CN105423911B - A kind of common railway digital holographic microphotography apparatus and method based on grating defocus - Google Patents
A kind of common railway digital holographic microphotography apparatus and method based on grating defocus Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
- G01B9/027—Interferometers using holographic techniques in real time
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Abstract
The invention discloses a kind of common railway digital holographic microphotography apparatus and method based on grating defocus.Including light source, object under test, microcobjective, correction object lens, the first lens, the second lens, imaging sensor and computer, in addition to One Dimension Periodic grating and hole array；The light beam of light source transmitting is incident to the first lens after object under test, microcobjective and correction object lens, through the first lens convergence after outgoing beam by One Dimension Periodic grating after be divided into 0 order diffraction light and+1 order diffraction light, filter to form reference light and the lens of object light directive second through hole array, the light beam that converges after the transmission of the second lens is received by the light receiving surface of imaging sensor, the picture signal input of the image signal output end connection computer of imaging sensor；The present invention is simple and easy, easy to adjust, and object under test size is unrestricted, makes full use of detection window visual field；The complexity for determining system carrier frequency can greatly be reduced and improve Phase Retrieve Algorithm efficiency.
Description
Technical field
The invention belongs to digital hologram detection field, more particularly to a kind of common railway digital holographic microphotography based on grating defocus
Apparatus and method.
Background technology
Digital hologram detection technique is based on principle of interference, holographic (interference) using image recording sensors such as CCD or CMOS
Figure, and using computer digit reconstructed object surface topography etc., due to uniquenesses such as non-contact, the whole audience is quantitative, three-dimensional imagings
Advantage, it is widely used in the survey such as biomedicine, micro-nano device, optics micro Process as extremely important test analysis means
Amount field.Traditional digital hologram system separates light path interference, its reference beam and survey using Michelson, Mach-Zehnder etc.
Amount light beam passes through different paths, is easily influenceed by extraneous vibration, temperature fluctuation etc., poor anti jamming capability.Relative to separation light path knot
Structure, common light channel structure have extraordinary antijamming capability because reference beam and measuring beam pass through same paths, thus closely
10 years by domestic and foreign scholars extensive concern.
G.Popescu of Massachusetts Institute Technology etc. (G.Popescu, T.Ikeda, R.R.Dasari,
M.S.Feld.Diffraction phase microscopy for quantifying cell structure and
Dynamics.Opt.Lett.2006,31,775-777) a kind of waypoint diffraction carrier-wave holograph technology altogether is proposed, in 4f optical systems
The plane of incidence of system places grating, the Diffraction of light wave by object under test is divided into multiple diffraction times, and place sky in frequency plane
Between hole array, choose zero order light as reference light and choose+1 grade of light as object light, and then by exposure collection acquisition carrier wave it is complete
Breath figure, the technology is because using line structure strong antijamming capability altogether, but to spatial pinhole filter array center spacing, grating week
Phase and the focal length of lens match between each other requires higher, and need to accurately adjust, and just can guarantee that and obtains preferable hologram.
To improve system rejection to disturbance ability, simplied system structure, the present inventor proposes the serial double window based on grating defocus
Mouth common path interference detection method and device, such as " the interference with common path detections based on synchronous carrier frequency phase shift of ZL 201210424239.2
Apparatus and method ", the plane of incidence of 4f optical systems being divided into two windows, one of them is used to place object under test, another
For reference windows, and place grating at the frequency domain defocus of 4f optical systems and introduce carrier wave, and then obtain carrier-wave holograph figure, but
It is that not only detection window utilization rate only has 1/2, and object under test is size-constrained because the plane of incidence is divided into two windows.
The content of the invention
It is an object of the invention to provide a kind of simple and easy, easy to adjust, the common railway digital holography based on grating defocus
Microscope equipment.The purpose of the present invention also includes providing a kind of complexity that can reduce determination system carrier frequency and improves phase
Recovery algorithms efficiency, a kind of common railway digital holographic microphotography method based on grating defocus.
A kind of common railway digital holographic microphotography device based on grating defocus, including light source 1, object under test 2, microcobjective 3,
Correct object lens 4, the first lens 5, the second lens 8, imaging sensor 9 and computer 10, in addition to One Dimension Periodic grating 6 and Kong Zhen
Row 7, wherein λ are the optical wavelength that light source 1 launches light beam；
The light beam that light source 1 is launched is incident to the first lens 5 after object under test 2, microcobjective 3 and correction object lens 4, through the
Outgoing beam after the convergence of one lens 5 is by being divided into 0 order diffraction light and+1 order diffraction light after One Dimension Periodic grating 6, through hole array 7
Filtering forms reference light and the second lens of object light directive 8, converges light beam by imaging sensor 9 after the transmission of the second lens 8
Light receiving surface receives, the picture signal input of the image signal output end connection computer 10 of imaging sensor 9；
The focal length of first lens 5 is f1, the focal length of the second lens 9 is all f2；
The cycle of One Dimension Periodic grating 6 is d, positioned at the rear burnt f of the first lens 51At-Δ f and positioned at the second lens 8
Preceding burnt f2At+Δ f, wherein Δ f is defocusing amount；
It is located at the first lens 6 and second containing the macropore A and pin hole B that center spacing is Δ f λ d, hole array 7 in hole array 7
On the conjugate focal planes of lens 8, wherein pin hole B a diameter of≤1.22f2λ D, D are the visual field width of imaging sensor.
A kind of common railway digital holographic microphotography device based on grating defocus of the present invention, in addition to：
1st, One Dimension Periodic grating (6) is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic light
Grid.
2nd, the macropore A of hole array (7) allows 0 order diffraction light all by forming object light, and pin hole B makes the filtering of+1 order diffraction light logical
Cross to form reference light,
Or：Macropore A allows+1 order diffraction light all by forming object light, and pin hole B allows the filtering of 0 order diffraction light by forming ginseng
Examine light.
A kind of common railway digital holographic microphotography method based on grating defocus, comprises the following steps,
Step 1：Light source is adjusted, makes the light beam that light source is launched by object under test, microcobjective and corrects objective lens entrance extremely
First lens, the outgoing beam directive One Dimension Periodic grating after the convergence of the first lens；
Step 2：It is divided into 0 order diffraction light and+1 order diffraction light by the converging beam of One Dimension Periodic grating, is filtered through hole array
Ripple forms reference light and the lens of object light directive second, converges light beam into a width interference pattern I after the transmission of the second lens, by image
Sensor collects computer and is subsequently can by computer；
Step 3：Calculate the complex amplitude c (x, y) of object under test：
C (x, y)=IFT { FT { I (x, y) Rr (x, y) } LF }
Wherein, LF represents LPF, and FT represents Fourier transformation, and IFT represents inverse Fourier transform, and Rr (x, y) is number
Word reference wave,
Step 4：Obtain the complex amplitude of object under test
Beneficial effect：
The device of the present invention has following distinguishing feature：
1. apparatus of the present invention are simple in construction, system positioning complexity requires low and easy to adjust, is also not required to any polarization member
The special optical element such as part；
2. apparatus of the present invention form light channel structure altogether using reflection type point diffraction, system rejection to disturbance ability is strong, and stability is good.
Common railway digital holographic microphotography method based on grating defocus has following characteristics：
1. on the basis of common line structure, grating defocus light splitting technology and hole array filtering technique are combined, by once
Exposure obtains carrier-wave holograph figure, not only ensures the real-time of system interference ability and detection, and method is simple and easy, adjustment side
Just, and object under test size is unrestricted, can make full use of detection window visual field, this be different from prior art innovative point it
One；
2. hologram carrier frequency mapping relations are simple, it is determined that easily, can accurately be controlled by grating defocus, so as to greatly
Reduce the complexity for determining system carrier frequency and improve Phase Retrieve Algorithm efficiency, this is the innovative point for being different from prior art
Two.
Brief description of the drawings
Fig. 1 is the common railway digital holographic microphotography apparatus structure schematic diagram based on grating defocus；
Fig. 2 is hole array schematic diagram.
Embodiment
The present invention is described in further details below in conjunction with accompanying drawing.
The purpose of the present invention is in view of the deficiencies of the prior art, grating defocus light splitting technology and hole array to be filtered into skill
Art is combined, and proposes a kind of common railway digital holographic microphotography apparatus and method based on grating defocus.
The invention belongs to digital hologram detection field, more particularly to a kind of common railway digital holographic microphotography based on grating defocus
Apparatus and method.Common railway digital holographic microphotography device light source based on grating defocus, microcobjective correction object lens, the first lens,
One Dimension Periodic grating, hole array, the second lens, imaging sensor and computer.The present invention is simple and easy, easy to adjust, and treats
It is unrestricted to survey dimension of object, makes full use of detection window visual field；Hologram carrier frequency mapping relations are simple, it is determined that easily, can
Accurately controlled by grating defocus, can greatly reduce the complexity for determining system carrier frequency and improve Phase Retrieve Algorithm effect
Rate.
Label declaration in Fig. 1：Light source 1, object under test 2, microcobjective 3, correct object lens 4, the first lens 5, One Dimension Periodic
Grating 6, hole array 7, the second lens 8, imaging sensor 9, computer 10.
The present invention include wavelength be λ light sources, it is collimating and beam expanding system, object under test, microcobjective, correction object lens, first saturating
Mirror, the second lens, imaging sensor and computer, the device are additionally provided with One Dimension Periodic grating and hole array.The light of light source transmitting
Through object under test, microcobjective and correction objective lens entrance to the first lens, the outgoing beam after the convergence of the first lens passes through beam
It is divided into 0 order diffraction light and+1 order diffraction light after One Dimension Periodic grating, filters to form reference light and object light directive second through hole array
Lens, the light beam that converges after the transmission of the second lens are received by the light receiving surface of imaging sensor, the image letter of imaging sensor
The picture signal input of number output end connection computer；The focal length of the first described lens is f1, the focal length of the second lens is all
For f2；The cycle of One Dimension Periodic grating is d, positioned at the rear burnt f of the first lens1At-Δ f and positioned at the preceding burnt f of the second lens2+
At Δ f, wherein Δ f is defocusing amount；Containing the macropore A and pin hole B that center spacing is Δ f λ/d in hole array, positioned at the first lens
On the conjugate focal planes of the second lens, wherein pin hole B's is a diameter of for≤1.22f2λ/D, D are that the visual field of imaging sensor is wide
Degree.
One Dimension Periodic grating is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
The macropore A of hole array allows 0 order diffraction light all by forming object light, and pin hole B allows the filtering of+1 order diffraction light to pass through shape
Allow+1 order diffraction light all by forming object light into reference light, or macropore A, pin hole B allows the filtering of 0 order diffraction light by forming ginseng
Examine light.
A kind of common railway digital holographic microphotography method based on grating defocus, comprises the following steps：
1. adjusts light source, make the light beam that light source is launched through object under test, microcobjective and correction objective lens entrance to first saturating
Mirror, the outgoing beam directive One Dimension Periodic grating after the convergence of the first lens, it is characterized in that：
2. is divided into 0 order diffraction light and+1 order diffraction light by the converging beam of One Dimension Periodic grating, shape is filtered through hole array
Into reference light and the lens of object light directive second, converge light beam into a width interference pattern I after the transmission of the second lens, by image sensing
Device collects computer and is subsequently can by computer；
3. calculates the complex amplitude c (x, y) of testee：
C (x, y)=IFT { FT { I (x, y) Rr (x, y) } LF }
Wherein, LF represents LPF, and FT represents Fourier transformation, and IFT represents inverse Fourier transform, and Rr (x, y) is number
Word reference wave, is represented by
4. calculates the complex amplitude of testee
The embodiment of the present invention is elaborated with reference to Fig. 1 and Fig. 2.
The inventive system comprises：Light source 1, object under test 2, microcobjective 3, correct object lens 4, the first lens 5, one-dimensional week
Phase grating 6, hole array 7, the second lens 8, imaging sensor 9, wherein computer 10, light source 1 are wavelength 632.8nm lasers；
The focal length of first lens 5 and the second lens 8 is 200mm；D=50 μm of screen periods, f=150 μm of defocusing amount Δ；Hole array is big
Hole A and pin hole B center spacing is 1.9mm, pin hole B a diameter of≤1.22f2λ/D。
The embodiment of the detection method of the present invention is as follows：Formed after the collimated beam-expanding system of light beam of light source transmitting
The light beam expanded, the light beam converge by object under test, microcobjective and correction objective lens entrance to the first lens through the first lens
Outgoing beam directive One Dimension Periodic grating afterwards；It is divided into order diffraction light and+1 order diffraction by the converging beam of One Dimension Periodic grating
Light, filter to form reference light and the lens of object light directive second through hole array, converge light beam into a width after the transmission of the second lens
Interference pattern I, collected computer and be subsequently can by computer by imaging sensor.
The complex amplitude c (x, y) of testee is calculated using computer to be obtained
C (x, y)=IFT { FT { I (x, y) Rr (x, y) } LF }
Wherein, LF represents LPF, and FT represents Fourier transformation, and IFT represents inverse Fourier transform, and Rr (x, y) is number
Word reference wave, is represented by
So as to obtain the complex amplitude of object under test
Claims (4)
1. a kind of common railway digital holographic microphotography device based on grating defocus, including light source (1), object under test (2), microcobjective
(3) object lens (4), the first lens (5), the second lens (8), imaging sensor (9) and computer (10), are corrected, it is characterized in that：Also
Including One Dimension Periodic grating (6) and hole array (7), wherein λ is the optical wavelength that light source (1) launches light beam；
The light beam of light source (1) transmitting is incident to the first lens after object under test (2), microcobjective (3) and correction object lens (4)
(5) it is divided into 0 order diffraction light and+1 order diffraction after, the outgoing beam after the first lens (5) convergence is by One Dimension Periodic grating (6)
Light, reference light and the lens of object light directive second (8) are formed through hole array (7) filtering, converges light after the second lens (8) transmission
Beam is received by the light receiving surface of imaging sensor (9), the image signal output end connection computer (10) of imaging sensor (9)
Picture signal input；
The focal length of first lens (5) is f1, the focal length of the second lens (8) is all f2；
The cycle of One Dimension Periodic grating (6) is d, positioned at the rear burnt f of the first lens (5)1At-Δ f and it is located at the second lens (8)
Preceding burnt f2At+Δ f, wherein Δ f is defocusing amount；
In hole array (7) containing center spacing be Δ f λ/d macropore A and pin hole B, hole array (7) be located at the first lens (6) and
On the conjugate focal planes of second lens (8), wherein pin hole B a diameter of≤1.22f2λ/D, D are that the visual field of imaging sensor is wide
Degree.
A kind of 2. common railway digital holographic microphotography device based on grating defocus according to claim 1, it is characterised in that：Institute
The One Dimension Periodic grating (6) stated is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
A kind of 3. common railway digital holographic microphotography device based on grating defocus according to claim 1, it is characterised in that：Institute
The macropore A for the hole array (7) stated allows 0 order diffraction light all by forming object light, and pin hole B allows the filtering of+1 order diffraction light to pass through to be formed
Reference light,
Or：Macropore A allows+1 order diffraction light all by forming object light, and pin hole B allows the filtering of 0 order diffraction light by forming reference
Light.
4. a kind of microscopic method of the common railway digital holographic microphotography device based on grating defocus based on described in claim 1, its
It is characterised by：Comprise the following steps,
Step 1：Light source is adjusted, makes the light beam that light source is launched by object under test, microcobjective and correction objective lens entrance to first
Lens, the outgoing beam directive One Dimension Periodic grating after the convergence of the first lens；
Step 2：It is divided into 0 order diffraction light and+1 order diffraction light by the converging beam of One Dimension Periodic grating, shape is filtered through hole array
Into reference light and the lens of object light directive second, converge light beam into a width interference pattern I (x, y) after the transmission of the second lens, schemed
As sensor collects computer and is subsequently can by computer；
Step 3：Calculate the complex amplitude c (x, y) of object under test：
C (x, y)=IFT { FT { I (x, y) Rr (x, y) } LF }
Wherein, LF represents LPF, and FT represents Fourier transformation, and IFT represents inverse Fourier transform, and Rr (x, y) joins for numeral
Examine ripple,
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| CN107305289B (en) * | 2016-04-20 | 2019-10-01 | 中国科学院化学研究所 | A kind of optical system and its working method for microcell spatial coherence pattern |
| CN106441085B (en) * | 2016-09-08 | 2019-11-01 | 哈尔滨工程大学 | A kind of double carrier frequency are total to railway digital holographic microphotography device and microscopic method |
| CN107966892B (en) * | 2016-10-20 | 2020-06-02 | 京东方科技集团股份有限公司 | Holographic display device and control method thereof |
| CN106952612B (en) | 2017-05-22 | 2019-09-03 | 京东方科技集团股份有限公司 | Pixel circuit, display panel and its driving method |
| CN107462150B (en) * | 2017-07-19 | 2019-07-16 | 哈尔滨工程大学 | Double-view field digital hologram detection method based on One Dimension Periodic grating with point diffraction |
| CN107272323B (en) | 2017-07-21 | 2019-12-27 | 京东方科技集团股份有限公司 | Imaging module, defocusing test device and method thereof, and light beam gating control method |
| CN108180867B (en) * | 2018-01-09 | 2020-11-03 | 深圳大学 | Quantitative phase measurement method, device and system |
| CN110376867A (en) * | 2019-06-25 | 2019-10-25 | 北京理工大学 | A kind of the off-axis digital holography micro imaging system and method for high-spatial and temporal resolution |
| CN110514111A (en) * | 2019-08-30 | 2019-11-29 | 北京理工大学 | A kind of circumscribed phase quantitative testing device and method |
| CN113325666A (en) * | 2020-02-28 | 2021-08-31 | 上海微电子装备（集团）股份有限公司 | Overlay error measuring device and method |
| CN111459003A (en) * | 2020-04-13 | 2020-07-28 | 北京理工大学 | External common-path off-axis digital holographic microscopic imaging device |
| CN111561864B (en) * | 2020-04-29 | 2022-02-18 | 西安电子科技大学 | Point diffraction digital holographic microscopic device and method based on polarization grating |
| CN114111625B (en) * | 2021-11-15 | 2024-06-04 | 郑州升达经贸管理学院 | Optical imaging system and method |
| CN115327876B (en) * | 2022-08-02 | 2023-07-18 | 上海大学 | LED-based partially coherent reflection off-axis digital holographic micro-nano measurement system |
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| US7106456B1 (en) * | 2002-01-09 | 2006-09-12 | Interphase Technologies, Inc. | Common-path point-diffraction phase-shifting interferometer |
| CN102147233B (en) * | 2010-02-04 | 2012-09-05 | 中国科学院西安光学精密机械研究所 | Physical parameter common path phase shift digital holographic microscopic device based on diffraction grating |
| CN102538986B (en) * | 2012-01-05 | 2013-11-20 | 哈尔滨工程大学 | Three-window based common-path interference detecting method and device |
| CN102954842B (en) * | 2012-10-30 | 2014-09-10 | 哈尔滨工程大学 | Common optical path interference detecting device based on synchronous carrier phase shift and a detecting method of common optical path interference detecting device |
| CN103217096B (en) * | 2013-03-18 | 2016-04-20 | 哈尔滨工程大学 | A kind of three window synchronization phase-shifting interferometers |
| CN204116710U (en) * | 2014-09-26 | 2015-01-21 | 江苏大学 | A kind of two step diffraction phase imaging systems |
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