CN103424196B - Two flat-plate polarizing phase shift shearing interferometer - Google Patents

Two flat-plate polarizing phase shift shearing interferometer Download PDF

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CN103424196B
CN103424196B CN201310346686.5A CN201310346686A CN103424196B CN 103424196 B CN103424196 B CN 103424196B CN 201310346686 A CN201310346686 A CN 201310346686A CN 103424196 B CN103424196 B CN 103424196B
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stereotyped
polarization spectro
dull
shearing
shears
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CN103424196A (en
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曾爱军
刘蕾
朱玲琳
黄惠杰
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

A kind of two flat-plate polarizing phase shift shearing interferometer, feature is that it is formed and comprises the first polarization spectro shearing flat board, the second polarization spectro shearing flat board, polarizing phase shifter, imageing sensor and computing machine composition, and it is identical with the second polarization spectro shearing flat board that the first polarization spectro shears flat board.The present invention has the feature of aplanatism interference with common path, and structure is simple, compact, not easily affected by environment.

Description

Two flat-plate polarizing phase shift shearing interferometer
Technical field
The present invention relates to field of optical measurements, relate to a kind of two flat-plate polarizing phase shift shearing interferometer.
Background technology
Wavefront measurement technology is widely used in the fields such as optical manufacturing, laser communications, sensor detection.It utilizes the medium of reacting condition light wave process or the correlation properties of system on corrugated, and then can obtain the multiple relevant information of medium or system.Wavefront measurement adopts shear interference measuring method to realize usually, and tested corrugated is sheared the corrugated of copying and interferes by it with it, carry out solution parcel to interferogram and carry out wave-front reconstruction, the method is without the need to canonical reference face, and its structure is simple, compact, stable.Introduce phase shift and define phase shift shear interference measuring technique, precision and the spatial resolution of shear interference wavefront measurement can be improved further.
First technology [1] (Liu Xiaojun, Zhang Ming, Li Zhu. " altogether the development of road phase shift shear interference measuring instrument ". HUST's journal, the birefringence effect of uniaxial plate 27(3): 16-18(1999)) utilizing optical axis parallel with surface, achieve common light path lateral shearing interference, but aplanatism can not be met interfere, be not suitable for the detection of measuring low-coherence light source corrugated.
First technology [2] (Luan Zhu, Liu Li people, Liu Dean, Teng Shuyun. " Double-Shearing Wavefront Testing ". Acta Optica, 24(10): 1417-1420(2004)) utilize Jamin parallel flat to carry out beam splitting, interfere after closing bundle by four clapboards after being sheared respectively by another block Jamin parallel flat, this interferometer can realize almost aplanatism interferes, but this interferometer path-splitting shear interference, responsive to ambient vibration.
Summary of the invention
The object of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of two flat-plate polarizing phase shift shearing interferometer is provided.This interferometer has the advantage such as aplanatism and interference with common path.
Technical solution of the present invention is as follows:
A kind of two flat-plate polarizing phase shift shearing interferometer, feature is that its formation comprises the first polarization spectro shearing flat board, the second polarization spectro shears flat board, polarizing phase shifter, imageing sensor and computing machine composition, and the position relationship of above-mentioned component is as follows:
That the first polarization spectro shears flat board successively along incident light direction, second polarization spectro is sheared dull and stereotyped, polarizing phase shifter and imageing sensor, if incident light direction is along the Y-axis negative direction of rectangular coordinate system, the first described polarization spectro is sheared dull and stereotyped dull and stereotyped identical with the second polarization spectro shearing, the front surface that the first described polarization spectro shears dull and stereotyped front surface and the second described polarization spectro shearing flat board is all coated with polarization beam splitter, the rear surface that the first described polarization spectro shears dull and stereotyped rear surface and the second described polarization spectro shearing flat board is all coated with the film that is all-trans, it is 45 ° in YZ plane with the angle of XY plane that first polarization spectro shears slab normal, it is 45 ° in XZ plane with the angle of XY plane that second polarization spectro shears slab normal, the output terminal of described imageing sensor is connected with the input end of described computing machine,
The time domain phase shifter that described polarizing phase shifter is made up of quarter-wave plate and rotatable analyzer, or the spatial domain phase shifter be made up of beam splitter prism or diffraction element and polarizer group.
Tested light beam incides along Y-axis negative direction to be sheared on flat board with the first polarization spectro of XY plane angle at 45 °, is divided into the mutually perpendicular two bunch polarized lightwaves in polarization direction: s ripple and P ripple by its front surface.S ripple is directly sheared dull and stereotyped front surface reflection by the first polarization spectro and is formed reflection wave, and p ripple is reflected by rear surface through after its front surface, again forms another bundle reflection wave through its front surface.Two bundle reflection waves incide with 45 ° of angles along the Z direction shears flat board with the second polarization spectro of XY plane angle at 45 °, p ripple is directly sheared dull and stereotyped front surface reflection by the second polarization spectro, become ps light wave, and s ripple is through being reflected by rear surface after its front surface, again form another bundle reflection wave sp light wave through its front surface.Two bundle reflection waves form phase shift lateral shear interferograms through described polarizing phase shifter, described phase shift lateral shear interferograms is received by described imageing sensor, and importing described computing machine into, computing machine utilizes phase shift Processing of lateral shear interferograms software to carry out relevant treatment, obtains and restores tested corrugated.
With compared with first technology, device effect of the present invention is as follows:
1, structure is simple, compact, not easily affected by environment.
Aplanatism of the present invention is sheared flat board and is only made up of two pieces of polarization spectros shearing flat boards, achieve interference with common path, therefore its structure is simple, compact simultaneously, not easily affected by environment.
2, aplanatism is interfered.
It is dull and stereotyped that the present invention utilizes two pieces of polarization spectros to shear, and utilizes locus and polarization spectro to shear the compensation that dull and stereotyped characteristic achieves optical path difference, be applicable to the detection on low coherence light beam corrugated.
Accompanying drawing explanation
Fig. 1 is the light channel structure figure of the two flat-plate polarizing phase shift shearing interferometer of the present invention
Fig. 2 is the index path that light incides on the first polarization spectro shearing flat board
Fig. 3 is the index path that light incides on the second polarization spectro shearing flat board
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, but should not limit the scope of the invention with this.
First refer to Fig. 1, Fig. 1 is the light channel structure figure of the two flat-plate polarizing phase shift shearing interferometer of the present invention.As seen from Figure 1, the two flat-plate polarizing phase shift shearing interferometer of the present invention is sheared dull and stereotyped 2, second polarization spectro shearing flat board 3, polarizing phase shifter 4, imageing sensor 5 and computing machine 6 by the first polarization spectro and is formed, and the position relationship of above-mentioned component is as follows:
It is identical with the second polarization spectro shearing flat board 3 that the first described polarization spectro shears flat board 2, is optical parallel plate.Refer to Fig. 2 and Fig. 3, Fig. 2 is the index path that light incides on the first polarization spectro shearing flat board, and Fig. 3 light incides the index path on the second polarization spectro shearing flat board.The first described polarization spectro shears the front surface 2a of dull and stereotyped 2 and the front surface 3a of the second described polarization spectro shearing dull and stereotyped 2 is all coated with polarization beam splitter, and the rear surface 3b that the rear surface 2b of the first described polarization spectro shearing dull and stereotyped 2 and the second described polarization spectro shear flat board 3 is all coated with the film that is all-trans.Refer to Fig. 1, set up rectangular coordinate system XYZ as shown in the figure.Described incident light 1 is parallel to Y-axis, it is 45 ° with the angle of XY plane that first polarization spectro shears dull and stereotyped 2 perpendicular to YZ plane, it is 45 ° with the angle of XY plane that second polarization spectro shears dull and stereotyped 3 perpendicular to XZ plane, the time domain phase shifter that described polarizing phase shifter 4 can be made up of quarter-wave plate and rotatable analyzer, the spatial domain phase shifter that also can be made up of beam splitter prism or diffraction element and polarizer group.The output terminal of described imageing sensor 5 is connected with the input end of described computing machine 6;
Tested light beam 1 incides along Y-axis negative direction to be sheared on dull and stereotyped 2 with the first polarization spectro of XY plane angle at 45 °, is divided into the mutually perpendicular two bunch polarized lightwaves in polarization direction: s ripple and P ripple by front surface 2a.S ripple is directly reflected to form reflection wave by the front surface 2a that the first polarization spectro shears dull and stereotyped 2, and p ripple is reflected by its rear surface 2b through after front surface, again forms another bundle reflection wave through its front surface 2a.Two bundle reflection waves incide with 45 ° of angles along the Z direction shears dull and stereotyped 3 with the second polarization spectro of XY plane angle at 45 °, p ripple is directly reflected by the front surface 3a that the second polarization spectro shears dull and stereotyped 3, become ps light wave, and s ripple is through being reflected by its rear surface 3b after front surface, again form another bundle reflection wave sp light wave through its front surface 3a.Two bundle reflection waves form phase shift lateral shear interferograms through described polarizing phase shifter 4, described phase shift lateral shear interferograms is received by described imageing sensor 5, and importing described computing machine 6 into, computing machine 6 utilizes phase shift Processing of lateral shear interferograms software to carry out relevant treatment, obtains and restores tested corrugated.
The of the present invention pair of flat-plate polarizing phase shift shearing interferometer course of work is as follows:
Tested light beam 1 incides along Y-axis negative direction shears dull and stereotyped upper 2 with the first polarization spectro of XY plane angle at 45 °, the mutually perpendicular two bunch polarized lightwaves in polarization direction are divided into: s ripple and P ripple by front surface 2a, the direction of vibration of s ripple is perpendicular to plane of incidence YZ plane, the surface being parallel to the first polarization spectro shearing dull and stereotyped 2 simultaneously, and the direction of vibration of p ripple is parallel to plane of incidence YZ plane, the surface of shearing dull and stereotyped 2 with the first polarization spectro is 45 ° of angles.S ripple is directly reflected to form reflection wave by the front surface 2a that the first polarization spectro shears dull and stereotyped 2, and p ripple is reflected by rear surface 2b through after its front surface 2a, again forms another bundle reflection wave through front surface.First polarization spectro shears dull and stereotyped 3 optical path differences introduced:
OPD 1 = d • n • 2 ( 2 n 2 - 1 ) - - - ( 1 )
Wherein, d is the thickness that the first polarization spectro shears dull and stereotyped 2, and n is refractive index.Two bundle reflection waves incide with 45 ° of angles shears dull and stereotyped 3 with the second polarization spectro of XY plane angle at 45 °, now the direction of vibration of s ripple is parallel to plane of incidence XZ plane, the surface angle at 45 ° of dull and stereotyped 3 is sheared with the second polarization spectro, p ripple, perpendicular to plane of incidence XZ plane, is parallel to the surface that the second polarization spectro shears dull and stereotyped 3 simultaneously.P ripple is directly reflected by the front surface 3a that the second polarization spectro shears dull and stereotyped 3, become ps light wave, and s ripple is through being reflected by rear surface 3b after its front surface 3a, and printing opacity front surface 3a forms another bundle reflection wave sp light wave again.Second polarization spectro shears dull and stereotyped 3 optical path differences introduced:
OPD 2 = - d • n • 2 ( 2 n 2 - 1 ) - - - ( 2 )
Wherein, d is that the first polarization spectro shears dull and stereotyped thickness, and n is refractive index.Obtained by formula (1) (2), after the first polarization spectro shears flat board 2 and the second polarization spectro shears dull and stereotyped 3, the optical path difference of two-beam is compensated, and optical path difference is zero.The phase shift lateral shear interferograms that two bundle reflection waves are formed through described polarizing phase shifter 4, described phase shift lateral shear interferograms is received by described imageing sensor 5, and import described computing machine 6 into, computing machine 6 utilizes phase shift Processing of lateral shear interferograms software to carry out relevant treatment, thus restore tested corrugated, realize phase shift shear interference and measure.
Give the design parameter of an embodiment below:
Corrugated 1 to be measured is that the light beam of the helium-neon laser of 2mm expands through 5 power beam expansion lens and obtains by bore.Polarization spectro is sheared dull and stereotyped 2 and is made up of HK9L, and size is 50mm × 2mm.It is identical with polarization spectro shearing flat board 3 that polarization spectro shears flat board 2, and its extinction ratio is 10000:1.Polarizing phase shifter 4 gets quarter-wave plate and rotatable analyzer, and quarter-wave plate is quartz wave-plate, and retardation precision is λ/300, the polaroid of analyzer to be extinction ratio be 1000:1.Imageing sensor 5 is the CCD of pixel 600 × 400.
With compared with first technology, the present invention is solid is now total to light path and aplanatism phase shift shear interference, and structure is simple, compact, not easily affected by environment, is applicable to the detection on low coherence light beam corrugated.

Claims (2)

1. a two flat-plate polarizing phase shift shearing interferometer, be characterised in that it is formed and comprise the first polarization spectro shearing dull and stereotyped (2), the second polarization spectro shearing dull and stereotyped (3), polarizing phase shifter (4), imageing sensor (5) and computing machine (6), the position relationship of above-mentioned component is as follows:
That the first polarization spectro is sheared dull and stereotyped (2) successively along incident light (1) direction, second polarization spectro is sheared dull and stereotyped (3), polarizing phase shifter (4) and imageing sensor (5), if incident light (1) direction is along the Y-axis negative direction of rectangular coordinate system, it is identical with the second polarization spectro shearing dull and stereotyped (3) that the first described polarization spectro shears dull and stereotyped (2), the front surface (3a) of front surface (2a) and the second described polarization spectro shearing dull and stereotyped (3) that the first described polarization spectro shears dull and stereotyped (2) is all coated with polarization beam splitter, the rear surface (3b) of rear surface (2b) and the second described polarization spectro shearing dull and stereotyped (3) that the first described polarization spectro shears dull and stereotyped (2) is all coated with the film that is all-trans, it is 45 ° perpendicular to YZ plane with the angle of XY plane that first polarization spectro shears dull and stereotyped (2), it is 45 ° perpendicular to XZ plane with the angle of XY plane that second polarization spectro shears dull and stereotyped (3), the output terminal of described imageing sensor (5) is connected with the input end of described computing machine (6).
2. according to claim 1 pair of flat-plate polarizing phase shift shearing interferometer, it is characterized in that the time domain phase shifter that described polarizing phase shifter (4) is made up of quarter-wave plate and rotatable analyzer, or the spatial domain phase shifter be made up of beam splitter prism or diffraction element and polarizer group.
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