CN105423911A - Common-path digital holographic microscopic device and method based on optical grating defocusing - Google Patents
Common-path digital holographic microscopic device and method based on optical grating defocusing Download PDFInfo
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- CN105423911A CN105423911A CN201510756850.9A CN201510756850A CN105423911A CN 105423911 A CN105423911 A CN 105423911A CN 201510756850 A CN201510756850 A CN 201510756850A CN 105423911 A CN105423911 A CN 105423911A
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
- G01B9/027—Interferometers using holographic techniques in real time
Abstract
The invention discloses a common-path digital holographic microscopic device and method based on optical grating defocusing. The device comprises a light source, a to-be-detected object, a microscopic object lens, a correction object lens, a first lens, a second lens, an image sensor, and a computer. The device also comprises a one-dimensional periodic optical grating and a hole array. Light emitted by the light source passes through the to-be-detected object, the microscopic object lens and the correction object lens to come to the first lens. An outgoing beam, formed after the first lens converges the light, passes through the one-dimensional periodic optical grating to be divided into zero-level diffracted light and +1-level diffracted light, and is filtered by the hole array to form reference light and object light. The reference light and object light pass through the second lens to be converged into a light beam, and the light beam is received by a light receiving surface of the image sensor. An image signal output end of the image sensor is connected with an image signal input end of the computer. The device is simple and practicable, and is convenient to adjust. Moreover, the size of a to-be-detected object is not limited, and the view field of a detection window is used fully. The device can greatly reduce the complexity in determining a system carrier frequency, and improves the phase recovery algorithm efficiency.
Description
Technical field
The invention belongs to digital hologram detection field, particularly relate to a kind of common railway digital holographic microphotography apparatus and method based on grating out of focus.
Background technology
Digital hologram detection technique is based on principle of interference, utilize image recording sensor holography (interference) figure such as CCD or CMOS, and utilize computer digit reconstructed object surface topography etc., due to have noncontact, the whole audience quantitatively, the particular advantages such as three-dimensional imaging, be widely used in the fields of measurement such as biomedicine, micro-nano device, optics micro Process as extremely important test analysis means.Traditional digital hologram system adopts Michelson, Mach-Zehnder etc. to be separated light path interference, and its reference beam and measuring beam, through different path, are subject to the impact such as extraneous vibration, temperature fluctuation, poor anti jamming capability.Relative to separated light line structure, light channel structure is because reference beam and measuring beam are through same paths altogether, has extraordinary antijamming capability, thus within nearly ten years, is subject to Chinese scholars extensive concern.
(the G.Popescu such as the G.Popescu of Massachusetts Institute Technology, T.Ikeda, R.R.Dasari, M.S.Feld.Diffractionphasemicroscopyforquantifyingcellstr uctureanddynamics.Opt.Lett.2006, 31, 775-777) propose a kind of waypoint diffraction carrier-wave holograph technology altogether, grating is placed at the plane of incidence of 4f optical system, Diffraction of light wave by object under test is divided into multiple order of diffraction time, and at frequency plane placement space hole array, choose zero order light as with reference to light choose+1 grade of light as object light, and then obtain carrier-wave holograph figure by exposure collection, line structure antijamming capability is strong because adopt altogether for this technology, but to spatial pinhole filter array center spacing, it is higher that screen periods and the focal length of lens mate requirement each other, and need accurate adjustment, guarantee obtains desirable hologram.
For improving system rejection to disturbance ability, simplied system structure, the present inventor proposes the serial Dual-window common path interference detection method based on grating out of focus and device, as ZL201210424239.2 " interference with common path pick-up unit and method based on synchronous carrier frequency phase shift ", the plane of incidence of 4f optical system is divided into two windows, one of them is for placing object under test, another is for reference windows, and grating introducing carrier wave is placed at the frequency domain out of focus place of 4f optical system, and then obtain carrier-wave holograph figure, but because the plane of incidence is divided into two windows, not only detection window utilization factor only has 1/2, and object under test is size-constrained.
Summary of the invention
The object of this invention is to provide a kind of simple, easy to adjust, based on the common railway digital holographic microphotography device of grating out of focus.Object of the present invention also comprise provide a kind of can reduce certainty annuity carrier frequency complexity and improve Phase Retrieve Algorithm efficiency, a kind of common railway digital holographic microphotography method based on grating out of focus.
A kind of common railway digital holographic microphotography device based on grating out of focus, comprise light source 1, object under test 2, microcobjective 3, correct object lens 4, first lens 5, second lens 8, imageing sensor 9 and computing machine 10, also comprise One Dimension Periodic grating 6 and hole array 7, wherein λ is the optical wavelength of light source 1 transmitted beam;
The light beam that light source 1 is launched is incident to the first lens 5 after object under test 2, microcobjective 3 and correction object lens 4, outgoing beam after the first lens 5 converge is by being divided into 0 order diffraction light and+1 order diffraction light after One Dimension Periodic grating 6, reference light and object light directive second lens 8 are formed through hole array 7 filtering, the light beam that converges after the second lens 8 transmission is received by the light receiving surface of imageing sensor 9, and the image signal output end of imageing sensor 9 connects the picture signal input end of computing machine 10;
The focal length of the first lens 5 is f
1, the focal length of the second lens 9 is all f
2;
The cycle of One Dimension Periodic grating 6 is d, is positioned at the rear burnt f of the first lens 5
1-Δ f place and be positioned at the front burnt f of the second lens 8
2+ Δ f place, wherein Δ f is defocusing amount;
Hole array 7 is macropore A and the pin hole B of Δ f λ/d containing center distance, hole array 7 is positioned on the conjugate focal planes of the first lens 6 and the second lens 8, and wherein the diameter of pin hole B is≤1.22f
2λ/D, D are the visual field width of imageing sensor.
A kind of common railway digital holographic microphotography device based on grating out of focus of the present invention, also comprises:
1, One Dimension Periodic grating (6) be two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
2, the macropore A of hole array (7) allows 0 order diffraction light all by forming object light, and pin hole B allows+1 order diffraction light filtering by forming reference light,
Or: macropore A allows+1 order diffraction light all by forming object light, and pin hole B allows 0 order diffraction light filtering by forming reference light.
Based on a common railway digital holographic microphotography method for grating out of focus, comprise the following steps,
Step one: adjustment light source, the light beam that light source is launched through object under test, microcobjective and correction objective lens entrance to the first lens, through first lens convergence after outgoing beam directive One Dimension Periodic grating;
Step 2: the converging beam through One Dimension Periodic grating is divided into 0 order diffraction light and+1 order diffraction light, reference light and object light directive second lens are formed through hole array filtering, the light beam that converges after the second lens transmission becomes a width interferogram I, is collected computing machine and be subsequently can by computer by imageing sensor;
Step 3: the complex amplitude c (x, y) calculating object under test:
c(x,y)＝IFT{FT{I(x,y)Rr(x,y)}·LF}
Wherein, LF represents low-pass filtering, and FT represents Fourier transform, and IFT represents inverse Fourier transform, and Rr (x, y) is digital reference ripple,
Step 4: the complex amplitude obtaining object under test
Beneficial effect:
Device of the present invention has following distinguishing feature:
1. apparatus of the present invention structure is simple, and system location complexity requires low, and easy to adjust, does not also need the special optical elements such as any polarizer;
2. apparatus of the present invention adopt reflection type point diffraction to form light channel structure altogether, and system rejection to disturbance ability is strong, good stability.
Common railway digital holographic microphotography method based on grating out of focus has following characteristics:
1. on common line structure basis, grating out of focus light splitting technology and hole array filtering technique are combined, carrier-wave holograph figure is obtained by single exposure, not only ensure the real-time of system interference ability and detection, and method is simple, easy to adjust, and object under test size is not limited, can make full use of detection window visual field, this is one of innovative point being different from prior art;
2. hologram carrier frequency mapping relations are simple, determine easily, accurately to control by grating out of focus, thus greatly reduce the complexity of certainty annuity carrier frequency and improve Phase Retrieve Algorithm efficiency, and this is the innovative point two being different from prior art.
Accompanying drawing explanation
Fig. 1 is the common railway digital holographic microphotography apparatus structure schematic diagram based on grating out of focus;
Fig. 2 is hole array schematic diagram.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further details.
The object of the invention is for the deficiencies in the prior art part, grating out of focus light splitting technology and hole array filtering technique are combined, propose a kind of common railway digital holographic microphotography apparatus and method based on grating out of focus.
The invention belongs to digital hologram detection field, particularly a kind of common railway digital holographic microphotography apparatus and method based on grating out of focus.Based on common railway digital holographic microphotography device light source, microcobjective correction object lens, the first lens, One Dimension Periodic grating, hole array, the second lens, imageing sensor and the computing machine of grating out of focus.The present invention is simple, easy to adjust, and object under test size is not limited, makes full use of detection window visual field; Hologram carrier frequency mapping relations are simple, determine easily, accurately to control, greatly can reduce the complexity of certainty annuity carrier frequency and improve Phase Retrieve Algorithm efficiency by grating out of focus.
Label declaration in Fig. 1: light source 1, object under test 2, microcobjective 3, corrects object lens 4, first lens 5, One Dimension Periodic grating 6, hole array 7, second lens 8, imageing sensor 9, computing machine 10.
The present invention includes wavelength is λ light source, collimating and beam expanding system, object under test, microcobjective, correction object lens, the first lens, the second lens, imageing sensor and computing machine, and this device is also provided with One Dimension Periodic grating and hole array.The light beam that light source is launched is through object under test, microcobjective and correction objective lens entrance to the first lens, outgoing beam after the first lens converge is by being divided into 0 order diffraction light and+1 order diffraction light after One Dimension Periodic grating, reference light and object light directive second lens are formed through hole array filtering, the light beam that converges after the second lens transmission is received by the light receiving surface of imageing sensor, and the image signal output end of imageing sensor connects the picture signal input end of computing machine; The focal length of the first described lens is f
1, the focal length of the second lens is all f
2; The cycle of One Dimension Periodic grating is d, is positioned at the rear burnt f of the first lens
1-Δ f place and be positioned at the front burnt f of the second lens
2+ Δ f place, wherein Δ f is defocusing amount; Hole array is macropore A and the pin hole B of Δ f λ/d containing center distance, is positioned on the conjugate focal planes of the first lens and the second lens, wherein the diameter of pin hole B is for being≤1.22f
2λ/D, D are the visual field width of imageing sensor.
One Dimension Periodic grating is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
The macropore A of hole array allows 0 order diffraction light all by forming object light, and pin hole B allows+1 order diffraction light filtering by forming reference light, or macropore A allows+1 order diffraction light all by forming object light, and pin hole B allows 0 order diffraction light filtering by forming reference light.
Based on a common railway digital holographic microphotography method for grating out of focus, comprise the steps:
1.. adjustment light source, the light beam that light source is launched is through object under test, microcobjective and correction objective lens entrance to the first lens, and the outgoing beam directive One Dimension Periodic grating after the first lens converge, is characterized in that:
2.. the converging beam through One Dimension Periodic grating is divided into 0 order diffraction light and+1 order diffraction light, reference light and object light directive second lens are formed through hole array filtering, the light beam that converges after the second lens transmission becomes a width interferogram I, is collected computing machine and be subsequently can by computer by imageing sensor;
3.. calculate the complex amplitude c (x, y) of testee:
c(x,y)＝IFT{FT{I(x,y)Rr(x,y)}·LF}
Wherein, LF represents low-pass filtering, and FT represents Fourier transform, and IFT represents inverse Fourier transform, and Rr (x, y) is digital reference ripple, can be expressed as
4.. calculate the complex amplitude of testee
Below in conjunction with Fig. 1 and Fig. 2, embodiment of the present invention is elaborated.
The inventive system comprises: light source 1, object under test 2, microcobjective 3, correct object lens 4, first lens 5, One Dimension Periodic grating 6, hole array 7, second lens 8, imageing sensor 9, computing machine 10, wherein light source 1 is wavelength 632.8nm laser instrument; The focal length of the first lens 5 and the second lens 8 is 200mm; Screen periods d=50 μm, defocusing amount Δ f=150 μm; The center distance of hole array macropore A and pin hole B is 1.9mm, and the diameter of pin hole B is≤1.22f
2λ/D.
The embodiment of detection method of the present invention is as follows: the light beam that light source 1 is launched forms the light beam expanded after collimating and beam expanding system 2, this light beam is incident to the first lens 6, the outgoing beam directive One Dimension Periodic grating 7 after the first lens 6 converge through object under test 3, microcobjective 4 and correction object lens 5; Converging beam through One Dimension Periodic grating 7 is divided into 0 order diffraction light and+1 order diffraction light, reference light and object light directive second lens 9 are formed through hole array 8 filtering, the light beam that converges after the second lens 9 transmission becomes a width interferogram I, is collected computing machine and processed by computing machine 11 by imageing sensor 10.
The complex amplitude c (x, y) utilizing computing machine 11 to calculate testee can obtain
c(x,y)＝IFT{FT{I(x,y)Rr(x,y)}·LF}
Wherein, LF represents low-pass filtering, and FT represents Fourier transform, and IFT represents inverse Fourier transform, and Rr (x, y) is digital reference ripple, can be expressed as
Thus obtain the complex amplitude of object under test
Claims (4)
1. the common railway digital holographic microphotography device based on grating out of focus, comprise light source (1), object under test (2), microcobjective (3), correct object lens (4), the first lens (5), the second lens (8), imageing sensor (9) and computing machine (10), it is characterized in that: also comprise One Dimension Periodic grating (6) and hole array (7), wherein λ is the optical wavelength of light source (1) transmitted beam;
The light beam that light source (1) is launched is through object under test (2), the first lens (5) are incident to after microcobjective (3) and correction object lens (4), outgoing beam after the first lens (5) converge is by being divided into 0 order diffraction light and+1 order diffraction light after One Dimension Periodic grating (6), reference light and object light directive second lens (8) are formed through hole array (7) filtering, the light beam that converges after the second lens (8) transmission is received by the light receiving surface of imageing sensor (9), the image signal output end of imageing sensor (9) connects the picture signal input end of computing machine (10),
The focal length of the first lens (5) is f
1, the focal length of the second lens (9) is all f
2;
The cycle of One Dimension Periodic grating (6) is d, is positioned at the rear burnt f of the first lens (5)
1-Δ f place and be positioned at the front burnt f of the second lens (8)
2+ Δ f place, wherein Δ f is defocusing amount;
Hole array (7) is upper contains macropore A and the pin hole B that center distance is Δ f λ/d, and hole array (7) is positioned on the conjugate focal planes of the first lens (6) and the second lens (8), and wherein the diameter of pin hole B is≤1.22f
2λ/D, D are the visual field width of imageing sensor.
2. a kind of common railway digital holographic microphotography device based on grating out of focus according to claim 1, is characterized in that: described One Dimension Periodic grating (6) is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
3. a kind of common railway digital holographic microphotography device based on grating out of focus according to claim 1, it is characterized in that: the macropore A of described hole array (7) allows 0 order diffraction light all by forming object light, pin hole B allows+1 order diffraction light filtering by forming reference light
Or: macropore A allows+1 order diffraction light all by forming object light, and pin hole B allows 0 order diffraction light filtering by forming reference light.
4., based on a microscopic method for the common railway digital holographic microphotography device based on grating out of focus according to claim 1, it is characterized in that: comprise the following steps,
Step one: adjustment light source, the light beam that light source is launched through object under test, microcobjective and correction objective lens entrance to the first lens, through first lens convergence after outgoing beam directive One Dimension Periodic grating;
Step 2: the converging beam through One Dimension Periodic grating is divided into 0 order diffraction light and+1 order diffraction light, reference light and object light directive second lens are formed through hole array filtering, the light beam that converges after the second lens transmission becomes a width interferogram I, is collected computing machine and be subsequently can by computer by imageing sensor;
Step 3: the complex amplitude c (x, y) calculating object under test:
c(x,y)＝IFT{FT{I(x,y)Rr(x,y)}·LF}
Wherein, LF represents low-pass filtering, and FT represents Fourier transform, and IFT represents inverse Fourier transform, and Rr (x, y) is digital reference ripple,
Step 4: the complex amplitude obtaining object under test
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