CN105785386B - High-precision FM-CW laser ranging system based on F P etalons - Google Patents
High-precision FM-CW laser ranging system based on F P etalons Download PDFInfo
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- CN105785386B CN105785386B CN201610285929.2A CN201610285929A CN105785386B CN 105785386 B CN105785386 B CN 105785386B CN 201610285929 A CN201610285929 A CN 201610285929A CN 105785386 B CN105785386 B CN 105785386B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
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- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
The invention discloses the high-precision FM-CW laser ranging system based on F P etalons.Existing FM-CW laser ranging system is big by ectocine using fiber lengths as benchmark.The laser that tunable laser is launched in the present invention is divided into A0, B0 two-way through shunt, B0 roads enter Mach and increase Dare interference system, A0 route Amici prisms are divided into A1, A2 two-way, A1 roads enter measurement interference system, measurement interference system and the first photodetector detect to tested reflecting prism, produce interference signal；After A2 roads laser interferes with F P etalons, detect to obtain interference signal by the second photodetection；B0 roads laser increases Dare interference system with Mach and interfered, and detects to obtain interference signal by the 3rd photodetector；Three road synchronous sampling signals are sent to host computer processing and draw measured target distance by synchronous sampling system.The present invention eliminates the influence that extraneous factor increases the interfere arm optical path difference of Dare interference system two to Mach.
Description
Technical field
The invention belongs to optical technical field, and in particular to a kind of high-precision CW with frequency modulation based on F-P etalons swashs
Ligh-ranging system.
Background technology
Just it is applied to ranging field at the beginning of the birth of laser, the good directionality of laser, brightness is high, monochromaticjty is good etc.
Characteristic, determine its unique advantage in fields of measurement.In topographic survey, space technology, military field and engineering survey,
The introducing of laser measuring technique so that measurement range is continuously increased, and measurement accuracy improves constantly, and measuring method is constantly brought forth new ideas, and is swashed
Photo measure is all the hot research topic of fields of measurement all the time.
CW with frequency modulation (FMCW) laser ranging is a kind of interference formula large scale laser Models of Absolute Distance Measurement Based technology, has measurement essence
Spend height, absolute measurement, without phase fuzzy problem, achievable the advantages that being measured without cooperative target, can be that large space geometry measures
Amount provides convenient effective solution, has broad application prospects.
The poor modulation linearity degree of tunable laser is the principal element for limiting FM-CW laser ranging precision, sharp
It can largely suppress the nonlinear influence of laser modulation with mode of optical frequency interval resampling is waited.But existing tune
Frequency continuous wave range-measurement system using fiber lengths as benchmark, had a great influence by factors such as ambient temperature, vibrations cause precision compared with
It is low.
The content of the invention
The object of the invention is exactly the shortcomings that being to overcome existing FM-CW laser ranging system and deficiency, there is provided one
High-precision FM-CW laser ranging system of the kind based on F-P etalons.Structure of the present invention is more simple, suppresses to swash effective
While light device Modulation and Nonlinear influences, by the use of Fabry-Perot (F-P) etalon as ranging benchmark, system is further improved
The range accuracy of system.
The present invention include tunable laser, measurement interference system, shunt, Amici prism, the first photodetector, on
Position machine, synchronous sampling system, F-P etalons, the second photodetection, the 3rd photodetector and Mach increase Dare interference system；
The narrow linewidth CW with frequency modulation laser through optical frequency linear modulation of the tunable laser transmitting is divided into A0, B0 by shunt
Two-way, wherein, B0 roads enter Mach and increase Dare interference system, are divided into A1, A2 two-way by Amici prism after the collimated lens in A0 roads,
A1 roads enter measurement interference system, and A2 roads enter F-P etalons；Described measurement interference system and the first photodetector is used for
Tested reflecting prism is detected, produces interference signal sig1；After A2 roads laser interferes with F-P etalons, by second
Photodetection is detected, and obtains interference signal sig2；B0 roads laser and Mach increase Dare interference system and interfered, and by the
Three photodetectors are detected, and obtain interference signal sig3.Described synchronous sampling system to interference signal sig1, sig2 and
Sig3 is amplified, filters and synchronized sampling, and the road synchronous sampling signals of Bing Jiang tri-, which are sent to host computer, to be handled to obtain tested reflection
Prism draws the distance of measured target with referring to the optical path difference of reflecting prism in measurement interference system.
Described measurement interference system includes half wave plate, with reference to reflecting prism, quarter-wave plate one, polarization point
Light cube, polarizer, convex lens and quarter-wave plate two；A1 roads laser adjusts polarization direction via half wave plate,
And splitting ratio is controlled by polarization spectro cube, it is divided into two beams through polarization spectro cube, wherein a branch of through quarter-wave plate
One is referenced reflecting prism reflection, and another beam is reflected through quarter-wave plate two by tested reflecting prism, in polarization spectro cube
The reflecting surface of body converges for a branch of conjunction Shu Jiguang；Quarter-wave plate one and quarter-wave plate two are used for the laser of process is inclined
The direction that shakes is rotated by 90 °, so as to change by the cubical laser propagation direction of polarization spectro；Shu Jiguang is closed through successively through polarization
Detected after piece and convex lens by the first photodetector, obtain interference signal sig1.
Described host computer is corrected using interference signal sig2 as benchmark to interference signal sig3, obtains signal
Sig4, it is specially：Interference signal sig2 three peak values are a, b and c, interference signal sig3 three peak As, B and C respectively between
Every 6 cycles, adjustment interference signal sig3 obtains signal sig4, make signal sig4 be respectively separated 6 cycles three peak A ＇,
B ＇, C ＇ and interference signal sig2 three peak values a, b, c align one by one.By the use of signal sig4 as sampled clock signal, to dry
Relate to signal sig1 and carry out double sampling, obtain resampling signal sig5, carrying out time-frequency conversion to resampling signal sig5 can obtain
To tested reflecting prism and the optical path difference with reference to reflecting prism, and then draw the distance of measured target.
Compared with prior art, the beneficial effects of the invention are as follows：
By the use of Fabry-Perot etalon as benchmark, increase the interference signal that Dare interference system obtains to Mach and carry out
Calibration, eliminate because the factors such as extraneous vibration, temperature increase caused by the optical path difference of the interfere arm of Dare interference system two to Mach
Influence.Distance measurement result has been traceable to the length of Fabry-Perot etalon, has improved range accuracy.
Brief description of the drawings
Fig. 1 is the system structure diagram of the present invention；
Fig. 2 is to increase the procedure chart that the signal of Dare interference system is corrected to Mach using F-P etalons.
In figure：1st, tunable laser, 2, shunt, 3, collimation lens, 4, Amici prism, 5, half wave plate, 6,
With reference to reflecting prism, 7, quarter-wave plate one, 8, polarization spectro cube, 9, polarizer, 10, convex lens, the 11, first photoelectricity
Detector, 12, quarter-wave plate two, 13, tested reflecting prism, 14, host computer, 15, synchronous sampling system, 16, F-P standards
Tool, the 17, second photodetector, the 18, the 3rd photodetector, 19, Mach increase Dare interference system.
Embodiment
Technical solution of the present invention is further described with specific embodiment below in conjunction with the accompanying drawings.
As shown in figure 1, the high-precision FM-CW laser ranging system based on F-P etalons, including tunable laser
Device 1, measurement interference system, shunt 2, Amici prism 4, the first photodetector 11, host computer 14, synchronous sampling system 15,
F-P etalons 16, the second photodetection 17, the 3rd photodetector 18 and Mach increase Dare interference system 19；Tunable laser
The narrow linewidth CW with frequency modulation laser through optical frequency linear modulation that device 1 is launched divides for A0, B0 two-way by shunt 2, wherein, B0
Road enters Mach and increases Dare interference system 19, is divided after the collimated lens 3 in A0 roads by Amici prism 4 and entered for A1, A2 two-way, A1 roads
Interference system is measured, A2 roads enter F-P etalons 16；Measure interference system and the first photodetector 11 is used for tested reflection
Prism 13 is detected, and produces interference signal sig1；After A2 roads laser interferes with F-P etalons 16, visited by the second photoelectricity
Survey 17 to be detected, obtain interference signal sig2；B0 roads laser increases Dare interference system 19 with Mach and interfered, and by the 3rd
Photodetector 18 is detected, and obtains interference signal sig3.Synchronous sampling system 15 is to interference signal sig1, sig2 and sig3
It is amplified, filters and synchronized sampling, the road synchronous sampling signals of Bing Jiang tri- sends to the processing of host computer 14 and obtain tested reflection rib
Mirror 13 draws the distance of measured target with referring to the optical path difference of reflecting prism 6 in measurement interference system.
Measuring interference system includes half wave plate 5, with reference to reflecting prism 6, quarter-wave plate 1, polarization spectro
Cube 8, polarizer 9, convex lens 10 and quarter-wave plate 2 12；A1 roads laser is adjusted via half wave plate 5 and polarized
Direction, and splitting ratio is controlled by polarization spectro cube 8, be divided to through polarization spectro cube 8 for two beams, wherein it is a branch of through four/
One wave plate 1 is referenced reflecting prism 6 and reflected, and another beam is reflected through quarter-wave plate 2 12 by tested reflecting prism 13,
The reflecting surface of polarization spectro cube 8 converges for a branch of conjunction Shu Jiguang；Quarter-wave plate 1 and quarter-wave plate 2 12 are used
It is rotated by 90 ° in by the laser polarization direction of process, so as to change by the cubical laser propagation direction of polarization spectro；Close beam
Laser obtains interference signal sig1 through being detected successively after polarizer 9 and convex lens 10 by the first photodetector 11.
Interference signal sig2 and sig3 is as shown in Figure 2.Host computer 14 is using interference signal sig2 as benchmark to interference signal
Sig3 is corrected, and obtains signal sig4.In Fig. 2, interference signal sig2 three peak values are a, b and c, interference signal sig3's
Three peak As, B and C are respectively separated 6 cycles, and adjustment interference signal sig3 obtains signal sig4, is respectively separated signal sig4
Three peak A ＇, B ＇, C ＇ in 6 cycles and interference signal sig2 three peak values a, b, c align one by one.Made using signal sig4
For sampled clock signal, double sampling is carried out to interference signal sig1, resampling signal sig5 is obtained, to resampling signal sig5
It is that can obtain tested reflecting prism 13 and the optical path difference with reference to reflecting prism 6 to carry out time-frequency conversion, and then draws measured target
Distance.
Claims (3)
1. the high-precision FM-CW laser ranging system based on F-P etalons, including tunable laser, measurement interference system
System, shunt, Amici prism, the first photodetector, host computer, synchronous sampling system, F-P etalons, the second photodetection,
3rd photodetector and Mach increase Dare interference system, it is characterised in that：Tunable laser transmitting through optical frequency line
Property modulation narrow linewidth CW with frequency modulation laser be divided into A0, B0 two-way by shunt, wherein, B0 roads enter Mach increasing Dare do
Relate to system, A1, A2 two-way are divided into by Amici prism after the collimated lens in A0 roads, A1 roads enter measurement interference system, and A2 roads enter
F-P etalons；Described measurement interference system and the first photodetector are used to detect tested reflecting prism, produce dry
Relate to signal sig1；After A2 roads laser interferes with F-P etalons, detected by the second photodetection, obtain interference signal
sig2；B0 roads laser increases Dare interference system with Mach and interfered, and is detected by the 3rd photodetector, is interfered
Signal sig3；Described synchronous sampling system is amplified to interference signal sig1, sig2 and sig3, filters and synchronized sampling,
The road synchronous sampling signals of Bing Jiang tri- send to host computer and handle to obtain tested reflecting prism with referring to reflection in measurement interference system
The optical path difference of prism, and then draw the distance of measured target.
2. the high-precision FM-CW laser ranging system according to claim 1 based on F-P etalons, its feature exist
In：Described measurement interference system includes half wave plate, stood with reference to reflecting prism, quarter-wave plate one, polarization spectro
Cube, polarizer, convex lens and quarter-wave plate two；A1 roads laser via half wave plate adjust polarization direction, and by
Polarization spectro cube controls splitting ratio, is divided into two beams through polarization spectro cube, wherein a branch of through the quilt of quarter-wave plate one
Reflected with reference to reflecting prism, another beam is reflected through quarter-wave plate two by tested reflecting prism, cubical in polarization spectro
Reflecting surface converges for a branch of conjunction Shu Jiguang；Quarter-wave plate one and quarter-wave plate two are used for the laser polarization side of process
To being rotated by 90 °, so as to change by the cubical laser propagation direction of polarization spectro；Close Shu Jiguang through successively through polarizer and
Detected after convex lens by the first photodetector, obtain interference signal sig1.
3. the high-precision FM-CW laser ranging system according to claim 1 based on F-P etalons, its feature exist
In：Described host computer is corrected using interference signal sig2 as benchmark to interference signal sig3, obtains signal sig4, specifically
For：Interference signal sig2 three peak values are a, b and c, and interference signal sig3 three peak As, B and C were respectively separated for 6 week
Phase, adjustment interference signal sig3 obtain signal sig4, make signal sig4 be respectively separated 6 cycles three peak A ＇, B ＇, C ＇ and
Interference signal sig2 three peak values a, b, c align one by one；By the use of signal sig4 as sampled clock signal, to interference signal
Sig1 carries out double sampling, obtains resampling signal sig5, and carrying out time-frequency conversion to resampling signal sig5 can be tested
Reflecting prism and the optical path difference with reference to reflecting prism, and then draw the distance of measured target.
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| CN106997047B (en) * | 2017-06-07 | 2019-09-17 | 杭州电子科技大学 | FM-CW laser ranging method based on F-P etalon |
| CN108050941A (en) * | 2017-12-25 | 2018-05-18 | 西安工业大学 | A kind of CW with frequency modulation laser interference optical fiber displacement sensor and its displacement detecting method |
| CN108413872B (en) * | 2018-04-10 | 2020-03-10 | 天津科技大学 | Three-dimensional size precision measurement method based on Fabry-Perot multi-beam interference |
| CN109212550B (en) * | 2018-09-13 | 2020-12-01 | 杭州电子科技大学 | Frequency modulation continuous wave laser ranging method of integrated FP etalon |
| CN111442716B (en) * | 2020-05-19 | 2021-04-16 | 宝宇(武汉)激光技术有限公司 | Interferometric measuring device and method for introducing reference light |
| CN112764007A (en) * | 2020-12-25 | 2021-05-07 | 北醒（北京）光子科技有限公司 | Frequency modulation continuous wave laser radar system and laser radar scanning method |
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| JPS61223577A (en) * | 1985-03-28 | 1986-10-04 | Shibuya Kogyo Kk | Distance measurement utilizing laser beam |
| US6710880B1 (en) * | 2001-09-06 | 2004-03-23 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Interferometric apparatus for ultra-high precision displacement measurement |
| US7277180B2 (en) * | 2004-11-09 | 2007-10-02 | Zygo Corporation | Optical connection for interferometry |
| CN102163795B (en) * | 2011-03-15 | 2012-06-27 | 中国科学院半导体研究所 | Optoelectronic oscillator with tunable broadband frequency |
| CN105137444B (en) * | 2015-07-14 | 2017-07-25 | 杭州电子科技大学 | Double optical interference circuit FM-CW laser ranging signal processing methods |
| CN105093238B (en) * | 2015-09-07 | 2018-07-17 | 国耀量子雷达科技有限公司 | The Transflective dual edge anemometry laser radar that single-chamber F-P interferometer simple detectors are realized |
| CN205581298U (en) * | 2016-04-29 | 2016-09-14 | 杭州电子科技大学 | High accuracy FM -CW laser ranging system based on F -P etalon |
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