CN108180833A - Reflective synchronous phase-shifted digital holographic apparatus and method based on light splitting pupil - Google Patents
Reflective synchronous phase-shifted digital holographic apparatus and method based on light splitting pupil Download PDFInfo
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- CN108180833A CN108180833A CN201810015539.2A CN201810015539A CN108180833A CN 108180833 A CN108180833 A CN 108180833A CN 201810015539 A CN201810015539 A CN 201810015539A CN 108180833 A CN108180833 A CN 108180833A
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- light
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- pupil
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- speculum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
Abstract
The present invention relates to a kind of reflective synchronous phase-shifted digital holographic apparatus and method based on light splitting pupil, belong to digital hologram detection field.Parallel input light is divided into two beams, and light beam forms reference light after the second collimating and beam expanding system is reflected by the first speculum, irradiates the second Amici prism；Another Shu Yici by the first lens, be divided pupil entrance pupil and object lens after, parallel oblique incidence is on object under test, after object under test reflects, forms object light, successively after object lens, the emergent pupil for being divided pupil, the second speculum, grating and the second lens, the second Amici prism is irradiated；Object light and reference light converge to form three width phase shifting interferences after the second Amici prism, by imaging sensor synchronous acquisition and upload in computer, and object under test phase is calculated using computer.It is simple in structure, without 3-D scanning mechanism, is more suitable for scatterer 3-D quantitative high-resolution and measures in real time.
Description
Technical field
The invention belongs to digital hologram detection field, more particularly to a kind of reflective synchronous phase-shifted digital based on light splitting pupil
Holographic apparatus and method.
Background technology
Digital hologram is that a kind of non-contact, high-precision whole audience quantifies method for three-dimensional measurement, is widely used in optics
Surface deformation, thickness and cell measurement.Digital hologram is based on principle of interference, frequently with off-axis method, temporal phase-shifting method and synchronization
Phase shift method etc..Off-axis interferometry by introducing inclination angle between object light and reference light, makes interference pattern generate carrier wave, thus will be extensive
Item needed for complex phase position is detached with distracter, and the phase of object under test can be recovered using a width interference pattern, is had stronger
Real-time, but the spatial bandwidth utilization rate of imaging sensor is low.Phase shift method is coaxially interfered by object light and reference light, can be fully sharp
With the spatial bandwidth of imaging sensor, but temporal phase-shifting method need to record several phase shifting interferences of time series, and real-time is poor, nothing
Method measures dynamic object, while is easily introduced random phase noise；Synchronous phase shift method acquires several phase shift interferences by single exposure
Figure, it is real-time, and then can realize that moving object or dynamic process secure satisfactory grades and distinguish power three-dimensional measurement.
Structurally, Digital Holography can be divided into reflective and transmission-type again.Reflective structure is mainly used to measure
Opaque object, transmission-type structure are mainly used to measure transparent substance.With industrialized development, integrated, micromation is
Through becoming development trend, reflective digital holographic technique attracts wide attention, but measures light when body surface reflects,
Due to object surface appearance complexity, some stray lights are often introduced while measuring, the imaging for drastically influencing object under test is surveyed
Measure quality.
Zhao Weiqian of Beijing Institute of Technology etc. proposes a kind of confocal microscopy device based on light splitting pupil, such as ZL
201310404307.3 " a kind of light splitting pupil confocal laser Raman spectra test method and devices ", divide object lens window using pupil is divided
Mouthful, pupil is penetrated respectively as entrance pupil and outgoing, light beam is made tiltedly to focus on object under test, effectively inhibits sample to be tested
Surface stray light.But the device uses light focus point measurement structure, not only complicated, of high cost when completing three-dimensional measurement,
And real-time is poor.
Invention content
It is an object of the invention to be directed to the shortcoming of above-mentioned technology, provide it is a kind of can inhibit stray light based on light splitting
The reflective synchronous phase-shifted digital holographic apparatus of pupil, and also provide it is a kind of meet and applicable above device based on light splitting pupil it is anti-
It penetrates formula and synchronizes phase-shifted digital holographic method.
Realization method of the present invention is as follows：
It is a kind of based on light splitting pupil reflective synchronous phase-shifted digital holographic apparatus, including light source, the first collimating and beam expanding system,
First Amici prism, the second collimating and beam expanding system, the first speculum, the second Amici prism, imaging sensor and computer, the dress
It puts and further includes the first lens, light splitting pupil, object lens, the second speculum, grating and the second lens, the light beam of light source transmitting passes through first
Directional light is formed after collimating and beam expanding system collimator and extender, two-beam is divided by the first Amici prism；Light beam passes through second successively
After collimating and beam expanding system and the first speculum, irradiate the second Amici prism, another light beam successively by the first lens, light splitting pupil and
After object lens, parallel oblique incidence is on object under test, after object under test reflects, then passes through object lens, light splitting pupil, second successively instead
After penetrating mirror, grating and the second lens, the second Amici prism is irradiated；Converge light beam by imaging sensor after the second Amici prism
Light receiving surface receive, the picture signal input terminal of the image signal output end of imaging sensor connection computer；Described
One speculum is placed with optical axis direction overturning angle at 45 °；The back focal plane of first lens and the front focal plane of object lens are coplanar, object lens
The front focal plane for being conjugated front focal plane and the second lens is coplanar；Pupil is divided close to the entrance port plane of object lens；Object under test is in object lens
Back focal plane place；Second speculum is placed with optical axis direction overturning angle at 45 °；Grating is put in the front focal plane of the second lens
It puts；Imaging sensor is placed in the back focal plane of the second lens.
The invention can also include：
(1) light splitting pupil is divided into entrance pupil A and emergent pupil B, and entrance pupil A and the first lens common optical axis, emergent light
Pupil B and the second lens common optical axis.
(2) grating is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
A kind of holographic method of the reflective synchronous phase-shifted digital holographic apparatus based on light splitting pupil, includes the following steps：It adjusts
Whole light source makes the light beam that light source emits form directional light after the first collimating and beam expanding system collimator and extender, by the first light splitting rib
Mirror is divided into two-beam；Light beam after the second collimating and beam expanding system, the first speculum, forms reference light, irradiation second successively
Amici prism, it is characterised in that：This method further includes another light beam successively by the first lens, the entrance pupil and object of light splitting pupil
After mirror, parallel oblique incidence forms object light on object under test after object under test reflects, and goes out successively by object lens, light splitting pupil
0 grade and ± 1 order diffraction object light light beam, irradiation the second light splitting rib are generated after penetrating pupil, the second speculum, grating and the second lens
Mirror；Object light and reference light converge generation interference after the second Amici prism, three width phase shifting interferences are formed, by imaging sensor
Synchronous acquisition is simultaneously uploaded in computer；Using improving, three step phase shift Phase Retrieve Algorithms completion object under test three dimensional Phase is extensive
It is multiple.
Reflective phase-shifted digital holographic method based on light splitting pupil has following characteristics and advantageous effect：
1. relative to Digital Holography, the present invention is transformed into using pupil is divided, by incident beam by vertical incidence oblique
It penetrates, effectively inhibits the stray light of sample surfaces, measured so as to be more suitable for scatterer, this is the innovative point for being different from the prior art
One of；
2. relative to light splitting pupil confocal technology, oblique incidence focus on light beam is replaced with oblique incidence collimated light beam by the present invention, and
Interference technique is introduced, any sweep mechanism is not required to and three-dimensional whole field quantitative measurment can be completed, not only measuring speed is fast, resolving power
Height, and it is simple in structure, at low cost, and this is the two of the innovative point for being different from the prior art.
The device of the invention has following distinguishing feature：
1. apparatus of the present invention are suitble to scatterer 3-D quantitative high-resolution to measure in real time；
2. apparatus of the present invention are simple in structure, without 3-D scanning mechanism.
Description of the drawings
Fig. 1 is a kind of reflective synchronous phase-shifted digital holographic structure schematic diagram based on light splitting pupil；
Fig. 2 is light splitting pupil structure diagram.
Specific embodiment
Piece number explanation in figure：1 light source, 2 first collimating and beam expanding systems, 3 first Amici prisms, 4 second collimating and beam expanding systems,
5 first speculums, 6 first lens, 7 light splitting pupils, 8 object lens, 9 objects under test, 10 second speculums, 11 gratings, 12 second lens,
13 second Amici prisms, 14 imaging sensors, 15 computers, A are the entrance pupil for being divided pupil, and B is the emergent pupil for being divided pupil.
A kind of reflective synchronous phase-shifted digital holographic apparatus based on light splitting pupil shown in Fig. 1 expands including light source, the first collimation
Beam system, the first Amici prism, the second collimating and beam expanding system, the first speculum, the first lens, light splitting pupil, object lens, the second reflection
Mirror, grating, the second lens, the second Amici prism, imaging sensor and computer.
According to the path description of light, light source transmitting light beam formed after the first collimating and beam expanding system collimator and extender it is parallel
Light is divided into two-beam by the first Amici prism；Light beam after the second collimating and beam expanding system and the first speculum, irradiates successively
Second Amici prism, another light beam successively by the first lens, light splitting pupil and object lens after, parallel oblique incidence on object under test,
After object under test reflects, then successively after object lens, light splitting pupil, the second speculum, grating and the second lens, irradiation second
Amici prism；The light beam that converges after the second Amici prism is received by the light receiving surface of imaging sensor, the figure of imaging sensor
As the picture signal input terminal of signal output end connection computer；First speculum is put with optical axis direction inclination at 45 °
It puts；The back focal plane of first lens and the front focal plane of object lens are coplanar, and the front focal plane of the conjugation front focal plane and the second lens of object lens is total to
Plane；Pupil is divided close to the entrance port plane of object lens；Object under test is placed in the back focal plane of object lens；Second speculum and optical axis side
To slant setting at 45 °；Grating is placed in the front focal plane of the second lens；Imaging sensor is put in the back focal plane of the second lens
It puts.
Light splitting pupil is divided into entrance pupil A and emergent pupil B, and entrance pupil A and the first lens common optical axis, emergent pupil B
With the second lens common optical axis.
Grating is two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
A kind of reflective synchronous phase-shifted digital holographic method based on light splitting pupil, includes the following steps：Light source is adjusted, makes light
The light beam of source transmitting forms directional light after the first collimating and beam expanding system collimator and extender, is divided into two beams by the first Amici prism
Light；Light beam after the second collimating and beam expanding system, the first speculum, forms reference light successively, irradiates the second Amici prism,
It is characterized in that：This method further include another light beam successively by the first lens, be divided pupil entrance pupil and object lens after, it is parallel tiltedly
It is incident on object under test, object light is formed after object under test reflects, successively by object lens, the emergent pupil for being divided pupil, second
0 grade and ± 1 order diffraction object light light beam are generated after speculum, grating and the second lens, irradiates the second Amici prism；Object light and reference
Light converge after the second Amici prism generation interference, formed three width phase shifting interferences, by imaging sensor synchronous acquisition and on
It passes in computer；The recovery of object under test three dimensional Phase is completed using three step phase shift Phase Retrieve Algorithms are improved.
It elaborates below in conjunction with the accompanying drawings to the embodiment of the present invention.
The inventive system comprises：Light source 1, the first collimating and beam expanding system 2, the first Amici prism 3, the second collimator and extender system
The 4, first speculum 5, the first lens 6, light splitting pupil 7, object lens 8, object under test 9, the second speculum 10, grating 11, second unite thoroughly
Mirror 12, the second Amici prism 13, imaging sensor 14 and computer 15.Wherein light source is the He-Ne laser of wavelength 632.8nm；
First speculum 5 and optical axis direction slant setting at 45 °；First lens 6,8 and second lens 12 of object lens focal length be f=
200mm；The back focal plane of first lens 6 and the front focal plane of object lens 8 be coplanar, the conjugation front focal plane of object lens 8 and the second lens 12
Front focal plane is coplanar；Pupil 7 is divided close to the entrance port plane of object lens 8；Object under test 9 is placed in the back focal plane of object lens 8；Second is anti-
Mirror 10 is penetrated to place with optical axis direction overturning angle at 45 °；Grating 11 uses the period as 50 μm of one-dimensional Ronchi gratings, second thoroughly
The front focal plane of mirror 12 is placed；Imaging sensor 14 is placed in the back focal plane of the second lens 12.
The operating path of the device light is：The light beam that light source 1 emits shape after 2 collimator and extender of the first collimating and beam expanding system
Into directional light, two-beam is divided by the first Amici prism 3；Light beam is after the second collimating and beam expanding system 4 by the first speculum 5
After reflection, reference light is formed, irradiates the second Amici prism 13, another light beam is successively by the incidence of the first lens 6, light splitting pupil 7
After pupil A and object lens 8, parallel oblique incidence forms object light, successively by object lens on object under test 9 after the reflection of object under test 9
8th, 0 grade and ± 1 order diffraction object light are generated after the emergent pupil B of light splitting pupil 7, the second speculum 10,11 and second lens 12 of grating
Light beam irradiates the second Amici prism 13；Object light and reference light converge generation interference after the second Amici prism 13 and form interference
Scheme I-1、I0And I+1, acquired and uploaded in computer 15 by 14 single exposure of imaging sensor.
Calculate the phase distribution of testee
Wherein, P () represents normalization phase, i.e., will be in the range of interference pattern strength pull to (- 1,1).
Apparatus of the present invention are simple in structure, and without 3-D scanning mechanism, it is real-time to be more suitable for scatterer 3-D quantitative high-resolution
It measures.
Claims (4)
1. a kind of reflective synchronous phase-shifted digital holographic apparatus based on light splitting pupil, including light source (1), the first collimating and beam expanding system
(2), the first Amici prism (3), the second collimating and beam expanding system (4), the first speculum (5), the second Amici prism (13), image pass
Sensor (14) and computer (15), it is characterised in that：The device further includes the first lens (6), light splitting pupil (7), object lens (8), the
Two-mirror (10), grating (11) and the second lens (12), the light beam of light source (1) transmitting pass through the first collimating and beam expanding system (2)
Directional light is formed after collimator and extender, two-beam is divided by the first Amici prism (3)；Light beam passes through the second collimator and extender system successively
After system (4) and the first speculum (5), the second Amici prism (13) is irradiated, another light beam is successively by the first lens (6), light splitting
After pupil (7) and object lens (8), parallel oblique incidence after object under test (9) reflection, then passes through object successively on object under test (9)
After mirror (8), light splitting pupil (7), the second speculum (10), grating (11) and the second lens (12), the second Amici prism (13) is irradiated；
The light beam that converges after the second Amici prism (13) is received by the light receiving surface of imaging sensor (14), imaging sensor (14)
The picture signal input terminal of image signal output end connection computer (15)；First speculum (5) and optical axis direction into
45° angle slant setting；The back focal plane of first lens (6) and the front focal plane of object lens (8) are coplanar, the conjugation front focal plane of object lens (8)
It is coplanar with the front focal plane of the second lens (12)；Pupil (7) is divided close to the entrance port plane of object lens (8)；Object under test (9) is in object
The back focal plane of mirror (8) is placed；Second speculum (10) is placed with optical axis direction overturning angle at 45 °；Grating (11) is in the second lens
(12) front focal plane is placed；Imaging sensor (14) is placed in the back focal plane of the second lens (12).
2. the reflective synchronous phase-shifted digital holographic apparatus according to claim 1 based on light splitting pupil, it is characterised in that：Institute
It states light splitting pupil (7) and is divided into entrance pupil A and emergent pupil B, and entrance pupil A and the first lens (6) common optical axis, emergent pupil B
With the second lens (12) common optical axis.
3. the reflective synchronous phase-shifted digital holographic apparatus according to claim 1 based on light splitting pupil, it is characterised in that：Institute
Grating (11) is stated as two-value One Dimension Periodic grating, sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
4. a kind of holography of the reflective synchronous phase-shifted digital holographic apparatus based on light splitting pupil based on described in claims 1 or 2
Method includes the following steps：Light source is adjusted, the light beam that light source emits is made to be formed after the first collimating and beam expanding system collimator and extender
Directional light is divided into two-beam by the first Amici prism；Light beam successively after the second collimating and beam expanding system, the first speculum,
Reference light is formed, irradiates the second Amici prism, it is characterised in that：This method further include another light beam successively by the first lens,
After being divided the entrance pupil and object lens of pupil, parallel oblique incidence forms object light, successively on object under test after object under test reflects
0 grade and ± 1 order diffraction object light light are generated after object lens, the emergent pupil for being divided pupil, the second speculum, grating and the second lens
Beam irradiates the second Amici prism；Object light and reference light converge generation interference after the second Amici prism, form three width phase shifts and do
Figure is related to, by imaging sensor synchronous acquisition and is uploaded in computer；It is treated using the completion of three step phase shift Phase Retrieve Algorithms is improved
Survey object dimensional phase recovery.
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| CN201810015539.2A CN108180833A (en) | 2018-01-08 | 2018-01-08 | Reflective synchronous phase-shifted digital holographic apparatus and method based on light splitting pupil |
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| CN201810015539.2A CN108180833A (en) | 2018-01-08 | 2018-01-08 | Reflective synchronous phase-shifted digital holographic apparatus and method based on light splitting pupil |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112525097A (en) * | 2020-12-18 | 2021-03-19 | 昆明理工大学 | Method for measuring three-dimensional deformation of object based on multiple sensors |
| CN113960040A (en) * | 2021-10-29 | 2022-01-21 | 杭州智微信息科技有限公司 | System and method for automatically detecting and identifying plasmodium |
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| JPH10301018A (en) * | 1997-04-23 | 1998-11-13 | Olympus Optical Co Ltd | Microphotogaphic focusing device |
| CN103217096A (en) * | 2013-03-18 | 2013-07-24 | 哈尔滨工程大学 | Three-window synchronous phase shifting interferometer |
| CN106292238A (en) * | 2015-05-20 | 2017-01-04 | 华中科技大学 | A kind of reflective off-axis digital holography micro-measurement apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112525097A (en) * | 2020-12-18 | 2021-03-19 | 昆明理工大学 | Method for measuring three-dimensional deformation of object based on multiple sensors |
| CN113960040A (en) * | 2021-10-29 | 2022-01-21 | 杭州智微信息科技有限公司 | System and method for automatically detecting and identifying plasmodium |
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Application publication date: 20180619 |