CN102889853A - Spectral synchronous phase-shift common-path interference microscopic-detection device and detection method - Google Patents
Spectral synchronous phase-shift common-path interference microscopic-detection device and detection method Download PDFInfo
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Abstract
The invention discloses a spectral synchronous phase-shift common-path interference microscopic-detection device and a detection method, which belongs to the field of optical interference detection. The invention is designed for solving the problem that the existing optical phase-shift interference detection method is complicated and difficult in operation and low in measurement accuracy. The scheme of the invention is as follows: a beam emitted by a light source, after passing through a polaroid, enters into a light receiving surface of a beam collimating and expanding system, after the beam is subjected to beam collimating and expanding by the beam collimating and expanding system, an emergent beam enters into a first beam splitter prism, and then a reflected beam of the first beam splitter prism, as a reference beam, enters into a rectangular window after passing through a second lambda/4 wave plate; the reference beam and object beams which are abreast converged into the rectangular window respectively pass through a first Fourier lens, a one-dimensional periodic grating, a second Fourier lens, a non-polarizing beam splitter prism and a four-quadrant polaroid set again, a polarized beam emitted from the four-quadrant polaroid set generates an interference pattern on a plane of an image sensor, and a computer carries out processing on the acquired interference pattern so as to obtain the phase distribution of an object to be detected.
Description
Technical field
The present invention relates to light splitting simultaneous phase-shifting interference with common path microscopic detection device and detection method, belong to the optical interference detection field.
Background technology
Interfere and micro-interference technique and micrurgy are combined, the phase information of the three-dimensional appearance of object analysis and phase type object accurately, having conventional interference technology and the irreplaceable advantages of microtechnic such as resolving power height, measuring speed be fast, is a kind of more satisfactory small items three-dimensional appearance and the position method of distribution measuring mutually.
2006, Switzerland Lyncee Tec company released the DHM-1000 digital holographic microscope first, can be used for measuring the three-dimensional appearance and mutually distribution of position of small items.But can not take full advantage of CCD resolution and space-bandwidth product because adopt from the axle holographic light path; Simultaneously can not in light path, eliminate the phase distortion that object lens cause, for phase reconstruction is brought difficulty, and cause reconstructed error; Separate the light path interference because adopt, namely thing light is interfered by different paths with reference light, is subject to the impacts such as extraneous vibration, temperature fluctuation, has reduced the repeatability of experiment.
Chinese patent " the thing ginseng based on diffraction grating is total to road phase shift Digital holographic microscopy device ", publication number is CN102147233A, open day is 20110810, utilize optical grating diffraction and pinhole filter to make up the altogether interference microscope equipment on road of thing ginseng, reduced the impact of ambient vibration on interference imaging, improved the longitudinal frame of imaging, but the method needs to obtain phase shift by moving grating, not only regulation and control difficulty, and vibration etc. introduces phase errors can for the different interferograms that constantly gather, because finish respectively in time record multi-frame interferometry pattern, can't realize the dynamic real-time measurement of object under test simultaneously.
The Xi'an ray machine the propositions such as Yao Baoli utilize Amici prism and Polarization Modulation method to combine to make up the method (P.Gao of synchronous phase shift interference microscope equipment, B.L.Yao, J.W.Min, R.L.Guo, J.J.Zheng, T.Ye.Parallel two-step phase-shifting microscopic interferometry based on a cube beamsplitter.Optics Communications.2011,284:4136-4140).The method utilizes Amici prism with thing light and the reference light beam splitting of cross polarization, obtains two width of cloth phase shifting interferences in conjunction with Polarization Modulation by single exposure.The method is simple in structure, the efficiency of light energy utilization is high, but the method single exposure can only obtain two width of cloth interference patterns, simultaneously because the thing light of cross polarization and reference light in the middle of Amici prism during reflective layer reflects, one of them can occur half-wave loss in thing light or reference light, and transmitted light is different from intensity of reflected light, and then introduces additional phase error in two width of cloth interferograms, and make two width of cloth interference pattern contrasts different, and then increase the complicacy of data processing and affect measuring accuracy.
Summary of the invention
The present invention seeks to provides a kind of light splitting simultaneous phase-shifting interference with common path microscopic detection device and detection method in order to solve the problem that existing optical phase shift interference detection method complicated operation is difficult, measuring accuracy is low.
Light splitting simultaneous phase-shifting interference with common path microscopic detection device of the present invention, it comprises light source, it also comprises polaroid, collimating and beam expanding system, the first Amici prism, the second Amici prism, the one λ/4 wave plates, proofread and correct object lens, microcobjective, object under test, the 2nd λ/4 wave plates, the 3rd λ/4 wave plates, rectangular window, the first fourier lense, the One Dimension Periodic grating, the second fourier lense, the depolarization Amici prism, the four-quadrant polarizer group, imageing sensor and computing machine, wherein λ is the optical wavelength of source emissioning light bundle
The light beam of light source emission is incident to the light receiving surface of collimating and beam expanding system behind polaroid, outgoing beam behind the collimating and beam expanding system collimator and extender is incident to the first Amici prism, and the folded light beam of the first Amici prism is incident to rectangular window as the reference light beam through the 2nd λ/4 wave plates;
The transmitted light beam of the first Amici prism is incident to a λ/4 wave plates again after the second Amici prism transmission, the outgoing beam of the one λ/4 wave plates is incident to object under test via proofreading and correct object lens and microcobjective, the light beam that is reflected by object under test again through microcobjective, proofread and correct object lens and a λ/4 wave plates are incident to the second Amici prism, be incident to rectangular window as object beam through the 3rd λ/4 wave plates through the folded light beam of the second Amici prism;
The object beam and the reference beam that meet at side by side rectangular window are incident to the first fourier lense, outgoing beam after the first fourier lense converges is incident to the second fourier lense by the One Dimension Periodic grating, outgoing beam after the second fourier lense and the transmission of depolarization Amici prism is incident to the four-quadrant polarizer group, the outgoing beam of this four-quadrant polarizer group is received by the light receiving surface of imageing sensor, and the signal output part of imageing sensor connects the picture signal input end of computing machine;
Set up the xyz three-dimensional cartesian coordinate system take the direction of the first fourier lense optical axis as the z direction of principal axis, described rectangular window is along the direction setting perpendicular to optical axis, and is divided into two wickets along the x direction of principal axis;
The 2nd λ/4 wave plates and the 3rd λ/4 wave plates and rectangular window be arranged in parallel and are positioned at same plane, and the 2nd λ/4 wave plates and the 3rd λ/4 wave plates are equidistantly arranged along the x direction of principal axis is parallel;
The focal length of the first fourier lense and the second fourier lense is f;
Rectangular window is positioned on the front focal plane of the first fourier lense; The One Dimension Periodic grating is positioned on the back focal plane of the first fourier lense and is positioned on the front focal plane of the second fourier lense;
Imageing sensor is positioned on the back focal plane of the second fourier lense;
The cycle d of One Dimension Periodic grating and rectangular window are along satisfying relation between the axial length D of x: d=2 λ f/D.
The first Amici prism and the second Amici prism are unpolarized Amici prism, and the 2nd λ/4 wave plates are identical with the quick shaft direction of the 3rd λ/4 wave plates.
Perhaps the first Amici prism and the second Amici prism are polarization splitting prism, and the 2nd λ/4 wave plates are mutually vertical with the quick shaft direction of the 3rd λ/4 wave plates.
The One Dimension Periodic grating is two-value One Dimension Periodic grating or sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
The depolarization Amici prism is placed according to the parallel plane mode that its light splitting surface and a λ/4 wave plates and the 2nd λ/4 wave plate orientations and source light transmit direction consist of, incident light from 45 ° with its light splitting surface or-the inclined-plane incident of 45° angle.
The four-quadrant polarizer group is 2 * 2 arrays that the polarization direction is rotated counterclockwise four polaroids compositions of 45° angle successively, and these four polaroids are arranged in the counterclockwise direction.
Based on the interference detection method of described light splitting simultaneous phase-shifting interference with common path microscopic detection device, its implementation procedure is as follows:
Open light source, make the light beam of light source emission after forming parallel polarized light behind the collimator and extender of polaroid and collimating and beam expanding system, be incident to the first Amici prism, behind the first Amici prism reflection and transmission, finally form reference beam respectively and object beam converges to rectangular window, the reference beam and the object beam that meet at side by side rectangular window pass through the first fourier lense more successively, the One Dimension Periodic grating, the second fourier lense, depolarization Amici prism and four-quadrant polarizer group, the light beam of four-quadrant polarizer group outgoing produces interference pattern in image sensor plane, computing machine will gather the interference pattern that obtains and cut apart four width of cloth interference patterns that obtain object under test according to the size of the wicket of rectangular window, this four width of cloth interference pattern is take upper right corner image as the first width of cloth interference pattern, and be first to fourth width of cloth interference pattern according to counterclockwise arranging, after the 3rd width of cloth interference pattern and the 4th width of cloth interference pattern carried out mirror image switch, the sequenced intensity distributions of four width of cloth interference patterns was I in turn
1, I
2, I
3And I
4, calculate the PHASE DISTRIBUTION that obtains object under test according to the intensity distributions of four width of cloth interference patterns
Advantage of the present invention:
Light splitting simultaneous phase-shifting interference with common path microscopic detection method has following characteristics and beneficial effect:
1. will interfere microtechnic and be total to light path light splitting simultaneous phase-shifting technology and combine, the interferogram that just can obtain four width of cloth by the single exposure collection reaches the purpose of object phase bit recovery, improving on the measuring accuracy basis, method is simple, good stability, antijamming capability is strong, and this is one of innovative point that is different from prior art;
2. four width of cloth interferogram contrasts are identical, and mapping relations are simple, can greatly improve Phase Retrieve Algorithm efficient, can eliminate simultaneously phase displacement error and the random noise introduced because of the multilevel diffraction, improve measuring accuracy, and then be more suitable for real time dynamic measurement, this be different from prior art innovative point two;
Apparatus of the present invention have following distinguishing feature:
1. apparatus of the present invention are simple in structure, and cost is low;
2. apparatus of the present invention do not need to change light path in operation, do not need mobile any experiment apparatus yet, and flexible to operation, stability is high.
Description of drawings
Fig. 1 is the structural representation of light splitting simultaneous phase-shifting interference with common path microscopic detection device of the present invention, and the coordinate among the figure is three-dimensional rectangular coordinate system;
Fig. 2 is depolarization Amici prism configuration schematic diagram;
Fig. 3 is four-quadrant polarizer group configuration structure synoptic diagram;
Fig. 4 is four width of cloth interference patterns of cutting apart the object under test of acquisition for the interference pattern that computer acquisition is obtained, four one by one corresponding acquisitions of polaroid among this four width of cloth interference pattern and Fig. 3;
Fig. 5 is the PHASE DISTRIBUTION according to object under test
Recover the PHASE DISTRIBUTION of the object under test of acquisition.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1 to Fig. 4, the described light splitting simultaneous phase-shifting of present embodiment interference with common path microscopic detection device, it comprises light source 1, it also comprises polaroid 2, collimating and beam expanding system 3, the first Amici prism 4, the second Amici prism 5, the one λ/4 wave plates 6, proofread and correct object lens 7, microcobjective 8, object under test 9, the 2nd λ/4 wave plates 10, the 3rd λ/4 wave plates 11, rectangular window 12, the first fourier lense 13, One Dimension Periodic grating 14, the second fourier lense 15, depolarization Amici prism 16, four-quadrant polarizer group 17, imageing sensor 18 and computing machine 19, wherein λ is the optical wavelength of light source 1 emission light beam
The light beam of light source 1 emission is incident to the light receiving surface of collimating and beam expanding system 3 behind polaroid 2, the folded light beam that outgoing beam behind collimating and beam expanding system 3 collimator and extenders is incident to the first Amici prism 4, the first Amici prisms 4 is incident to rectangular window 12 as the reference light beam through the 2nd λ/4 wave plates 10;
The transmitted light beam of the first Amici prism 4 is incident to a λ/4 wave plates 6 again after 5 transmissions of the second Amici prism, the outgoing beam of the one λ/4 wave plates 6 is incident to object under test 9 via proofreading and correct object lens 7 and microcobjective 8, the light beam that is reflected by object under test 9 again through microcobjective 8, proofread and correct object lens 7 and a λ/4 wave plates 6 are incident to the second Amici prism 5, be incident to rectangular window 12 as object beam through the 3rd λ/4 wave plates 11 through the folded light beam of the second Amici prism 5;
The object beam and the reference beam that meet at side by side rectangular window 12 are incident to the first fourier lense 13, outgoing beam after the first fourier lense 13 converges is incident to the second fourier lense 15 by One Dimension Periodic grating 14, outgoing beam after the second fourier lense 15 and 16 transmissions of depolarization Amici prism is incident to four-quadrant polarizer group 17, the outgoing beam of this four-quadrant polarizer group 17 is received by the light receiving surface of imageing sensor 18, and the signal output part of imageing sensor 18 connects the picture signal input end of computing machine 19;
Set up the xyz three-dimensional cartesian coordinate system take the direction of the first fourier lense 13 optical axises as the z direction of principal axis, described rectangular window 12 is along the direction setting perpendicular to optical axis, and is divided into two wickets along the x direction of principal axis;
The 2nd λ/4 wave plates 10 and the 3rd λ/4 wave plates 11 be arranged in parallel with rectangular window 12 and are positioned at same plane, and the 2nd λ/4 wave plates 10 and the 3rd λ/4 wave plates 11 are equidistantly arranged along the x direction of principal axis is parallel;
The focal length of the first fourier lense 13 and the second fourier lense 15 is f;
The cycle d of One Dimension Periodic grating 14 and rectangular window 12 are along satisfying relation between the axial length D of x: d=2 λ f/D.
In the present embodiment, it is the He-Ne laser instrument of 632.8nm that light source 1 can adopt wavelength.The first fourier lense 11 and the second fourier lense 14 focal distance f all can be 250mm.
Embodiment two: present embodiment is described below in conjunction with Fig. 2, present embodiment is described further embodiment one, the first Amici prism 4 and the second Amici prism 5 are unpolarized Amici prism, and the 2nd λ/4 wave plates 10 are identical with the quick shaft direction of the 3rd λ/4 wave plates 11.
Embodiment three: present embodiment is described further embodiment one or two, and the first Amici prism 4 and the second Amici prism 5 are polarization splitting prism, and the 2nd λ/4 wave plates 10 are mutually vertical with the quick shaft direction of the 3rd λ/4 wave plates 11.
Embodiment four: below in conjunction with Fig. 3 present embodiment is described, present embodiment is described further embodiment one, two or three, and One Dimension Periodic grating 14 is two-value One Dimension Periodic grating or sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
In the present embodiment, One Dimension Periodic grating 14 adopts the Ronchi grating of cycle d=50 μ m.
Embodiment five: present embodiment is described further embodiment one, two, three or four, depolarization Amici prism 16 is placed according to the parallel plane mode that its light splitting surface and a λ/4 wave plates 10 and the 2nd λ/4 wave plates, 11 orientations and light source 1 light emission direction consist of, incident light from 45 ° with its light splitting surface or-the inclined-plane incident of 45° angle.
Embodiment six: present embodiment is described below in conjunction with Fig. 3, present embodiment is described further embodiment one, two, three, four or five, four-quadrant polarizer group 17 is 2 * 2 arrays that the polarization direction is rotated counterclockwise four polaroids compositions of 45° angle successively, and these four polaroids are arranged in the counterclockwise direction.
The polarization direction of four polaroids is different, four polarization directions as shown in Figure 3, the polarization direction of upper right corner polaroid and optical axis included angle are 0, other three polaroids are arranged in the counterclockwise direction take upper right corner polaroid as benchmark, and the polarization direction of these three polaroids is rotated counterclockwise 45° angle with respect to previous polaroid successively take upper right corner polaroid as benchmark.
Embodiment seven: present embodiment is described further embodiment one, two, three, four, five or six, and the light transmission shaft of polaroid 2 and x axle are 45° angle.
Embodiment eight: present embodiment is described further embodiment one, two, three, four, five, six or seven, and described rectangular window 12 is the window of D * (D/2)=6.33mm * 3.16mm.
The size of rectangular window 10 can be adjusted as required in the present embodiment.This window is divided into two parts, the size of every part and a width of cloth interference pattern measure-alike.
Embodiment nine: below in conjunction with Fig. 1 to Fig. 5 present embodiment is described, based on the interference detection method of embodiment one to eight arbitrary described light splitting simultaneous phase-shifting interference with common path microscopic detection device, its implementation procedure is as follows:
Open light source 1, make the light beam of light source 1 emission after forming parallel polarized light behind the collimator and extender of polaroid 2 and collimating and beam expanding system 3, be incident to the first Amici prism 4, behind the first Amici prism 4 reflection and transmissions, finally form respectively reference beam and object beam and converge to rectangular window 12, the reference beam and the object beam that meet at side by side rectangular window 12 pass through the first fourier lense 13 more successively, One Dimension Periodic grating 14, the second fourier lense 15, depolarization Amici prism 16 and four-quadrant polarizer group 17, the light beam of four-quadrant polarizer group 17 outgoing produces interference pattern on imageing sensor 18 planes, computing machine 19 will gather the interference pattern that obtains and cut apart four width of cloth interference patterns that obtain object under test 9 according to the size of the wicket of rectangular window 12, this four width of cloth interference pattern is take upper right corner image as the first width of cloth interference pattern, and be first to fourth width of cloth interference pattern according to counterclockwise arranging, after the 3rd width of cloth interference pattern and the 4th width of cloth interference pattern carried out mirror image switch, the sequenced intensity distributions of four width of cloth interference patterns was I in turn
1, I
2, I
3And I
4, calculate the PHASE DISTRIBUTION that obtains object under test 9 according to the intensity distributions of four width of cloth interference patterns
Recover PHASE DISTRIBUTION figure as shown in Figure 5.
In the present embodiment, before the pick-up unit operation, need adjust as required whole optical system.Do not need mobile optical device in measuring process, this embodiment is simple in structure, because adopt the synchronous phase-shifting technique of light splitting, has avoided device to move the interference of introducing simultaneously, and system stability is good.Four required interference patterns of phase bit recovery generate in an interferogram, and recovery algorithms is simple, has reduced the complexity of system.The present embodiment method namely collects four width of cloth interference patterns of object under test 9 by single exposure, measures on the basis of real-time guaranteeing, has greatly improved measuring accuracy.
Principle of work:
This light path is based on typical optics 4f system, and the pass between input face, frequency plane and the output face is: the optical field distribution of frequency plane is the Fourier transform of input face optical field distribution, and the optical field distribution of output face is the inverse Fourier transform of frequency plane optical field distribution; Two lens play respectively Fourier transform and inverse Fourier transform.
This light path is passed through to use two Amici prism light splitting, thereby has obtained thing light and reference light, and the use of this light path, so that measured object can freely be placed.On input face, rectangular aperture is divided into two windows, passes through for thing light and reference light respectively; What obtain at frequency plane is the frequency spectrum of input plane optical field distribution, by using One Dimension Periodic grating 14 to carry out filtering at frequency plane, frequency spectrum is diffracted into a plurality of levels time; After carrying out inverse Fourier transform through the second fourier lense 15 like this, in output face, just obtained a plurality of level time with the similar light field of input optical field distribution, be that each order of diffraction is the structure of Dual-window, a side window is reference light, and the opposite side window is PHASE DISTRIBUTION; In native system, only use 0 grade ,+1 grade and-1 order diffraction light, concern along satisfying between the axial width D of x by cycle d and the rectangular window 12 of adjusting One Dimension Periodic grating 14: d=2 λ f/D, just can make a side window of 0 grade of light and a side window of-1 grade of light overlap (namely two windows overlap), thereby produce an interference pattern, a side window of 0 grade of light overlaps (two windows overlap) and produces another interference pattern with a side window of+1 grade of light simultaneously, so just can obtain two width of cloth interferograms.
In order to obtain four width of cloth interferograms, we had used a depolarization Amici prism 16 before light enters imageing sensor 18.The effect of depolarization Amici prism 16 is exactly that incident light is divided into reflection and transmission two-beam in the ratio of intensity one to one, can not affect the PHASE DISTRIBUTION of light field, and since the reflection effect so that the reflected light of outgoing is the mirror image switch of incident light, and transmitted light can not overturn, so two interference patterns that reflection need to be obtained when processing interferogram carry out mirror image switch.
Use 17 pairs of interference patterns of polarizer group to carry out polarization filtering, each interference pattern of four interference patterns passes through respectively a polaroid of polarizer group 17, because the polarization direction of each polaroid is different from the angle of optical axis, thereby in four interference patterns, introduce different phase shifts, four polarization directions as shown in Figure 3, thereby obtain the interference pattern of the different phase shifts of four width of cloth, four interference patterns shown in Figure 4 are corresponding from different phase shifts shown in Figure 3.Just can calculate the PHASE DISTRIBUTION of object under test with the intensity distributions of the interference pattern of these four different phase shifts.
The interference pattern that we mention all refers to the intensity distributions of light field.
PHASE DISTRIBUTION and optical surface pattern, deformation and the isoparametric relation of transparent substance thickness are such:
When utilizing the photo measure optical surface that is reflected back from optical surface, the relation of PHASE DISTRIBUTION and optical surface pattern, deformation:
When light is beaten on optical surface, the phase place of light beam will be modulated by the variation of optical surface, surperficial information has just been arranged in the light wave, so it is exactly the pattern of optical surface that the phase place that records changes, be exactly the pattern on the surface after the deformation, and the variation of optical surface height can obtain by following formula:
Wherein, h (x, y) is exactly the surface elevation variation of object under test 9,
It is the PHASE DISTRIBUTION of object under test 9.
Claims (9)
1. light splitting simultaneous phase-shifting interference with common path microscopic detection device, it comprises light source (1), it is characterized in that: it also comprises polaroid (2), collimating and beam expanding system (3), the first Amici prism (4), the second Amici prism (5), the one λ/4 wave plates (6), proofread and correct object lens (7), microcobjective (8), object under test (9), the 2nd λ/4 wave plates (10), the 3rd λ/4 wave plates (11), rectangular window (12), the first fourier lense (13), One Dimension Periodic grating (14), the second fourier lense (15), depolarization Amici prism (16), four-quadrant polarizer group (17), imageing sensor (18) and computing machine (19), wherein λ is the optical wavelength of light source (1) emission light beam
The light beam of light source (1) emission is incident to the light receiving surface of collimating and beam expanding system (3) behind polaroid (2), outgoing beam behind collimating and beam expanding system (3) collimator and extender is incident to the first Amici prism (4), and the folded light beam of the first Amici prism (4) is incident to rectangular window (12) as the reference light beam through the 2nd λ/4 wave plates (10);
The transmitted light beam of the first Amici prism (4) is incident to a λ/4 wave plates (6) again after the second Amici prism (5) transmission, the outgoing beam of the one λ/4 wave plates (6) is incident to object under test (9) via proofreading and correct object lens (7) and microcobjective (8), by the light beam of object under test (9) reflection again through microcobjective (8), proofread and correct object lens (7) and a λ/4 wave plates (6) are incident to the second Amici prism (5), be incident to rectangular window (12) as object beam through the 3rd λ/4 wave plates (11) through the folded light beam of the second Amici prism (5);
The object beam and the reference beam that meet at side by side rectangular window (12) are incident to the first fourier lense (13), outgoing beam after the first fourier lense (13) converges is incident to the second fourier lense (15) by One Dimension Periodic grating (14), outgoing beam after the second fourier lense (15) and depolarization Amici prism (16) transmission is incident to four-quadrant polarizer group (17), the outgoing beam of this four-quadrant polarizer group (17) is received by the light receiving surface of imageing sensor (18), and the signal output part of imageing sensor (18) connects the picture signal input end of computing machine (19);
Set up the xyz three-dimensional cartesian coordinate system take the direction of the first fourier lense (13) optical axis as the z direction of principal axis, described rectangular window (12) is along the direction setting perpendicular to optical axis, and is divided into two wickets along the x direction of principal axis;
The 2nd λ/4 wave plates (10) and the 3rd λ/4 wave plates (11) be arranged in parallel with rectangular window (12) and are positioned at same plane, and the 2nd λ/4 wave plates (10) and the 3rd λ/4 wave plates (11) are equidistantly arranged along the x direction of principal axis is parallel;
The focal length of the first fourier lense (13) and the second fourier lense (15) is f;
Rectangular window (12) is positioned on the front focal plane of the first fourier lense (13); One Dimension Periodic grating (14) is positioned on the back focal plane of the first fourier lense (13) and is positioned on the front focal plane of the second fourier lense (15);
Imageing sensor (18) is positioned on the back focal plane of the second fourier lense (15);
The cycle d of One Dimension Periodic grating (14) and rectangular window (12) are along satisfying relation between the axial length D of x: d=2 λ f/D.
2. light splitting simultaneous phase-shifting interference with common path microscopic detection device according to claim 1, it is characterized in that: the first Amici prism (4) and the second Amici prism (5) are unpolarized Amici prism, and the 2nd λ/4 wave plates (10) are identical with the quick shaft direction of the 3rd λ/4 wave plates (11).
3. light splitting simultaneous phase-shifting interference with common path microscopic detection device according to claim 1, it is characterized in that: the first Amici prism (4) and the second Amici prism (5) are polarization splitting prism, and the 2nd λ/4 wave plates (10) are mutually vertical with the quick shaft direction of the 3rd λ/4 wave plates (11).
4. according to claim 1,2 or 3 described light splitting simultaneous phase-shifting interference with common path microscopic detection devices, it is characterized in that: One Dimension Periodic grating (14) is two-value One Dimension Periodic grating or sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
5. according to claim 1,2 or 3 described light splitting simultaneous phase-shifting interference with common path microscopic detection devices, it is characterized in that: depolarization Amici prism (16) is placed according to the parallel plane mode that its light splitting surface and a λ/4 wave plates (10) and the 2nd λ/4 wave plates (11) orientation and light source (1) light emission direction consist of, incident light from 45 ° with its light splitting surface or-the inclined-plane incident of 45° angle.
6. according to claim 1,2 or 3 described light splitting simultaneous phase-shifting interference with common path microscopic detection devices, it is characterized in that: four-quadrant polarizer group (17) is 2 * 2 arrays that the polarization direction is rotated counterclockwise four polaroids compositions of 45° angle successively, and these four polaroids are arranged in the counterclockwise direction.
7. according to claim 1,2 or 3 described light splitting simultaneous phase-shifting interference with common path microscopic detection devices, it is characterized in that: light transmission shaft and the x axle of polaroid (2) are 45° angle.
8. according to claim 1,2 or 3 described light splitting simultaneous phase-shifting interference with common path microscopic detection devices, it is characterized in that: described rectangular window (12) is the window of D * (D/2)=6.33mm * 3.16mm.
9. interference detection method based on the described light splitting simultaneous phase-shifting of claim 1 interference with common path microscopic detection device, it is characterized in that: its implementation procedure is as follows:
Open light source (1), make the light beam of light source (1) emission after forming parallel polarized light behind the collimator and extender of polaroid (2) and collimating and beam expanding system (3), be incident to the first Amici prism (4), behind the first Amici prism (4) reflection and transmission, finally form respectively reference beam and object beam and converge to rectangular window (12), the reference beam and the object beam that meet at side by side rectangular window (12) pass through the first fourier lense (13) more successively, One Dimension Periodic grating (14), the second fourier lense (15), depolarization Amici prism (16) and four-quadrant polarizer group (17), the light beam of four-quadrant polarizer group (17) outgoing produces interference pattern on imageing sensor (18) plane, computing machine (19) will gather the interference pattern that obtains and cut apart four width of cloth interference patterns that obtain object under test (9) according to the size of the wicket of rectangular window (12), this four width of cloth interference pattern is take upper right corner image as the first width of cloth interference pattern, and be first to fourth width of cloth interference pattern according to counterclockwise arranging, after the 3rd width of cloth interference pattern and the 4th width of cloth interference pattern carried out mirror image switch, the sequenced intensity distributions of four width of cloth interference patterns was I in turn
1, I
2, I
3And I
4, calculate the PHASE DISTRIBUTION that obtains object under test (9) according to the intensity distributions of four width of cloth interference patterns
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Cited By (13)
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| CN103344176A (en) * | 2013-07-25 | 2013-10-09 | 哈尔滨工业大学 | Octave type short coherence transient phase-shifting interferometer and measurement method used for detecting spherical topographic characteristics |
| CN103759649A (en) * | 2014-01-29 | 2014-04-30 | 青岛市光电工程技术研究院 | Non-contact conoscopic holography measurement system |
| CN105699332A (en) * | 2016-03-22 | 2016-06-22 | 佛山市南海区欧谱曼迪科技有限责任公司 | Intensity modulation based white light interferometric phase microscopic system and phase calculation method thereof |
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| CN103344176B (en) * | 2013-07-25 | 2015-09-16 | 哈尔滨工业大学 | The short relevant instantaneous phase-shifting interference measuring instrument of a kind of times formula for sphere pattern feature detection and measuring method |
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| CN103759649A (en) * | 2014-01-29 | 2014-04-30 | 青岛市光电工程技术研究院 | Non-contact conoscopic holography measurement system |
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| CN109211934A (en) * | 2018-08-29 | 2019-01-15 | 南京理工大学 | Based on interference micro- microballoon planar defect detection device and its detection method |
| CN109211934B (en) * | 2018-08-29 | 2021-01-26 | 南京理工大学 | Micro-sphere surface defect detection device and method based on interference microscopy |
| CN110186390A (en) * | 2019-05-21 | 2019-08-30 | 中国计量大学 | Compact transient state multi-wavelength phase shift interference device and its measurement method |
| CN110345860A (en) * | 2019-08-16 | 2019-10-18 | 合肥工业大学 | A kind of interferometer |
| CN113218312A (en) * | 2021-05-18 | 2021-08-06 | 哈尔滨工业大学 | Light needle type common-path interference confocal displacement measuring device and method |
| CN113218312B (en) * | 2021-05-18 | 2022-09-30 | 哈尔滨工业大学 | Light needle type common-path interference confocal displacement measuring device and method |
| CN113959358A (en) * | 2021-10-27 | 2022-01-21 | 中国计量科学研究院 | Four-quadrant interferometric measurement system based on integrated array wave plate |
| CN114354141A (en) * | 2022-01-14 | 2022-04-15 | 深圳迈塔兰斯科技有限公司 | Method and system for measuring super-surface phase based on frequency domain |
| CN114354141B (en) * | 2022-01-14 | 2024-05-07 | 深圳迈塔兰斯科技有限公司 | Method and system for measuring super-surface phase based on frequency domain |
| CN116642413A (en) * | 2023-02-28 | 2023-08-25 | 华为技术有限公司 | Optical module and optical equipment |
| CN116642413B (en) * | 2023-02-28 | 2024-03-01 | 华为技术有限公司 | Optical module and optical equipment |
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