CN105423911B - A kind of common railway digital holographic microphotography apparatus and method based on grating defocus - Google Patents

A kind of common railway digital holographic microphotography apparatus and method based on grating defocus Download PDF

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CN105423911B
CN105423911B CN201510756850.9A CN201510756850A CN105423911B CN 105423911 B CN105423911 B CN 105423911B CN 201510756850 A CN201510756850 A CN 201510756850A CN 105423911 B CN105423911 B CN 105423911B
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单明广
邓平科
钟志
张雅彬
刁鸣
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Harbin Engineering University
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    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
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Abstract

本发明公开了一种基于光栅离焦的共路数字全息显微装置与方法。包括光源、待测物体、显微物镜、校正物镜、第一透镜、第二透镜、图像传感器和计算机,还包括一维周期光栅和孔阵列;光源发射的光束经待测物体、显微物镜和校正物镜后入射至第一透镜,经第一透镜汇聚后的出射光束通过一维周期光栅后分成0级衍射光和+1级衍射光,经孔阵列滤波形成参考光和物光射向第二透镜,经第二透镜透射后的汇合光束由图像传感器的光接收面接收,图像传感器的图像信号输出端连接计算机的图像信号输入端;本发明简单易行,调整方便,且待测物体尺寸不受限,充分利用检测窗口视场;可极大降低确定系统载波频率的复杂度并提高相位恢复算法效率。

The invention discloses a co-channel digital holographic microscopic device and method based on grating defocus. It includes a light source, an object to be measured, a microscopic objective lens, a correction objective lens, a first lens, a second lens, an image sensor and a computer, and also includes a one-dimensional periodic grating and an array of holes; the light beam emitted by the light source passes through the object to be measured, the microscopic objective lens and After correcting the objective lens, it enters the first lens, and the outgoing beam converged by the first lens is divided into 0-order diffracted light and +1-order diffracted light after passing through the one-dimensional periodic grating, and is filtered by the hole array to form reference light and object light, which are directed to the second The converging light beam transmitted by the second lens is received by the light receiving surface of the image sensor, and the image signal output end of the image sensor is connected to the image signal input end of the computer; the invention is simple and easy to adjust, and the size of the object to be measured is not large. Limited, make full use of the field of view of the detection window; it can greatly reduce the complexity of determining the system carrier frequency and improve the efficiency of the phase recovery algorithm.

Description

一种基于光栅离焦的共路数字全息显微装置与方法A co-channel digital holographic microscope device and method based on grating defocus

技术领域technical field

本发明属于数字全息检测领域,尤其涉及一种基于光栅离焦的共路数字全息显微装置与方法。The invention belongs to the field of digital holographic detection, in particular to a co-channel digital holographic microscopic device and method based on grating defocus.

背景技术Background technique

数字全息检测技术基于干涉原理,利用CCD或CMOS等图像传感器记录全息(干涉)图,并利用计算机数字再现物体表面形貌等,由于具有非接触、全场定量、三维成像等独特优点,已作为极其重要的测试分析手段被广泛应用于生物医学、微纳器件、光学微加工等测量领域。传统的数字全息系统采用迈克逊、马赫-曾德尔等分离光路干涉,其参考光束和测量光束经过不同路径,易受外界振动、温度起伏等影响,抗干扰能力差。相对于分离光路结构,共光路结构因为参考光束和测量光束经过相同路径,具有非常好的抗干扰能力,因而近十年受到国内外学者广泛关注。Based on the principle of interference, digital holographic detection technology uses image sensors such as CCD or CMOS to record holographic (interferometric) images, and uses computers to digitally reproduce the surface topography of objects. The extremely important test and analysis methods are widely used in measurement fields such as biomedicine, micro-nano devices, and optical micro-processing. The traditional digital holography system uses Michelson, Mach-Zehnder and other separate optical path interference. The reference beam and measurement beam pass through different paths, which are easily affected by external vibrations and temperature fluctuations, and have poor anti-interference ability. Compared with the separate optical path structure, the common optical path structure has very good anti-interference ability because the reference beam and the measurement beam pass through the same path, so it has attracted extensive attention from domestic and foreign scholars in the past ten years.

美国麻省理工学院的G.Popescu等(G.Popescu,T.Ikeda,R.R.Dasari,M.S.Feld.Diffraction phase microscopy for quantifying cell structure anddynamics.Opt.Lett.2006,31,775-777)提出了一种共路点衍射载波全息技术,在4f光学系统的入射面放置光栅,将通过待测物体的光波衍射分成多个衍射级次,并在频谱面放置空间孔阵列,选取零级光作为参考光并选取+1级光作为物光,进而通过曝光采集获得载波全息图,该技术因为采用共路结构抗干扰能力强,但对空间针孔滤波器阵列中心间距、光栅周期以及透镜焦距相互之间匹配要求较高,且需精确调整,才能保证获得理想全息图。G. Popescu et al. (G. Popescu, T. Ikeda, R. R. Dasari, M. S. Feld. Diffraction phase microscopy for quantifying cell structure and dynamics. Opt. Lett. 2006, 31, 775-777) of the Massachusetts Institute of Technology proposed a common path Point diffraction carrier holography technology, place a grating on the incident surface of the 4f optical system, divide the light wave diffraction through the object to be measured into multiple diffraction orders, and place a spatial hole array on the spectrum plane, select the zero-order light as the reference light and select + The first-order light is used as the object light, and then the carrier hologram is obtained through exposure acquisition. This technology has strong anti-interference ability due to the common path structure, but it has relatively high requirements for the matching between the center distance of the spatial pinhole filter array, the grating period, and the focal length of the lens. High, and precise adjustment is required to ensure an ideal hologram.

为提高系统抗干扰能力,简化系统结构,本发明人提出系列基于光栅离焦的双窗口共路干涉检测方法与装置,如ZL 201210424239.2“基于同步载频移相的共光路干涉检测装置与方法”,将4f光学系统的入射面分成两个窗口,其中一个用于放置待测物体,另一个用于参考窗口,并在4f光学系统的频域离焦处放置光栅引入载波,进而获得载波全息图,但是因为入射面分成两个窗口,不仅检测窗口利用率只有1/2,而且待测物体尺寸受限。In order to improve the anti-interference ability of the system and simplify the system structure, the inventor proposed a series of dual-window common-path interference detection methods and devices based on grating defocus, such as ZL 201210424239.2 "Common-optical-path interference detection device and method based on synchronous carrier frequency phase shifting" , the incident surface of the 4f optical system is divided into two windows, one of which is used to place the object to be measured, and the other is used as a reference window, and a grating is placed at the frequency domain defocus of the 4f optical system to introduce the carrier, and then the carrier hologram is obtained , but because the incident surface is divided into two windows, not only the utilization rate of the detection window is only 1/2, but also the size of the object to be measured is limited.

发明内容Contents of the invention

本发明的目的是提供一种简单易行,调整方便的,基于光栅离焦的共路数字全息显微装置。本发明的目的还包括提供一种能够降低确定系统载波频率的复杂度并提高相位恢复算法效率的,一种基于光栅离焦的共路数字全息显微方法。The purpose of the present invention is to provide a simple, easy to adjust, common-path digital holographic microscopic device based on grating defocus. The object of the present invention also includes providing a co-channel digital holographic microscopy method based on grating defocus, which can reduce the complexity of determining the system carrier frequency and improve the efficiency of the phase recovery algorithm.

一种基于光栅离焦的共路数字全息显微装置,包括光源1、待测物体2、显微物镜3、校正物镜4、第一透镜5、第二透镜8、图像传感器9和计算机10,还包括一维周期光栅6和孔阵列7,其中λ为光源1发射光束的光波长;A co-channel digital holographic microscope device based on grating defocus, comprising a light source 1, an object to be measured 2, a microscope objective lens 3, a correction objective lens 4, a first lens 5, a second lens 8, an image sensor 9 and a computer 10, It also includes a one-dimensional periodic grating 6 and a hole array 7, where λ is the light wavelength of the light beam emitted by the light source 1;

光源1发射的光束经待测物体2、显微物镜3和校正物镜4后入射至第一透镜5,经第一透镜5汇聚后的出射光束通过一维周期光栅6后分成0级衍射光和+1级衍射光,经孔阵列7滤波形成参考光和物光射向第二透镜8,经第二透镜8透射后的汇合光束由图像传感器9的光接收面接收,图像传感器9的图像信号输出端连接计算机10的图像信号输入端;The light beam emitted by the light source 1 enters the first lens 5 after passing through the object to be measured 2, the microscopic objective lens 3 and the correction objective lens 4, and the outgoing light beam converged by the first lens 5 passes through the one-dimensional periodic grating 6 and is divided into 0-order diffracted light and The +1st-order diffracted light is filtered by the hole array 7 to form reference light and object light, which are sent to the second lens 8, and the converging light beam transmitted by the second lens 8 is received by the light receiving surface of the image sensor 9, and the image signal of the image sensor 9 The output end is connected to the image signal input end of the computer 10;

第一透镜5的焦距为f1,第二透镜9的焦距都为f2The focal length of the first lens 5 is f 1 , and the focal length of the second lens 9 is both f 2 ;

一维周期光栅6的周期为d,位于第一透镜5的后焦f1-Δf处并且位于第二透镜8的前焦f2+Δf处,其中Δf为离焦量;The period of the one-dimensional periodic grating 6 is d, located at the back focus f 1 -Δf of the first lens 5 and located at the front focus f 2 +Δf of the second lens 8, where Δf is the defocus amount;

孔阵列7上含有中心间距为Δfλd的大孔A和针孔B,孔阵列7位于第一透镜6和第二透镜8的共轭焦平面上,其中针孔B的直径为≤1.22f2λD,D为图像传感器的视场宽度。The hole array 7 contains large holes A and pinholes B with a center distance of Δfλd, the hole array 7 is located on the conjugate focal plane of the first lens 6 and the second lens 8, and the diameter of the pinhole B is ≤1.22f 2 λD , D is the field of view width of the image sensor.

本发明一种基于光栅离焦的共路数字全息显微装置,还包括:A co-channel digital holographic microscopic device based on grating defocus of the present invention also includes:

1、一维周期光栅(6)为二值一维周期光栅、正弦一维周期光栅或余弦一维周期光栅。1. The one-dimensional periodic grating (6) is a binary one-dimensional periodic grating, a sine one-dimensional periodic grating or a cosine one-dimensional periodic grating.

2、孔阵列(7)的大孔A让0级衍射光全部通过形成物光,针孔B让+1级衍射光滤波通过形成参考光,2. The large hole A of the hole array (7) allows all the 0th-order diffracted light to pass through to form the object light, and the pinhole B allows the +1-order diffracted light to pass through to form the reference light.

或者:大孔A让+1级衍射光全部通过形成物光,针孔B让0级衍射光滤波通过形成参考光。Or: the large hole A allows all the +1 order diffracted light to pass through to form the object light, and the pinhole B allows the 0th order diffracted light to pass through to form the reference light.

一种基于光栅离焦的共路数字全息显微方法,包括以下步骤,A co-channel digital holographic microscopy method based on grating defocus, comprising the following steps,

步骤一:调整光源,使光源发射的光束经过待测物体、显微物镜和校正物镜入射至第一透镜,经第一透镜汇聚后的出射光束射向一维周期光栅;Step 1: Adjust the light source so that the light beam emitted by the light source enters the first lens through the object to be measured, the microscopic objective lens and the correction objective lens, and the outgoing light beam converged by the first lens is directed to the one-dimensional periodic grating;

步骤二:经过一维周期光栅的汇聚光束分成0级衍射光和+1级衍射光,经孔阵列滤波形成参考光和物光射向第二透镜,经第二透镜透射后的汇合光束成一幅干涉图I,被图像传感器采集到计算机并被计算机处理;Step 2: The converging light beam passing through the one-dimensional periodic grating is divided into 0-order diffracted light and +1-order diffracted light, which are filtered by the hole array to form reference light and object light, which are sent to the second lens, and the converging beam transmitted by the second lens forms a picture The interferogram I is collected by the image sensor and processed by the computer;

步骤三:计算待测物体的复振幅c(x,y):Step 3: Calculate the complex amplitude c(x,y) of the object to be measured:

c(x,y)=IFT{FT{I(x,y)Rr(x,y)}·LF}c(x,y)=IFT{FT{I(x,y)Rr(x,y)}·LF}

其中,LF表示低通滤波,FT表示傅里叶变换,IFT表示逆傅里叶变换,Rr(x,y)为数字参考波,Among them, LF means low-pass filtering, FT means Fourier transform, IFT means inverse Fourier transform, Rr(x, y) is a digital reference wave,

步骤四:得到待测物体的复振幅 Step 4: Obtain the complex amplitude of the object to be measured

有益效果:Beneficial effect:

本发明的装置有如下显著特点:Device of the present invention has following salient features:

1.本发明装置结构简单,系统定位复杂度要求低,且调整方便,也不需任何偏振元件等特殊光学元件;1. The device of the present invention has a simple structure, low system positioning complexity requirements, and convenient adjustment, and does not require any special optical elements such as polarization elements;

2.本发明装置采用反射式点衍射构成共光路结构,系统抗干扰能力强,稳定性好。2. The device of the present invention adopts reflective point diffraction to form a common optical path structure, and the system has strong anti-interference ability and good stability.

基于光栅离焦的共路数字全息显微方法有以下特点:The co-channel digital holographic microscopy method based on grating defocus has the following characteristics:

1.在共路结构基础上,将光栅离焦分光技术和孔阵列滤波技术相结合,通过一次曝光获得载波全息图,不仅保证系统干扰能力和检测的实时性,而且方法简单易行,调整方便,且待测物体尺寸不受限,可充分利用检测窗口视场,这是区别于现有技术的创新点之一;1. On the basis of the common channel structure, the grating defocusing spectroscopic technology and the hole array filtering technology are combined to obtain a carrier hologram through one exposure, which not only ensures the system interference capability and real-time detection, but also the method is simple and easy to adjust , and the size of the object to be measured is not limited, and the field of view of the detection window can be fully utilized, which is one of the innovations different from the existing technology;

2.全息图载波频率映射关系简单,确定容易,可通过光栅离焦精确控制,从而极大降低确定系统载波频率的复杂度并提高相位恢复算法效率,这是区别于现有技术的创新点之二。2. The hologram carrier frequency mapping relationship is simple and easy to determine. It can be precisely controlled through the grating defocus, thereby greatly reducing the complexity of determining the system carrier frequency and improving the efficiency of the phase recovery algorithm. This is one of the innovations different from the existing technology two.

附图说明Description of drawings

图1为基于光栅离焦的共路数字全息显微装置结构示意图;Figure 1 is a schematic structural diagram of a co-channel digital holographic microscope device based on grating defocus;

图2为孔阵列示意图。Figure 2 is a schematic diagram of the hole array.

具体实施方式detailed description

下面将结合附图对本发明做进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings.

本发明的目的是针对现有技术的不足之处,将光栅离焦分光技术和孔阵列滤波技术相结合,提出一种基于光栅离焦的共路数字全息显微装置与方法。The purpose of the present invention is to address the deficiencies of the prior art, combining grating defocus spectroscopic technology and hole array filtering technology, and propose a co-channel digital holographic microscopic device and method based on grating defocus.

本发明属于数字全息检测领域,特别涉及一种基于光栅离焦的共路数字全息显微装置与方法。基于光栅离焦的共路数字全息显微装置光源、显微物镜校正物镜、第一透镜、一维周期光栅、孔阵列、第二透镜、图像传感器和计算机。本发明简单易行,调整方便,且待测物体尺寸不受限,充分利用检测窗口视场;全息图载波频率映射关系简单,确定容易,可通过光栅离焦精确控制,可极大降低确定系统载波频率的复杂度并提高相位恢复算法效率。The invention belongs to the field of digital holographic detection, in particular to a co-channel digital holographic microscopic device and method based on grating defocus. A co-channel digital holographic microscope device light source based on grating defocus, a microscope objective lens correction objective lens, a first lens, a one-dimensional periodic grating, an aperture array, a second lens, an image sensor and a computer. The invention is simple and easy to operate, easy to adjust, and the size of the object to be measured is not limited, and the field of view of the detection window is fully utilized; the carrier frequency mapping relationship of the hologram is simple, easy to determine, and can be precisely controlled by the defocus of the grating, which can greatly reduce the determination system. The complexity of the carrier frequency and improve the efficiency of the phase recovery algorithm.

图1中标号说明:光源1,待测物体2,显微物镜3,校正物镜4,第一透镜5,一维周期光栅6,孔阵列7,第二透镜8,图像传感器9,计算机10。Explanation of symbols in Fig. 1: light source 1, object to be measured 2, microscope objective lens 3, correction objective lens 4, first lens 5, one-dimensional periodic grating 6, hole array 7, second lens 8, image sensor 9, computer 10.

本发明包括波长为λ光源、准直扩束系统、待测物体、显微物镜、校正物镜、第一透镜、第二透镜、图像传感器和计算机,该装置还设有一维周期光栅和孔阵列。光源发射的光束经待测物体、显微物镜和校正物镜入射至第一透镜,经第一透镜汇聚后的出射光束通过一维周期光栅后分成0级衍射光和+1级衍射光,经孔阵列滤波形成参考光和物光射向第二透镜,经第二透镜透射后的汇合光束由图像传感器的光接收面接收,图像传感器的图像信号输出端连接计算机的图像信号输入端;所述的第一透镜的焦距为f1,第二透镜的焦距都为f2;一维周期光栅的周期为d,位于第一透镜的后焦f1-Δf处并且位于第二透镜的前焦f2+Δf处,其中Δf为离焦量;孔阵列上含有中心间距为Δfλ/d的大孔A和针孔B,位于第一透镜和第二透镜的共轭焦平面上,其中针孔B的直径为为≤1.22f2λ/D,D为图像传感器的视场宽度。The invention includes a light source with a wavelength of λ, a collimated beam expander system, an object to be measured, a microscope objective lens, a correction objective lens, a first lens, a second lens, an image sensor and a computer. The device is also provided with a one-dimensional periodic grating and a hole array. The light beam emitted by the light source enters the first lens through the object to be measured, the microscopic objective lens and the correction objective lens. Array filtering forms reference light and object light to the second lens, and the converging light beam transmitted by the second lens is received by the light receiving surface of the image sensor, and the image signal output end of the image sensor is connected to the image signal input end of the computer; The focal length of the first lens is f 1 , and the focal length of the second lens is f 2 ; the period of the one-dimensional periodic grating is d, which is located at the back focus f 1 -Δf of the first lens and at the front focus f 2 of the second lens At +Δf, where Δf is the amount of defocus; the hole array contains a large hole A and a pinhole B with a center distance of Δfλ/d, which are located on the conjugate focal plane of the first lens and the second lens, where the pinhole B The diameter is ≤1.22f 2 λ/D, where D is the field of view width of the image sensor.

一维周期光栅为二值一维周期光栅、正弦一维周期光栅或余弦一维周期光栅。The one-dimensional periodic grating is a binary one-dimensional periodic grating, a sine one-dimensional periodic grating or a cosine one-dimensional periodic grating.

孔阵列的大孔A让0级衍射光全部通过形成物光,针孔B让+1级衍射光滤波通过形成参考光,或者大孔A让+1级衍射光全部通过形成物光,针孔B让0级衍射光滤波通过形成参考光。The large hole A of the hole array allows all the 0th order diffracted light to pass through to form the object light, the pinhole B allows the +1st order diffracted light to pass through to form the reference light, or the large hole A allows all the +1st order diffracted light to pass through to form the object light, the pinhole B B Let the 0th-order diffracted light filter through to form the reference light.

一种基于光栅离焦的共路数字全息显微方法,包括如下步骤:A co-channel digital holographic microscopy method based on grating defocusing, comprising the steps of:

①.调整光源,使光源发射的光束经待测物体、显微物镜和校正物镜入射至第一透镜,经第一透镜汇聚后的出射光束射向一维周期光栅,其特征是:①. Adjust the light source so that the light beam emitted by the light source enters the first lens through the object to be measured, the microscopic objective lens and the correction objective lens, and the outgoing light beam converged by the first lens is directed to the one-dimensional periodic grating. Its characteristics are:

②.经过一维周期光栅的汇聚光束分成0级衍射光和+1级衍射光,经孔阵列滤波形成参考光和物光射向第二透镜,经第二透镜透射后的汇合光束成一幅干涉图I,被图像传感器采集到计算机并被计算机处理;②. The converging light beam passing through the one-dimensional periodic grating is divided into 0-order diffracted light and +1-order diffracted light, which is filtered by the hole array to form reference light and object light, which are sent to the second lens, and the converging beam transmitted by the second lens forms an interference Fig. 1, is gathered into computer by image sensor and processed by computer;

③.计算被测物体的复振幅c(x,y):③. Calculate the complex amplitude c(x,y) of the measured object:

c(x,y)=IFT{FT{I(x,y)Rr(x,y)}·LF}c(x,y)=IFT{FT{I(x,y)Rr(x,y)}·LF}

其中,LF表示低通滤波,FT表示傅里叶变换,IFT表示逆傅里叶变换,Rr(x,y)为数字参考波,可表示为Among them, LF means low-pass filtering, FT means Fourier transform, IFT means inverse Fourier transform, Rr(x, y) is a digital reference wave, which can be expressed as

④.计算被测物体的复振幅 ④. Calculate the complex amplitude of the measured object

下面结合图1和图2对本发明的实施实例作详细说明。The implementation examples of the present invention will be described in detail below with reference to FIG. 1 and FIG. 2 .

本发明的装置包括:光源1,待测物体2,显微物镜3,校正物镜4,第一透镜5,一维周期光栅6,孔阵列7,第二透镜8,图像传感器9,计算机10,其中光源1为波长632.8nm激光器;第一透镜5和第二透镜8的焦距均为200mm;光栅周期d=50μm,离焦量Δf=150μm;孔阵列大孔A和针孔B的中心间距为1.9mm,针孔B的直径为≤1.22f2λ/D。The device of the present invention includes: a light source 1, an object to be measured 2, a microscope objective lens 3, a correction objective lens 4, a first lens 5, a one-dimensional periodic grating 6, an array of holes 7, a second lens 8, an image sensor 9, a computer 10, Wherein the light source 1 is a laser with a wavelength of 632.8nm; the focal lengths of the first lens 5 and the second lens 8 are 200mm; the grating period d=50 μm, the defocus amount Δf=150 μm; the center distance between the hole array large hole A and the pinhole B is 1.9mm, and the diameter of the pinhole B is ≤1.22f 2 λ/D.

本发明的检测方法的具体实施方式如下:光源发射的光束经准直扩束系统后形成扩束的光束,该光束经过待测物体、显微物镜和校正物镜入射至第一透镜,经第一透镜汇聚后的出射光束射向一维周期光栅;经过一维周期光栅的汇聚光束分成级衍射光和+1级衍射光,经孔阵列滤波形成参考光和物光射向第二透镜,经第二透镜透射后的汇合光束成一幅干涉图I,被图像传感器采集到计算机并被计算机处理。The specific implementation of the detection method of the present invention is as follows: the light beam emitted by the light source forms an expanded beam after passing through the collimated beam expander system, and the beam enters the first lens through the object to be measured, the microscopic objective lens and the correction objective lens, and passes through the first The outgoing light beam converged by the lens is directed to the one-dimensional periodic grating; the converged light beam passing through the one-dimensional periodic grating is divided into first-order diffracted light and +1-order diffracted light, which are filtered by the hole array to form reference light and object light, which are directed to the second lens, and passed through the first The combined light beams transmitted by the two lenses form an interferogram I, which is collected by the image sensor and processed by the computer.

利用计算机计算被测物体的复振幅c(x,y)可得Using a computer to calculate the complex amplitude c(x,y) of the measured object can be obtained

c(x,y)=IFT{FT{I(x,y)Rr(x,y)}·LF}c(x,y)=IFT{FT{I(x,y)Rr(x,y)}·LF}

其中,LF表示低通滤波,FT表示傅里叶变换,IFT表示逆傅里叶变换,Rr(x,y)为数字参考波,可表示为Among them, LF means low-pass filtering, FT means Fourier transform, IFT means inverse Fourier transform, Rr(x, y) is a digital reference wave, which can be expressed as

从而获得待测物体的复振幅 In order to obtain the complex amplitude of the object to be measured

Claims (4)

1.一种基于光栅离焦的共路数字全息显微装置,包括光源(1)、待测物体(2)、显微物镜(3)、校正物镜(4)、第一透镜(5)、第二透镜(8)、图像传感器(9)和计算机(10),其特征是:还包括一维周期光栅(6)和孔阵列(7),其中λ为光源(1)发射光束的光波长;1. A co-channel digital holographic microscope device based on grating defocus, comprising a light source (1), an object to be measured (2), a microscopic objective lens (3), a correction objective lens (4), a first lens (5), Second lens (8), image sensor (9) and computer (10), are characterized in that: also comprise one-dimensional periodic grating (6) and hole array (7), wherein λ is the light wavelength of light source (1) emitting light beam ; 光源(1)发射的光束经待测物体(2)、显微物镜(3)和校正物镜(4)后入射至第一透镜(5),经第一透镜(5)汇聚后的出射光束通过一维周期光栅(6)后分成0级衍射光和+1级衍射光,经孔阵列(7)滤波形成参考光和物光射向第二透镜(8),经第二透镜(8)透射后的汇合光束由图像传感器(9)的光接收面接收,图像传感器(9)的图像信号输出端连接计算机(10)的图像信号输入端;The light beam emitted by the light source (1) enters the first lens (5) after passing through the object to be measured (2), the microscopic objective lens (3) and the correction objective lens (4), and the outgoing light beam converged by the first lens (5) passes through the The one-dimensional periodic grating (6) is divided into 0-order diffracted light and +1-order diffracted light, which is filtered by the hole array (7) to form reference light and object light, which are sent to the second lens (8) and transmitted through the second lens (8) After the converging beam is received by the light-receiving surface of the image sensor (9), the image signal output end of the image sensor (9) is connected to the image signal input end of the computer (10); 第一透镜(5)的焦距为f1,第二透镜(8)的焦距都为f2The focal length of the first lens (5) is f1, and the focal length of the second lens (8) is both f2; 一维周期光栅(6)的周期为d,位于第一透镜(5)的后焦f1-Δf处并且位于第二透镜(8)的前焦f2+Δf处,其中Δf为离焦量;The period of the one-dimensional periodic grating (6) is d, located at the back focus f 1 -Δf of the first lens (5) and located at the front focus f 2 +Δf of the second lens (8), where Δf is the amount of defocus ; 孔阵列(7)上含有中心间距为Δfλ/d的大孔A和针孔B,孔阵列(7)位于第一透镜(6)和第二透镜(8)的共轭焦平面上,其中针孔B的直径为≤1.22f2λ/D,D为图像传感器的视场宽度。The hole array (7) contains large holes A and pinholes B with a center distance of Δfλ/d, and the hole array (7) is located on the conjugate focal plane of the first lens (6) and the second lens (8), where the pinholes The diameter of the hole B is ≤1.22f 2 λ/D, where D is the field width of the image sensor. 2.根据权利要求1所述的一种基于光栅离焦的共路数字全息显微装置,其特征在于:所述的一维周期光栅(6)为二值一维周期光栅、正弦一维周期光栅或余弦一维周期光栅。2. A co-channel digital holographic microscope device based on grating defocus according to claim 1, characterized in that: the one-dimensional periodic grating (6) is a binary one-dimensional periodic grating, a sinusoidal one-dimensional period grating or cosine 1D periodic grating. 3.根据权利要求1所述的一种基于光栅离焦的共路数字全息显微装置,其特征在于:所述的孔阵列(7)的大孔A让0级衍射光全部通过形成物光,针孔B让+1级衍射光滤波通过形成参考光,3. A co-channel digital holographic microscope device based on grating defocus according to claim 1, characterized in that: the large hole A of the hole array (7) allows all the 0th-order diffracted light to pass through to form the object light , the pinhole B lets the +1 order diffracted light filter through to form the reference light, 或者:大孔A让+1级衍射光全部通过形成物光,针孔B让0级衍射光滤波通过形成参考光。Or: the large hole A allows all the +1 order diffracted light to pass through to form the object light, and the pinhole B allows the 0th order diffracted light to pass through to form the reference light. 4.一种基于权利要求1所述的基于光栅离焦的共路数字全息显微装置的显微方法,其特征在于:包括以下步骤,4. A microscopic method based on the co-channel digital holographic microscopic device based on grating defocus according to claim 1, characterized in that: comprising the following steps, 步骤一:调整光源,使光源发射的光束经过待测物体、显微物镜和校正物镜入射至第一透镜,经第一透镜汇聚后的出射光束射向一维周期光栅;Step 1: Adjust the light source so that the light beam emitted by the light source enters the first lens through the object to be measured, the microscopic objective lens and the correction objective lens, and the outgoing light beam converged by the first lens is directed to the one-dimensional periodic grating; 步骤二:经过一维周期光栅的汇聚光束分成0级衍射光和+1级衍射光,经孔阵列滤波形成参考光和物光射向第二透镜,经第二透镜透射后的汇合光束成一幅干涉图I(x,y),被图像传感器采集到计算机并被计算机处理;Step 2: The converging light beam passing through the one-dimensional periodic grating is divided into 0-order diffracted light and +1-order diffracted light, which are filtered by the hole array to form reference light and object light, which are sent to the second lens, and the converging beam transmitted by the second lens forms a picture The interferogram I(x,y) is collected by the image sensor and processed by the computer; 步骤三:计算待测物体的复振幅c(x,y):Step 3: Calculate the complex amplitude c(x,y) of the object to be measured: c(x,y)=IFT{FT{I(x,y)Rr(x,y)}·LF}c(x,y)=IFT{FT{I(x,y)Rr(x,y)}·LF} 其中,LF表示低通滤波,FT表示傅里叶变换,IFT表示逆傅里叶变换,Rr(x,y)为数字参考波,Among them, LF means low-pass filtering, FT means Fourier transform, IFT means inverse Fourier transform, Rr(x, y) is a digital reference wave, <mrow> <mi>R</mi> <mi>r</mi> <mrow> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> </mrow> <mo>=</mo> <mi>exp</mi> <mrow> <mo>(</mo> <mo>-</mo> <mi>i</mi> <mn>2</mn> <mi>&amp;pi;</mi> <mfrac> <mrow> <mi>&amp;Delta;</mi> <mi>f</mi> </mrow> <mrow> <msub> <mi>df</mi> <mn>1</mn> </msub> </mrow> </mfrac> <mi>x</mi> <mo>)</mo> </mrow> <mo>;</mo> </mrow> <mrow><mi>R</mi><mi>r</mi><mrow><mo>(</mo><mi>x</mi><mo>,</mo><mi>y</mi><mo>)</mo></mrow><mo>=</mo><mi>exp</mi><mrow><mo>(</mo><mo>-</mo><mi>i</mi><mn>2</mn><mi>&amp;pi;</mi><mfrac><mrow><mi>&amp;Delta;</mi><mi>f</mi></mrow><mrow><msub><mi>df</mi><mn>1</mn></msub></mrow></mfrac><mi>x</mi><mo>)</mo></mrow><mo>;</mo></mrow> 步骤四:得到待测物体的复振幅c(x,y):Step 4: Obtain the complex amplitude c(x,y) of the object to be measured: <mrow> <mi>c</mi> <mrow> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> </mrow> <mo>=</mo> <mi>a</mi> <mi>r</mi> <mi>c</mi> <mi>t</mi> <mi>a</mi> <mi>n</mi> <mo>{</mo> <mfrac> <mrow> <mi>Im</mi> <mo>&amp;lsqb;</mo> <mi>c</mi> <mrow> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> </mrow> <mo>&amp;rsqb;</mo> </mrow> <mrow> <mi>Re</mi> <mo>&amp;lsqb;</mo> <mi>c</mi> <mrow> <mo>(</mo> <mi>x</mi> <mo>,</mo> <mi>y</mi> <mo>)</mo> </mrow> <mo>&amp;rsqb;</mo> </mrow> </mfrac> <mo>}</mo> <mo>.</mo> </mrow> <mrow><mi>c</mi><mrow><mo>(</mo><mi>x</mi><mo>,</mo><mi>y</mi><mo>)</mo></mrow><mo>=</mo><mi>a</mi><mi>r</mi><mi>c</mi><mi>t</mi><mi>a</mi><mi>n</mi><mo>{</mo><mfrac><mrow><mi>Im</mi><mo>&amp;lsqb;</mo><mi>c</mi><mrow><mo>(</mo><mi>x</mi><mo>,</mo><mi>y</mi><mo>)</mo></mrow><mo>&amp;rsqb;</mo></mrow><mrow><mi>Re</mi><mo>&amp;lsqb;</mo><mi>c</mi><mrow><mo>(</mo><mi>x</mi><mo>,</mo><mi>y</mi><mo>)</mo></mrow><mo>&amp;rsqb;</mo></mrow></mfrac><mo>}</mo><mo>.</mo></mrow>
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