CN105699332A - Intensity modulation based white light interferometric phase microscopic system and phase calculation method thereof - Google Patents
Intensity modulation based white light interferometric phase microscopic system and phase calculation method thereof Download PDFInfo
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- 238000003384 imaging method Methods 0.000 claims description 26
- 230000010363 phase shift Effects 0.000 claims description 6
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 230000009466 transformation Effects 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000006467 substitution reaction Methods 0.000 claims description 3
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- 238000005305 interferometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- 230000010287 polarization Effects 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N21/453—Holographic interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0234—Measurement of the fringe pattern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0269—Microscope type
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Abstract
The invention discloses an intensity modulation based white light interferometric phase microscopic system and a phase calculation method thereof. Through improving light path design, a pure-phase spatial light modulator is replaced by utilizing a pure-amplitude spatial light modulator; the light intensity of reference light can be controlled; when the light intensity of the reference light changes, the light intensity of the interference light changes therewith; if the modulation curve of an amplitude-type spatial light modulator is known, each information component in an interference figure can be acquired; the light intensity generated by the system changes much; interference data can be obtained by using an ordinary camera. In the technical scheme, a transmission-type light path does not have the problem of an incident angle; the problem that the incident angle is limited is solved.
Description
Technical field
The present invention relates to a kind of microscopic system, a kind of in particular white light interference phase place microscopic system based on intensity modulated and phase calculation method thereof。
Background technology
Simple microscope imaging is only so that the amplitude variations (brightness) of light and wavelength change (color) can be observed, but the micro-organisms lived is water white mostly, when light passes through, wavelength and amplitude variations are not notable, are so difficult to observation under light field spectroscopy clear。In order to overcome this difficulty, people have employed such as measures such as dyeing so that color and the brightness of tested object change, but for non-living body state when this method major part, when being applied to live body, effect is not especially desirable；It is of course also possible to by the aperture diaphragm reducing condenser lens, to increase comparison of light and shade, but so fine structure is difficult to be resolved, and brightness simultaneously decreases；Utilize details in a play not acted out on stage, but told through dialogues, fluorescence or polarization microscopy, although it is observed that living specimen, but effect is general。And popularizing along with computer, holographic interferometry has had significant progress, one of them most important part is exactly Phaseshifting interferometry (Phase-shiftingInterferometry, PSI), PSI is not a kind of concrete optical hardware structure, but a kind of data acquisition being usable under various measuring condition and data analysing method, PSI has at a relatively high measurement repeatable accuracy, precision and degree of stability。
At present, by of greatest concern with Spatiallightinterferencemicroscopy (SLIM) system of GabrielPopescu professor and team thereof in conjunction with good achievement to white light imaging and phase shift interference phase recuperation technique, this system uses pure phase spatial light modulator, pure phase spatial light modulator is utilized to carry out phase shift, the phase shifting interference that highly sensitive sCMOS camera obtains is utilized again to be acquired, by gathering four width phase shifting interferences, four-step phase-shifting algorithm is utilized to carry out phase recovery。This system accuracy is high, but pure phase bit space light modulation (SLM) that this system uses is reflective, and SLM has strict requirement for incident angle, and namely angle of incidence not can exceed that 7 °, and system building is brought very burden by this；Using Amici prism can solve the problem of incident angle, but can bring other problem simultaneously, namely light intensity is very weak, and gatherer process later is brought ill effect by this；It addition, this system is owing to being white light interference, in dephasing processes, the intensity of interference fringe is inconspicuous with the change of phase shift, so to use highly sensitive sCMOS camera as sampler, and the price of sCMOS camera and pure phase spatial light modulator is all much more expensive, is not suitable for further genralrlization。
Therefore, prior art has yet to be improved and developed。
Summary of the invention
It is an object of the invention to provide a kind of white light interference phase place microscopic system based on intensity modulated and phase calculation method thereof, it is intended to solve interferogram gray-value variation narrow range in dephasing processes and the high problem of equipment cost。
Technical scheme is as follows:
A kind of white light interference phase place microscopic system based on intensity modulated, wherein, including:
Microscopie unit, for micro-imaging；
First battery of lens, is placed in after the imaging surface of microscopie unit；
Transmission-type net amplitude spatial light modulator, for the light after Fourier transformation is carried out subregion intensity modulated, is placed on the back focal plane of the first battery of lens；
Second battery of lens, is placed in transmission-type net amplitude spatial light modulator rear, forms 4f system with the first battery of lens；
Camera, for imaging of samples, being placed on the back focal plane of battery of lens。
The described white light interference phase place microscopic system based on intensity modulated, wherein, the distance of described first battery of lens and microscopie unit imaging surface is equal to the focal length of the first battery of lens itself。
The described white light interference phase place microscopic system based on intensity modulated, wherein, described microscopie unit includes collecting lens, aperture diaphragm, condenser lens, microcobjective, reflecting mirror and tube lens group, light source sequentially passes through collecting lens, aperture diaphragm, condenser lens, microcobjective, reflecting mirror and tube lens group, and testing sample is placed in above microcobjective。
The described white light interference phase place microscopic system based on intensity modulated, wherein, described light source adopts Halogen light。
A kind of phase shift interference phase calculation method of white light interference phase place microscopic system based on intensity modulated as described in above-mentioned any one, wherein, specifically includes following steps:
Step S100: change the intensity of light source, by obtaining the 4 width imaging patterns with varying strength based on the white light interference phase place microscopic system of intensity modulated；
The different gray values that step S200:4 width imaging pattern has according to the different intensities of light source convert different transmitances to by transmission-type net amplitude spatial light modulator, and the transmission-type net amplitude spatial light modulator transmitance of 4 different gray values is respectively as follows: k1, k2, k3, k4；
Step S300: formula 1 is arranged an accepted way of doing sth 2:
Wherein, E1Represent the amplitude of reference light, E2Represent the amplitude of object information light,Representing the PHASE DISTRIBUTION of object, (x y) represents the position of pixel, k in interferogramrRepresent the transmitance of transmission-type net amplitude spatial light modulator 200, formula 1 arranged an accepted way of doing sth 2:
Step S400: formula (2) is arranged the matrix form of an accepted way of doing sth (3) again:
Step S500: respectively by k1, k2, k3, k4In substitution formula 3, obtain 4 expression formulas；
Step S600: obtained by the 4 of step S500 expression formulasWith
Step S700: obtain againWith
Step S800: finally try to achieve the PHASE DISTRIBUTION being associated with interferogram:
Beneficial effects of the present invention: the present invention is by providing a kind of white light interference phase place microscopic system based on intensity modulated and phase calculation method thereof, by improving light path design, net amplitude spatial light modulator is utilized to replace pure phase spatial light modulator, the light intensity of reference light can be controlled, when reference light intensity changes, interference light intensity changes therewith, if the adjustment curve of known amplitude type spatial light modulator, it is possible to try to achieve each information component in interferogram；The light intensity that native system produces changes greatly, it is possible to use general camera obtains interference data；In the technical program, transmission-type light path is absent from the problem of incident angle, the problem solving angle of incidence restriction。
Accompanying drawing explanation
Fig. 1 is the structural representation of the white light interference phase place microscopic system in the present invention based on intensity modulated。
Detailed description of the invention
For making the purpose of the present invention, technical scheme and advantage clearly, clearly, developing simultaneously referring to accompanying drawing, the present invention is described in more detail for embodiment。
As it is shown in figure 1, a kind of white light interference phase place microscopic system based on intensity modulated, including:
Microscopie unit, for micro-imaging；
First battery of lens 100, is placed in after the imaging surface of microscopie unit；
Transmission-type net amplitude spatial light modulator 200 (calling net amplitude SLM in the following text), for the light after Fourier transformation is carried out subregion intensity modulated, is placed on the back focal plane of the first battery of lens 100；
Second battery of lens 300, is placed in net amplitude SLM200 rear, forms 4f system with the first battery of lens 100；
Camera 400, for imaging of samples, being placed on the back focal plane of the second battery of lens 300。
In the technical program, the first battery of lens 100, net amplitude SLM200, the second battery of lens 300 and camera 400 collectively form phase imaging device, and 2 battery of lens constitute a 4f system so that finally can imaging on the imageing sensor of video camera；Net amplitude SLM200 controls the amplitude of reference light (low-frequency information light), by loading the pattern of different gray value on the SLM of amplitude type, completes the modulation to optical interference circuit；Then on camera, obtain the different interferogram with reference to light intensity, and then calculating obtains PHASE DISTRIBUTION。
Specifically, the focal length that described first battery of lens 100 is own equal to the first battery of lens 100 with the distance of microscopie unit imaging surface。
Specifically, described microscopie unit includes collecting lens 510, aperture diaphragm 520, condenser lens 530, microcobjective 540, reflecting mirror 550 and tube lens group 560, described collecting lens 510, aperture diaphragm 520, condenser lens 530, microcobjective 540, reflecting mirror 550 and tube lens group 560 set gradually, testing sample is placed in above microcobjective 540: the light that light source 570 sends is retrained (in the present system by aperture diaphragm 520 after collecting lens 510, in order to ensure the spatial coherence of light beam, need to reduce aperture diaphragm 520 as far as possible, in combination with factors such as light intensity, under 40 times of object lens, generally the numerical aperture of aperture diaphragm 520 is controlled about 0.09), the light sent from aperture diaphragm 520 is irradiated to testing sample after condenser lens 530, testing sample is amplified by the microcobjective 540 below testing sample, after reflecting mirror 550, light beam is diverted, the microscope imaging face in figure it is imaged onto by tube lens group 560。In the present embodiment, described light source 570 adopts Halogen light, thus avoids the appearance using the laser with high temporal coherence to cause laser speckle；And owing to the white light of Halogen light itself has extremely short coherence length (being about 1.2 microns), the space background noise of imaging is just controlled in sub-nanometer scale。
In the technical program, the imaging surface of microscopie unit is positioned at the front focal plane of the first battery of lens 100, the back focal plane of the first battery of lens 100 is placed a transmission-type net amplitude spatial light modulator 200, the light of microscopie unit imaging surface is after the Fourier transformation effect of the first battery of lens 100, low-frequency information and high-frequency information separate on net amplitude SLM200, make above net amplitude SLM200, to load a pattern matched with image spectrum, thus only changing the amplitude of low-frequency information light, reference light is made to control。
A kind of phase shift interference phase calculation method of white light interference phase place microscopic system based on intensity modulated as described above, specifically includes following steps:
Step S100: change light source 570 intensity, by obtaining the 4 width imaging patterns with varying strength based on the white light interference phase place microscopic system of intensity modulated；
The different gray values that step S200:4 width imaging pattern has according to different light source 570 intensity convert different transmitances to by transmission-type net amplitude spatial light modulator 200, and transmission-type net amplitude spatial light modulator 200 transmitance of 4 different gray values is respectively as follows: k1, k2, k3, k4；
Step S300: formula 1 is arranged an accepted way of doing sth 2:
Wherein, E1Represent the amplitude of reference light, E2Represent the amplitude of object information light,Representing the PHASE DISTRIBUTION of object, (x y) represents the position of pixel, k in interferogramrRepresent the transmitance of transmission-type net amplitude spatial light modulator 200, formula 1 arranged an accepted way of doing sth 2:
Step S400: formula (2) is arranged the matrix form of an accepted way of doing sth (3) again:
Step S500: respectively by k1, k2, k3, k4In substitution formula 3, obtain 4 expression formulas；
Step S600: obtained by the 4 of step S500 expression formulasWith
Step S700: obtain againWith
Step S800: finally try to achieve the PHASE DISTRIBUTION being associated with interferogram:
The technical program is by improving light path design, net amplitude spatial light modulator is utilized to replace pure phase spatial light modulator, the light intensity of reference light can be controlled, when reference light intensity changes, interference light intensity changes therewith, if the adjustment curve of known amplitude type spatial light modulator, it is possible to try to achieve each information component in interferogram；The light intensity that native system produces changes greatly, it is possible to use general camera obtains interference data；In the technical program, transmission-type light path is absent from the problem of incident angle, the problem solving angle of incidence restriction。
It should be appreciated that the application of the present invention is not limited to above-mentioned citing, for those of ordinary skills, it is possible to improved according to the above description or convert, all these improve and convert the protection domain that all should belong to claims of the present invention。
Claims (5)
1. the white light interference phase place microscopic system based on intensity modulated, it is characterised in that including:
Microscopie unit, for micro-imaging；
First battery of lens, is placed in after the imaging surface of microscopie unit；
Transmission-type net amplitude spatial light modulator, for the light after Fourier transformation is carried out subregion intensity modulated, is placed on the back focal plane of the first battery of lens；
Second battery of lens, is placed in transmission-type net amplitude spatial light modulator rear, forms 4f system with the first battery of lens；
Camera, for imaging of samples, being placed on the back focal plane of battery of lens。
2. the white light interference phase place microscopic system based on intensity modulated according to claim 1, it is characterised in that the distance of described first battery of lens and microscopie unit imaging surface is equal to the focal length of the first battery of lens itself。
3. the white light interference phase place microscopic system based on intensity modulated according to claim 1, it is characterized in that, described microscopie unit includes collecting lens, aperture diaphragm, condenser lens, microcobjective, reflecting mirror and tube lens group, light source sequentially passes through collecting lens, aperture diaphragm, condenser lens, microcobjective, reflecting mirror and tube lens group, and testing sample is placed in above microcobjective。
4. the white light interference phase place microscopic system based on intensity modulated according to claim 3, it is characterised in that described light source adopts Halogen light。
5. the phase shift interference phase calculation method of the white light interference phase place microscopic system based on intensity modulated as described in any one of claim 1-4, it is characterised in that specifically include following steps:
Step S100: change the intensity of light source, by obtaining the 4 width imaging patterns with varying strength based on the white light interference phase place microscopic system of intensity modulated；
The different gray values that step S200:4 width imaging pattern has according to the different intensities of light source convert different transmitances to by transmission-type net amplitude spatial light modulator, and the transmission-type net amplitude spatial light modulator transmitance of 4 different gray values is respectively as follows: k1, k2, k3, k4；
Step S300: formula 1 is arranged an accepted way of doing sth 2:
Wherein, E1Represent the amplitude of reference light, E2Represent the amplitude of object information light,Representing the PHASE DISTRIBUTION of object, (x y) represents the position of pixel, k in interferogramrRepresent the transmitance of transmission-type net amplitude spatial light modulator 200, formula 1 arranged an accepted way of doing sth 2:
Step S400: formula (2) is arranged the matrix form of an accepted way of doing sth (3) again:
Step S500: respectively by k1, k2, k3, k4In substitution formula 3, obtain 4 expression formulas；
Step S600: obtained by the 4 of step S500 expression formulasWith
Step S700: obtain againWith
Step S800: finally try to achieve the PHASE DISTRIBUTION being associated with interferogram:
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| CN109297888A (en) * | 2018-09-13 | 2019-02-01 | 福建师范大学 | A kind of white light real-time cell volume precision measuring instrument |
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| CN205449795U (en) * | 2016-03-22 | 2016-08-10 | 佛山市南海区欧谱曼迪科技有限责任公司 | White light interferometer phase place microscopic system based on intensity modulation |
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| CN102889853A (en) * | 2012-09-29 | 2013-01-23 | 哈尔滨工程大学 | Spectral synchronous phase-shift common-path interference microscopic-detection device and detection method |
| CN104089573A (en) * | 2014-07-03 | 2014-10-08 | 佛山市南海区欧谱曼迪科技有限责任公司 | Multi-channel white light common-channel interference microscopic chromatography system |
| CN205449795U (en) * | 2016-03-22 | 2016-08-10 | 佛山市南海区欧谱曼迪科技有限责任公司 | White light interferometer phase place microscopic system based on intensity modulation |
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| CN109297888A (en) * | 2018-09-13 | 2019-02-01 | 福建师范大学 | A kind of white light real-time cell volume precision measuring instrument |
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