CN106767389B - Striking rope type simultaneous phase-shifting interference testing device based on prismatic decomposition phase shift - Google Patents
Striking rope type simultaneous phase-shifting interference testing device based on prismatic decomposition phase shift Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
Abstract
The present invention provides a kind of striking rope type simultaneous phase-shifting interference testing device based on prismatic decomposition phase shift, including being sequentially placed interference system, prismatic decomposition phase-shift system and imaging system along optical path direction, light from laser enters interference system, use quarter-wave plate front surface as the plane of reference, transmitted light is secondary back and forth to form the crossed polarized light for having measured piece information by quarter-wave plate and reflected light；Orthogonal polarised light enters prismatic decomposition phase-shift system, is divided into three beams phase deviation and is followed successively by 0, the parallel orthogonal polarised light of pi/2 and-pi/2；Imaging system is finally entered, imaged object lens are imaged on detector and form three width interference fringes again by polarizing film after shrink beam.The present invention can effectively prevent the interference of ambient vibration, have efficiency of light energy utilization height, compact-sized, the small feature of systematic error.
Description
Technical field
The present invention relates to interference of light testing field, especially a kind of striking rope type simultaneous phase-shifting based on prismatic decomposition phase shift is dry
Relate to test device.
Background technique
Striking rope type interferometer is a kind of thicker interferometer such as common, has the characteristics that reference light is total to optical path with test light,
It can be used for plane, spherical surface and aspherical surface shape measurement, the measurement of sphere curvature radius and various lens, prism, optics
The measurement of the corrugated transmission quality of system.
Phase shift interference is a kind of precision optics interferometry technology, orderly in reference path using accurate phase shifting device
Ground introduces specific phase shift value, changes the phase difference of reference light and test light to realize phase-modulation, is adopted using detector (such as CCD)
Collect digitized interference pattern, corrugated information included in interference pattern is accurately calculated by different corrugated derivation algorithms, surveys
Accuracy of measurement can reach 1/50 wavelength.Phase-moving method can be divided into time domain phase shift and airspace phase shift, and airspace shift-phase interferometry passes through
The acquisition mode of interference pattern is transformed into airspace from time domain acquisition and acquired by spatial Phase-shifting Method component, the difference in synchronization, space
Position obtains several phase-shift interferences, therefore also known as simultaneous phase-shifting interferometry.The technology is generally basede on polarization phase-shift theory, will
The reference light and test light of interferometer are divided into multichannel, introduce different phase shifts per polarizer (polarizing film or wave plate) is passed through all the way
Amount, thus can " instantaneous " collect required phase-shift interference, fundamentally avoid and vibrate this kind of time-varying error component pair
The influence of interferometry.Simultaneous phase-shifting interferometry is the best interference testing technology of current antivibration effect, and it is dry to also represent phase shift
The development trend of interferometer.According to the difference of spectroscopic modes, simultaneous phase-shifting interferometry can be divided into prismatic decomposition structure, diffraction element
Beam-splitting structure and micro-pixels mask structure three classes.
Simultaneous phase-shifting scheme based on prismatic decomposition has very much, such scheme obtains a pair of orthogonal polarization in interference system
After light is as reference light and test light, several roads are classified as using various polarizations and unpolarized Amici prism, per all the way
Different phase differences are introduced between reference light and test light, to realize spatial Phase-shifting Method.Chinese patent 101776488A is disclosed
A kind of method and realization optical path using simultaneous phase-shifting interference technique measurement optical phase, for measuring optical phase, wherein
Multiple BS have been used to be divided.This scheme has used six CCD to acquire each width phase-shift interference respectively, its advantage is that
Each width interference pattern all has very high spatial resolution, the disadvantage is that since the response of each CCD is not exactly the same, Space Consistency
More difficult to control, device volume is big, at high cost, and brings systematic error to be difficult to control by different CCD.
Hagyong Kihm(Fiber-diffraction interferometer for vibration
Desensitization Opt. Lett., 2005,36:2059-2061.Vol.31, No.16) et al. construct one kind
The optical fiber point-diffraction interferometer of simultaneous phase-shifting, the program equally realize light splitting, the combination using the assembling device of multiple BS and PBS
Device enables 4 road coherent lights be in same direction, receives each width phase-shift interference all by four quadrants of the same CCD.It should
Scheme uses the interference structure of safe graceful type, and structure is complicated for whole device, and systematic error is big and debugging difficulty is big, with particular reference to
Conjunction beam after the light splitting of optical tests light is difficult to precisely align.Liang-chia Chen(3-D surface profilometry
using simultaneous phase-shifting interferometry, Opt. Commu. 2010, 283:
3376-3382.) scheme that the another kind et al. proposed is combined based on PBS with BS.This scheme uses one piece of parallel flat and carries out
Light splitting, due to multiple reflections of the light in reference arm, the light intensity of interference image is difficult to control, and the utilization rate of luminous energy is low.
Summary of the invention
The purpose of the present invention is to provide a kind of striking rope type simultaneous phase-shifting interference testing device based on prismatic decomposition phase shift,
It can be realized the light splitting phase shift of prism, and be suitable for the total light channel structure of striking rope type, reduce the systematic error of interferometer, simultaneously
It can be realized simultaneous phase-shifting, reducing ring disturbance bring influences.
The technical solution for realizing the aim of the invention is as follows: a kind of striking rope type simultaneous phase-shifting based on prismatic decomposition phase shift is dry
Relate to test device comprising interference system, prismatic decomposition phase-shift system and the imaging system set gradually along optical path direction；Its
In, the interference system includes laser, beam-expanding collimation system, the 3rd BS Amici prism and the one or four that common optical axis is set gradually
/ mono- wave plate, plane to be measured are set to the rear of the first quarter-wave plate.
The prismatic decomposition phase-shift system includes the first BS Amici prism, the 2nd BS Amici prism, the first PBS polarization spectro
Prism, the 2nd PBS polarization splitting prism, the 3rd PBS polarization splitting prism, the 4th PBS polarization splitting prism, the second a quarter
Wave plate, third quarter-wave plate, the first sheet glass, the second sheet glass, the first right-angle prism, the second right-angle prism, third are straight
Angle prism, the 4th right-angle prism, the 5th right-angle prism and the 6th right-angle prism；The first BS Amici prism and second is arranged in common optical axis
Optical axis where BS Amici prism, the first BS Amici prism and the 2nd BS Amici prism is primary optic axis；Common optical axis sets gradually
One right-angle prism, the first PBS polarization splitting prism, the second quarter-wave plate and the 2nd PBS polarization splitting prism, the optics
Optical axis where element is the second optical axis；Common optical axis sets gradually the second right-angle prism, the first sheet glass and third right-angle prism,
Optical axis where the optical element is third optical axis；Common optical axis sets gradually the 4th right-angle prism, the 3rd PBS polarization spectro rib
Mirror and the 4th PBS polarization splitting prism, the optical axis of the optical element are the 4th optical axis；Common optical axis sets gradually the 5th right-angled edge
Mirror and the 6th right-angle prism, the optical axis where the 5th right-angle prism and the 6th right-angle prism are the 5th optical axis；Successively it is arranged in parallel
Third optical axis, the second optical axis, primary optic axis, the 4th optical axis and the 5th optical axis, the setting of the first right-angle prism are divided rib in the 2nd BS
On the reflected light path of mirror, the second right-angle prism is arranged on the reflected light path of the first PBS polarization splitting prism, the 2nd PBS polarization
Amici prism is arranged on the reflected light path of third right-angle prism；The reflection of the first BS Amici prism is arranged in 4th right-angle prism
In optical path, the 5th right-angle prism is located at the reflected light path of the 3rd PBS polarization splitting prism, and five right-angle prisms and the 3rd PBS are inclined
The second sheet glass is equipped between vibration Amici prism；4th PBS polarization splitting prism is located at the reflected light path of the 6th right-angle prism, and
Third quarter-wave plate is equipped between 4th PBS polarization splitting prism and the 6th right-angle prism；The setting of first BS Amici prism
On the reflected light path of the 3rd BS Amici prism.
Imaging system includes shrink beam system, polarizing film, imaging len and the ccd detector that common optical axis is set gradually；.
Above-mentioned all optical elements are coaxially contour relative to substrate, i.e., coaxial etc. relative to optical platform or instrument base
It is high.
Further, the laser issues laser beam, into beam-expanding collimation system, through beam-expanding collimation system collimator and extender
After be incident to the 3rd BS Amici prism, transmitted through the 3rd BS Amici prism, into the first quarter-wave plate, through the one or four/
One wave plate is reflected and is transmitted respectively, and the first reflected light through the first quarter-wave plate front surface reflection injects the 3rd BS and is divided rib
Mirror；The light transmitted through the first quarter-wave plate is incident to plane to be measured, obtains plane face type information to be measured, and reflex to first
Its polarization direction is rotated by 90 ° through the first quarter-wave plate as the second reflected light, and injects the 3rd BS points by quarter-wave plate
Light prism, the first reflected light and the second reflected light form the crossed polarized light for having tested surface information, have tested surface type information
Crossed polarized light the first BS spectroscope of prismatic decomposition phase-shift system is reflexed to through the 3rd BS Amici prism, be divided into to be measured
The the first cross-polarization transmitted light and the first cross-polarization reflected light of face type information, the first cross-polarization transmitted light enter the 2nd BS
Spectroscope is divided into the second cross-polarization transmitted light and the second cross-polarization reflected light through the 2nd BS spectroscope；First cross-polarization
Reflected light is reflected into the light splitting of the 3rd PBS Amici prism by right-angle prism, wherein P light transmission to the 4th PBS polarization spectro rib
Mirror, S light reflex to the second sheet glass, enter the 5th right-angle prism through the second sheet glass, are reflected into the through the 5th right-angle prism
Six right-angle prisms reflex to third quarter-wave plate through the 6th right-angle prism, generate the phase delay of pi/2, into the 4th PBS
Polarization splitting prism, converges after the reflection of the 4th PBS polarization splitting prism with transmission P light therein that form phase difference be-pi/2
Crossed polarized light, phase difference is-crossed polarized light of pi/2 enters the shrink beam system of imaging system；Second cross-polarization transmitted light
Into the shrink beam system of imaging system, the second cross-polarization reflected light back to the first right-angle prism is anti-through the first right-angle prism
It injects into the first PBS Amici prism, is divided into P light and S light, the P light of P light transmission, the reflection of S light, transmission passes through the second a quarter
Wave plate generates the phase delay of pi/2, and injects the 2nd PBS polarization splitting prism；The S light of reflection is successively anti-through the second right-angle prism
It is incident upon the first sheet glass, is incident to third right-angle prism through the first sheet glass, reflexes to the 2nd PBS polarization through third right-angle prism
Amici prism converges to form the cross-polarization that phase difference is pi/2 after the reflection of the 2nd PBS polarization splitting prism with the P light of transmission
Light, phase difference are that the crossed polarized light of pi/2 enters the shrink beam system of imaging system；Three-beam reduces mouth after shrink beam system
Diameter, then interference is generated through polarizing film, imaged lens imaging obtains three width phase-shift interferences on ccd detector.
Further, the fast axis direction of first quarter-wave plate and incident light polarization direction are at 45 °；Described second
The fast axis direction of quarter-wave plate is identical as incident light polarization direction；The fast axis direction and incident light of third quarter-wave plate
Polarization direction is identical.
Compared with prior art, the present invention its remarkable advantage are as follows:
(1) present apparatus is total to light channel structure using striking rope type, and systematic error is small, and structure is simply easy to adjustment.
(2) three width phase-shift interferences can be obtained simultaneously, can be acquired by single CCD, antivibration and strong antijamming capability.
(3) prismatic decomposition phase-shift system uses reflecting prism, and light is totally reflected in reflecting surface, without optical energy loss.
Detailed description of the invention
Fig. 1 is that the present invention is based on the striking rope type simultaneous phase-shifting interference testing apparatus structure schematic diagrams of prismatic decomposition phase shift.
Fig. 2 is prismatic decomposition phase-shift system structural schematic diagram of the invention.
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and detailed description.
A kind of striking rope type simultaneous phase-shifting interference testing device based on prismatic decomposition phase shift combined with Figure 1 and Figure 2: including edge
Interference system 1, prismatic decomposition phase-shift system 2 and the imaging system 3 that optical path direction is set gradually；Wherein, the interference system 1 wraps
Laser 4, beam-expanding collimation system 5, the 3rd BS Amici prism 6 and the first quarter-wave plate 7 that common optical axis is set gradually are included, to
Survey the rear that plane 8 is set to the first quarter-wave plate 7；Beam-expanding collimation system 5 is by inverted Galilean telescope or opens
General Le telescope configuration composition expands multiplying power and is codetermined by the bore of system and the bore of laser beam.
The prismatic decomposition phase-shift system 2 includes the first BS Amici prism 9, the 2nd BS Amici prism 10, the first PBS polarization
Amici prism 11, the 2nd PBS polarization splitting prism 12, the 3rd PBS polarization splitting prism 13, the 4th PBS polarization splitting prism 14,
Second quarter-wave plate 15, third quarter-wave plate 16, the first sheet glass 17, the second sheet glass 18, the first right-angle prism
19, the second right-angle prism 20, third right-angle prism 21, the 4th right-angle prism 22, the 5th right-angle prism 23 and the 6th right-angle prism
24；The first BS Amici prism 9 and the 2nd BS Amici prism 10 is arranged in common optical axis, and the first BS Amici prism 9 and the 2nd BS are divided rib
10 place optical axis of mirror is primary optic axis；Common optical axis sets gradually the first right-angle prism 19, the first PBS polarization splitting prism 11,
Two quarter-wave plates 15 and the 2nd PBS polarization splitting prism 12, the optical axis where the optical element are the second optical axis；Light altogether
Axis sets gradually the second right-angle prism 20, the first sheet glass 17 and third right-angle prism 21, the optical axis where the optical element
For third optical axis；Common optical axis sets gradually the 4th right-angle prism 22, the 3rd PBS polarization splitting prism 13 and the 4th PBS polarization point
Light prism 14, the optical axis of the optical element are the 4th optical axis；Common optical axis sets gradually the 5th right-angle prism 23 and the 6th right angle
Optical axis where prism 24, the 5th right-angle prism 23 and the 6th right-angle prism 24 is the 5th optical axis；Third light is successively arranged in parallel
Axis, the second optical axis, primary optic axis, the 4th optical axis and the 5th optical axis, the first right-angle prism 19 are arranged in the 2nd BS Amici prism 10
Reflected light path on, the second right-angle prism 20 is arranged on the reflected light path of the first PBS polarization splitting prism 11, and the 2nd PBS is inclined
Vibration Amici prism 12 is arranged on the reflected light path of third right-angle prism 21；The setting of 4th right-angle prism 22 is divided rib in the first BS
On the reflected light path of mirror 9, the 5th right-angle prism 23 is located at the reflected light path of the 3rd PBS polarization splitting prism 13, and five right-angled edges
The second sheet glass 18 is equipped between mirror 23 and the 3rd PBS polarization splitting prism 13；4th PBS polarization splitting prism 14 is located at the 6th
The reflected light path of right-angle prism 24, and the three or four point is equipped between the 4th PBS polarization splitting prism 14 and the 6th right-angle prism 24
One of wave plate 16；First BS Amici prism 9 is arranged on the reflected light path of the 3rd BS Amici prism 6；First sheet glass 17, second
Sheet glass 18, the second quarter-wave plate 15 are identical with the outer dimension of third quarter-wave plate 16.
Imaging system 3 includes shrink beam system 25, polarizing film 26, imaging len 27 and the CCD detection that common optical axis is set gradually
Device 28.Since incident light is directional light, shrink beam system 25 is the structure of Kepler telescope, the structure by common optical axis a piece of coke
Away from relatively long positive lens and the relatively short positive lens groups of another focal length at the focus of this two lens is overlapped, and passes through tune
Save the available different scaling multiplying power of the ratio between focal length of two positive lens.Due to needing to reach shrink beam purpose, prismatic decomposition is moved
The three-beam that phase system 2 comes out first is incident on the relatively long positive lens of focal length.
Above-mentioned all optical elements are coaxially contour relative to substrate, i.e., coaxial etc. relative to optical platform or instrument base
It is high.
Optical path is moved towards in the system are as follows: laser 4 issues laser beam, into beam-expanding collimation system 5, through beam-expanding collimation system
It unites and is incident to the 3rd BS Amici prism 6 after 5 collimator and extenders, transmitted through the 3rd BS Amici prism 6, into the first quarter-wave plate
7, it reflects and transmits respectively through the first quarter-wave plate 7, the first reflected light through 7 front surface reflection of the first quarter-wave plate
Inject the 3rd BS Amici prism 6；The light transmitted through the first quarter-wave plate 7 is incident to plane 8 to be measured, obtains plane 8 to be measured
Face type information, and the first quarter-wave plate 7 is reflexed to, being rotated by 90 ° its polarization direction through the first quarter-wave plate 7 is
Two reflected lights, and the 3rd BS Amici prism 6 is injected, the first reflected light and the second reflected light form and have the orthogonal of tested surface information
Polarised light, the crossed polarized light with tested surface type information reflex to prismatic decomposition phase-shift system 2 through the 3rd BS Amici prism 6
First BS spectroscope 9 is divided into the first cross-polarization transmitted light and the first cross-polarization reflected light with tested surface type information, the
One cross-polarization transmitted light enters the 2nd BS spectroscope 10, is divided into the second cross-polarization transmitted light and the through the 2nd BS spectroscope 10
Two cross-polarization reflected lights；Second cross-polarization transmitted light is directly incident in the shrink beam system 25 of imaging system 3, due to not having
By phase shifting device, therefore the additional phase error of the second cross-polarization transmitted light is 0；First cross-polarization reflected light is by right angle
Prism 22 is reflected into the light splitting of the 3rd PBS Amici prism 13, and wherein P light transmission to the 4th PBS polarization splitting prism 14, S light are anti-
It is incident upon the second sheet glass 18, enters the 5th right-angle prism 23 through the second sheet glass 18, is reflected into the through the 5th right-angle prism 23
Six right-angle prisms 24 reflex to third quarter-wave plate 16 through the 6th right-angle prism 24, generate the phase delay of pi/2, enter
4th PBS polarization splitting prism 14 converges to form phase after the reflection of the 4th PBS polarization splitting prism 14 with transmission P light therein
Potential difference is the-crossed polarized light of pi/2, and phase difference is-and the crossed polarized light of pi/2 enters the shrink beam system 25 of imaging system 3；Second
Cross-polarization transmitted light enters the shrink beam system 25 of imaging system 3, the second cross-polarization reflected light back to the first right-angle prism
19, it is reflected into the first PBS Amici prism 11 through the first right-angle prism 19, is divided into P light and S light, P light transmission, S light reflects, thoroughly
The P light penetrated generates the phase delay of pi/2 by the second quarter-wave plate 15, and injects the 2nd PBS polarization splitting prism 12；Instead
The S light penetrated successively reflexes to the first sheet glass 17 through the second right-angle prism 20, is incident to third right-angled edge through the first sheet glass 17
Mirror 21 reflexes to the 2nd PBS polarization splitting prism 12 through third right-angle prism 21, reflects through the 2nd PBS polarization splitting prism 12
Converge the crossed polarized light to form that phase difference is pi/2 with the P light of transmission afterwards, phase difference is that the crossed polarized light of pi/2 enters imaging
The shrink beam system 25 of system 3；Three beams crossed polarized light reduces bore after shrink beam system 25, then generates and do through polarizing film 26
It relating to, imaged lens 27 are imaged on ccd detector 28, and obtaining three amplitude shift phasors is respectively pi/2, and 0, the phase shift interference of-pi/2
Figure.
The fast axis direction of first quarter-wave plate 7 and incident light polarization direction are at 45 °；Second a quarter
The fast axis direction of wave plate 15 is identical as incident light polarization direction；The fast axis direction and incident light polarization of third quarter-wave plate 16
Direction is identical.
Embodiment 1
A kind of striking rope type simultaneous phase-shifting interference testing device based on prismatic decomposition phase shift, including successively set along optical path direction
Interference system 1, prismatic decomposition phase-shift system 2 and the imaging system 3 set.Wherein, the interference system 1 includes that common optical axis is successively set
The wavelength set is the linearly polarized light laser 4 of 632.8nm, beam diameter 2.54mm；The clear aperature of interference system is
25.4mm, therefore the enlargement ratio of beam-expanding collimation system 5 is 10X；3rd BS Amici prism, 6 splitting ratio is 50%；One or four/
For one wave plate, 7 front surface as the plane of reference, face type is λ/10, and rear surface plates anti-reflection film, transmissivity 99.9%, and plane 8 to be measured is arranged
In the rear of the first quarter-wave plate 7；The prismatic decomposition phase-shift system 2 includes the first BS Amici prism 9, the 2nd BS light splitting
Prism 10, the first PBS polarization splitting prism 11, the 2nd PBS polarization splitting prism 12, the 3rd PBS polarization splitting prism the 13, the 4th
PBS polarization splitting prism 14, the second quarter-wave plate 15, third quarter-wave plate 16, the first sheet glass 17, the second glass
Piece 18, the first right-angle prism 19, the second right-angle prism 20, third right-angle prism 21, the 4th right-angle prism 22, the 5th right-angle prism
23 and the 6th right-angle prism 24.The parameter request of prismatic decomposition phase-shift system 2 are as follows: 9 transmitted light intensity of the first BS Amici prism is total
The 66.6% of light intensity, reflective light intensity 33.3%, i.e. splitting ratio are 2:1；The splitting ratio of 2nd BS Amici prism 10 is 1:1；It is described
The fast axis direction of second quarter-wave plate 15 is identical as incident light polarization direction；The fast axis direction of third quarter-wave plate 16
It is identical as incident light polarization direction.All device clear aperatures in prismatic decomposition phase-shift system 2 all should be greater than or be equal to
25.4mm, operation wavelength 632.8nm.
Imaging system 3 includes shrink beam system 25, polarizing film 26, imaging len 27 and the CCD detection that common optical axis is set gradually
Device 28.The ratio between two positive lens focal lengths of shrink beam system 25 are 6:1, and the relatively long positive lens focal length of focal length is 180mm, light passing
Aperture is greater than or equal to 76.2mm, and the relatively short positive lens focal length of focal length is 30mm, and clear aperature is greater than or equal to 12.7mm；
The clear aperature of polarizing film 26 is greater than or equal to 12.7mm, wherein a branch of polarised light of polarization direction and crossed polarized light at
45° angle；The focal plane of imaging len 27 is overlapped with ccd detector, and clear aperature is greater than or equal to 12.7mm, ccd detector 28
Size be 1/2 inch, i.e. 12.7mm.
The laser 4 issues laser beam, incident after 5 collimator and extender of beam-expanding collimation system into beam-expanding collimation system 5
To the 3rd BS Amici prism 6, transmitted through the 3rd BS Amici prism 6, into the first quarter-wave plate 7, through the first a quarter
Wave plate 7 is reflected and is transmitted respectively, and the first reflected light through 7 front surface reflection of the first quarter-wave plate injects the 3rd BS and is divided rib
Mirror 6；The light transmitted through the first quarter-wave plate 7 is incident to plane 8 to be measured, obtains 8 face type information of plane to be measured, and reflex to
Its polarization direction is rotated by 90 ° by the first quarter-wave plate 7 through the first quarter-wave plate 7, is the second reflected light, and inject
3rd BS Amici prism 6, the first reflected light and the second reflected light form the crossed polarized light for having tested surface information, with to be measured
The crossed polarized light of face type information reflexes to the first BS spectroscope 9 of prismatic decomposition phase-shift system 2 through the 3rd BS Amici prism 6,
It is divided into the first cross-polarization transmitted light and the first cross-polarization reflected light with tested surface type information, the first cross-polarization transmission
Light enters the 2nd BS spectroscope 10, is divided into the second cross-polarization transmitted light through the 2nd BS spectroscope 10 and the second cross-polarization is reflected
Light；First cross-polarization reflected light is reflected into the light splitting of the 3rd PBS Amici prism 13 by right-angle prism 22, wherein P light transmission
To the 4th PBS polarization splitting prism 14, S light reflexes to the second sheet glass 18, enters the 5th right-angle prism through the second sheet glass 18
23, it is reflected into the 6th right-angle prism 24 through the 5th right-angle prism 23, reflexes to third a quarter through the 6th right-angle prism 24
Wave plate 16 generates the phase delay of pi/2, anti-through the 4th PBS polarization splitting prism 14 into the 4th PBS polarization splitting prism 14
Penetrate it is rear converge that form phase difference be the-crossed polarized light of pi/2 with transmission P light therein, phase difference is-crossed polarized light of pi/2
Into the shrink beam system 25 of imaging system 3；Second cross-polarization transmitted light enters the shrink beam system 25 of imaging system 3, and second just
It hands over polarized reflection light to reflex to the first right-angle prism 19, is reflected into the first PBS Amici prism 11 through the first right-angle prism 19, point
For P light and S light, P light transmission, S light reflects, and the P light of transmission generates the phase delay of pi/2 by the second quarter-wave plate 15,
And inject the 2nd PBS polarization splitting prism 12；The S light of reflection successively reflexes to the first sheet glass 17 through the second right-angle prism 20,
It is incident to third right-angle prism 21 through the first sheet glass 17, reflexes to the 2nd PBS polarization splitting prism through third right-angle prism 21
12, converge to form the crossed polarized light that phase difference is pi/2, phase with the P light of transmission after the reflection of the 2nd PBS polarization splitting prism 12
Potential difference is that the crossed polarized light of pi/2 enters the shrink beam system 25 of imaging system 3；Three-beam reduces mouth after shrink beam system 25
Diameter, then interference is generated through polarizing film 26, imaged lens 27 are imaged, and three width phase-shift interferences are obtained on ccd detector 28.
The present invention is based on the striking rope type simultaneous phase-shifting interference testing devices of prismatic decomposition phase shift to provide a kind of stable structure
It can be realized the light splitting phase shift of prism, and be suitable for the total light channel structure of striking rope type, reduce the systematic error of interferometer, simultaneously
It can be realized simultaneous phase-shifting, reducing ring disturbance bring influences.The interference pattern of three width difference phase shifts, image pair can be obtained simultaneously
It is better than spending, without optical energy loss.
Claims (3)
1. a kind of striking rope type simultaneous phase-shifting interference testing device based on prismatic decomposition phase shift, it is characterised in that: including along optical path
Interference system (1), prismatic decomposition phase-shift system (2) and the imaging system (3) that direction is set gradually；Wherein, the interference system
(1) include laser (4), beam-expanding collimation system (5), the 3rd BS Amici prism (6) and the one or four point that common optical axis is set gradually
One of wave plate (7), plane (8) to be measured be set to the rear of the first quarter-wave plate (7)；
The prismatic decomposition phase-shift system (2) is inclined including the first BS Amici prism (9), the 2nd BS Amici prism (10), the first PBS
It shakes Amici prism (11), the 2nd PBS polarization splitting prism (12), the 3rd PBS polarization splitting prism (13), the 4th PBS polarization point
Light prism (14), the second quarter-wave plate (15), third quarter-wave plate (16), the first sheet glass (17), the second glass
Piece (18), the first right-angle prism (19), the second right-angle prism (20), third right-angle prism (21), the 4th right-angle prism (22),
Five right-angle prisms (23) and the 6th right-angle prism (24)；Primary optic axis sets gradually the first BS Amici prism (9) and the 2nd BS altogether
Amici prism (10)；Totally second optical axis sets gradually the first right-angle prism (19), the first PBS polarization splitting prism (11), second
Quarter-wave plate (15) and the 2nd PBS polarization splitting prism (12)；Altogether third optical axis set gradually the second right-angle prism (20),
First sheet glass (17) and third right-angle prism (21)；It is inclined to set gradually the 4th right-angle prism (22), the 3rd PBS for totally fourth optical axis
Shake Amici prism (13) and the 4th PBS polarization splitting prism (14)；Totally fiveth optical axis set gradually the 5th right-angle prism (23) and
6th right-angle prism (24)；Third optical axis, the second optical axis, primary optic axis, the 4th optical axis and the 5th optical axis is successively arranged in parallel, the
One right-angle prism (19) is arranged on the reflected light path of the 2nd BS Amici prism (10), and the second right-angle prism (20) is arranged first
On the reflected light path of PBS polarization splitting prism (11), the 2nd PBS polarization splitting prism (12) is arranged in third right-angle prism (21)
Reflected light path on；4th right-angle prism (22) is arranged on the reflected light path of the first BS Amici prism (9), the 5th right-angle prism
(23) it is located at the reflected light path of the 3rd PBS polarization splitting prism (13), and five right-angle prisms (23) and the 3rd PBS polarization spectro rib
The second sheet glass (18) are equipped between mirror (13)；4th PBS polarization splitting prism (14) is located at the anti-of the 6th right-angle prism (24)
Optical path is penetrated, and is equipped with third quarter-wave plate between the 4th PBS polarization splitting prism (14) and the 6th right-angle prism (24)
(16)；First BS Amici prism (9) is arranged on the reflected light path of the 3rd BS Amici prism (6)；
Imaging system (3) includes shrink beam system (25), polarizing film (26), imaging len (27) and the CCD that common optical axis is set gradually
Detector (28)；
Above-mentioned all optical elements are coaxially contour relative to substrate, i.e., coaxially contour relative to optical platform or instrument base.
2. the striking rope type simultaneous phase-shifting interference testing device according to claim 1 based on prismatic decomposition phase shift, feature
Be: the laser (4) issues laser beam, into beam-expanding collimation system (5), after beam-expanding collimation system (5) collimator and extender
It is incident to the 3rd BS Amici prism (6), is transmitted through the 3rd BS Amici prism (6), into the first quarter-wave plate (7), through the
One quarter-wave plate (7) is reflected and is transmitted respectively, the first reflection light emission through the first quarter-wave plate (7) front surface reflection
Enter the 3rd BS Amici prism (6)；The light transmitted through the first quarter-wave plate (7) is incident to plane to be measured (8), is obtained to be measured flat
Face (8) face type information, and the first quarter-wave plate (7) are reflexed to, its polarization direction is revolved through the first quarter-wave plate (7)
Turning 90 ° is the second reflected light, and injects the 3rd BS Amici prism (6), and the first reflected light and the second reflected light are formed with tested
The crossed polarized light of face information, the crossed polarized light with tested surface type information reflex to prism through the 3rd BS Amici prism (6)
It is divided the first BS spectroscope (9) of phase-shift system (2), is divided into the first cross-polarization transmitted light with tested surface type information and the
One cross-polarization reflected light, the first cross-polarization transmitted light enter the 2nd BS spectroscope (10), through the 2nd BS spectroscope (10) point
At the second cross-polarization transmitted light and the second cross-polarization reflected light；First cross-polarization reflected light is anti-by right-angle prism (22)
It injects and is divided into the 3rd PBS Amici prism (13), wherein P light transmission to the 4th PBS polarization splitting prism (14), S light reflexes to
Second sheet glass (18) enters the 5th right-angle prism (23) through the second sheet glass (18), reflects into through the 5th right-angle prism (23)
Enter the 6th right-angle prism (24), reflexes to third quarter-wave plate (16) through the 6th right-angle prism (24), generate the phase of pi/2
Delay, into the 4th PBS polarization splitting prism (14), after the reflection of the 4th PBS polarization splitting prism (14) with transmission P therein
Light converges that form phase difference be the-crossed polarized light of pi/2, and phase difference is-and the crossed polarized light of pi/2 enters imaging system (3)
Shrink beam system (25)；Second cross-polarization transmitted light enters the shrink beam system (25) of imaging system (3), the second cross-polarization reflection
Light reflexes to the first right-angle prism (19), is reflected into the first PBS Amici prism (11) through the first right-angle prism (19), is divided into P
Light and S light, P light transmission, the reflection of S light, the P light of transmission generate the phase delay of pi/2 by the second quarter-wave plate (15), and
Inject the 2nd PBS polarization splitting prism (12)；The S light of reflection successively reflexes to the first sheet glass through the second right-angle prism (20)
(17), third right-angle prism (21) are incident to through the first sheet glass (17), it is inclined to reflex to the 2nd PBS through third right-angle prism (21)
It shakes Amici prism (12), converges to form phase difference as pi/2 with the P light of transmission after the reflection of the 2nd PBS polarization splitting prism (12)
Crossed polarized light, phase difference is that the crossed polarized light of pi/2 enters the shrink beam system (25) of imaging system (3)；Three-beam is through contracting
Bore is reduced after beam system (25), then generates interference, imaged lens (27) imaging, in ccd detector through polarizing film (26)
(28) three width phase-shift interferences are obtained on.
3. the striking rope type simultaneous phase-shifting interference testing device according to claim 1 based on prismatic decomposition phase shift, feature
Be: the fast axis direction of first quarter-wave plate (7) and incident light polarization direction are at 45 °；Second a quarter
The fast axis direction of wave plate (15) is identical as incident light polarization direction；The fast axis direction and incident light of third quarter-wave plate (16)
Polarization direction is identical.
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| CN110031481B (en) * | 2019-05-05 | 2021-11-12 | 苏州天准科技股份有限公司 | Square wave structured light illumination implementation method based on polarization |
| CN111578832A (en) * | 2020-04-30 | 2020-08-25 | 南京理工大学 | Short coherent light source interferometer-based long-stroke optical path matching device and experimental method |
| CN111929036B (en) * | 2020-07-28 | 2022-05-20 | 南京理工大学 | Double Fizeau cavity dynamic short coherence interferometry device and method |
| CN114459620B (en) * | 2022-01-29 | 2023-10-20 | 华南师范大学 | Device and method for generating pi phase shift between double interference channels through single wave plate |
| CN114812889A (en) * | 2022-05-06 | 2022-07-29 | 南京理工大学 | Large-caliber optical element stress detection device and detection method thereof |
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