (7) is f1, the focal length of the second lens (10) is all f2, the first lens (7) and second
Lens (10) form 4f optical system；Rectangular window (6) is located on the front focal plane of the first lens (7)；One Dimension Periodic grating (8) position
In the rear coke f of the first lens (7)1Preceding coke f at Δ f and positioned at the second lens (10)2At+Δ f, wherein Δ f is defocusing amount,
And 0 < Δ f < f1；The period of One Dimension Periodic grating (8) is the width D of d and rectangular window (6) along screen periods directionGBetween meet
Relationship d=2 λ f1/DG；Three hole arrays (9) are located on the conjugate focal planes of the first lens (7) and the second lens (10), contain there are two
Away from being Δ f λ/d, pin hole B diameter is≤1.22f at the center of macropore A and a pin hole B, two of them macropore A and pin hole B2λ/
D, D are the visual field width of imaging sensor, and two macropore A allow ± 1 grade of diffraction light all to pass through to form two beam object lights, and pin hole B allows 0
Grade diffraction light filtering diffraction amplification is by forming reference light；Double carrier frequency are total to railway digital holographic microphotography method, include the following steps:
(1) light source is adjusted, after the collimated beam-expanding system collimator and extender of light beam for emitting light source, successively passes through object under test, show
Speck mirror and correction objective lens entrance to the first lens, the outgoing beam directive One Dimension Periodic grating after the convergence of the first lens；
(2) it is divided into 0 grade of diffraction light and ± 1 grade of diffraction light by the converging beam of One Dimension Periodic grating, filters shape through three hole arrays
At a branch of reference light and two beam object light the second lens of directive, reference light and two beam object lights after the transmission of the second lens are passed in image
It is synchronous on sensor to generate interference, two width carrier frequency interference pattern equal in magnitude, contrary is generated, by imaging sensor acquisition and quilt
Computer disposal, the phase for obtaining object under test are
Wherein, HT is Hilbert transform, I+、I-For the intensity distribution of two width interference patterns, it is expressed as
I+(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)+βx]
I-(x, y)=Ib(x,y)+γ(x,y)cos[φ(x,y)-βx]
Wherein, Ib(x, y) is the mean intensity of interference pattern, and γ (x, y) is the modulation degree of interference fringe, the π Δ of β=2 f/f1D is to carry
Frequency is measured.
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| 基于双窗口载波干涉的动态相位测量研究;刁鸣等;《光电子.激光》;20141130;第25卷(第11期);第2141-2145页 * |
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