CN205449795U - White light interferometer phase place microscopic system based on intensity modulation - Google Patents
White light interferometer phase place microscopic system based on intensity modulation Download PDFInfo
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Abstract
The utility model discloses a white light interferometer phase place microscopic system based on intensity modulation through having improved the light path design, utilizes pure amplitude spatial light modulator to replace pure phase place spatial light modulator, can control the light intensity of reference light, when referring to the light intensity change, interferes the light intensity to change thereupon, if known amplitude type spatial light modulator's adjustment curve, just can be in the hope of each the information weight in the interference pattern, the light intemsity variation that this system produced is big, can use ordinary camera to obtain to interfere data, among this technical scheme, there is not the problem of incident angle in transmission type light path, has solved the problem of angle of incidence restriction.
Description
Technical field
This utility model relates to a kind of microscopic system, a kind of white light interference phase place microscopic system based on intensity modulated.
Background technology
Simple microscope imaging is only so that the amplitude variations (brightness) of light and wavelength change (color) can be observed, but the micro-organisms lived is water white mostly, when light passes through, wavelength and amplitude variations be not notable, is so difficult to observation under light field spectroscopy clear.In order to overcome this difficulty, people have employed such as measures such as dyeing so that color and the brightness of tested object change, but for non-living body state when this method major part, when being applied to live body, effect is not especially desirable；It is of course also possible to by the aperture diaphragm reducing condenser lens, to increase comparison of light and shade, but so fine structure is difficult to be resolved, and brightness simultaneously decreases；Utilize details in a play not acted out on stage, but told through dialogues, fluorescence or polarization microscopy, although it is observed that living specimen, but effect is general.And popularizing along with computer, holographic interferometry has had significant progress, one of them most important part is exactly Phaseshifting interferometry (Phase-shiftingInterferometry, PSI), PSI is not a kind of concrete optical hardware structure, but a kind of data acquisition can being used under various measuring condition and data analysing method, PSI has at a relatively high measurement repeatable accuracy, precision and degree of stability.
At present, white light imaging and phase shift interference phase recuperation technique are combined preferable achievement of greatest concern with Spatiallightinterferencemicroscopy (SLIM) system of GabrielPopescu professor and team thereof, this system uses pure phase spatial light modulator, pure phase spatial light modulator is utilized to carry out phase shift, the phase shifting interference utilizing again highly sensitive sCMOS camera to obtain is acquired, by gathering four width phase shifting interferences, four-step phase-shifting algorithm is utilized to carry out phase recovery.This system accuracy is high, but the pure phase space light modulation (SLM) that this system uses is reflective, and SLM has strict requirements for incident angle, i.e. angle of incidence not can exceed that 7 °, and system building is brought very burden by this；Using Amici prism can solve the problem of incident angle, but other problem, i.e. light intensity can be brought simultaneously the most weak, gatherer process later is brought ill effect by this；It addition, this system is owing to being white light interference, in dephasing processes, the intensity of interference fringe is inconspicuous with the change of phase shift, so to use highly sensitive sCMOS camera as sampler, and the price of sCMOS camera and pure phase spatial light modulator is the most much more expensive, is not suitable for further genralrlization
Therefore, prior art has yet to be improved and developed.
Utility model content
The purpose of this utility model is to provide a kind of white light interference phase place microscopic system based on intensity modulated, it is intended to solve interferogram gray-value variation narrow range in dephasing processes and the high problem of equipment cost.
The technical solution of the utility model is as follows:
A kind of white light interference phase place microscopic system based on intensity modulated, wherein, including:
Microscopie unit, for micro-imaging；
First battery of lens, is placed in after the imaging surface of microscopie unit；
Transmission-type net amplitude spatial light modulator, for the light after Fourier transformation is carried out subregion intensity modulated, is placed on the back focal plane of the first battery of lens；
Second battery of lens, is placed in transmission-type net amplitude spatial light modulator rear, with the first battery of lens composition 4f system；
Camera, for imaging of samples, is placed on the back focal plane of battery of lens.
Described white light interference phase place microscopic system based on intensity modulated, wherein, the distance of described first battery of lens and microscopie unit imaging surface is equal to the focal length of battery of lens itself.
Described white light interference phase place microscopic system based on intensity modulated, wherein, described microscopie unit includes collecting lens, aperture diaphragm, condenser lens, microcobjective, reflecting mirror and tube lens group, light source sequentially passes through collecting lens, aperture diaphragm, condenser lens, microcobjective, reflecting mirror and tube lens group, and testing sample is placed in above microcobjective.
Described white light interference phase place microscopic system based on intensity modulated, wherein, described light source uses Halogen light.
The beneficial effects of the utility model: this utility model is by providing a kind of white light interference phase place microscopic system based on intensity modulated, by improving light path design, net amplitude spatial light modulator is utilized to replace pure phase spatial light modulator, the light intensity of reference light can be controlled, when changing with reference to light intensity, interference light intensity changes therewith, if the adjustment curve of known amplitude type spatial light modulator, it is possible to try to achieve each information component in interferogram；The light intensity that native system produces changes greatly, it is possible to use general camera obtains interference data；In the technical program, there is not the problem of incident angle in transmission-type light path, solves the problem that angle of incidence limits.
Accompanying drawing explanation
Fig. 1 is the structural representation of white light interference phase place microscopic system based on intensity modulated in this utility model.
Detailed description of the invention
For making the purpose of this utility model, technical scheme and advantage clearer, clear and definite, this utility model is further described by the embodiment that develops simultaneously referring to the drawings.
As it is shown in figure 1, a kind of white light interference phase place microscopic system based on intensity modulated, including:
Microscopie unit, for micro-imaging；
First battery of lens 100, is placed in after the imaging surface of microscopie unit；
Transmission-type net amplitude spatial light modulator 200 (calling net amplitude SLM in the following text), for the light after Fourier transformation is carried out subregion intensity modulated, is placed on the back focal plane of the first battery of lens 100；
Second battery of lens 300, is placed in net amplitude SLM200 rear, forms 4f system with the first battery of lens 100；
Camera 400, for imaging of samples, is placed on the back focal plane of the second battery of lens 300.
In the technical program, the first battery of lens 100, net amplitude SLM200, the second battery of lens 300 and camera 400 collectively form phase imaging device, and 2 battery of lens constitute a 4f system so that finally can imaging on the imageing sensor of video camera；Net amplitude SLM200 controls the amplitude of reference light (low-frequency information light), by loading the pattern of different gray value on the SLM of amplitude type, completes the modulation to optical interference circuit；Then on camera, obtain the different interferogram with reference to light intensity, and then be calculated PHASE DISTRIBUTION.
Specifically, described first battery of lens 100 and the distance of microscopie unit imaging surface are equal to the focal length of battery of lens 100 own.
nullSpecifically，Described microscopie unit includes collecting lens 510、Aperture diaphragm 520、Condenser lens 530、Microcobjective 540、Reflecting mirror 550 and tube lens group 560，Described collecting lens 510、Aperture diaphragm 520、Condenser lens 530、Microcobjective 540、Reflecting mirror 550 and tube lens group 560 set gradually，Testing sample is placed in above microcobjective 540: the light that light source 570 sends is retrained (in the present system by aperture diaphragm 520 after collecting lens 510，In order to ensure the spatial coherence of light beam，Need to reduce aperture diaphragm 520 as far as possible，In combination with factors such as light intensity，Under 40 times of object lens，Typically the numerical aperture of aperture diaphragm 520 is controlled about 0.09)，The light sent from aperture diaphragm 520 is irradiated to testing sample after condenser lens 530，Testing sample is amplified by the microcobjective 540 below testing sample，After reflecting mirror 550，Light beam is diverted，The microscope imaging face being imaged onto in figure by tube lens group 560.In the present embodiment, described light source 570 uses Halogen light, thus avoids the appearance using the laser with high temporal coherence to cause laser speckle；And owing to the white light of Halogen light itself has extremely short coherence length (about 1.2 microns), the space background noise of imaging is just controlled in sub-nanometer scale.
In the technical program, the imaging surface of microscopie unit is positioned at the front focal plane of the first battery of lens 100, the back focal plane of the first battery of lens 100 is placed a transmission-type net amplitude spatial light modulator 200, the light of microscopie unit imaging surface is after the Fourier transformation effect of the first battery of lens 100, low-frequency information and high-frequency information separate on net amplitude SLM200, make above net amplitude SLM200, to load a pattern matched with image spectrum, thus only change the amplitude of low-frequency information light, make reference light to control.
A kind of phase shift interference phase calculation method of white light interference phase place microscopic system based on intensity modulated as described above, specifically includes following steps:
Step S100: change light source 570 intensity, obtains the 4 width imaging patterns with varying strength by white light interference phase place microscopic system based on intensity modulated；
The different gray values that step S200:4 width imaging pattern is had according to different light source 570 intensity are converted into different transmitances by transmission-type net amplitude spatial light modulator 200, and transmission-type net amplitude spatial light modulator 200 transmitance of 4 different gray values is respectively as follows: k1, k2, k3, k4；
Step S300: formula 1 is arranged an accepted way of doing sth 2:
Wherein, E1Represent the amplitude of reference light, E2Represent the amplitude of object information light,Representing the PHASE DISTRIBUTION of object, (x y) represents the position of pixel, k in interferogramrRepresent the transmitance of transmission-type net amplitude spatial light modulator 200, formula 1 arranged an accepted way of doing sth 2:
Step S400: again by the matrix form of formula (2) arrangement accepted way of doing sth (3):
Step S500: respectively by k1, k2, k3, k4In substitution formula 3, obtain 4 expression formulas；
Step S600: obtained by the 4 of step S500 expression formulasWith
Step S700: obtain againWith
Step S800: finally try to achieve the PHASE DISTRIBUTION being associated with interferogram:
The technical program is by improving light path design, net amplitude spatial light modulator is utilized to replace pure phase spatial light modulator, the light intensity of reference light can be controlled, when changing with reference to light intensity, interference light intensity changes therewith, if the adjustment curve of known amplitude type spatial light modulator, it is possible to try to achieve each information component in interferogram；The light intensity that native system produces changes greatly, it is possible to use general camera obtains interference data；In the technical program, there is not the problem of incident angle in transmission-type light path, solves the problem that angle of incidence limits.
Should be understood that; application of the present utility model is not limited to above-mentioned citing; for those of ordinary skills, can be improved according to the above description or convert, all these modifications and variations all should belong to the protection domain of this utility model claims.
Claims (4)
1. a white light interference phase place microscopic system based on intensity modulated, it is characterised in that including:
Microscopie unit, for micro-imaging；
First battery of lens, is placed in after the imaging surface of microscopie unit；
Transmission-type net amplitude spatial light modulator, for the light after Fourier transformation is carried out subregion intensity modulated, is placed on the back focal plane of the first battery of lens；
Second battery of lens, is placed in transmission-type net amplitude spatial light modulator rear, with the first battery of lens composition 4f system；
Camera, for imaging of samples, is placed on the back focal plane of battery of lens.
White light interference phase place microscopic system based on intensity modulated the most according to claim 1, it is characterised in that the distance of described first battery of lens and microscopie unit imaging surface is equal to the focal length of battery of lens itself.
White light interference phase place microscopic system based on intensity modulated the most according to claim 1, it is characterized in that, described microscopie unit includes collecting lens, aperture diaphragm, condenser lens, microcobjective, reflecting mirror and tube lens group, light source sequentially passes through collecting lens, aperture diaphragm, condenser lens, microcobjective, reflecting mirror and tube lens group, and testing sample is placed in above microcobjective.
White light interference phase place microscopic system based on intensity modulated the most according to claim 3, it is characterised in that described light source uses Halogen light.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105699332A (en) * | 2016-03-22 | 2016-06-22 | 佛山市南海区欧谱曼迪科技有限责任公司 | Intensity modulation based white light interferometric phase microscopic system and phase calculation method thereof |
| US11077438B2 (en) | 2016-12-01 | 2021-08-03 | Berkeley Lights, Inc. | Apparatuses, systems and methods for imaging micro-objects |
| CN113568153A (en) * | 2021-09-27 | 2021-10-29 | 板石智能科技(武汉)有限公司 | Microscopic imaging equipment and nanoscale three-dimensional shape measurement system |
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2016
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105699332A (en) * | 2016-03-22 | 2016-06-22 | 佛山市南海区欧谱曼迪科技有限责任公司 | Intensity modulation based white light interferometric phase microscopic system and phase calculation method thereof |
| CN105699332B (en) * | 2016-03-22 | 2018-12-11 | 广东欧谱曼迪科技有限公司 | White light interference phase microscopic system and its phase calculation method based on intensity modulated |
| US11077438B2 (en) | 2016-12-01 | 2021-08-03 | Berkeley Lights, Inc. | Apparatuses, systems and methods for imaging micro-objects |
| TWI746715B (en) * | 2016-12-01 | 2021-11-21 | 美商伯克利之光生命科技公司 | Apparatuses, systems and methods for imaging micro-objects |
| US11731129B2 (en) | 2016-12-01 | 2023-08-22 | Berkeley Lights, Inc. | Apparatuses, systems and methods for imaging micro-objects |
| CN113568153A (en) * | 2021-09-27 | 2021-10-29 | 板石智能科技(武汉)有限公司 | Microscopic imaging equipment and nanoscale three-dimensional shape measurement system |
| CN113568153B (en) * | 2021-09-27 | 2021-12-21 | 板石智能科技(武汉)有限公司 | Microscopic imaging equipment and nanoscale three-dimensional shape measurement system |
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Address after: 528251 Guangdong Province Nanhai District of Foshan City, Guicheng Guicheng Ping Chau Street No. 1 Yongan Road, A block 504 Jingu Photoelectric Industrial community Patentee after: GUANGDONG OPTOMEDIC TECHNOLOGY CO.,LTD. Address before: 528251 Guangdong Province Nanhai District of Foshan City, Guicheng Guicheng Ping Chau Street No. 1 Yongan Road, A block 504 Jingu Photoelectric Industrial community Patentee before: FOSHAN CITY NANHAI DISTRICT OPTOMEDIC TECHNOLOGY CO.,LTD. |
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Address after: 528253 Room 503, Floor 5, Building A, Jingu Zhichuang Industrial Community, No. 2, Yong'an North Road, Dawu Community, Guicheng Street, Nanhai District, Foshan City, Guangdong Province (residence declaration) Patentee after: Guangdong Oupu Mandi Technology Co.,Ltd. Address before: 504, Building A, Jingu Optoelectronics Industry Community, No.1 Yong'an North Road, Guicheng Pingzhou, Guicheng Street, Nanhai District, Foshan, Guangdong 528251 Patentee before: GUANGDONG OPTOMEDIC TECHNOLOGY CO.,LTD. |