CN106338333A - High-robustness homodyne laser vibration measurer based on wave plate yawing and four-step adjustment method thereof - Google Patents
High-robustness homodyne laser vibration measurer based on wave plate yawing and four-step adjustment method thereof Download PDFInfo
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- CN106338333A CN106338333A CN201610667674.6A CN201610667674A CN106338333A CN 106338333 A CN106338333 A CN 106338333A CN 201610667674 A CN201610667674 A CN 201610667674A CN 106338333 A CN106338333 A CN 106338333A
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- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Abstract
The invention provides a high-robustness homodyne laser vibration measurer based on wave plate yawing and a four-step adjustment method thereof, and belongs to the technical field of laser vibration measurement. Beam splitting is performed by using a depolarization beam splitter so as to form a reference arm and a measurement arm. A quarter-wave plate and a half-wave plate are respectively introduced to the reference arm and the measurement arm. The yawing angle of the wave plates of the two arms is adjusted by using the four-step adjustment method. Additional phase shifting of the depolarization beam splitter is compensated by changing the phase delay of the wave plates so that reference light and measurement light outputted by an interference part are enabled to be orthogonal polarization light. According to the high-robustness homodyne laser vibration measurer based on wave plate yawing and the four-step adjustment method thereof, light path adjustment is simple, nonlinear error of the light path is reduced, robustness of the light path is enhanced, the requirements of real-time measurement can be met, the problems of significant influence of the wave plate rotation angle error on the non-orthogonal error caused by polarization aliasing and additional phase shifting in the technical scheme can be effectively solved, and thus the laser vibration measurer and the four-step adjustment method thereof have significant technical advantages in the field of ultra-precision vibration measurement.
Description
Technical field
The invention belongs to vibration measurement with laser technical field, relate generally to a kind of high robust homodyne laser based on wave plate driftage
Vialog and four steppings.
Background technology
Homodyne laser vibration measurer has that structure is simple, certainty of measurement is high, wide dynamic range, non-linear be easy to compensate etc. excellent
Point, is widely used in displacement kinetic measurement, vibration measurement and monitoring, ultraprecise equipment and the system integration, scientific research and reality
The field such as test.Adopt four-way homodyne orthogonal laser vibration measuring scheme more homodyne laser vibration measurer, interfere skill using Polarized light phase-shift
Art, obtains the orthogonal photosignal of two-way, by arctangent computation and continuous phase demodulation, realizes displacement, the high accuracy of vibration is surveyed
Amount.
Due to laser power drift, optical component is undesirable and the factor such as optical element error in mounting position, especially
It is that the optics such as polarization spectroscope pbs and polarizer have polarisation leakage, non-polarization Beamsplitter nbs has additional phase shift, ripple
There is the factors such as phase delay error in piece device, lead to the two-way orthogonal signalling of reality output exist direct current biasing, non-constant amplitude and
Non-orthogonal errors, thus it is real to bring nonlinearity erron, wherein direct current biasing error and non-constant amplitude error can adopt to measurement result
When backoff algorithm eliminate, and non-orthogonal errors be difficult to using real-Time Compensation algorithm eliminate.Consider the robust of homodyne laser vibration measurer
Property, the rotation of optical element especially wave plate is slightly away from specified angle and should not produce significant measure error.Error sensitivity
Degree is the important indicator weighing homodyne laser vibration measurer robustness.The non-orthogonal errors sensitivity of wave plate, that is, wave plate rotation is slight
Deviate the influence degree to non-orthogonal errors for the specified angle, constrain the reduction of non-orthogonal errors；The non-orthogonal errors spirit of wave plate
Sensitivity is bigger, and the non-orthogonal errors of homodyne laser vibration measurer are more difficult to adjust, and its robustness is poorer.Therefore, how to pass through light path
Innovation in structure and principle, reduces the non-orthogonal errors sensitivity of wave plate from principle, is that solution homodyne laser vibration measurer is same
When take into account the nonlinearity erron of sub- nanometer or even micromicron magnitude, the problem most efficient method of measurement and high robust in real time.
For existing various four-way homodyne orthogonal laser vibration measuring survey technology schemes, to its respective pluses and minuses and wave plate
Non-orthogonal errors sensitivity larger the reason be described below:
(1) nineteen ninety-five, Italian scholar greco proposes one kind first and is based on quarter-wave plate phase shift and polarization spectroscope
Pbs light splitting four-way homodyne orthogonal laser vibration measuring survey technology scheme (greco v, molesini g, quercioli f. "
Accurate polarization interferometer " .review of scientific instruments, 1995,
66 (7): 3729-3734.).This technical scheme can be used for the probe portion of homodyne orthogonal laser vialog, such as pre-optical path output
Signal form is the orthogonal linearly polarized light in two polarization directions, is designated as p light and s light, makes quick shaft direction and the p of 1/2nd wave plates
The polarization direction of light or s light becomes 22.5 ° of angles, then p light, s light become polarization direction after 1/2nd wave plates is 45 ° of directions
Two orhtogonal linear polarizaiton light, then through non-polarization Beamsplitter nbs equal proportion light splitting, wherein one tunnel is directly through polarization spectroscope pbs
Obtain the interference signal that two-way phase place is 0 ° and 180 °, another Lu Xianjing fast axle be 45 ° of directions quarter-wave plate become
Circularly polarized light, then obtain, through polarization spectroscope pbs light splitting, the interference signal that other two-way phase place is 90 ° and 270 °, finally give
The interference signal of four 90 ° of road phase.The program is polarized the attached of aliasing and probe portion by interference portion, probe portion
Plus phase shift affects, the rotation sensitivity of the non-orthogonal errors of probe portion 1/2nd wave plate is 1.5 °/1 °.
(2) 2015 years, Hu Pengcheng of Harbin Institute of Technology etc. it is also proposed one kind and is based on Space Rotating Wo Lasite rib
Four-way homodyne orthogonal laser vibration measuring survey technology scheme (pengcheng hu, et.al. " the dc-offset homodyne of mirror
Interferometer and its nonlinearity compensation " .optics express, 2015,23 (7):
8399-8408).In this technical scheme, such as interference portion exports the orthogonal linearly polarized light in two polarization directions, is designated as p light and s
Light, is divided into two bundles through non-polarization Beamsplitter nbs, and a branch of direct warp divides around the Wo Lasite prism of 45 ° of beam direction Space Rotating
Become two bundles, then received by two photodetectors, another Shu Xianjing optical axis is consistent with the polarization direction of a linearly polarized light
Quarter-wave plate, then it is divided into two bundles through another Wo Lasite prism around 45 ° of beam direction Space Rotating, then by another two
Photodetector receives.Finally give the interference signal of 90 ° of four road phase.The program is mixed by the polarization of interference portion equally
The additional phase shift impact of folded and probe portion, the non-orthogonal errors rotation sensitivity of probe portion quarter-wave plate is 2.7 °/
1°.
(3) 2015 years. the Cui Jun of Harbin Institute of Technology is peaceful etc. propose a series of based on non-polarization Beamsplitter with Wo La
This special prismatic decomposition four-way homodyne orthogonal laser vibration measuring survey technology scheme (1. Cui Jun is peaceful, what Zhang Qiang, Tan Jiubin. single channel is justified
Polarization interference and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, Chinese patent grant number: zl201510340554.0；
2. Cui Jun is peaceful, what Zhang Qiang, Tan Jiubin. and two-way circular polarization is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, in
State's patent authorization number: zl201510341864.4；3. Cui Jun is peaceful, what Zhang Qiang, long unit, Jiang Honglei, Tan Jiubin. single channel linear polarization
Interfere and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, Chinese patent grant number: zl 201510340370.4；4.
Cui Junning, what Zhang Qiang, Tan Jiubin. two-way linear polarization is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer, China
Patent authorization number: zl201510340552.1).In these technical schemes, interference portion adopts non-polarization Beamsplitter light splitting, passes through
Introduce a quarter-wave plate in measurement arm and reference arm, make interference portion export the orthogonal linear polarization in two polarization directions
Light or circularly polarized light, probe portion adopts non-polarization Beamsplitter and Wo Lasite prismatic decomposition, produces 90 ° of four road phase
Interference signal.These technical schemes eliminate polarization aliasing from principle, but the additional phase shift of non-polarization Beamsplitter makes wave plate
Non-orthogonal errors sensitivity increase problem do not obtain effectively solving.
To sum up, due to the polarization aliasing of polarization spectroscope and the factor such as additional phase shift of non-polarization Beamsplitter, lead to existing
Homodyne orthogonal laser vialog technical scheme in interference portion and probe portion, by light channel structure, principle and optics itself
The undesirable restriction of characteristic, has that wave plate non-orthogonal errors sensitivity is larger, up to 2 °/1 ° of non-orthogonal errors sensitivity
Left and right, thus leading to nonlinearity erron to be difficult to be adjusted to zero, its value is up to several nm even tens nm it is difficult to meet real-time, high-precision
Degree measurement, Asia nanometer especially of future generation or even the vibration measurement demand such as micromicron class precision and nanoscale amplitude.Therefore, such as
What passes through the innovation in light channel structure and principle, provides one kind can suppress nonlinearity erron and fall from light channel structure and principle
The homodyne orthogonal laser vibration measuring technical scheme of low wave plate non-orthogonal errors sensitivity, improves the robustness of homodyne laser vibration measurer,
Meaning is very great.
Content of the invention
The purpose of the present invention is that exist on light channel structure and principle for existing homodyne orthogonal laser vibration measuring technical scheme
The larger problem of wave plate non-orthogonal errors sensitivity, a kind of high robust homodyne laser vibration measurer based on wave plate driftage is provided
And four steppings, by the innovation of light channel structure and principle, light path adjustment is simple, makes wave plate non-in designated mounting angle position
Quadrature error is zero and the non-orthogonal errors sensitivity of wave plate is zero, decreases the nonlinearity erron of light path, improves light path
Robustness, can meet the demand of real-time measurement.
The technical solution of the present invention is:
A kind of high robust homodyne laser vibration measurer based on wave plate driftage, is made up of interference portion and probe portion, institute
State interference portion by laser instrument, optoisolator, the first non-polarization Beamsplitter, reference mirror, the first quarter-wave plate, 1/2nd
Wave plate becomes with measurement microscope group；Laser instrument sends linearly polarized light, by the first non-polarization Beamsplitter light splitting, reflected light after optoisolator
Form reference arm as reference light and the first quarter-wave plate, reference mirror, transmitted light as measurement light and 1/2nd wave plates,
Measurement mirror forms measurement arm, and the first quarter-wave plate is located between the first non-polarization Beamsplitter and reference mirror, 1/2nd ripples
Piece is located between the first non-polarization Beamsplitter and measurement mirror；Reference light through the first non-polarization Beamsplitter transmission, measures light through first
Non-polarization Beamsplitter reflects, and reference light forms interference light with measurement actinic light；Described probe portion by the second non-polarization Beamsplitter,
Second quarter-wave plate, mono- Wo Lasite prism, bis- Wo Lasite prism, the first photodetector, the second smooth electrical resistivity survey
Survey device, the 3rd photodetector and the 4th photodetector composition；Interference light forms first through the second non-polarization Beamsplitter transmission
Light beam and reflect to form the second light beam；First light beam is divided into an o light, an e light through mono- Wo Lasite prism, respectively by
One photodetector, the second photodetector receive；Second light beam first after the second quarter-wave plate, through bis- Wo Lasite
Prism is divided into the 2nd o light, the 2nd e light, is received by the 3rd photodetector, the 4th photodetector respectively；Described one or four point
One of wave plate and 1/2nd wave plates there is certain yaw angle.
A kind of high robust homodyne vibration measurement with laser four stepping based on wave plate driftage, the method comprises the following steps:
(1) optoisolator output light polarization direction and vertical direction angle are 45 °, 1/2nd wave plates, the one or four/
The fast axle of one wave plate and the second quarter-wave plate is respectively 0 °, 0 ° and 45 ° with vertical direction angle, and laser vertical incides two
/ mono- wave plate, the first quarter-wave plate and the second quarter-wave plate.
(2) driftage the first quarter-wave plate, makes the signal of the first photodetector and the reception of the second photodetector
Li Sa such as figure is the straight line for negative for the slope；
(3) driftage 1/2nd wave plates, make non-orthogonal errors minimum；
(4) driftage the first quarter-wave plate, makes the signal of the first photodetector and the reception of the second photodetector
Li Sa such as figure is the straight line for negative for the slope.
Described laser instrument is frequency stabilized carbon dioxide laser.
Described reference mirror, measurement mirror are plane reflection or corner cube reflector.
Described first non-polarization Beamsplitter, the second non-polarization Beamsplitter splitting ratio are 50%: 50%.
The good result of the technological innovation of the present invention and generation is:
(1) present invention proposes that a kind of four-way homodyne that can eliminate non-polarization Beamsplitter additional phase shift from principle is orthogonal to swash
Light vialog technical scheme.The program adopts non-polarization Beamsplitter light splitting to form reference arm and measurement arm, in reference arm and measurement
Quarter-wave plate and 1/2nd wave plates are introduced respectively on arm, non-polarization Beamsplitter is compensated by the phase delay changing wave plate
Additional phase shift, make interference portion export reference light and measurement light be crossed polarized light, wave plate can be made in theory in specified peace
Dress angle position non-orthogonal errors are zero and the non-orthogonal errors sensitivity of wave plate is zero, improve the robustness of light path.Pass through
Above-mentioned technological innovation, light path can lead to wave plate nonopiate due to polarization aliasing and additional phase shift in effectively solving prior art
The larger problem of error-sensitivity.
(2) present invention proposes a kind of four simple and quick steppings.The method is according to the beautiful Sa of four road interference signals such as
Diagram shape and the yaw angle of non-orthogonal errors value adjustment 1/2nd wave plates and quarter-wave plate, adjustment is simply effective,
Disclosure satisfy that the requirement of the additional phase shift eliminating non-polarization Beamsplitter with the phase delay of wave plate.
Brief description
Fig. 1 is a reality of the light path principle figure of the high robust homodyne laser vibration measurer based on wave plate driftage of the present invention
Apply example；
Fig. 2 is the analysis result of Phase Retardation of Wave Plate and yaw angle relation；
Fig. 3 is an embodiment to wave plate anglec of rotation relation for the non-orthogonal errors before and after wave plate driftage；
In figure piece number illustrates: 1 laser instrument, 2 optoisolators, 3 first non-polarization Beamsplitters, 4 reference mirrors, 1/5th two ripple
Piece, 6 measurement mirrors, 7 mono- Wo Lasite prisms, 8 bis- Wo Lasite prisms, 9 first photodetectors, 10 second photodetections
Device, 11 the 3rd photodetectors, 12 the 4th photodetectors, 13 interference portions, 14 probe portions, 15 reference lights, 16 measurement light,
17 interference lights, 18 first light beams, 19 second light beams, 20 second non-polarization Beamsplitters, 21 the oneth o light, 22 the oneth e light, 23 the 2nd o
Light, 24 the 2nd e light, 25 first quarter-wave plates, 26 second quarter-wave plates.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described in detail, and provides embodiment.
A kind of high robust homodyne laser vibration measurer based on wave plate driftage, by interference portion 13 and 14 groups of probe portion
Become, described interference portion 13 is by laser instrument 1, optoisolator 2, the first non-polarization Beamsplitter 3, reference mirror 4, the first quarter-wave
Piece 25,1/2nd wave plates 5 and measurement mirror 6 form；Laser instrument 1 sends linearly polarized light, by the first depolarization after optoisolator 2
Spectroscope 3 light splitting, reflected light forms reference arm as reference light 15 and the first quarter-wave plate 25, reference mirror 4, and transmitted light is made
It is measurement light 16 and 1/2nd wave plates 5, measurement mirror 6 formation measurement arm, the first quarter-wave plate 25 is located at the first depolarization
Between spectroscope 3 and reference mirror 4,1/2nd wave plates 5 are located between the first non-polarization Beamsplitter 3 and measurement mirror 6；Reference light 15
Through the first non-polarization Beamsplitter 3 transmission, measure light 16 and reflect through the first non-polarization Beamsplitter 3, reference light 15 is closed with measurement light 16
Light forms interference light 17；By the second non-polarization Beamsplitter 20, the second quarter-wave plate 26, first wet draws described probe portion 14
This special prism 7, bis- Wo Lasite prism 8, the first photodetector 9, the second photodetector 10, the 3rd photodetector 11
Form with the 4th photodetector 12；Interference light 17 forms the first light beam 18 and reflection through the second non-polarization Beamsplitter 20 transmission
Become the second light beam 19；First light beam 18 is divided into an o light 21, an e light 22 through mono- Wo Lasite prism 7, respectively by first
Photodetector 9, the second photodetector 10 receive；Second light beam 19 is first after the second quarter-wave plate 26, wet through second
Lars spy's prism 8 is divided into the 2nd o light 23, the 2nd e light 24, is connect by the 3rd photodetector 11, the 4th photodetector 12 respectively
Receive；Described first quarter-wave plate 25 and 1/2nd wave plates 5 have certain yaw angle.
A kind of high robust homodyne vibration measurement with laser four stepping based on wave plate driftage, the method comprises the following steps:
(1) optoisolator 2 output light polarization direction is 45 ° with vertical direction angle, 1/2nd the 5, the 1st point of wave plates
One of the fast axle of wave plate 25 and the second quarter-wave plate 26 be respectively 0 °, 0 ° and 45 ° with vertical direction angle, laser vertical enters
It is mapped to 1/2nd wave plates 5, the first quarter-wave plate 25 and the second quarter-wave plate 26；
(2) driftage the first quarter-wave plate 25, makes the letter that the first photodetector 9 and the second photodetector 10 receive
Number beautiful Sa such as figure be the straight line for negative for the slope；
(3) driftage 1/2nd wave plates 5, make non-orthogonal errors minimum；
(4) driftage the first quarter-wave plate 25, makes the letter that the first photodetector 9 and the second photodetector 10 receive
Number beautiful Sa such as figure be the straight line for negative for the slope.
Described laser instrument 1 is frequency stabilized carbon dioxide laser.
Described reference mirror 4, measurement mirror 6 are plane reflection or corner cube reflector.
Described first non-polarization Beamsplitter 3, the second non-polarization Beamsplitter 20 splitting ratio are 50%: 50%.
Provide one embodiment of the present of invention with reference to Fig. 1.In the present embodiment, laser instrument 1 is using the he- through frequency stabilization
Ne laser instrument, wavelength is 632.8nm, noise ＜ 0.05%rms, and power output is 1mw, and polarization turns to 1000: 1, sits in space
In mark system xyz, laser instrument 1 sends linearly polarized light, and polarization direction is along x-axis, as p light.Light beam becomes at 45 ° after optoisolator 2
Linearly polarized light.Through the first non-polarization Beamsplitter 3 equal proportion light splitting, on reference arm, the first quarter-wave plate 25 is placed on yz
In plane, its fast axle and y-axis angle are 0, and on measurement arm, 1/2nd wave plates 5 are placed in x/y plane, in theory its fast axle
Can become arbitrarily angled with y-axis, in the present embodiment, its angle is 0.Reference light 15 is through non-polarization Beamsplitter 3 primary event and one
Secondary transmission, measurement light 16, through 3 transmissions of non-polarization Beamsplitter and primary event, is formed after reference light 15 and measurement light 16 synthesis
Interference light 17.Interference light 17 is divided into two-beam in probe portion 14 by the second non-polarization Beamsplitter 20, a branch of directly wet by first
Lars spy's prism 7 is divided into an o light 21 and an e light 22, is received by first and second photodetector 9,10 respectively, and another bundle is first
After fast axle second quarter-wave plate 26 phase shift at 45 ° with y-axis direction, then the 2nd o is divided into by bis- Wo Lasite prism 8
Light 23 and the 2nd e light 24, are received by first and second photodetector 11,12 respectively.
In the present embodiment, photodetector adopts the two quadrant photodetector of si pin type, and photosensitive area size is
10mm × 10mm, sensitivity is 0.45a/w (λ=632.8nm), and two quadrants of two quadrant photodetector are respectively as the
First, two photodetector 9,10；In the same manner, using another two quadrant photodetector two quadrants as third and fourth photoelectricity
Detector 11,12.
In the present embodiment, when four faces (a face～d face) is incident respectively, transmission phase shift is respectively non-polarization Beamsplitter
5.4 °, 10.4 °, 6.5 ° and 12.4 °, reflection phase shift is respectively 132.7 °, 134.5 °, 158.3 ° and 159.7 degree.When 1/2nd
The phase delay of wave plate is the phase delay of 199 ° and the first quarter-wave plate when being 119.2 °, can compensate for depolarization light splitting
The additional phase shift of mirror.
Fig. 2 is the analysis result of Phase Retardation of Wave Plate and yaw angle relation.Fig. 2 (a) is zero level a quarter quartz ripple
Piece phase delay curve, Fig. 2 (b) is zero level 1/2nd quartz wave-plate phase delay curve.Ideally, work as beam orthogonal
Incide wave plate, when that is, yaw angle is 0, quarter-wave plate, the phase delay of 1/2nd wave plates are respectively 90 °, 180 °.
When the yaw angle of 1/2nd wave plates is 3.5 °, phase delay is 199 °, when quarter-wave plate yaw angle is 4.4 °,
Phase delay is 119.2 °.By small yaw angle, the demand changing Phase Retardation of Wave Plate can be met.
Fig. 3 is an embodiment to wave plate anglec of rotation relation for the non-orthogonal errors before and after wave plate driftage.Before wave plate driftage,
Up to 1.4 °/1 ° of the sensitivity that non-orthogonal errors rotate to the first quarter-wave plate 25.After driftage, 1/2nd wave plates 5,
First quarter-wave plate 25, the designated mounting angle of the second quarter-wave plate 26 are the anon-normal of wave plate at 0 °, 0 ° and 45 °
Error-sensitivity is handed over to be 0.By the method for wave plate of going off course, the robustness of this homodyne laser vibration measurer is greatly improved.
Claims (5)
1. a kind of high robust homodyne laser vibration measurer based on wave plate driftage, by interference portion (13) and probe portion (14) group
Become it is characterised in that: described interference portion (13) by laser instrument (1), optoisolator (2), the first non-polarization Beamsplitter (3), ginseng
Examine mirror (4), the first quarter-wave plate (25), 1/2nd wave plates (5) and measurement mirror (6) composition；It is inclined that laser instrument (1) sends line
Shake light, and by the first non-polarization Beamsplitter (3) light splitting after optoisolator (2), reflected light is as reference light (15) and the one or four point
One of wave plate (25), reference mirror (4) formed reference arm, transmitted light as measurement light (16) with 1/2nd wave plates (5), measurement mirror
(6) form measurement arm, the first quarter-wave plate (25) is located between the first non-polarization Beamsplitter (3) and reference mirror (4), two points
One of wave plate (5) be located at the first non-polarization Beamsplitter (3) and measure between mirror (6)；Reference light (15) is through the first depolarization light splitting
Mirror (3) transmission, measurement light (16) is reflected through the first non-polarization Beamsplitter (3), and reference light (15) is formed with measurement light (16) closing light
Interference light (17)；, by the second non-polarization Beamsplitter (20), the second quarter-wave plate (26), first is wet for described probe portion (14)
Lars spy's prism (7), bis- Wo Lasite prism (8), the first photodetector (9), the second photodetector (10), the 3rd light
Electric explorer (11) and the 4th photodetector (12) composition；Interference light (17) is formed through the second non-polarization Beamsplitter (20) transmission
First light beam (18) and reflect to form the second light beam (19)；First light beam (18) is divided into an o through mono- Wo Lasite prism (7)
Light (21), an e light (22), are received by the first photodetector (9), the second photodetector (10) respectively；Second light beam
(19) first after the second quarter-wave plate (26), it is divided into the 2nd o light (23), the 2nd e light through bis- Wo Lasite prism (8)
(24), received by the 3rd photodetector (11), the 4th photodetector (12) respectively；Described first quarter-wave plate (25)
With 1/2nd wave plates (5), there is certain yaw angle.
2. a kind of high robust homodyne vibration measurement with laser four stepping based on wave plate driftage it is characterised in that the method include with
Lower step:
(1) optoisolator (2) output light polarization direction and vertical direction angle are 45 °, 1/2nd wave plates (5), the one or four point
One of the fast axle of wave plate (25) and the second quarter-wave plate (26) be respectively 0 °, 0 ° and 45 ° with vertical direction angle, laser hangs down
Directly incide 1/2nd wave plates (5), the first quarter-wave plate (25) and the second quarter-wave plate (26)；
(2) driftage the first quarter-wave plate (25), makes the first photodetector (9) and the second photodetector (10) receive
The beautiful Sa such as figure of signal is the straight line for negative for the slope；
(3) driftage 1/2nd wave plates (5), makes non-orthogonal errors minimum；
(4) driftage the first quarter-wave plate (25), makes the first photodetector (9) and the second photodetector (10) receive
The beautiful Sa such as figure of signal is the straight line for negative for the slope.
3. the high robust homodyne laser vibration measurer based on wave plate driftage according to claim 1 it is characterised in that: described
Laser instrument (1) is frequency stabilized carbon dioxide laser.
4. the high robust homodyne laser vibration measurer based on wave plate driftage according to claim 1 it is characterised in that: described
Reference mirror (4), measurement mirror (6) are plane reflection or corner cube reflector.
5. the high robust homodyne laser vibration measurer based on wave plate driftage according to claim 1 it is characterised in that: described
First non-polarization Beamsplitter (3), the second non-polarization Beamsplitter (20) splitting ratio are 50%: 50%.
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| CN108627234A (en) * | 2018-03-14 | 2018-10-09 | 哈尔滨工业大学 | Speed estimates vibration measurement with laser phase demodulating method |
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| CN108593114B (en) * | 2018-04-16 | 2020-04-03 | 西北工业大学 | Method and light path for efficiently and synchronously measuring polarization state and phase of any light beam |
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| CN109375137A (en) * | 2018-11-06 | 2019-02-22 | 国网内蒙古东部电力有限公司电力科学研究院 | All-fiber current transformator quarter wave plate phase delay automatic testing equipment and method |
| CN110836639A (en) * | 2019-10-28 | 2020-02-25 | 哈尔滨工业大学 | Method for eliminating differential cross multiplication carrier delay and associated amplitude modulation of phase generation carrier |
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