CN106323598A - Method for detecting spectrophotometric features of spectroscope of dual frequency laser interferometer - Google Patents
Method for detecting spectrophotometric features of spectroscope of dual frequency laser interferometer Download PDFInfo
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Abstract
Disclosed is a method for detecting spectrophotometric features of a spectroscope of a dual frequency laser interferometer. The method belongs to the technical field of laser application. The method comprises the following steps: double-frequency laser sequentially passes through a polarizer and a to-be-tested spectroscope, and a photodetector is used to receive the light intensity of the transmission path and the reflection path of the to-be-tested spectroscope; and a polarizer is rotated to change the light intensity at the two paths, and the energy transmissivity and reflectivity of the spectroscope, the location rotating angle error, the non-orthogonal angle of the laser source can be solved based on the measured light intensity changing curves of the two paths. The method takes light source errors, location errors and to-be-tested spectrophotometric feature parameters of the spectroscope into account, so as to not only solve the spectrophotometric feature parameters of the spectroscope, but also solve the non-orthogonal angle of the light source with measurement accuracy and reliability. The method can be used in a polarizing spectroscope and a non-polarizing spectroscope, utilizes two-path synchronous measurement, in order to effectively prevent light source fluctuation in measurement from influencing the measuring results.
Description
Technical field
The invention belongs to laser application technique field, particularly relate to the detection method of a kind of two-frequency laser interferometer spectroscope dichroism.
Background technology
In two-frequency laser interferometer, owing to the performance undesirable, optical component of lasing light emitter polarization state is undesirable and optical component position adjustment inaccuracy, the polarized light that there are two kinds of different frequencies in optical interference circuit can be caused, produce frequency alias, the phase place measured change is made to addition of an extra periodic phase place change, cause the phase place change measured the most linear with measured, i.e. create nonlinearity erron.Nonlinearity erron is to be changed for the cycle with optical wavelength with measured change, and in high performance laser interferometer, this error may have a few nanometer, and in general laser interferometer, nonlinearity erron is about 10-20nm, even more than 20nm.This is for nano-level measuring system, it will the precision measured is caused tremendous influence.In the error source producing nonlinearity erron, the undesirable elliptic polarization phenomenon referring to double-frequency laser source of lasing light emitter polarization state and two frequency laser bundles nonopiate；Optical component performance is undesirable is primarily referred to as the Phase delay that the polarizer introduces, and the spectroscopic behaviour of polarization spectroscope (PBS), unpolarized spectroscope (NPBS) is undesirable；Optics positions adjusts inaccuracy and refers between light source and optics, and the misaligned placement error caused of light transmission shaft between each optics.Wherein, a series of errors of polarization spectroscope and the unpolarized undesirable introducing of spectroscope spectroscopic behaviour are very important nonlinearity erron sources, and whether the quality of spectroscope spectroscopic behaviour is to weigh spectroscope can be for building the standard of high precision double frequency laser interferometer.
Chen Hongfang et al. have studied the undesirable impact [Chen Hongfang on nonlinearity erron of polarization spectroscope spectroscopic behaviour, Ding Xuemei, Zhong Zhi. the non-ideal impact on laser heterodyne interference nonlinearity erron of polarization spectroscope spectroscopic behaviour. Chinese laser, 2006,33 (11): 1562-1566]: research shows that the absorbance of polarization spectroscope and reflectance are the lowest i.e.T p WithR s The least, light leakage phenomena is the most serious, and the nonlinearity erron of measurement result is the biggest, can reach nanometer scale.
Zhong Zhi et al. have studied polarization spectroscope anglec of rotation error impact nonlinear on two-frequency laser interferometer [Zhong Zhi, Yang Gang, Chen Hongfang etc. the determination of polarization spectroscope anglec of rotation error. metering journal, 2006,27 (3A): 73-76]: research shows when polarization spectroscope exists placement error, the polarization printing opacity direction of polarization spectroscope is inconsistent with the polarization direction of Heterodyne Interferometer System Based, thus introduce nonlinearity erron, and placement error is the biggest, nonlinearity erron is the biggest, and error is in sub-nanometer scale.
Hou Wenmei et al. have studied unpolarized spectroscope impact nonlinear on two-frequency laser interferometer [Hou Wenmei, Zhang Yunbo, Xu Qixin. spectroscope impact nonlinear on heterodyne laser interferometer. mechanical engineering journal, 2008,44 (9): 163-168]: point out that unpolarized spectroscope exists impact to nonlinearity erron, and find that the impact on two-frequency laser interferometer nonlinearity erron of the unpolarized spectroscope is serious more than polarization spectroscope by series of experiments.
In order to reduce the spectroscope impact on two-frequency laser interferometer, need spectroscopical dichroism is detected.Liu Guofeng adopts in prism makes and detects spectroscope spectral transmission coefficient and reflection coefficient and extinction ratio [Liu Guofeng with the following method, Yan Yongzhi, Liu Biao etc. Prism Polarizing Spectroscope. piezoelectricity and acousto-optic, 1991,13 (5): 46-49]: the laser that light source is launched is directly coupled in multimode silica fibre, fiber exit light impinges perpendicularly on Glan prism through geodesic lens collimation, by inciding on sample after condenser lens, by rotating Glan prism, the change of detection emergent light output intensity obtains transmission coefficient and reflection coefficient parameter.Test process requires there is quiet clean environment, reduces vibrations as far as possible, eliminates extraneous natural light and other bias light, and transmitted light intensity uniformity when Glan prism rotates.This detection method have ignored fluctuating error and the light source polarization error of light source, although can manage to reduce error as far as possible, but can dramatically increase cost, and final testing result unavoidably has residual error.
In order to reduce the error that in spectroscope dichroism parameter, light source introduces, Cherry's fortune et al. uses the mode introducing circularly polarized light to measure spectroscope dichroism parameter, and [Cherry transports, Wu Fuquan, Wang Qing, Hao hall is medium. the research of big visual field 1/4 series of symmetrical film polarizing beamsplitter. and optoelectronic laser, 2010, 8 (21): 1167-1170]: in this method, laser rises through Glan-Taylor prism and to the rear forms circularly polarized light by quarter wave plate, then circularly polarized light incides on polarization spectroscope to be measured through the polaroid (such as glan thompson prism) that extinction ratio is higher, rotate glan thompson prism one week, by the light intensity of the two-way light that high-precision light power meter detection polarization spectroscope separates.Circularly polarized light power stability used in the requirement of this detection method, polarization state is preferable, but in reality, circularly polarized light exists the nonideal problem of polarization state, causes measurement result to there is error.
In sum, undesirable measure two-frequency laser interferometer of spectroscope light splitting produces bigger nonlinearity erron, in the existing method that its dichroism detects, can only measure on the basis of reducing light source error as far as possible, do not eliminate the LASER Light Source impact on measurement result, and in reality, light source is non-ideal is to exist, therefore existing theoretical model imperfection, the most also still have several drawbacks.
Summary of the invention
For the deficiency of existing measuring method, the present invention proposes a kind of two-frequency laser interferometer spectroscope dichroism detection method, its objective is to provide a kind of high-precision measuring method for spectroscope dichroism parameter measurement.
The purpose of the present invention is achieved through the following technical solutions:
A kind of two-frequency laser interferometer spectroscope dichroism detection method, it is characterized in that making double-frequency laser sequentially pass through polariser and spectroscope to be measured, by the polariser before rotation spectroscope to be measured, after making spectroscope light splitting to be measured, transmission road and reflex circuit output intensity change, then the change of two-way light intensity is measured simultaneously, and two-way light intensity curve analyzing and processing is realized the resolving of spectroscope dichroism parameter, method specifically includes following steps:
(1) by frequency it isWith, polarization ellipse angle beWith, polarization none angle beAnd with the spectroscope anglec of rotation beDouble-frequency laser by forming optical beat signal after polariser, its frequency is, amplitude is, whereinAzimuth for polariser light transmission shaft；
(2) optical beat signal described in step (1) is divided into the two-beam, transmission road beat signal frequency to be by spectroscope to be measured, amplitude is, reflection light beam beat signal frequency is, amplitude is, whereinFor spectroscope P ripple transmission coefficient,For spectroscope S ripple transmission coefficient,For spectroscope P wave reflection coefficient,For spectroscope S wave reflection coefficient；
(3) optical beat signal described in step (2) is ac voltage signal by photodetection circuit conversion, and its frequency is, transmission road voltage signal peak value is, reflex circuit voltage signal peak value is, whereinGain coefficient for photodetection circuit；
(4) the ac voltage signal entrance true effective value converting circuit described in step (3), and be converted to the virtual value of input exchange signal, transmission road is output as, reflex circuit is output as, its voltage output virtual value is obtained by AD Acquisition Circuit measurement；
(5) rotatable polarizer changes light transmission shaft azimuth, measure output voltage virtual value corresponding to two-way light intensity change and make ratio and be worth to, whereinFor spectroscope energy transmission rate,For spectroscope energy reflectivity；
(6) ratio curve described in step (5) take 2 different, asWith 2, simultaneous formula,,, solve and can calculate spectroscopical absorbanceAnd reflectance；
(7) the two-way light intensity separated spectroscope is sued for peace and obtains curve of suing for peace, according to formulaWithSpectroscope anglec of rotation error can be calculatedWith light source polarization none angle it is, whereinFor azimuth corresponding to minimum near summation curve 90 °,For the azimuth that minimum near summation curve 180 ° is corresponding.
The invention have the characteristics that and good effect:
(1) method in the present invention has considered polarization none and two kinds of non-ideal polarization characteristics of polarization ellipseization of double-frequency laser, consider spectroscopical absorbance and albedo measurement and spectroscopical placement error, system model is complete, obtained spectroscopic features parameter is accurate solution, and light source error is not the most taken into account by existing method, the solution of the simply approximation obtained, so the method for the present invention in theory has higher precision.
(2) present invention can either realize solving of spectroscope dichroism parameter, can complete again solving of light source non-orthogonal angles, it is possible to solve multiple parameter on the basis of one-shot measurement simultaneously.
(3) method in the present invention completes polarization spectroscope and unpolarized spectroscopical unified measurement model, and two-way synchro measure in system, effectively avoid the light source fluctuation impact on measurement result in measurement.
Accompanying drawing explanation
Fig. 1 spectroscope dichroism measurement scheme schematic diagram.
Fig. 2 nonideal double-frequency laser source polarization characteristic schematic diagram.
Fig. 3 polarization spectroscope two-way light intensity amplitude.
Fig. 4 polarization spectroscope two-way light intensity Amplitude Ration.
Fig. 5 unpolarized spectroscope two-way light intensity amplitude.
Fig. 6 unpolarized spectroscope two-way light intensity Amplitude Ration.
Fig. 7 two-way light intensity sum curve with、。
Detailed description of the invention
With preferred embodiment example, the present invention is described in detail with reference to the accompanying drawings:
Fig. 1 is spectroscope dichroism measurement scheme schematic diagram, double-frequency laser sequentially passes through polariser and spectroscope to be measured, by the polariser before rotation spectroscope to be measured, after making spectroscope light splitting to be measured, transmission road and reflex circuit output intensity change, receive the change of two-way light intensity with photoelectric switching circuit simultaneously, and by data collection and control circuit record data, send to host computer storage.The follow-up data to collecting process, and can calculate spectroscopical energy transmission rate, energy reflectivity and placement error, and the reflection non-orthogonal angles of dual-frequency laser source non-ideal characteristic, elliptic polarization angle.
Fig. 2 is nonideal double-frequency laser source polarization characteristic schematic diagram, and the double-frequency laser in figure comprises two different frequencies and the light component of polarization stateE 1 WithE 2 , they are designated as respectively the frequency of correspondenceWith；In actual application, owing to various non-ideal factors exist,E 1 WithE 2 It not strict line polarized light, but there is polarization ellipse polarizing angleWithElliptically polarized light, whereinE 1 For right-handed elliptical polarization light, elliptic polarization angle is,E 2 For left-handed elliptically polarized light, elliptic polarization angle is.Additionally,E 1 WithE 2 The angle of main shaft is not strict 90 °, the most misaligned with spectroscope light transmission shaft, and the P light light transmission shaft choosing polarization spectroscope PBS to be measured is Y-axis as X-axis, S light light transmission shaft, noteE 1 With the angle of spectroscope light transmission shaft X it is,E 2 With the angle of X-axis it is, the Jones matrix expression formula obtaining light source X-axis and Y-axis is:
In above formula,a 1 Witha 2 It is respectivelyE 1 WithE 2 Amplitude, non-ideal double-frequency laser through polariser formed optics clap time, polariser light transmission shaft as shown in phantom in Figure 2, with the angle of X-axis is,It is the azimuth of polariser light transmission shaft, then double-frequency laser optical field distribution on its light transmission shaft directionEIt is represented by:
Light beam passes through spectroscope light splitting postscriptFor P ripple transmission coefficient,For S ripple transmission coefficient,For P wave reflection coefficient,For S wave reflection coefficient, after obtaining outgoing spectroscope, the Jones matrix expression formula of transmitted light path (P light path) is:
The Jones matrix expression formula of reflected light path (S light path) is:
The light intensity expression being derived by transmitted light path and reflected light path is:
WhereinWithBeing the amplitude of output two-way light intensity, its expression formula is:
In formula:
In actual optical path, two-beam beat signal is converted to ac voltage signal through photoelectricity Acquisition Circuit, then voltage signal peak value in transmission road is
, reflex circuit voltage signal peak value is, wherein for the gain of photodetection circuit.
Ac voltage signal enters AC value change-over circuit, and change-over circuit output voltage is that the measurement magnitude of voltage of the virtual value of input exchange signal, i.e. transmitted light path is, reflected light path voltage measuring value is, its numerical value is obtained by AD Acquisition Circuit measurement again.
Rotatable polarizer, changes its light transmission shaft azimuth, AC value change-over circuit output voltage withAngle and change, two-way is measured voltage and does ratio:
WhereinFor spectroscope energy transmission rate,For spectroscope energy reflectivity.
Take 2 different, asWith, i.e. can get absorbance according to following formula simultaneous solutionWith reflectance:
Present invention achieves the Unified Model to the detection of polarization spectroscope and unpolarized spectroscope, the two is solved and only solves azimuth and choose difference.For polarization spectroscope PBS solves, be can be seen that by the polarization spectroscope two-way light intensity amplitude of Fig. 3, maximum and minimum the most all hardly result in, so needing in testing to avoid ultimate measure, find higher in resolution between 155 ° to 165 ° according to Fig. 4 polarization spectroscope two-way light intensity Amplitude Ration, during so solving polarization spectroscope, solve in this section of interval；For unpolarized spectroscope NPBS, Fig. 5 can be seen that extreme point can be surveyed, and in Fig. 6, two-way ratio curve is shallower, therefore can directly use maximum and minimum point to bring simultaneous equations energy transmission rate and reflectance into.
The present invention also can complete the detection to light source error Yu spectroscope placement error while solving spectroscopic features parameter.Fig. 2 describes the polarization state of actual double-frequency laser, places anglec of rotation error owing to existingWith two, double-frequency laser source frequencies of light component non-orthogonal angles, so the transverse of two elliptical polarization light components and spectroscopical light transmission shaft misaligned, there is angle, wherein。
The two-way light intensity summation separating spectroscope can obtain:, whenWhen being respectively less than 4 °, as it is shown in fig. 7, there is following relation in two-way light intensity sum y curve approximation:
WhereinIt is respectivelyAzimuthal value corresponding to two minimums, whereinFor summation the curve azimuth that minimum is corresponding near 90 °,For the summation curve azimuth that minimum is corresponding near 180 °.Just can be by this formulaSolve out, and then by non-orthogonal anglesWith spectroscope anglec of rotation errorSolve out:
Finally, also can according to Jiubin Tan in the literature (Jiubin Tan, Haijin Fu,
Pengcheng Hu, et al. A laser polarization state measurement method based on the
beat amplitude characteristic. Measurement Science and Technology, 2011, 22(8):
085302) method of mentioning solves LASER Light Source elliptic polarization angle.
From examples detailed above, method in the present invention has considered elliptic polarization error and the non-orthogonal errors of dual-frequency laser source, spectroscopical placement error and polarisation leakage error, measurement to all parameters completes simultaneously, obtained absorbance and reflectance do not comprise light source error, are to solve accurately；The present invention completes polarization spectroscope and the unification of unpolarized spectroscope dichroism solving model, it is achieved that different spectroscope unified models and method detection dichroism；Additionally, use two-way synchro measure mode, effectively avoid the light source fluctuation impact on measurement result in measurement.
Claims (1)
1. a two-frequency laser interferometer spectroscope dichroism detection method, it is characterized in that making double-frequency laser sequentially pass through polariser and spectroscope to be measured, by the polariser before rotation spectroscope to be measured, after making spectroscope light splitting to be measured, transmission road and reflex circuit output intensity change, then the change of two-way light intensity is measured simultaneously, and two-way light intensity curve analyzing and processing is realized the resolving of spectroscope dichroism parameter, method specifically includes following steps:
By frequency it is
With, polarization ellipse angle beWith, polarization none angle beAnd with the spectroscope anglec of rotation beDouble-frequency laser by forming optical beat signal after polariser, its frequency is, amplitude is, whereinAzimuth for polariser light transmission shaft；
Optical beat signal described in step (1) is divided into the two-beam, transmission road beat signal frequency to be by spectroscope to be measured, amplitude is, reflection light beam beat signal frequency is, amplitude is, whereinFor spectroscope P ripple transmission coefficient,For spectroscope S ripple transmission coefficient,For spectroscope P wave reflection coefficient,For spectroscope S wave reflection coefficient；
Optical beat signal described in step (2) is ac voltage signal by photodetection circuit conversion, and its frequency is, transmission road voltage signal peak value is, reflex circuit voltage signal peak value is, whereinGain coefficient for photodetection circuit；
Ac voltage signal entrance true effective value converting circuit described in step (3), and be converted to the virtual value of input exchange signal, transmission road is output as, reflex circuit is output as, its voltage output virtual value is obtained by AD Acquisition Circuit measurement；
Rotatable polarizer changes light transmission shaft azimuth, measures output voltage virtual value corresponding to two-way light intensity change and makees ratio and be worth to, whereinFor spectroscope energy transmission rate,For spectroscope energy reflectivity；
Ratio curve described in step (5) take 2 different, asWith, simultaneous formula,,, solve and can calculate spectroscopical absorbanceAnd reflectance；
The two-way light intensity separating spectroscope is sued for peace and obtains curve of suing for peace, according to formulaWithSpectroscope anglec of rotation error can be calculatedWith light source polarization none angle it is, whereinFor azimuth corresponding to minimum near summation curve 90 °,For the azimuth that minimum near summation curve 180 ° is corresponding.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107941477A (en) * | 2017-12-28 | 2018-04-20 | 中国科学院西安光学精密机械研究所 | A kind of spectroscope measuring method and device that can accurately control incidence angle |
| CN111707448A (en) * | 2020-05-20 | 2020-09-25 | 中国科学院西安光学精密机械研究所 | Efficiency detection device and efficiency detection method for optical component of space laser communication terminal |
| CN111781169A (en) * | 2019-04-03 | 2020-10-16 | 阳程科技股份有限公司 | Polarized light alignment detection device and detection method |
| CN113899533A (en) * | 2021-12-08 | 2022-01-07 | 杭州拓致光电科技有限公司 | Device and method for measuring performance of reflective volume grating |
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| CN104748835A (en) * | 2015-03-05 | 2015-07-01 | 哈尔滨工业大学 | Interference-mount separating type nonlinear error correcting method and device for laser interference vibration tester |
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| CN101832819A (en) * | 2010-04-28 | 2010-09-15 | 哈尔滨工业大学 | Method for synchronously measuring non-orthogonal polarization angle and elliptic polarization angle of dual-frequency laser |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107941477A (en) * | 2017-12-28 | 2018-04-20 | 中国科学院西安光学精密机械研究所 | A kind of spectroscope measuring method and device that can accurately control incidence angle |
| CN107941477B (en) * | 2017-12-28 | 2023-12-08 | 中国科学院西安光学精密机械研究所 | Spectroscope measurement method and device capable of accurately controlling incident angle |
| CN111781169A (en) * | 2019-04-03 | 2020-10-16 | 阳程科技股份有限公司 | Polarized light alignment detection device and detection method |
| CN111781169B (en) * | 2019-04-03 | 2023-08-22 | 阳程科技股份有限公司 | Polarized light alignment detection device and detection method |
| CN111707448A (en) * | 2020-05-20 | 2020-09-25 | 中国科学院西安光学精密机械研究所 | Efficiency detection device and efficiency detection method for optical component of space laser communication terminal |
| CN113899533A (en) * | 2021-12-08 | 2022-01-07 | 杭州拓致光电科技有限公司 | Device and method for measuring performance of reflective volume grating |
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